JPH0348193Y2 - - Google Patents

Info

Publication number
JPH0348193Y2
JPH0348193Y2 JP1985037767U JP3776785U JPH0348193Y2 JP H0348193 Y2 JPH0348193 Y2 JP H0348193Y2 JP 1985037767 U JP1985037767 U JP 1985037767U JP 3776785 U JP3776785 U JP 3776785U JP H0348193 Y2 JPH0348193 Y2 JP H0348193Y2
Authority
JP
Japan
Prior art keywords
workpiece
activated gas
gas
activated
reaction chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985037767U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61155342U (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985037767U priority Critical patent/JPH0348193Y2/ja
Publication of JPS61155342U publication Critical patent/JPS61155342U/ja
Application granted granted Critical
Publication of JPH0348193Y2 publication Critical patent/JPH0348193Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP1985037767U 1985-03-16 1985-03-16 Expired JPH0348193Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985037767U JPH0348193Y2 (cs) 1985-03-16 1985-03-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985037767U JPH0348193Y2 (cs) 1985-03-16 1985-03-16

Publications (2)

Publication Number Publication Date
JPS61155342U JPS61155342U (cs) 1986-09-26
JPH0348193Y2 true JPH0348193Y2 (cs) 1991-10-15

Family

ID=30544151

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985037767U Expired JPH0348193Y2 (cs) 1985-03-16 1985-03-16

Country Status (1)

Country Link
JP (1) JPH0348193Y2 (cs)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59155440A (ja) * 1983-02-25 1984-09-04 Toyota Motor Corp プラズマ処理装置
JPS59155442A (ja) * 1983-02-25 1984-09-04 Toyota Motor Corp プラズマ処理装置

Also Published As

Publication number Publication date
JPS61155342U (cs) 1986-09-26

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