JPH09260113A - Resistor and manufacture thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve a withstand voltage characteristic in a resistor to be used for current detection and potential detection in an inverter circuit or the like. SOLUTION: Since a resistor 13 provided with an electrode 12 for external connection and an electrode 12 for external connection so as to be superimposed and a resistor 13 being provided with an intermediate electrode 14 between the resistor 13 and the electrode 12 for external connection and being connected to the electrode 12 for external connection and the intermediate electrode 14 are almost in the same shape besides being corrected almost to the same shape and almost to the same resistance value by trimming, a voltage applied to the resistor can be equally dispersed so as to effectively improve a withstand voltage characteristic.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a resistor used for voltage detection and current detection in an inverter circuit and the like and a method for manufacturing the same.

[0002]

2. Description of the Related Art As a conventional resistor, the one described in the public technical report of the official technique number 85-1906 issued by the Institute of Invention and Innovation is known.

FIG. 5 is a front view of a conventional resistor. 1 is a substrate. Reference numeral 2 is an external connection electrode provided on both ends of the substrate 1. Reference numeral 3 is an intermediate electrode provided on the upper surface of the substrate 1 between the external connection electrodes 2. Reference numeral 4 is a resistor provided between the external connection electrodes 2. Reference numeral 5 is a trimming groove formed in the resistor 4 with a uniform cut amount.

[0004]

However, in the resistor as described above, the external connection electrode 2 and the intermediate electrode 3 are provided.
The individual parts of the resistor divided by and do not necessarily have the same shape and resistance value.If the shapes or resistance values of the individual parts are different, there are parts where the applied voltage concentrates, and good withstand voltage characteristics are obtained. There was a problem that I could not get it.

An object of the present invention is to provide a resistor having excellent withstand voltage characteristics.

[0006]

In order to achieve this object, the present invention makes the shapes and the resistance values of the external connection electrodes, the intermediate electrode, and the individual portions of the resistor divided by the intermediate electrode substantially the same. To do so.

Further, it is manufactured so that the shape and the resistance value of the individual portion of the resistor divided between the external connection electrodes and the intermediate electrode and the intermediate electrode are substantially the same.

[0008]

BEST MODE FOR CARRYING OUT THE INVENTION The invention according to claim 1 of the present invention is an insulating substrate, an external connecting electrode electrically connected to the upper surface of the insulating substrate via a resistor, and the external connecting electrode. One or more intermediate electrodes provided between the electrodes, and a resistor provided so as to overlap between the external connection electrodes, and are divided between the external connection electrode, the intermediate electrode and the intermediate electrode. Each of the individual parts of the resistor is laser-trimmed so that the individual parts have substantially the same shape and resistance value, and the individual parts of the resistor divided by the intermediate electrode have the same shape and resistance value. This has the effect that the voltage loaded at can be evenly distributed to each individual part.

According to a second aspect of the present invention, a step of simultaneously forming an external connection electrode and one or more intermediate electrodes between the external connection electrodes on the upper surface of the insulating substrate with the same material,
Forming a resistor provided so as to overlap between the external connection electrodes, and laser trimming the individual portions of the resistor divided between the external connection electrode and the intermediate electrode and the intermediate electrode. The laser-trimmed individual part of the resistor is a method of manufacturing a resistor having substantially the same shape and resistance, and the individual part of the resistor has substantially the same shape and resistance. It has the effect that parts can be manufactured under the same conditions.

According to a third aspect of the present invention, a step of electrically connecting the external connection electrode and the intermediate electrode with a lead terminal, and a lead terminal connected to the intermediate electrode among the lead terminals is omitted. The method of manufacturing a resistor according to claim 2, further comprising: a step of manufacturing a resistor network with lead terminals having three or more electrodes for external connection,
It has an effect that the intermediate electrode can be easily formed only by adding the step of removing the lead terminal.

A resistor and a manufacturing method thereof according to an embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a front view of a resistor according to an embodiment of the present invention. Reference numeral 11 is a rectangular insulating substrate made of alumina, and has a length of 3.3 mm, a width of 6.5 mm, and a thickness of 0.8 mm.
Is the size of. Reference numeral 12 is an external connection electrode mainly composed of Ag, which is formed on each end of the upper surface of the insulating substrate 11. Reference numeral 13 is a ruthenium oxide-based resistor formed on the upper surface of the insulating substrate 11 so as to overlap the electrodes 12 for external connection. Reference numeral 14 denotes an intermediate electrode having the same component as that of the external connection electrode 12 provided on the upper surface of the insulating substrate 11 so as to electrically connect the resistor 13 between the external connection electrodes 12. The intermediate electrode 14 is designed to be located exactly in the middle of the two external connection electrodes 12. External connection electrode 1
The size of the individual part of the resistor 13 divided between the 2 and the intermediate electrode 14 is 1.2 mm in length, 1.8 mm in width, and about 8 μm in thickness.
It is. Reference numeral 15 is an L-shaped trimming groove formed by using a laser to correct the resistance value of the resistor 13, and has a width of about 50 μm. The size of the L-shaped trimming groove 15 varies greatly depending on conditions such as the initial resistance value, but is 0.1 mm to 0.6 mm on the primary side (direction perpendicular to the current direction).
The target is 0.3 mm to 0.6 mm on the next side (current direction). Since the resistance value of each individual portion of the resistor 13 divided between the external connection electrode 12 and the intermediate electrode 14 is adjusted to be 500 kΩ ± 5%, the external connection electrode 12 has a resistance value of 1 MΩ ± 5%. Has a resistance value of. Trimming groove 15
Since there is one in each of the individual portions of the resistor 13 divided between the external connection electrode 12 and the intermediate electrode 14, there are two trimming grooves 15 between the external connection electrodes 12.
Since the two trimming grooves 15 are manufactured under substantially the same conditions, they have almost the same shape and length. Reference numeral 16 is a lead terminal electrically connected to the external connection electrode 12.

A method of manufacturing the resistor having the above-described structure according to the embodiment of the present invention will be described with reference to FIG.

First, as shown in FIG. 2 (a), a sheet-like insulating substrate 1 provided with a dividing groove 18 for dividing into individual pieces.
In each of the areas separated by the dividing groove 18 on the upper surface of FIG.
As shown in (b), the external connection electrode 12 and the intermediate electrode 1
4 are simultaneously formed of the same material by the screen printing method.

Next, as shown in FIG. 2C, the dividing groove 1
The resistor 13 is formed by a screen printing method so that the external connection electrode 12 in the area divided by 8 is overlapped.

Next, as shown in FIG. 2D, the resistor between the external connection electrode 12 and the intermediate electrode 14 is laser-trimmed while measuring the resistance value to form a trimming groove 15. The resistance value is corrected to a desired value so that the shape and the resistance value of the individual portions are almost the same.

Next, as shown in FIG. 2 (e), the insulating substrate 17 is divided along the dividing grooves 18, and the external connection electrode 1 is formed.
2. An individual piece 11 of an insulating substrate having a resistor 13 having an intermediate electrode 14 and a trimming groove 15 on its upper surface is obtained.

Next, as shown in FIG. 2 (f), the external connection electrode 12 and the intermediate electrode 14 of the individual insulating substrate 11 are separated.
The lead terminal 16 is inserted into.

Next, as shown in FIG. 2 (g), the middle lead terminal 16 connected to the intermediate electrode 14 among the lead terminals 16 is cut off.

Finally, the lead terminals 16 on both ends are electrically connected to the external connection electrodes 12 by soldering to manufacture a resistor.

The operation of the resistor according to the embodiment of the present invention constructed and manufactured as described above will be described.

FIG. 3 is a circuit diagram of an inverter circuit showing a usage example of the resistor according to the embodiment of the present invention. Two
Reference numerals 1 and 22 are potential detecting resistors. One of 21 and 22 has a resistance value of 100 kΩ or more, is connected in series by the potential detection unit 23, and is arranged between the voltage control unit and the inverter generation circuit unit. The potential detector 23 is feedback-connected to the voltage controller.

Conventionally, 21 and 22 have been composed of a thin film resistor mainly composed of a metal material such as NiCr or carbon as a resistance material. In a relatively high load voltage of 100 V to 700 V, high humidity, and an environment where condensation is likely to occur, a resistor having a resistance value of 100 kΩ or more, which is a very thin resistor with a film thickness of about 10 nm, is a resistance material that originally oxidizes, so There has been a problem that the resistance value gradually increases with the passage of time, and the potential of the potential detection unit 23 varies depending on the degree of increase. Therefore, a method of using a resistor as shown in FIG. 1 in which an oxide such as ruthenium oxide is used as a conductive material is increasing in 21 and 22.

The resistors 21 and 22 according to the embodiment of the present invention are used at a voltage of 500V. Generally, the applied voltage is concentrated around the trimming groove of the resistor, but the trimming groove 15
There are two between the lead terminals 16 and the trimming grooves 15 have almost the same size.
The voltage per 5 can be reduced to half of the voltage applied between the lead terminals 16, that is, 250V.

Generally, when a resistor is used in a high-voltage load / high-humidity environment, there are many cases in which the resistance value is affected. A resistor according to one embodiment of the present invention and a resistor based on a conventional example are respectively provided with high humidity (60 ° C., 90 to 9).
FIG. 4 shows a characteristic diagram showing the rate of change in resistance when a 1000 V load is continuously applied for 1000 hours under a 0% RH environment. It can be seen that the change in resistance value of the resistor according to the embodiment of the present invention is much smaller than that of the conventional example, and the improvement of withstand voltage characteristics can be achieved.

In the embodiment of the present invention, the case where the central terminal of the three-terminal SIP resistance network is omitted to form two terminals has been described. The same effect can be obtained by omitting the terminals.

Further, in the embodiment of the present invention, the case where the external connection electrode, the intermediate electrode, and the resistor are formed by the screen printing method has been described, but the same effect can be obtained even in the case of other methods such as a thin film. To be

[0028]

As described above, according to the present invention, the load applied to each of the divided resistors can be evenly distributed by making the resistors divided by the intermediate electrode have the same shape and resistance value. Therefore, the withstand voltage characteristic can be effectively improved.

In particular, since the resistors have the same shape and the same resistance value, it is not necessary to change the manufacturing conditions depending on the resistors, and the yield can be improved.

In the case of a network resistor in which lead terminals are electrically connected to three or more electrodes for external connection, a resistor or an electrode for external connection is added by adding a step of removing at least one lead terminal other than both ends. It is possible to use the electrode for external connection originally as the intermediate electrode without changing the shape, and it is possible to easily manufacture a resistor having improved withstand voltage characteristics.

Further, in the trimmed resistor, the electric power applied is concentrated around the trimming groove and becomes extremely hot locally, and there is a problem that the resistor is burned out if too much electric power is applied. It was However, since the resistor manufactured according to the present invention has the plurality of trimming grooves between the electrodes for external connection, the power concentrated portion is diffused, and the effect of improving the withstand power characteristic is also obtained.

[Brief description of drawings]

FIG. 1 is a front view of a resistor according to an embodiment of the present invention.

FIG. 2 is a view showing the same manufacturing method.

FIG. 3 is a diagram showing an example of using the same.

FIG. 4 is a characteristic diagram showing a change in resistance value when the same load test is performed.

FIG. 5 is a front view of a conventional resistor.

[Explanation of symbols]

 11 Insulating Substrate 12 External Connection Electrode 13 Resistor 14 Intermediate Electrode 15 Trimming Groove

Claims (3)

[Claims] 1. An insulating substrate, external connection electrodes electrically connected to the upper surface of the insulating substrate via a resistor, and one or more intermediate electrodes provided between the external connection electrodes,
A resistor provided so as to overlap between the electrodes for external connection, and laser trimming each individual portion of the resistor divided between the electrode for external connection and the intermediate electrode and the intermediate electrode, A resistor in which the shape and resistance of individual parts are almost the same. 2. A step of simultaneously forming an electrode for external connection and one or more intermediate electrodes between the electrodes for external connection on the upper surface of an insulating substrate with the same material at the same time, so as to overlap between the electrodes for external connection. The laser-trimmed resistor comprises: a step of forming a provided resistor; and a step of laser-trimming each of the external connection electrode, the intermediate electrode, and the individual portion of the resistor divided between the intermediate electrode. A method of manufacturing a resistor in which individual parts of the body have substantially the same shape and resistance value. 3. The method according to claim 2, further comprising a step of electrically connecting the external connection electrode and the intermediate electrode with a lead terminal, and a step of removing the lead terminal connected to the intermediate electrode among the lead terminals. Method of manufacturing resistor.