JP2001203101A - Resistor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a resistor having superior surge resistance. SOLUTION: The resistor is provided with a resistance body 13, which is formed on an insulating substrate 11 and electrically connected between counter electrodes 12a and 12b, across which an electric current is made to flow, and two trimmed traces 14a and 17a formed on the side edges of the resistance body 13.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a resistor having excellent surge resistance.

[0002]

2. Description of the Related Art Conventionally, a resistor described in Japanese Utility Model Publication No. 2-38708 is known as a resistor having excellent surge resistance.

[0003] A conventional resistor will be described below with reference to the drawings.

FIG. 8 is a top view of a conventional resistor.

In FIG. 8, reference numeral 1 denotes a substrate. 2a, 2
b is an electrode provided at both ends of the upper surface of the substrate 1.
Reference numeral 3 denotes a resistor provided to electrically connect the electrodes 2a and 2b. Reference numeral 4 denotes a primary trimming mark provided on a side of the resistor 3 so as to be located near one of the electrodes 2a and extend in a direction parallel to the electrode 2a. Reference numeral 5 denotes a secondary trimming trace starting from the end of the primary trimming trace 4 and extending in the direction of the other electrode 2b from the starting end.

A method of manufacturing the conventional resistor having the above-described structure will be described below with reference to the drawings.

FIG. 9 is a view showing a conventional method of manufacturing a resistor.

First, as shown in FIG. 9A, a pair of electrodes 2a and 2b are formed on both ends of the upper surface of the substrate 1.

Next, as shown in FIG. 9B, a resistor 3 is formed on the upper surface of a part of the substrate 1 and the electrodes 2a and 2b. Before the trimming traces are formed, the electrodes 2a,
The resistance value between 2b (initial resistance value) should be lower than the target resistance value, and if too low, it is necessary to provide a long trimming mark. become worse. Therefore, the resistance is usually set to one half or more of the target resistance value.

Next, as shown in FIG.
The primary trimming trace 4 extending in a direction parallel to the electrode 2a is formed so that the resistance between the electrodes a and 2b becomes a predetermined resistance determined by the resistance after the formation of the resistor. The lower the initial resistance value after the formation of the resistor 13 before the formation of the trimming traces 4 and 5, the longer the primary trimming trace 4 becomes. However, when the initial resistance value is about half the target resistance value, The length is as large as about two thirds of the entire width of the resistor 3.

Finally, as shown in FIG.
so that the resistance value between a and 2b becomes the target resistance value,
The end of the primary trimming trace 4 is set as the starting end, and the other electrode 2b
The secondary trimming trace 5 extending in the direction of is formed.

When the end position of the secondary trimming mark 5 is determined by the resistance value between the electrodes 2a and 2b, the length of the secondary trimming mark 5 tends to vary. Therefore, usually, the primary trimming trace 4 is formed longer so that the terminal end of the secondary trimming trace 5 does not overlap with the electrode 2b, and the resistance value after the formation of the primary trimming trace 4 is slightly increased. The secondary trimming mark 5 is set to have a length equal to or less than half of the entire length of the resistor. Therefore, at least on either the start end side or the end side of the secondary trimming trace 5, the distance between the secondary trimming trace 5 and the electrode 2 a or 2 b is equal to or more than half the length of the secondary trimming trace 5. .

[0013]

However, the above-mentioned conventional resistor has a degree of current concentration at the beginning of the secondary trimming trace 5 (end of the primary trimming trace 4) and / or near the end when current is loaded. However, there is a problem that sufficient surge resistance may not be obtained in some cases.

FIG. 10 is a diagram showing a current flow when a current flows through a conventional resistor. The arrows in the figure indicate the direction of the current, and the narrower the interval between the arrows, the more the current is concentrated.

As is apparent from FIG. 10, the current is hindered by the trimming traces 4 and 5, so that the current is particularly concentrated near both ends (start and end) of the secondary trimming trace 5.

When the same amount of current flows, the primary trimming trace 4 extends perpendicular to the current flow, so that the longer the primary trimming trace 4 is, the larger the primary trimming trace 4 is.
The longer the distance between the electrode and the electrode 2a, the greater the degree of this current concentration. Then, when a surge current flows, a temperature rise occurs in accordance with the degree of current concentration, and when the temperature rise exceeds a certain level, the resistor 3 is burned and the resistance value changes or the resistor 3 is opened. At this time, in a region surrounded by the primary trimming traces 4 and the secondary trimming traces 5, the current partially flows in the reverse direction, and all the reverse currents are concentrated near the end of the secondary trimming traces 5, so that the secondary The current concentration is much more intense near the end of the secondary trimming trace 5 than near the beginning of the trimming trace 5.

An object of the present invention is to solve the above-mentioned conventional problems, and an object of the present invention is to provide a resistor having excellent surge resistance.

[0018]

In order to solve the above-mentioned problems, a resistor according to the present invention is formed on an insulating substrate, and is electrically connected between opposing electrodes so that a current flows between the electrodes. It is provided with a resistor having a shape and two trimming marks formed on the side of the resistor, thereby obtaining a resistor having excellent surge resistance.

[0019]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The invention according to claim 1 of the present invention is a rectangular resistor formed on an insulating substrate and electrically connected between opposing electrodes so that a current flows between the electrodes. And two trimming marks formed on the side of the resistor. According to this configuration, when the initial resistance value and the target resistance value are the same, two trimming marks are formed on the resistor. As compared with the case where only one trimming mark is formed, the length of the trimming mark is shorter, so that the current concentration at the end of the trimming mark can be suppressed, thereby improving the surge resistance characteristics of the resistor. It has the action of:

According to a second aspect of the present invention, there is provided a rectangular resistor formed on an insulating substrate and electrically connected between electrodes facing each other, and a current flows between the two electrodes; A first trimming mark formed on one of the side edges to be formed, and a second trimming mark formed on the other side,
According to this configuration, when the initial resistance value and the target resistance value are the same, trimming marks are formed on both sides of the resistor, so that a single trimming mark is formed on only one side of the resistor. The current that flows during normal operation can be further impeded by the trimming traces, so that the length of the trimming traces can be further reduced, thereby further suppressing the current concentration at the end of the trimming traces and reducing the surge resistance of the resistor. It has the effect of further improving.

According to a third aspect of the present invention, there is provided a rectangular resistor formed on an insulating substrate and electrically connected between opposing electrodes to allow a current to flow between the two electrodes; A first trimming mark formed on one of the sides to be formed, and a second trimming mark formed on the other side.
And the second trimming mark are located near one electrode side and extend in parallel with the one electrode.
The secondary trimming trace includes a secondary trimming trace and a secondary trimming trace extending from the start end to the other electrode side in a current direction and having a terminal end near the other electrode side. According to this configuration, when the initial resistance value and the target resistance value are the same, trimming traces are formed on both sides of the resistor, so that only one trimming trace is formed on only one side of the resistor. In comparison, since the length of the primary trimming trace is shorter, current concentration at the start and / or end of the secondary trimming trace can be suppressed, and the terminal end of the primary trimming trace can be reduced by the secondary trimming trace. Because the current flowing around can be reduced,
The current concentration at the start end of the secondary trimming trace (end of the primary trimming trace) can be suppressed, thereby having the effect of improving the surge resistance characteristics of the resistor.

According to a fourth aspect of the present invention, there is provided a rectangular resistor formed on an insulating substrate, electrically connected between opposing electrodes, and having a current flowing between both electrodes; A first trimming mark formed on one of the opposing sides of the body, and a second trimming mark formed on the other side,
At least the second trimming trace has a primary trimming trace located near one electrode side and extending in parallel with the one electrode, and an end of the primary trimming trace as a starting end,
A secondary trimming trace extending in the current direction from the start end toward the other electrode side and having an end near the other electrode side, wherein the length of the primary trimming trace is one trimming trace. In the vicinity of the end of the primary trimming trace and the primary trimming trace so as to reduce the current wrap around at the beginning and end of the secondary trimming trace. And the distance between the end of the secondary trimming trace and the electrode in the vicinity of the secondary trimming trace is less than half the length of the secondary trimming trace, respectively. For example, when the initial resistance value and the target resistance value are the same, trimming marks are formed on both sides of the resistor, compared to a case where only one trimming mark is formed on only one side of the resistor. Since the length of the primary crop marks is shortened, in addition to being able to suppress the beginning and / or end of the current concentration of the secondary trimming traces, electrodes and 2
Since the distance between the start end and the end of the next trimming mark can be made shorter than before, the current concentration can be further suppressed, thereby having the effect of improving the surge resistance characteristics of the resistor.

According to a fifth aspect of the present invention, there is provided a rectangular resistor which is formed on an insulating substrate, is electrically connected between opposing electrodes, and allows a current to flow between the electrodes. A first trimming mark formed on one of the opposing sides of the body, and a second trimming mark formed on the other side,
At least the second trimming trace has a primary trimming trace located near one electrode side and extending in parallel with the one electrode, and an end of the primary trimming trace as a starting end,
A secondary trimming trace extending in the current direction from the start end toward the other electrode side and having an end near the other electrode side, wherein the length of the primary trimming trace is one trimming trace. , And the length of the primary trimming trace is set to be equal to the full width of the resistor so as to suppress the current from flowing at the beginning and end of the secondary trimming trace. According to this configuration, when the initial resistance value and the target resistance value are the same, trimming marks are formed on both sides of the resistor, so that one trimming mark is formed on one side of the resistor. Since the length of the primary trimming trace is shorter than that of the case where the primary trimming trace is formed only on the side, current concentration at the start and / or end of the secondary trimming trace can be suppressed. Since the length of the trimming marks can be made shorter than conventionally, it can be further suppressed current concentration,
This has the effect of improving the surge resistance of the resistor.

According to a sixth aspect of the present invention, a tertiary trimming trace extending parallel to the other electrode is formed from the end of the secondary trimming trace.
Since the reverse current near the end of the next trimming trace can be reduced, the current concentration near the end of the secondary trimming trace can be further suppressed, which has the effect of further improving the surge resistance characteristics of the resistor. It is.

According to a seventh aspect of the present invention, the terminal of the tertiary trimming trace is kept within the resistor. According to this configuration, the trimming is performed while measuring the resistance value, and the target resistance value is measured. Since the trimming can be stopped at the point where, the resistance value can be adjusted with high accuracy.

According to an eighth aspect of the present invention, the termination of the tertiary trimming trace is extended outside the resistor. According to this configuration, the reverse current near the termination of the secondary trimming trace is completely reduced. Since this can be prevented, current concentration near the end of the secondary trimming trace can be further suppressed, which has the effect of further improving the surge withstand characteristics of the resistor.

According to a ninth aspect of the present invention, the first trimming trace and the second trimming trace are formed so that the directions from the start end to the end of the secondary trimming trace are opposite to each other. According to this configuration, since the end position of the secondary trimming trace where the current concentration is most likely to occur can be separated, the surge withstand characteristic of the resistor is further improved.

According to a tenth aspect of the present invention, the first aspect
Are formed so as to be substantially point-symmetric with respect to the center of the resistor. According to this configuration, the end and the start of the secondary trimming trace where current concentration occurs are determined. Since the local temperature rise can be suppressed by arranging the resistors evenly, the surge resistance of the resistor is further improved.

According to an eleventh aspect of the present invention, a resistor formed on an insulating substrate and electrically connected between opposing electrodes and allowing a current to flow between the electrodes is provided. A first trimming mark and a second trimming mark formed only on one of the side edges to be formed, wherein the first trimming mark and the second trimming mark are respectively located near one electrode side. A primary trimming trace extending parallel to the one electrode, and a secondary trimming trace extending from the starting end of the primary trimming trace toward the other electrode in a current direction. The first trimming trace and the second trimming trace are oppositely directed from the beginning to the end of the secondary trimming trace so as to suppress current wraparound at the beginning and end of the trimming trace. According to this configuration, the variation in the distance between the electrode and the primary trimming trace can be easily reduced, so that the start and end points of the secondary trimming trace where current concentration occurs and the electrode are formed. Variations in the distance are suppressed, and thereby, an effect is obtained that a resistor with less variation in surge resistance can be easily obtained.

That is, since the primary trimming may be started after mechanically adjusting the distance to the resistor, the starting position of the formation of the primary trimming trace can be determined with high accuracy. This is because it is easy to make the distances of the traces substantially the same.

According to a twelfth aspect of the present invention, the primary trimming trace for the coarse adjustment is longer than the primary trimming trace for the fine adjustment. Since the current is prevented from flowing to the side closer to the side of the resistor where the second trimming trace is formed than the primary trimming trace for adjustment, the current flowing to the place where the secondary trimming trace for fine adjustment is formed is reduced. The amount is reduced, whereby the rate of increase in the resistance value during the trimming for fine adjustment can be suppressed, and an effect that a highly accurate resistor can be easily obtained.

Embodiment 1 Hereinafter, Embodiment 1 of the present invention will be described with reference to the drawings.

FIG. 1 is a top view of the resistor according to the first embodiment of the present invention.

Reference numeral 11 denotes a rectangular insulating substrate made of alumina. Reference numerals 12a and 12b denote silver electrodes provided at opposite ends of the upper surface of the substrate 11. Reference numeral 13 denotes a ruthenium oxide-based material provided on the substrate 11 and a part of the upper surfaces of the electrodes 12a and 12b so as to electrically connect the electrodes 12a and 12b and to allow a current to flow between the electrodes 12a and 12b. It is a rectangular resistor made of a thick film material. 1
Reference numeral 4a denotes a first trimming mark for coarse adjustment of a resistance value provided by trimming.
Next trimming mark 14, Secondary trimming mark 1 for coarse adjustment
5, a third trimming mark 16 for coarse adjustment. A primary trimming mark 14 for coarse adjustment is formed on one side of the resistor 13 and is arranged near one electrode 12a.
It extends in a direction parallel to the electrode 12a. The length of the primary trimming trace 14 for coarse adjustment is one third of the entire width of the resistor 13.
The distance between the primary trimming traces 14 for coarse adjustment and the electrode 12a is as small as possible, and is at least half the length of the secondary trimming traces 15 for coarse adjustment. The secondary trimming mark 15 for the coarse adjustment is
The end of the next trimming mark 14 extends from the end toward the electrode 12b. The end of the coarse adjustment secondary trimming trace 15 is kept in the resistor 13 near the other electrode 12b, but the distance between the coarse adjustment secondary trimming trace 15 and the electrode 12b is as small as possible. , At least half the length of the secondary trimming mark 15 for coarse adjustment. The tertiary trimming trace 16 for coarse adjustment extends from the end of the secondary trimming trace 15 for coarse adjustment to the outside of the resistor 13 in parallel with the electrode 12b.

As described above, since the tertiary trimming trace 16 for coarse adjustment is provided, the reverse current near the end of the secondary trimming trace 15 for coarse adjustment can be reduced, thereby providing the tertiary trimming trace. 2 for coarse adjustment than none
Since the current concentration near the end of the next trimming mark 15 can be further suppressed, the surge resistance characteristic of the resistor is further improved.

Further, since the terminal of the tertiary trimming mark 16 for coarse adjustment is extended outside the resistor 11, reverse current near the terminal of the secondary trimming mark 15 for coarse adjustment can be completely prevented. Since the terminal of the tertiary trimming trace 16 for the coarse adjustment is kept in the resistor 11, current concentration near the end of the secondary trimming trace 15 for the coarse adjustment can be further suppressed. Is further improved.

Reference numeral 17a denotes a second trimming mark for fine adjustment of a resistance value provided by trimming, a primary trimming mark 17 for fine adjustment, a secondary trimming mark 18 for fine adjustment, and a fine trimming mark 18. Of the tertiary trimming marks 19 of FIG. The primary trimming trace 17 for fine adjustment is the resistor 1
3 is formed on a side opposite to the side on which the primary trimming mark 14 for coarse adjustment is formed, and is disposed near the electrode 12b and extends in a direction parallel to the electrode 12b. The length of the primary trimming trace 17 for fine adjustment is set to be not more than one-third of the entire width of the resistor 13 and substantially the same as the length of the primary trimming trace 14 for coarse adjustment.

As described above, the first trimming mark 14a for coarse adjustment of the resistance value and the second trimming mark 17 for fine adjustment are provided.
If a is provided, the accuracy of the resistance value can be further improved.

At this time, the primary trimming trace 14 for coarse adjustment and the primary trimming trace 17 for fine adjustment are shorter than the primary trimming trace when there is only one trimming trace. That is, if the initial resistance value and the target resistance value are the same,
This is because, when there is one trimming mark, it is necessary to set the target resistance value at one primary trimming mark, but when there are two trimming marks, the target resistance value should be set at two primary trimming marks.

The distance between the primary trimming trace 17 for fine adjustment and the electrode 12b is as small as possible, and is at least half the length of the secondary trimming trace 18 for fine adjustment. The secondary trimming trace 18 for fine adjustment starts from the end of the primary trimming trace 17 for fine adjustment as the starting end.
Extending in the current direction toward. The end of the secondary trimming trace 18 for fine adjustment is connected to the resistor 13 near the other electrode 12a.
However, the distance between the terminal of the secondary trimming trace 18 for fine adjustment and the electrode 12a is as small as possible, and is at least half the length of the secondary trimming trace 18 or less.
At this time, the direction from the start end to the end of the secondary trimming trace 18 for fine adjustment depends on the secondary trimming trace 15 for coarse adjustment.
Is opposite to the direction from the beginning to the end.

As described above, the first trimming trace 14a and the second trimming trace 17a are configured such that the directions from the start end to the end of the secondary trimming trace are opposite to each other. The end positions of the next trimming traces 15 and 18 can be separated, and the surge resistance characteristics of the resistor are further improved as compared with the case where the directions from the start end to the end are the same.

Further, the first trimming mark 14a and the second trimming mark 14a
If the trimming traces 17a are formed so as to be substantially point-symmetric with respect to the center of the resistor 11, the ends and the starting ends of the secondary trimming traces 15 and 18 where current concentration occurs can be arranged evenly on the resistor 11. As a result, a local temperature rise can be suppressed, so that the surge resistance characteristics of the resistor can be further improved.

The tertiary trimming trace 19 for fine adjustment extends from the end of the secondary trimming trace 18 for fine adjustment in parallel with the electrode 12 a, and has the end in the resistor 13.

As described above, if the end of the tertiary trimming trace 19 for fine adjustment is kept in the resistor 13, trimming is performed while measuring the resistance value, and trimming is performed at the target resistance value. Can be stopped, so that it is possible to easily realize a high-precision resistance value.

On the other hand, when the tertiary trimming trace 19 for fine adjustment is extended to the outside of the resistor 13, the rise in the resistance value due to the formation of the tertiary trimming trace 19 for fine adjustment is reduced by the second trimming trace for fine adjustment. Since the trimming trace 18 varies depending on the end position, the variation in the final resistance value increases.

Of course, the third trimming mark 1 for fine adjustment
In the case 9, if the terminal is extended out of the resistor 11, the surge resistance of the resistor is further improved as in the case of the above-described tertiary trimming trace 16 for fine adjustment. Since it is provided for fine adjustment of the resistance value, it is better to perform the high-precision resistance value adjustment by keeping the terminal end in the resistor 13.

It should be noted that, in the above configuration, 3
Next trimming mark 16 and third trimming mark 19 for fine adjustment
Has been described, but both or either of them may not be provided.

Although the third trimming mark 16 for coarse adjustment has been described as extending to the outside of the resistor 13, it may be limited to the resistor 13.

Further, in order to improve the reliability of the resistor 13, a pre-coated glass made of a borosilicate glass-based thick film glass material is formed so as to cover the entire surface of the resistor 13 before the trimming marks 14 a and 17 a are formed. May be provided.

In order to improve the reliability of the resistor 13, after forming the trimming marks 14a and 17a, a protective film layer covering the resistor 13 made of glass or a resin material may be formed.

The manufacturing method of the first embodiment of the present invention configured as described above will be described below.

FIG. 2 is a process chart showing a method of manufacturing the resistor according to the first embodiment of the present invention.

First, as shown in FIG. 2A, a conductive paste is screen-printed on both ends of the upper surface of the insulating substrate 11 and the electrodes are fired to form the electrodes 12a and 12b.

Next, as shown in FIG.
a and the electrode 12b are electrically connected to each other.
A resistor paste is screen-printed on a part of the upper surfaces of the electrodes 1 and the electrodes 12a and 12b, and the resistor paste is fired to form the resistor 13. At this time, the trimming marks 14a, 17
Although the resistance value (initial resistance value) between the electrodes 12a and 12b before the formation of “a” can be increased by laser trimming described later, it is very difficult to reduce it.
The resistance value should be lower than the target resistance value in advance. However, the lower the initial resistance value before the trimming, the longer the length of the trimming traces 14a and 17a must be provided, so that the surge resistance is deteriorated. Therefore, those whose ratio to the target value is too low, usually less than half, are removed.

Next, as shown in FIG.
While measuring the resistance value between the electrodes 12a and 12b, the electrodes 12a from the outside of the resistor 13 near the electrode 12a until a predetermined resistance value determined by the resistance value after the formation of the resistor 13 is reached.
The laser is scanned in a direction parallel to the direction shown in FIG. 1 to form a primary trimming mark 14 for coarse adjustment on the resistor 13. Electrode 12a
And the shorter the distance between the primary trimming marks 14 for rough adjustment and the
Since the current concentration near the end of the primary trimming trace 14 for coarse adjustment can be suppressed, that is, the surge resistance of the resistor 13 is improved, the electrode 12a and the primary trimming trace 1 for coarse adjustment are improved.
The formation of the primary trimming marks 14 for coarse adjustment is started in consideration of various manufacturing conditions (such as the precision of the starting position of trimming and the precision of the forming positions of the resistor 13 and the electrodes 12a and 12b) so that the 4 does not overlap. The position is set, and the distance between the electrode 12a and the primary trimming trace 14 for coarse adjustment is shortened.
Further, the equipment setting is performed so that the length of the primary trimming trace 14 for rough adjustment does not exceed one third of the entire width of the resistor 13.

Next, as shown in FIG.
The secondary trimming traces 15 for coarse adjustment extending in the direction of the electrode 12b starting from the end of the primary trimming traces 14 for coarse adjustment until the predetermined resistance value is reached while measuring the resistance value between a and 12b. Form. As the end of the secondary trimming mark 15 for rough adjustment is closer to the electrode 12b, the secondary trimming mark 15 for rough adjustment
Since the current concentration near the end of the next trimming mark 15 can be suppressed, that is, the surge withstand characteristic is improved, the secondary trimming mark 15 for rough adjustment is made in consideration of various manufacturing conditions so as not to overlap the electrode 12b. Then, trim with a predetermined length.

Next, as shown in FIG.
Coarse adjustment extending in the same direction as the primary trimming trace 14 for coarse adjustment starting from the end of the secondary trimming trace 15 for coarse adjustment until the resistance value reaches a predetermined value while measuring the resistance value between a and 12b. Forming a third trimming mark 16 for the first
Is provided. The tertiary trimming trace 16 for coarse adjustment has substantially the same length as the primary trimming trace 14 for coarse adjustment so as to extend to the outside of the resistor 13.

The resistance value after the formation of the first trimming mark 14a is set lower than the target resistance value. And
A second trimming mark 17a is formed to finally reach a target resistance value. Although the secondary trimming trace 15 for coarse adjustment may be kept (not provided with the tertiary trimming trace) depending on the resistance value, the distance between the terminal position of the secondary trimming trace 15 and the electrode 12b tends to vary.

Next, as shown in FIG.
The resistance of the resistor 13 near the electrode 12b is placed on the side opposite to the side on which the first trimming mark 14a is formed on the resistor 13 until the predetermined resistance is reached while measuring the resistance between the electrodes a and 12b. A primary trimming trace 17 for fine adjustment extending from the outside in a direction parallel to the electrode 12b is formed. The distance between the electrode 12b and the primary trimming trace 17 for fine adjustment is substantially the same as the distance between the electrode 12a and the primary trimming trace 14 for coarse adjustment. Also, the length of the primary trimming trace 17 for fine adjustment is
By setting the equipment, the total width of the resistor 13 is set not to exceed one-third, and the length is set to be substantially the same as the length of the primary trimming trace 14 for coarse adjustment.

As described above, the trimming marks 14a, 17a
Are formed on both sides of the resistor. Therefore, even if the lengths of the primary trimming traces 14 and 17 are shortened to one third or less of the entire width of the resistor 13, respectively, the resistance value after the resistor 13 is formed. Can trim about half the target resistance value to the target resistance value. Therefore, the surge withstand characteristics can be improved without affecting the yield.

Next, as shown in FIG.
The secondary trimming traces 18 for fine adjustment extending in the direction of the electrode 12a starting from the end of the primary trimming traces 17 for fine adjustment until the resistance value reaches a predetermined resistance value while measuring the resistance value between the a and 12b. Form.

Finally, as shown in FIG.
While measuring the resistance value between 2a and 12b, until the target resistance value is reached, the fine trimming trace 18 extending in the same direction as the fine adjustment secondary trimming trace 17 is started from the end of the secondary trimming trace 18 for fine adjustment. A third trimming mark 19 for adjustment is formed, and a second trimming mark 17a is provided. After the formation of the tertiary trimming mark 19 for fine adjustment, the electrodes 12a and 12b
The resistance value between them becomes the target resistance value. Further, the tertiary trimming trace 19 for fine adjustment is made to remain in the resistor 13.

The operation of the resistor constructed and manufactured as described above according to the first embodiment of the present invention will be described below.

FIG. 3 is a diagram showing a current flow when a current flows through the resistor according to the first embodiment of the present invention.
The arrows in the figure indicate the direction of the current. The more concentrated the lines indicating the current, the more the current is concentrated.

FIG. 11 is a diagram showing a current flow when a current flows through another conventional resistor provided with a third trimming mark.

As is clear from FIGS. 3, 10 and 11, the current is hindered by the trimming traces, so that current concentration occurs near both ends (start and / or end) of the secondary trimming traces. The resistor according to the first embodiment of the present invention shown in FIG. 10 and FIG. 11 has a second trimming as compared with the conventional resistor shown in FIGS. 10 and 11 in which only one trimming mark is formed on only one side of the resistor. It can be seen that current concentration at the start and / or end of the traces 15, 18 is suppressed.

That is, if at least the distance between the primary trimming trace 14 for coarse adjustment and the electrode 12a or the primary trimming trace 16 for fine adjustment and the electrode 12b is reduced, the end or start end of the secondary trimming traces 15 and 18 is obtained. Can prevent current concentration.

Table 1 shows the shape of the trimming trace and the maximum value of the current density when calculated using the finite element method under the condition that the shape and initial resistance of the resistor and the target resistance are the same. FIG. 9 is a diagram showing a result of comparing the relationships of FIG.

[0069]

[Table 1]

As the shape of the trimming mark, one trimming mark is formed only on one side of the resistor and no tertiary trimming mark (corresponding to FIG. 10), and one trimming mark is formed on one side of the resistor. Only the tertiary trimming traces are formed (corresponding to FIG. 11), two trimming traces are formed on both sides of the resistor, no tertiary trimming traces are formed, and two trimming traces are formed on both sides of the resistor. The comparison was made under the four conditions of the third trimming trace (corresponding to FIG. 1). The result is calculated assuming that the maximum current density in the case where there is one trimming trace and is formed only on one side of the resistor and there is no tertiary trimming trace (corresponding to FIG. 10) is 1, and the smaller the value, the more the current concentration Is suppressed.

As is clear from Table 1, when there are tertiary trimming marks formed on both sides of the two resistors (corresponding to FIG. 1), the current concentration can be suppressed most.
It can be seen that the surge resistance is improved.

The distance between the secondary trimming marks 15 and 18 and the start and end of the electrodes 12a and 12b (1 for coarse adjustment)
Distance between the end of the next trimming trace 14 and the electrode 12a near the primary trimming trace 14 for coarse adjustment, the end of the primary trimming trace 17 for fine adjustment, and the primary trimming trace 1 for fine adjustment
7, the distance between the end of the secondary trimming mark 15 for coarse adjustment and the electrode 12b near the secondary trimming mark 15 for coarse adjustment, the distance between the electrode 12b near the secondary trimming mark 15 for coarse adjustment, and the secondary trimming mark 18 for fine adjustment. The distance between the terminal and the electrode 12a near the secondary trimming trace 18 for fine adjustment) is the secondary trimming trace 1 respectively.
Since the length of each of the secondary trimming marks 15 and 18 and the start and end of each of the electrodes 12a and 12b can be made shorter than in the related art, the current concentration can be further reduced. And the surge resistance of the resistor can be further improved.

Further, since the length of the primary trimming traces 14 and 17 is less than one third of the entire width of the resistor 11, the length of the primary trimming traces 14 and 17 can be made shorter than before. As a result, the current concentration can be further suppressed, the surge resistance of the resistor can be further improved, and the resistor can be manufactured in the same resistance value range as after the resistor is formed, which is excellent in cost performance.

Here, in the case where two trimming marks are formed on both sides of the resistor and there are tertiary trimming marks (corresponding to FIG. 1), (Table 2) shows the secondary trimming marks and the starting end of the electrode and The ratio of the distance from the end to the length of the secondary trimming mark and the ratio of the length of the primary trimming mark to the total width of the resistor are shown in Table 3. Is now open)
FIG. 4 is a diagram showing the number of occurrences.

In the experiment, the shape of the resistor was 2.5 mm × 2.2 mm.
A rectangular wave surge of 100 W and 10 msec was applied to each of the rectangular shapes.

[0076]

[Table 2]

[0077]

[Table 3]

As is clear from (Table 2) and (Table 3),
When the distance between the secondary trimming trace and the beginning and end of the electrode is less than half the length of the secondary trimming trace, the length of the primary trimming trace is less than one-third of the total width of the resistor. It turns out that it is excellent in the surge property.

In the above-described resistor according to the first embodiment of the present invention, when the initial resistance value and the target resistance value are the same,
By forming the trimming traces on both sides of 1, the length of the primary trimming traces 14 and 17 is shorter than in the case where only one trimming trace is formed on one side of the resistor, so that the secondary trimming is performed. The current concentration at the start and / or end of the traces 15 and 18 can be suppressed, whereby the effect of improving the surge resistance characteristics of the resistor can be obtained.

It is needless to say that this effect can be obtained without providing a third trimming mark.

Even if the secondary trimming traces 15 and 18 are not provided, as long as only two trimming traces are formed on the side of the resistor, if the initial resistance value and the target resistance value are the same, the resistor may be replaced by two.
Since the length of the trimming trace is shorter than the case where only one trimming trace is formed by forming one trimming trace, it is possible to suppress the current concentration at the end of the trimming trace, whereby the resistor The surge withstand characteristic of is improved.

Further, if a first trimming mark is provided on one of the opposing sides of the resistor and a second trimming mark is formed on the other side, the resistance may be reduced when the initial resistance value and the target resistance value are the same. By forming trimming traces on both sides of the body, compared to the case where trimming traces are formed only on one side of the resistor as described above, the current flowing at normal times can be more hindered by the trimming traces. Can be further reduced, thereby further suppressing the current concentration at the end of the trimming mark,
The surge resistance of the resistor is further improved.

Here, when the initial resistance value and the target resistance value are the same, those which form trimming marks on both sides of the resistor are as follows.
Since the number of primary trimming traces is doubled for a single trimming trace formed only on one side of the resistor, the length of the primary trimming trace is reduced to about half.

(Embodiment 2) An embodiment of the present invention will be described below with reference to the drawings.

FIG. 4 is a top view of the resistor according to the second embodiment of the present invention.

Reference numeral 31 denotes a rectangular insulating substrate made of alumina. Reference numerals 32a and 32b are silver electrodes provided at opposite ends of the upper surface of the insulating substrate 31. 33 is provided on a part of the upper surface of the insulating substrate 31 and the electrodes 32a and 32b so as to electrically connect the electrodes 32a and 32b and to allow a current to flow between the electrodes 32a and 32b.
It is a rectangular resistor made of a ruthenium oxide-based thick film material. Reference numeral 34a denotes a first trimming mark for coarsely adjusting the resistance value provided by trimming, and includes a first trimming mark 34 for coarse adjustment and a second trimming mark 35 for coarse adjustment. Primary trimming mark 34 for coarse adjustment
Is formed on one side of the resistor 33, is disposed near one electrode 32a, and extends in a direction parallel to the electrode 32a. The distance between the primary trimming mark 34 for rough adjustment and the electrode 32a is made as short as possible. The secondary trimming mark 35 for coarse adjustment extends in the current direction toward the other electrode 32b starting from the end of the primary trimming mark 34 for coarse adjustment.

Reference numeral 36a denotes a second trimming mark for fine adjustment of the resistance value provided by trimming, which comprises a first trimming mark 36 for fine adjustment and a second trimming mark 37 for fine adjustment. The primary trimming trace 36 for fine adjustment is the primary trimming trace 3 for coarse adjustment of the resistor 33.
4 is formed on the side where the electrode 4 is provided, and the other electrode 32b
, And extends in a direction parallel to the electrode 32b. In addition, the primary trimming trace 36 for fine adjustment is shorter than the primary trimming trace 34 for coarse adjustment, and the distance between the primary trimming trace 36 for fine adjustment and the electrode 32b is as short as possible. ing.

Further, the length of the primary trimming traces 34 and 36 is shorter than the length of the primary trimming trace when there is one trimming trace.

That is, when the initial resistance value and the target resistance value are the same, it is necessary to set the target resistance value by one primary trimming trace when there is one trimming trace, but when the number of trimming traces is two, two primary trimming traces are required. This is because the target resistance value may be set at the next trimming mark.

Further, a secondary trimming mark 37 for fine adjustment is provided.
Extends from the end of the fine adjustment primary trimming trace 36 in the current direction toward the electrode 32a.

Therefore, the first trimming mark 34a and the second trimming mark 34a
The trimming trace 36a is formed such that the directions from the start end to the end of the respective secondary trimming traces 35 and 37 are opposite to each other.

With this configuration, the distance between the primary trimming mark 34 for coarse adjustment and the electrode 32a and the distance between the primary trimming mark 36 for fine adjustment and the electrode 32b can be easily kept small.

This is because the primary trimming may be started after the distance to the resistor is mechanically adjusted, and thus the formation start position of the primary trimming trace can be accurately determined.

A method of manufacturing the second embodiment of the present invention configured as described above will be described below.

FIG. 5 is a process chart showing a method of manufacturing a resistor according to the second embodiment of the present invention.

First, as shown in FIG. 5A, a conductive paste is screen-printed on both ends of the upper surface of the insulating substrate 31, and the electrodes 32a and 32b are formed by firing.

Next, as shown in FIG.
A resistor paste is screen-printed on a part of the upper surface of the insulating substrate 31 and the electrodes 32a and 32b so that the resistor 33a is electrically connected to the resistor 32b.
To form At this time, the resistance value between the electrodes 32a and 32b before the trimming marks 34a and 36a are formed (initial resistance value)
Can be increased by trimming with a laser, which will be described later, but it is very difficult to reduce the resistance, so that the resistance is set to be lower than a target resistance value in advance. However, the lower the initial resistance value before the trimming, the longer the length of the trimming traces 34a and 36a needs to be provided, so that the surge resistance is deteriorated. Therefore, those whose ratio to the target value is too low, usually less than half, are removed.

Next, as shown in FIG.
The laser is scanned from the outside of the resistor 33 in the vicinity of the electrode 32a in a direction parallel to the electrode 32a until the predetermined resistance is reached while measuring the resistance between the resistors 33a and 32b.
Then, a primary trimming mark 34 for coarse adjustment is formed. Electrode 3
As the distance between 2a and the coarse adjustment primary trimming mark 34 is shorter, the current concentration near the end of the coarse adjustment primary trimming mark 34 can be suppressed, that is, the surge resistance of the resistor 33 is improved. In consideration of manufacturing conditions (accuracy of starting position of trimming, formation accuracy of resistors 33 and electrodes 32a and 32b, etc.), coarse adjustment is performed so that 32a and primary trimming mark 34 for coarse adjustment do not overlap. The formation start position of the primary trimming mark 34 is set.

Next, as shown in FIG.
The secondary trimming traces 35 for coarse adjustment extending in the direction of the electrode 32b starting from the end of the primary trimming traces 34 for coarse adjustment until the predetermined resistance value is reached while measuring the resistance value between the a and 32b. Formed, and a first trimming mark 34a is provided.

Next, as shown in FIG.
While measuring the resistance value between the electrodes 32a and 32b, the electrode 32b is placed from the outside of the resistor 33 near the electrode 32b on the side where the primary trimming mark 34 for coarse adjustment is provided until the predetermined resistance value is reached.
Primary trimming trace 36 for fine adjustment extending in a direction parallel to
To form At this time, the primary trimming marks 3 for fine adjustment
6 is shorter than the primary trimming trace 34 for coarse adjustment.

Finally, as shown in FIG.
While measuring the resistance value between 2a and 32b, until the target resistance value is reached, the fine trimming 1 extends in the direction of the electrode 32a starting from the end of the fine trimming trace 37 as a starting end.
A next trimming mark 37 is formed, and a second trimming mark 36 is formed.
a is provided. After forming the primary trimming trace 37 for fine adjustment, the resistance value between the electrodes 32a and 32b becomes the target resistance value. Also, the first trimming mark 34a and the second trimming mark 34a
The trimming trace 36a is formed such that the directions from the start end to the end of the respective secondary trimming traces 35 and 37 are opposite to each other.

At this time, the primary trimming marks 3 for rough adjustment
4 is longer than the primary trimming trace 36 for fine adjustment,
In the place where the secondary trimming trace 37 for fine adjustment is formed, the amount of current flowing is reduced by the primary trimming trace 34 for coarse adjustment, thereby suppressing the rate of increase of the resistance value in the second trimming trace 36a. And a highly accurate resistor can be easily obtained.

The operation of the resistor constructed and manufactured as described above according to the second embodiment of the present invention will be described below.

FIG. 6 is a diagram showing a current flow when a current flows through the resistor according to the second embodiment of the present invention.

As is clear from FIG. 6, the first trimming mark 34a prevents the current from flowing closer to the side of the resistor 33 than the primary trimming mark 34 for coarse adjustment, and thus the second trimming mark 34a is used. It can be seen that the current flowing through the portion where the trimming trace 36a is formed is reduced.

It is also possible to provide a tertiary trimming trace extending in the same direction as the electrodes 32a and 32b from the end of the secondary trimming trace 36 and / or 38.

Further, trimming marks may be provided on the side opposite to the side of the resistor 33 provided with the primary trimming marks 34 and 36. For example, as shown in FIG. A trimming mark 38 in the shape of a letter is provided, or a trimming mark 34 provided on one side as shown in FIG.
The trimming marks 39 and 40 may be provided as in the case of a and 36a.

In the above-described resistor according to the second embodiment of the present invention, the first trimming trace 34a and the second trimming trace 36a are directed in opposite directions from the beginning to the end of the secondary trimming traces 35 and 37, respectively. The electrodes 32a, 32b and the primary trimming marks 34, 3
6 can be easily reduced, so that secondary trimming marks 35 and 3 where current concentration occurs can be achieved.
Variations in the distance between the start and end of the electrode 7 and the electrodes 32a, 32b are suppressed, so that an effect is obtained that a resistor with less variation in surge resistance can be easily obtained.

That is, the primary trimming may be started after mechanically adjusting the distance from the resistor, so that the formation start position of the primary trimming traces 34 and 36 can be determined with high accuracy. , 32b and the primary trimming traces 34, 36 can be easily made substantially the same.

The resistors according to the first and second embodiments of the present invention have a distance between the primary trimming trace and the electrode, a length of the primary trimming trace, and a distance between the starting end and the end of the secondary trimming trace and the electrode. As far as possible, the surge resistance can be improved most.

The distance between the primary trimming trace and the electrode must be the shortest distance that can be mechanically adjusted.

As can be seen from FIGS. 3 and 6, current concentration usually occurs near both ends (start and end) of the secondary trimming trace, but if the distance between the primary trimming trace and the electrode is very short, Since the current flowing from the electrode to the end of the primary trimming trace (the start and end of the secondary trimming trace) becomes extremely small, current concentration can be reliably suppressed.

The length of the primary trimming trace and the distance between the secondary trimming trace and the electrode must be formed so as to be the shortest when correcting the initial resistance value to the target resistance value by trimming. However, it is necessary to give priority to shortening the length of the primary trimming trace that most affects the degree of current concentration.

[0114]

As described above, the resistor according to the present invention is formed on an insulating substrate, is electrically connected between electrodes facing each other, and has a rectangular shape in which a current flows between the electrodes. According to this configuration, when the initial resistance value and the target resistance value are the same, two trimming marks are formed on the resistor to form a trimming mark by forming two trimming marks on the resistor. Since the length of the trimming trace is shorter than the case where only one is formed, the current concentration at the end of the trimming trace can be suppressed.
An advantageous effect that the surge resistance characteristic of the resistor is improved can be obtained.

[Brief description of the drawings]

FIG. 1 is a top view of a resistor according to a first embodiment of the present invention.

FIGS. 2A to 2H are process diagrams showing a method of manufacturing the resistor.

FIG. 3 is a diagram showing a current flow of the resistor.

FIG. 4 is a top view of the resistor according to the second embodiment of the present invention.

FIGS. 5A to 5H are process diagrams showing a method of manufacturing the resistor.

FIG. 6 is a view showing a current flow in the resistor.

7A and 7B are top views showing another example of the resistor.

FIG. 8 is a top view of a conventional resistor.

FIG. 9 is a process chart showing a method for manufacturing the resistor.

FIG. 10 is a view showing a current flow of the resistor.

FIG. 11 is a view showing a current flow of another example of the resistor.

[Explanation of symbols]

 11, 31 Insulating substrate 12a, 12b, 32a, 32b Electrode 13, 33 Resistor 14a, 34a First trimming mark 14, 34 Primary trimming mark for coarse adjustment 15, 35 Secondary trimming mark for coarse adjustment 16 Coarse Tertiary trimming marks 17a, 36a for adjustment Second trimming marks 17, 36 Primary trimming marks for fine adjustment 18, 37 Secondary trimming marks for fine adjustment 19 Tertiary trimming marks for fine adjustment

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[Procedure amendment]

[Submission date] February 10, 2000 (2000.2.1
0)

[Procedure amendment 1]

[Document name to be amended] Statement

[Correction target item name] Claim 12

[Correction method] Change

[Correction contents]

[Procedure amendment 2]

[Document name to be amended] Statement

[Correction target item name] 0031

[Correction method] Change

[Correction contents]

According to a twelfth aspect of the present invention, the first aspect
The first trimming mark of the trimming mark of the second is the second trimming mark
According to this configuration, the first trimming trace is longer than the first trimming trace.
Of the primary crop marks than the second trimming marks are formed resistor for impeded the current from flowing into the closer to the side, the current flowing to the area where the secondary trimming remains of the second trimming marks the amount is reduced, thereby, the second
Has an effect that the rate of increase in the resistance value during the trimming of the trimming trace can be suppressed, and a highly accurate resistor can be easily obtained.

Claims (12)

[Claims] 1. A rectangular resistor which is formed on an insulating substrate and is electrically connected between electrodes facing each other and in which a current flows between both electrodes, and two rectangular resistors formed on the sides of the resistor. Resistor with trimming marks. 2. A rectangular resistor formed on an insulating substrate and electrically connected between opposing electrodes and having a current flowing between the electrodes, and formed on one of the opposing sides of the resistor. A first trimming mark formed on the other side and a second trimming mark formed on the other side. 3. A rectangular resistor formed on an insulating substrate and electrically connected between opposing electrodes and having a current flowing between the electrodes, and formed on one of the opposing sides of the resistor. And a second trimming mark formed on the other, wherein the first trimming mark and the second trimming mark are located in the vicinity of one electrode side and Primary trimming trace extending in parallel to the first and second electrodes, and secondary trimming starting from the end of the primary trimming trace and extending in the current direction from the starting end toward the other electrode and having an end near the other electrode. A resistor that contains a trace. 4. A rectangular resistor formed on an insulating substrate and electrically connected between opposing electrodes and having a current flowing between the electrodes, and formed on one of the opposing sides of the resistor. And a second trimming mark formed on the other, and at least the second trimming mark is located near one electrode side and extends in parallel with the one electrode. A primary trimming trace and an end of the primary trimming trace as a start end, extending in the current direction from the start end toward the other electrode side, and having an end near the other electrode side 2
A second trimming mark, the length of the first trimming mark being shorter than the length of the first trimming mark when there is one trimming mark, and
A distance between an end of the primary trimming trace and an electrode near the primary trimming trace, the distance between the end of the primary trimming trace and an electrode near the primary trimming trace.
A resistor in which the distance between the end of the secondary trimming trace and the electrode near the secondary trimming trace is less than half the length of the secondary trimming trace, respectively. 5. A rectangular resistor which is formed on an insulating substrate, is electrically connected between electrodes facing each other, and flows a current between the electrodes, and is formed on one of opposed sides of the resistor. And a second trimming mark formed on the other, and at least the second trimming mark is located near one electrode side and extends in parallel with the one electrode. A primary trimming trace and an end of the primary trimming trace as a start end, extending in the current direction from the start end toward the other electrode side, and having an end near the other electrode side 2
A second trimming mark, the length of the first trimming mark being shorter than the length of the first trimming mark when there is one trimming mark, and
A resistor in which the length of the primary trimming trace is equal to or less than one-third of the entire width of the resistor so as to suppress the current from flowing around at the beginning and end of the next trimming trace. 6. A tertiary trimming trace extending parallel to the other electrode from the end of the secondary trimming trace.
6. The resistor according to any one of 5. 7. The resistor according to claim 6, wherein an end of the third trimming trace is kept within the resistor. 8. The resistor according to claim 6, wherein the end of the third trimming trace extends outside the resistor. 9. The secondary trimming trace according to claim 3, wherein the first trimming trace and the second trimming trace are formed such that the directions from the start end to the end of the secondary trimming trace are opposite to each other. Resistor. 10. The resistor according to claim 9, wherein the first trimming mark and the second trimming mark are formed so as to be substantially point-symmetric with respect to the center of the resistor. 11. A resistor formed on an insulating substrate, electrically connected between opposing electrodes, and having a current flowing between the electrodes, and formed on only one of the opposing sides of the resistor. A first trimming mark and a second trimming mark,
The first trimming trace and the second trimming trace are:
A primary trimming mark located in the vicinity of one of the electrodes and extending in parallel with the one electrode; and an end terminating at the end of the primary trimming mark and extending in a current direction from the starting end toward the other electrode. A second trimming trace, wherein the first trimming trace and the second trimming trace are moved from the beginning of the secondary trimming trace so as to suppress current wraparound at the beginning and end of the secondary trimming trace. Resistors formed so that the directions toward the ends are opposite. 12. The resistor according to claim 11, wherein the primary trimming trace for coarse adjustment is longer than the primary trimming trace for fine adjustment.