JPH0343951A - 短波長紫外光発生装置 - Google Patents

短波長紫外光発生装置

Info

Publication number
JPH0343951A
JPH0343951A JP17844489A JP17844489A JPH0343951A JP H0343951 A JPH0343951 A JP H0343951A JP 17844489 A JP17844489 A JP 17844489A JP 17844489 A JP17844489 A JP 17844489A JP H0343951 A JPH0343951 A JP H0343951A
Authority
JP
Japan
Prior art keywords
gas
discharge
light
section
microwave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17844489A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0568062B2 (https=
Inventor
Nobuo Adachi
安達　伸雄
Shoichi Kinoshita
木下　昭一
Yusuke Yoshida
雄介 吉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Orc Manufacturing Co Ltd
Original Assignee
Orc Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Orc Manufacturing Co Ltd filed Critical Orc Manufacturing Co Ltd
Priority to JP17844489A priority Critical patent/JPH0343951A/ja
Publication of JPH0343951A publication Critical patent/JPH0343951A/ja
Publication of JPH0568062B2 publication Critical patent/JPH0568062B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Circuit Arrangements For Discharge Lamps (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
JP17844489A 1989-07-11 1989-07-11 短波長紫外光発生装置 Granted JPH0343951A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17844489A JPH0343951A (ja) 1989-07-11 1989-07-11 短波長紫外光発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17844489A JPH0343951A (ja) 1989-07-11 1989-07-11 短波長紫外光発生装置

Publications (2)

Publication Number Publication Date
JPH0343951A true JPH0343951A (ja) 1991-02-25
JPH0568062B2 JPH0568062B2 (https=) 1993-09-28

Family

ID=16048631

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17844489A Granted JPH0343951A (ja) 1989-07-11 1989-07-11 短波長紫外光発生装置

Country Status (1)

Country Link
JP (1) JPH0343951A (https=)

Also Published As

Publication number Publication date
JPH0568062B2 (https=) 1993-09-28

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