JPH034241U - - Google Patents

Info

Publication number
JPH034241U
JPH034241U JP1989065131U JP6513189U JPH034241U JP H034241 U JPH034241 U JP H034241U JP 1989065131 U JP1989065131 U JP 1989065131U JP 6513189 U JP6513189 U JP 6513189U JP H034241 U JPH034241 U JP H034241U
Authority
JP
Japan
Prior art keywords
pressure
semiconductor chip
pipe section
pressure chambers
bonding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1989065131U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989065131U priority Critical patent/JPH034241U/ja
Priority to KR2019900007437U priority patent/KR930007902Y1/ko
Publication of JPH034241U publication Critical patent/JPH034241U/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/04—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Description

【図面の簡単な説明】
第１図はこの考案の一実施例による圧力センサ
の構造を示す断面図、第２図は同上実施例の第１
図の直角方向の断面図、第３図は同上実施例にお
ける制御部の電気回路図、第４図は同上実施例に
おける接着剤厚みとダイヤフラム厚みとの比対歪
みによる誤出力低減率の関係を示す特性図である
。 １……圧力センサ、２，３……ケース、４，５
……半導体チツプ、４ａ，５ａ……ダイヤフラム
、９……接着剤、２１……第１の圧力室、２２…
…第２の圧力室、２３……第３の圧力室、２４…
…第４の圧力室、２５，２６……導圧管部、１０
１……第１のブリツジ回路、１０２……第２のブ
リツジ回路、１０３……第１の差動増幅回路、１
０４……第２の差動増幅回路、１０５……第３の
差動増幅回路。なお、図中、同一符号は同一、又
は相当部分を示す。

Claims (1)

    【実用新案登録請求の範囲】
  1. ケースに形成された第１の導圧管部に連通する
    第１および第４の圧力室と、上記ケースに形成さ
    れた第２の導圧管部に連通する第２および第３の
    圧力室と、上記第１の圧力室と上記第２の圧力室
    の隔壁および上記第３と第４の圧力室の隔壁とな
    るようにそれぞれ半導体チツプに配設され同一形
    状ならびに同一電気的特性を有する第１、第２の
    ダイヤフラムと、上記半導体チツプを基板に接合
    する柔軟性を有する接着剤と、上記第１、第２の
    ダイヤフラム上に形成され上記第１、第２のダイ
    ヤフラムが上記第１、第２の導圧管部に生じる差
    圧によつて応動するとき、互いに同値で逆位相の
    信号を出力する第１、第２のブリツジ回路と、こ
    の第１、第２のブリツジ回路の信号出力をそれぞ
    れ差動増幅する第１および第２の差動増幅器とを
    備えた圧力センサ。
JP1989065131U 1989-06-02 1989-06-02 Pending JPH034241U (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1989065131U JPH034241U (ja) 1989-06-02 1989-06-02
KR2019900007437U KR930007902Y1 (ko) 1989-06-02 1990-05-30 압력 감지기

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989065131U JPH034241U (ja) 1989-06-02 1989-06-02

Publications (1)

Publication Number Publication Date
JPH034241U true JPH034241U (ja) 1991-01-17

Family

ID=13278014

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989065131U Pending JPH034241U (ja) 1989-06-02 1989-06-02

Country Status (2)

Country Link
JP (1) JPH034241U (ja)
KR (1) KR930007902Y1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009526647A (ja) * 2006-02-15 2009-07-23 ボールドウィン・フィルターズ・インコーポレーテッド 溝付きフィルタ装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009526647A (ja) * 2006-02-15 2009-07-23 ボールドウィン・フィルターズ・インコーポレーテッド 溝付きフィルタ装置

Also Published As

Publication number Publication date
KR910001184U (ko) 1991-01-24
KR930007902Y1 (ko) 1993-11-24

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