JPS6136923A - 光励起プロセス装置 - Google Patents
光励起プロセス装置Info
- Publication number
- JPS6136923A JPS6136923A JP15721484A JP15721484A JPS6136923A JP S6136923 A JPS6136923 A JP S6136923A JP 15721484 A JP15721484 A JP 15721484A JP 15721484 A JP15721484 A JP 15721484A JP S6136923 A JPS6136923 A JP S6136923A
- Authority
- JP
- Japan
- Prior art keywords
- discharge
- gas
- reaction chamber
- transmission window
- beams
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006243 chemical reaction Methods 0.000 claims abstract description 31
- 230000003287 optical effect Effects 0.000 claims abstract description 15
- 239000007789 gas Substances 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 16
- 230000001443 photoexcitation Effects 0.000 claims description 10
- 239000012495 reaction gas Substances 0.000 claims description 4
- 238000000354 decomposition reaction Methods 0.000 claims description 2
- 230000005540 biological transmission Effects 0.000 abstract description 13
- 239000000758 substrate Substances 0.000 abstract description 9
- 238000005530 etching Methods 0.000 abstract description 8
- 230000002035 prolonged effect Effects 0.000 abstract 1
- 230000005284 excitation Effects 0.000 description 6
- 238000010521 absorption reaction Methods 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 241000238413 Octopus Species 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005281 excited state Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15721484A JPS6136923A (ja) | 1984-07-30 | 1984-07-30 | 光励起プロセス装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15721484A JPS6136923A (ja) | 1984-07-30 | 1984-07-30 | 光励起プロセス装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6136923A true JPS6136923A (ja) | 1986-02-21 |
| JPH0351090B2 JPH0351090B2 (enExample) | 1991-08-05 |
Family
ID=15644706
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15721484A Granted JPS6136923A (ja) | 1984-07-30 | 1984-07-30 | 光励起プロセス装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6136923A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5144199A (en) * | 1990-01-11 | 1992-09-01 | Mitsubishi Denki Kabushiki Kaisha | Microwave discharge light source device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5054172A (enExample) * | 1973-08-22 | 1975-05-13 |
-
1984
- 1984-07-30 JP JP15721484A patent/JPS6136923A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5054172A (enExample) * | 1973-08-22 | 1975-05-13 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5144199A (en) * | 1990-01-11 | 1992-09-01 | Mitsubishi Denki Kabushiki Kaisha | Microwave discharge light source device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0351090B2 (enExample) | 1991-08-05 |
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