JPH0338191Y2 - - Google Patents

Info

Publication number
JPH0338191Y2
JPH0338191Y2 JP1984164381U JP16438184U JPH0338191Y2 JP H0338191 Y2 JPH0338191 Y2 JP H0338191Y2 JP 1984164381 U JP1984164381 U JP 1984164381U JP 16438184 U JP16438184 U JP 16438184U JP H0338191 Y2 JPH0338191 Y2 JP H0338191Y2
Authority
JP
Japan
Prior art keywords
size
vacuum chamber
suction
partition
ultra
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984164381U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6178153U (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984164381U priority Critical patent/JPH0338191Y2/ja
Publication of JPS6178153U publication Critical patent/JPS6178153U/ja
Application granted granted Critical
Publication of JPH0338191Y2 publication Critical patent/JPH0338191Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
  • Holders For Sensitive Materials And Originals (AREA)
  • Registering Or Overturning Sheets (AREA)
JP1984164381U 1984-10-30 1984-10-30 Expired JPH0338191Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984164381U JPH0338191Y2 (OSRAM) 1984-10-30 1984-10-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984164381U JPH0338191Y2 (OSRAM) 1984-10-30 1984-10-30

Publications (2)

Publication Number Publication Date
JPS6178153U JPS6178153U (OSRAM) 1986-05-26
JPH0338191Y2 true JPH0338191Y2 (OSRAM) 1991-08-13

Family

ID=30722243

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984164381U Expired JPH0338191Y2 (OSRAM) 1984-10-30 1984-10-30

Country Status (1)

Country Link
JP (1) JPH0338191Y2 (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0635231Y2 (ja) * 1988-11-09 1994-09-14 興和株式会社 画像記録装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5512382Y2 (OSRAM) * 1973-06-22 1980-03-18
JPS51101474U (OSRAM) * 1975-02-10 1976-08-14

Also Published As

Publication number Publication date
JPS6178153U (OSRAM) 1986-05-26

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