JPH0342036Y2 - - Google Patents

Info

Publication number
JPH0342036Y2
JPH0342036Y2 JP1984130052U JP13005284U JPH0342036Y2 JP H0342036 Y2 JPH0342036 Y2 JP H0342036Y2 JP 1984130052 U JP1984130052 U JP 1984130052U JP 13005284 U JP13005284 U JP 13005284U JP H0342036 Y2 JPH0342036 Y2 JP H0342036Y2
Authority
JP
Japan
Prior art keywords
crystal
particles
amount
monitoring
crystal resonator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984130052U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6144926U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13005284U priority Critical patent/JPS6144926U/ja
Publication of JPS6144926U publication Critical patent/JPS6144926U/ja
Application granted granted Critical
Publication of JPH0342036Y2 publication Critical patent/JPH0342036Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Physical Vapour Deposition (AREA)
JP13005284U 1984-08-28 1984-08-28 モニタ用水晶振動子 Granted JPS6144926U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13005284U JPS6144926U (ja) 1984-08-28 1984-08-28 モニタ用水晶振動子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13005284U JPS6144926U (ja) 1984-08-28 1984-08-28 モニタ用水晶振動子

Publications (2)

Publication Number Publication Date
JPS6144926U JPS6144926U (ja) 1986-03-25
JPH0342036Y2 true JPH0342036Y2 (enrdf_load_stackoverflow) 1991-09-03

Family

ID=30688661

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13005284U Granted JPS6144926U (ja) 1984-08-28 1984-08-28 モニタ用水晶振動子

Country Status (1)

Country Link
JP (1) JPS6144926U (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5621590B2 (ja) * 2010-12-28 2014-11-12 日本電波工業株式会社 エッチング量センサ及びエッチング量測定方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5488790A (en) * 1977-12-26 1979-07-14 Seiko Instr & Electronics Ltd Resonant frequency adjusting method for crystal oscillator
JPS58117714A (ja) * 1982-01-06 1983-07-13 Hitachi Ltd 水晶板ヘツドの構造

Also Published As

Publication number Publication date
JPS6144926U (ja) 1986-03-25

Similar Documents

Publication Publication Date Title
JP6712384B2 (ja) 膜厚監視装置
US4375604A (en) Method of angle correcting doubly rotated crystal resonators
TWI683089B (zh) 膜厚感測器
JP2602215B2 (ja) 圧電振動子の周波数調整方法
JPH0342036Y2 (enrdf_load_stackoverflow)
KR102685475B1 (ko) 표면 탄성파 장치 및 제조 방법
US2542651A (en) Temperature compensated piezoelectric crystal holder
US2133647A (en) Electromechanical vibrator
CN117879523A (zh) 一种可调谐薄膜体声波谐振器的制备系统
US1949149A (en) Vacuum mounted oscillator
JPS5831076A (ja) 物理的蒸着法による被膜形成方法及びその装置
KR101184210B1 (ko) 반구형 공진기의 금속박막 증착방법 및 그 장치
JP2000323442A (ja) 圧電素子の周波数調整装置
JPS59174010A (ja) 矩形状atカツト水晶振動子
Sykes High-frequency plated quartz crystal units
CN115287603B (zh) 蒸镀方法
JP3745051B2 (ja) 膜厚測定方法
JPS58117714A (ja) 水晶板ヘツドの構造
JPS6192010A (ja) 蒸着マスク
US1924297A (en) Crystal oscillator and resonator
JPH09256156A (ja) 成膜装置
JPS59113174A (ja) 薄膜形成方法および薄膜形成装置
US2038804A (en) Piezo-electric crystal holder
JPH10269308A (ja) 信号処理方法および信号処理装置
JPH01209810A (ja) 圧電振動子およびその周波数微調整方法