JPH0345823B2 - - Google Patents
Info
- Publication number
- JPH0345823B2 JPH0345823B2 JP9278682A JP9278682A JPH0345823B2 JP H0345823 B2 JPH0345823 B2 JP H0345823B2 JP 9278682 A JP9278682 A JP 9278682A JP 9278682 A JP9278682 A JP 9278682A JP H0345823 B2 JPH0345823 B2 JP H0345823B2
- Authority
- JP
- Japan
- Prior art keywords
- photosensitive
- diazo
- diazo resin
- present
- group
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/016—Diazonium salts or compounds
- G03F7/021—Macromolecular diazonium compounds; Macromolecular additives, e.g. binders
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9278682A JPS58209731A (ja) | 1982-05-31 | 1982-05-31 | 感光性組成物 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9278682A JPS58209731A (ja) | 1982-05-31 | 1982-05-31 | 感光性組成物 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58209731A JPS58209731A (ja) | 1983-12-06 |
JPH0345823B2 true JPH0345823B2 (en, 2012) | 1991-07-12 |
Family
ID=14064099
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9278682A Granted JPS58209731A (ja) | 1982-05-31 | 1982-05-31 | 感光性組成物 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58209731A (en, 2012) |
-
1982
- 1982-05-31 JP JP9278682A patent/JPS58209731A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS58209731A (ja) | 1983-12-06 |
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