JPH0345957Y2 - - Google Patents

Info

Publication number
JPH0345957Y2
JPH0345957Y2 JP1987165222U JP16522287U JPH0345957Y2 JP H0345957 Y2 JPH0345957 Y2 JP H0345957Y2 JP 1987165222 U JP1987165222 U JP 1987165222U JP 16522287 U JP16522287 U JP 16522287U JP H0345957 Y2 JPH0345957 Y2 JP H0345957Y2
Authority
JP
Japan
Prior art keywords
vapor phase
reaction vessel
substrate support
phase growth
reaction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1987165222U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0183073U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987165222U priority Critical patent/JPH0345957Y2/ja
Publication of JPH0183073U publication Critical patent/JPH0183073U/ja
Application granted granted Critical
Publication of JPH0345957Y2 publication Critical patent/JPH0345957Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP1987165222U 1987-10-28 1987-10-28 Expired JPH0345957Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987165222U JPH0345957Y2 (enExample) 1987-10-28 1987-10-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987165222U JPH0345957Y2 (enExample) 1987-10-28 1987-10-28

Publications (2)

Publication Number Publication Date
JPH0183073U JPH0183073U (enExample) 1989-06-02
JPH0345957Y2 true JPH0345957Y2 (enExample) 1991-09-27

Family

ID=31451511

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987165222U Expired JPH0345957Y2 (enExample) 1987-10-28 1987-10-28

Country Status (1)

Country Link
JP (1) JPH0345957Y2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004020692A1 (ja) * 2002-08-30 2004-03-11 Tokyo Electron Limited 基板処理装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080241805A1 (en) * 2006-08-31 2008-10-02 Q-Track Corporation System and method for simulated dosimetry using a real time locating system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004020692A1 (ja) * 2002-08-30 2004-03-11 Tokyo Electron Limited 基板処理装置

Also Published As

Publication number Publication date
JPH0183073U (enExample) 1989-06-02

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