JPH0351090B2 - - Google Patents

Info

Publication number
JPH0351090B2
JPH0351090B2 JP59157214A JP15721484A JPH0351090B2 JP H0351090 B2 JPH0351090 B2 JP H0351090B2 JP 59157214 A JP59157214 A JP 59157214A JP 15721484 A JP15721484 A JP 15721484A JP H0351090 B2 JPH0351090 B2 JP H0351090B2
Authority
JP
Japan
Prior art keywords
discharge
reaction chamber
gas
reaction
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59157214A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6136923A (ja
Inventor
Toshio Hayashi
Koichi Tamagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP15721484A priority Critical patent/JPS6136923A/ja
Publication of JPS6136923A publication Critical patent/JPS6136923A/ja
Publication of JPH0351090B2 publication Critical patent/JPH0351090B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP15721484A 1984-07-30 1984-07-30 光励起プロセス装置 Granted JPS6136923A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15721484A JPS6136923A (ja) 1984-07-30 1984-07-30 光励起プロセス装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15721484A JPS6136923A (ja) 1984-07-30 1984-07-30 光励起プロセス装置

Publications (2)

Publication Number Publication Date
JPS6136923A JPS6136923A (ja) 1986-02-21
JPH0351090B2 true JPH0351090B2 (enExample) 1991-08-05

Family

ID=15644706

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15721484A Granted JPS6136923A (ja) 1984-07-30 1984-07-30 光励起プロセス装置

Country Status (1)

Country Link
JP (1) JPS6136923A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5144199A (en) * 1990-01-11 1992-09-01 Mitsubishi Denki Kabushiki Kaisha Microwave discharge light source device

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1024246A (en) * 1973-08-22 1978-01-10 Donald M. Spero Apparatus and method for generating radiation

Also Published As

Publication number Publication date
JPS6136923A (ja) 1986-02-21

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