JPH0339882Y2 - - Google Patents
Info
- Publication number
- JPH0339882Y2 JPH0339882Y2 JP16788586U JP16788586U JPH0339882Y2 JP H0339882 Y2 JPH0339882 Y2 JP H0339882Y2 JP 16788586 U JP16788586 U JP 16788586U JP 16788586 U JP16788586 U JP 16788586U JP H0339882 Y2 JPH0339882 Y2 JP H0339882Y2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic field
- anode
- cylindrical
- cylindrical anode
- high vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 108010083687 Ion Pumps Proteins 0.000 claims description 23
- 238000004544 sputter deposition Methods 0.000 claims description 4
- 230000002238 attenuated effect Effects 0.000 claims description 3
- 238000005086 pumping Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 102000006391 Ion Pumps Human genes 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Landscapes
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16788586U JPH0339882Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-10-31 | 1986-10-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16788586U JPH0339882Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-10-31 | 1986-10-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6373855U JPS6373855U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-05-17 |
| JPH0339882Y2 true JPH0339882Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-08-22 |
Family
ID=31100239
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16788586U Expired JPH0339882Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-10-31 | 1986-10-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0339882Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10255582B2 (en) | 2016-08-18 | 2019-04-09 | Amazon Technologies, Inc. | AGV traffic management system |
-
1986
- 1986-10-31 JP JP16788586U patent/JPH0339882Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6373855U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-05-17 |