JPH0336704A - Thick-film hybrid integrated circuit element and adjusting method for resistance thereof - Google Patents

Abstract

PURPOSE:To enable resistance to be adjusted freely after baked a resistor by providing an auxiliary conductor which is in conduction state with the resistor formed between parallel electrode parts to the resistor for reducing resistance of the resistor. CONSTITUTION:An electrode part 1 is an electrode where a resistor element is connected to and has a main constituent such as Ag/Pd. A resistor 2 has a main constituent of RuO, etc., and areas between the parallel electrode parts 1 are connected, thus forming the resistor element. By cutting one part of the resistor 2 and by forming a trimming part 2, the resistance can be increased. An auxiliary conductor 4 is, for example, a polymer-type conductive paste with a main constituent such as silver powder. The resistance is adjusted by providing the resistor 2 between the parallel electrode parts 1. If the resistance after baked is lower than a specified value, it is increased to a specified value by trimming. If it is higher, for example, the above paste layer is provided on the resistor 2, it is baked at 150-250 deg.C, the auxiliary conductor 4 is formed, the resistance of the resistor 2 is reduced to a proper value, and then compensation is made by trimming. Also, compensation in this case is possible only at the auxiliary conductor 4.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a thick film hybrid integrated circuit element used in television receivers, tape recorders, etc., and a method for adjusting its resistance value.

BACKGROUND OF THE INVENTION A resistor structure which is a conventional thick film hybrid integrated circuit element will be described with reference to FIG. In FIG. 4, an electrode portion l is an electrode for connecting a resistor element, and is mainly composed of, for example, Ag/Pd. The resistor 2 connects the parallel electrode parts l using a resistor material whose main component is, for example, Ru○,
This is the part where the resistor element is formed. The trimming part 3 is a part where a part of the resistor 2 is melted with heat using a laser beam or the like and a cut is made to allow current to flow and increase the resistance value. That is, the resistor 2 is formed so as to overlap the electrode portion 1, which is a terminal electrode, and after the resistor 2 is dried, it is fired at a high temperature of 800° C. or more in the case of Ru○, for example. The resistance value after firing is a minimum of approximately 50% and a maximum of approximately 120% of the specified value.
If the resistance value varies within a range, especially if it shows a value less than 100% of the predetermined value, the resistor 2 can be removed using a laser beam, etc.
By adjusting the resistance value, increase the resistance value and correct it.
Although it was possible to adjust the resistance up to a predetermined value, if the value after firing exceeded the predetermined value, the resistance value could not be corrected and the circuit characteristics would be affected, making it completely unusable.

Therefore, the problem of the conventional resistance value variation as described above will be explained in detail using FIG. 5. If the resistor material is ideal, the same value should be produced if the firing is repeated under the same conditions. However, with current materials, even if fired under the same conditions, the maximum value is only 120% and the minimum value is only 50%. Therefore, assuming a case where the resistor burnout is performed at a maximum of 120%, the circuit element is designed using 80% of the predetermined value as a provisional predetermined value. In this way, even if the resistor is fired at a rate of 120%, theoretically the firing rate will be 0.8%.
This means that X1.2 = 0.96, which is almost the predetermined value. However, when the resistor is fired at the minimum 50%, the resistance value is only 40% (0.8X0.5 = 0.4), so trimming increases the resistance by 150% (+!!
Corrections had to be made, and productivity was extremely poor.

Problems to be Solved by the Invention Therefore, attempts have been made to fire a resistor in which the value after firing does not exceed a predetermined value in response to the conventional variation in resistance value as described above, but it is possible to reduce the variation in resistance value. The firing method and resistor material have not yet been developed, and the resistor must be formed after firing so that the resistance value can be adjusted by trimming. Moreover, it is 50% higher than the predetermined value.
Trimming a resistor with such a low resistance involves repeating the trimming many times, which poses a problem in that productivity is extremely low. Therefore, the development of a thick film hybrid integrated circuit element that can increase productivity by minimizing the amount of trimming has been awaited.

In view of the above-mentioned problems, the present invention aims to realize a resistor structure of a Wg4 mixed integrated circuit element with high productivity and a method for adjusting its resistance value, which compensates for the drawbacks of the conventional resistor.

Above are the means to solve the problem! In order to solve the problem, the present invention includes a resistor formed between parallel electrode parts, and an auxiliary conductor that is in conduction with the resistor in order to adjust the resistance value of the resistor. Features. According to this structure, if the resistance value of the resistor becomes lower than a predetermined value, the resistance value is adjusted by trimming the resistor to increase the resistance value. This method allows you to freely raise or lower the resistance value by forming an auxiliary conductor so that the resistor is in a conductive state, lowering the resistance value of the resistor once below a predetermined value, and then trimming it. ,
It features a resistance value adjustment method that allows.

According to the present invention, the resistance value of the resistor formed between the parallel electrode parts is first measured, and if the resistance value is lower than a predetermined value, the resistance value is adjusted by trimming the resistor. If the resistance value is higher than a predetermined value, the resistance value of the parallel electrode portion will decrease because it is in a state of conduction with the resistor. Therefore, if the auxiliary conductor is formed while measuring the resistance value between the electrodes, the time required for trimming can be significantly shortened. In this way, by performing the correction to increase the resistance value by trimming and the correction to decrease the resistance value by using the auxiliary conductor, it is no longer necessary to design the circuit element in consideration of a temporary predetermined value, and the circuit element can be designed using the predetermined value as is. In this way, the resistance value between the electrodes can be freely manipulated by combining the correction to increase the resistance value by trimming, and the correction to reduce the resistance value by forming the auxiliary conductor so that it is in a conductive state with the resistor. The amount of trimming is reduced and work efficiency is dramatically improved.

Embodiments Hereinafter, embodiments of the present invention will be explained using FIGS. 1 to 3. In FIG. 1, an electrode portion l is an electrode for connecting a resistor element, and is mainly composed of, for example, Ag/Pd. The resistor 2 is a portion in which a resistor element is formed by connecting parallel electrode portions l using a resistor material mainly composed of, for example, RuO. The trimming part 3 is a part where a part of the resistor 2 is melted with heat using a laser beam or the like, and a cut is made to increase the resistance value by allowing current to flow therethrough. The auxiliary conductor 4 is, for example, a polymer type nasal electrode paste, and its main component is silver powder or the like.

Next, a method for adjusting the resistance value will be described. First, resistor 2
is formed between the parallel electrode parts l. The resistance value after firing shows a minimum of about 50% and a maximum of about 120% of the predetermined value, so resistor 2 shows a value lower than the predetermined value.
, the resistance value is corrected by trimming to raise the resistance value to a predetermined value.

Next, a method of correcting the resistance value of a resistor that exhibits a value higher than a predetermined value will be described. In order to temporarily lower the resistance value of the resistor 2 below a predetermined value, first form an auxiliary conductor 4 on the resistor 2 that is in electrical continuity with the resistor 2. For example, use a polymer conductor as the auxiliary conductor 4. In this case, the polymer conductor formed on the resistor 2 is fired at 150 to 250° C. for a few ten minutes. 8 if the resistor 2 has RuO etc. as its main component.
Because it is fired at 00°C or higher, it has been confirmed that even if the auxiliary conductor 9 is formed, the change in resistance value is only a few percent, and there is no problem. As for the formation position above, as shown in FIG. 1, it is in direct conduction with the resistor 2 but not in direct conduction with the electrode part l, or as shown in FIG. 2 and the electrode portion 1 at a position that is in direct electrical conduction. In this way, in order to temporarily lower the resistance value of the resistor 2 below a predetermined value, the auxiliary conductor 4 is formed in a state where it is electrically connected to the resistor 2, and the resistance value of the resistor 2 is lowered to an appropriate value. It is also possible to correct the resistance value of the resistor 2 whose value is higher than a predetermined value using only the auxiliary conductor 4.

As described above, no matter what value the resistance value of the resistor 2 formed between the parallel electrode parts l shows with respect to a predetermined value, the auxiliary conductor 4 is kept in the normal state with the resistor 2. The resistance value of resistor 2 can be lowered by forming a
It is possible to provide a resistance value adjustment method in which the resistance value of can be freely manipulated.

Effects of the Invention According to the present invention, the resistance value of the resistor can be lowered by providing the resistor formed between the parallel electrode parts with an auxiliary conductor that is in electrical continuity with the resistor. . Therefore, after firing the resistor, if the resistance value is lower than the predetermined value, the resistance value is corrected by trimming, and if the resistance value is high, the resistance value is adjusted by forming an auxiliary conductor on the resistor element. By adopting a method in which the resistance value is once lowered below a predetermined value and the resistance value is corrected by trimming, the resistance value can be freely manipulated. Previously, the maximum was 15
The resistance value correction, which used to be close to 0%, now only needs to be corrected to 100%, and it is no longer necessary to design circuit elements that take temporary predetermined values into consideration, resulting in a dramatic improvement in productivity.

[Brief explanation of drawings]

FIG. 1 is a plan view of a thick film hybrid integrated circuit device according to an embodiment of the present invention, FIG. 2 is a sectional view of a thick film hybrid integrated circuit device according to the present invention, and FIG. 3 is a plan view of a thick film hybrid integrated circuit device according to the present invention. FIG. 4 is a plan view of a conventional thick film hybrid integrated circuit device, and FIGS. It is a figure showing the relationship with a value. 1... Electrode part, 2... Resistor, 3...
...Trimming part, 4...Auxiliary conductor.

Claims (2)

[Claims] (1) A thick film hybrid integration characterized by comprising a resistor formed between parallel electrode parts and an auxiliary conductor for adjusting the resistance value of the resistor that is in conduction with the resistor. circuit element. (2) The resistance value of the resistor can be lowered by using an auxiliary conductor that is in conduction with the resistor to lower the resistance between the parallel electrodes, or by trimming the resistor. A method for adjusting the resistance value of thick film hybrid integrated circuit elements.