JPH0339998B2 - - Google Patents

Info

Publication number
JPH0339998B2
JPH0339998B2 JP57124118A JP12411882A JPH0339998B2 JP H0339998 B2 JPH0339998 B2 JP H0339998B2 JP 57124118 A JP57124118 A JP 57124118A JP 12411882 A JP12411882 A JP 12411882A JP H0339998 B2 JPH0339998 B2 JP H0339998B2
Authority
JP
Japan
Prior art keywords
wafer
oxygen
oxygen concentration
atoms
defects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57124118A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5918198A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12411882A priority Critical patent/JPS5918198A/ja
Publication of JPS5918198A publication Critical patent/JPS5918198A/ja
Publication of JPH0339998B2 publication Critical patent/JPH0339998B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP12411882A 1982-07-16 1982-07-16 デバイス基板用単結晶シリコン Granted JPS5918198A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12411882A JPS5918198A (ja) 1982-07-16 1982-07-16 デバイス基板用単結晶シリコン

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12411882A JPS5918198A (ja) 1982-07-16 1982-07-16 デバイス基板用単結晶シリコン

Publications (2)

Publication Number Publication Date
JPS5918198A JPS5918198A (ja) 1984-01-30
JPH0339998B2 true JPH0339998B2 (enrdf_load_stackoverflow) 1991-06-17

Family

ID=14877364

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12411882A Granted JPS5918198A (ja) 1982-07-16 1982-07-16 デバイス基板用単結晶シリコン

Country Status (1)

Country Link
JP (1) JPS5918198A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3624827B2 (ja) * 2000-12-20 2005-03-02 三菱住友シリコン株式会社 シリコン単結晶の製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4118303A (en) * 1976-08-30 1978-10-03 Burroughs Corporation Apparatus for chemically treating a single side of a workpiece
JPS5857724B2 (ja) * 1979-07-24 1983-12-21 日本電信電話株式会社 光学的信号の接続装置

Also Published As

Publication number Publication date
JPS5918198A (ja) 1984-01-30

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