JPH034237U - - Google Patents

Info

Publication number
JPH034237U
JPH034237U JP6249589U JP6249589U JPH034237U JP H034237 U JPH034237 U JP H034237U JP 6249589 U JP6249589 U JP 6249589U JP 6249589 U JP6249589 U JP 6249589U JP H034237 U JPH034237 U JP H034237U
Authority
JP
Japan
Prior art keywords
temperature
thermocouple
outer sheath
resistance thermometer
sensing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6249589U
Other languages
English (en)
Japanese (ja)
Other versions
JPH088429Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989062495U priority Critical patent/JPH088429Y2/ja
Publication of JPH034237U publication Critical patent/JPH034237U/ja
Application granted granted Critical
Publication of JPH088429Y2 publication Critical patent/JPH088429Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Measuring Temperature Or Quantity Of Heat (AREA)
JP1989062495U 1989-05-31 1989-05-31 温度分布検知センサ Expired - Fee Related JPH088429Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989062495U JPH088429Y2 (ja) 1989-05-31 1989-05-31 温度分布検知センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989062495U JPH088429Y2 (ja) 1989-05-31 1989-05-31 温度分布検知センサ

Publications (2)

Publication Number Publication Date
JPH034237U true JPH034237U (h) 1991-01-17
JPH088429Y2 JPH088429Y2 (ja) 1996-03-06

Family

ID=31591697

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989062495U Expired - Fee Related JPH088429Y2 (ja) 1989-05-31 1989-05-31 温度分布検知センサ

Country Status (1)

Country Link
JP (1) JPH088429Y2 (h)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001183239A (ja) * 1999-12-27 2001-07-06 Kawaso Denki Kogyo Kk 連続測温装置
JP2002022548A (ja) * 2000-07-07 2002-01-23 Kawaso Electric Industrial Co Ltd 連続測温プローブ
JP2007266439A (ja) * 2006-03-29 2007-10-11 Matsushita Electric Ind Co Ltd 基板処理装置および基板処理方法
JP2009174889A (ja) * 2008-01-22 2009-08-06 Yamari Sangyo Kk 管壁への熱電対取付構造及び熱電対取付方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4776762B2 (ja) * 2000-09-27 2011-09-21 株式会社東芝 熱電対装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5784324A (en) * 1980-11-14 1982-05-26 Sukegawa Denki Kogyo Kk Manufacture of temperature measuring body with multiple measuring points
JPS5916816U (ja) * 1982-07-22 1984-02-01 岡部　昌明 仕切付の段ボ−ル箱
JPS60162896U (ja) * 1984-04-05 1985-10-29 株式会社　日向製錬所 炉内雰囲気温度分布測定装置
JPS618635A (ja) * 1984-06-25 1986-01-16 Sukegawa Denki Kogyo Kk シ−ス型測温抵抗体の製作方法
JPS6375826U (h) * 1986-11-05 1988-05-20

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5784324A (en) * 1980-11-14 1982-05-26 Sukegawa Denki Kogyo Kk Manufacture of temperature measuring body with multiple measuring points
JPS5916816U (ja) * 1982-07-22 1984-02-01 岡部　昌明 仕切付の段ボ−ル箱
JPS60162896U (ja) * 1984-04-05 1985-10-29 株式会社　日向製錬所 炉内雰囲気温度分布測定装置
JPS618635A (ja) * 1984-06-25 1986-01-16 Sukegawa Denki Kogyo Kk シ−ス型測温抵抗体の製作方法
JPS6375826U (h) * 1986-11-05 1988-05-20

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001183239A (ja) * 1999-12-27 2001-07-06 Kawaso Denki Kogyo Kk 連続測温装置
JP2002022548A (ja) * 2000-07-07 2002-01-23 Kawaso Electric Industrial Co Ltd 連続測温プローブ
JP2007266439A (ja) * 2006-03-29 2007-10-11 Matsushita Electric Ind Co Ltd 基板処理装置および基板処理方法
JP2009174889A (ja) * 2008-01-22 2009-08-06 Yamari Sangyo Kk 管壁への熱電対取付構造及び熱電対取付方法

Also Published As

Publication number Publication date
JPH088429Y2 (ja) 1996-03-06

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