JPH0345763B2 - - Google Patents

Info

Publication number
JPH0345763B2
JPH0345763B2 JP58199000A JP19900083A JPH0345763B2 JP H0345763 B2 JPH0345763 B2 JP H0345763B2 JP 58199000 A JP58199000 A JP 58199000A JP 19900083 A JP19900083 A JP 19900083A JP H0345763 B2 JPH0345763 B2 JP H0345763B2
Authority
JP
Japan
Prior art keywords
area
reference range
inspected
pattern
length
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58199000A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5994006A (ja
Inventor
Keiichi Okamoto
Nobuyuki Akyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP19900083A priority Critical patent/JPS5994006A/ja
Publication of JPS5994006A publication Critical patent/JPS5994006A/ja
Publication of JPH0345763B2 publication Critical patent/JPH0345763B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/022—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of tv-camera scanning

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP19900083A 1983-10-26 1983-10-26 外観検査装置 Granted JPS5994006A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19900083A JPS5994006A (ja) 1983-10-26 1983-10-26 外観検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19900083A JPS5994006A (ja) 1983-10-26 1983-10-26 外観検査装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP10203073A Division JPS5055380A (enrdf_load_stackoverflow) 1973-09-12 1973-09-12

Publications (2)

Publication Number Publication Date
JPS5994006A JPS5994006A (ja) 1984-05-30
JPH0345763B2 true JPH0345763B2 (enrdf_load_stackoverflow) 1991-07-12

Family

ID=16400428

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19900083A Granted JPS5994006A (ja) 1983-10-26 1983-10-26 外観検査装置

Country Status (1)

Country Link
JP (1) JPS5994006A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63269003A (ja) * 1987-04-27 1988-11-07 Shin Etsu Handotai Co Ltd 晶出界面位置検出装置
JPH01203935A (ja) * 1988-02-09 1989-08-16 Sumitomo Electric Ind Ltd 光ファイバ端部の検査方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5857705B2 (ja) * 1973-04-26 1983-12-21 住友金属工業株式会社 ケイコウジフンタンシヨウホウ オヨビ ソノソウチ

Also Published As

Publication number Publication date
JPS5994006A (ja) 1984-05-30

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