JPH0336761B2 - - Google Patents

Info

Publication number
JPH0336761B2
JPH0336761B2 JP61113775A JP11377586A JPH0336761B2 JP H0336761 B2 JPH0336761 B2 JP H0336761B2 JP 61113775 A JP61113775 A JP 61113775A JP 11377586 A JP11377586 A JP 11377586A JP H0336761 B2 JPH0336761 B2 JP H0336761B2
Authority
JP
Japan
Prior art keywords
silica
fine particulate
particle size
particulate silica
present
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP61113775A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62270415A (ja
Inventor
Hiroyuki Kono
Genji Taga
Masashi Toyoshima
Nobuaki Onoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokuyama Corp
Original Assignee
Tokuyama Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokuyama Corp filed Critical Tokuyama Corp
Priority to JP61113775A priority Critical patent/JPS62270415A/ja
Publication of JPS62270415A publication Critical patent/JPS62270415A/ja
Publication of JPH0336761B2 publication Critical patent/JPH0336761B2/ja
Priority to JP4125360A priority patent/JPH0733251B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
JP61113775A 1986-05-20 1986-05-20 球状シリカの製法 Granted JPS62270415A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP61113775A JPS62270415A (ja) 1986-05-20 1986-05-20 球状シリカの製法
JP4125360A JPH0733251B2 (ja) 1986-05-20 1992-04-20 微細粒子状シリカの加湿方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP61113775A JPS62270415A (ja) 1986-05-20 1986-05-20 球状シリカの製法
JP4125360A JPH0733251B2 (ja) 1986-05-20 1992-04-20 微細粒子状シリカの加湿方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP4125360A Division JPH0733251B2 (ja) 1986-05-20 1992-04-20 微細粒子状シリカの加湿方法

Publications (2)

Publication Number Publication Date
JPS62270415A JPS62270415A (ja) 1987-11-24
JPH0336761B2 true JPH0336761B2 (enExample) 1991-06-03

Family

ID=26452701

Family Applications (2)

Application Number Title Priority Date Filing Date
JP61113775A Granted JPS62270415A (ja) 1986-05-20 1986-05-20 球状シリカの製法
JP4125360A Expired - Fee Related JPH0733251B2 (ja) 1986-05-20 1992-04-20 微細粒子状シリカの加湿方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP4125360A Expired - Fee Related JPH0733251B2 (ja) 1986-05-20 1992-04-20 微細粒子状シリカの加湿方法

Country Status (1)

Country Link
JP (2) JPS62270415A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10211958A1 (de) 2002-03-18 2003-10-16 Wacker Chemie Gmbh Hochreines Silica-Pulver, Verfahren und Vorrichtung zu seiner Herstellung
DE10358065A1 (de) * 2003-12-11 2005-07-28 Wacker-Chemie Gmbh Vorrichtung zur Herstellung von Fused Silica
JP7082257B1 (ja) 2020-12-10 2022-06-07 株式会社アドマテックス 半導体実装材料用フィラー及びその製造方法並びに半導体実装材料

Also Published As

Publication number Publication date
JPH0733251B2 (ja) 1995-04-12
JPS62270415A (ja) 1987-11-24
JPH05301708A (ja) 1993-11-16

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term