JPH0350325U - - Google Patents

Info

Publication number
JPH0350325U
JPH0350325U JP11076289U JP11076289U JPH0350325U JP H0350325 U JPH0350325 U JP H0350325U JP 11076289 U JP11076289 U JP 11076289U JP 11076289 U JP11076289 U JP 11076289U JP H0350325 U JPH0350325 U JP H0350325U
Authority
JP
Japan
Prior art keywords
susceptor
wafer
heater
facing
reactor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11076289U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0735383Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11076289U priority Critical patent/JPH0735383Y2/ja
Publication of JPH0350325U publication Critical patent/JPH0350325U/ja
Application granted granted Critical
Publication of JPH0735383Y2 publication Critical patent/JPH0735383Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP11076289U 1989-09-21 1989-09-21 薄膜気相成長装置 Expired - Fee Related JPH0735383Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11076289U JPH0735383Y2 (ja) 1989-09-21 1989-09-21 薄膜気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11076289U JPH0735383Y2 (ja) 1989-09-21 1989-09-21 薄膜気相成長装置

Publications (2)

Publication Number Publication Date
JPH0350325U true JPH0350325U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-05-16
JPH0735383Y2 JPH0735383Y2 (ja) 1995-08-09

Family

ID=31659281

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11076289U Expired - Fee Related JPH0735383Y2 (ja) 1989-09-21 1989-09-21 薄膜気相成長装置

Country Status (1)

Country Link
JP (1) JPH0735383Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009061826A (ja) * 2007-09-04 2009-03-26 Yac Co Ltd 給油キャップホルダー
JP2013093460A (ja) * 2011-10-26 2013-05-16 Ulvac Japan Ltd 成膜装置
JP2013131555A (ja) * 2011-12-20 2013-07-04 Stanley Electric Co Ltd 半導体製造装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009061826A (ja) * 2007-09-04 2009-03-26 Yac Co Ltd 給油キャップホルダー
JP2013093460A (ja) * 2011-10-26 2013-05-16 Ulvac Japan Ltd 成膜装置
JP2013131555A (ja) * 2011-12-20 2013-07-04 Stanley Electric Co Ltd 半導体製造装置

Also Published As

Publication number Publication date
JPH0735383Y2 (ja) 1995-08-09

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees