JP2940079B2 - Trimming method of membrane resistor - Google Patents
Trimming method of membrane resistorInfo
- Publication number
- JP2940079B2 JP2940079B2 JP2160164A JP16016490A JP2940079B2 JP 2940079 B2 JP2940079 B2 JP 2940079B2 JP 2160164 A JP2160164 A JP 2160164A JP 16016490 A JP16016490 A JP 16016490A JP 2940079 B2 JP2940079 B2 JP 2940079B2
- Authority
- JP
- Japan
- Prior art keywords
- trimming
- film resistor
- value
- hook
- shaped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Non-Adjustable Resistors (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は膜抵抗体のトリミング方法に関する。The present invention relates to a method of trimming a film resistor.
従来、厚膜抵抗体において、高精度のトリミングを行
おうとした場合、通常、ダブルカットや第２図に示すよ
うなバーニア付Ｌカットが用いられていた。Conventionally, when performing high-precision trimming of a thick-film resistor, a double cut or an L-cut with a vernier as shown in FIG. 2 is usually used.
最近、厚膜抵抗体においても、薄膜抵抗体を同程度の
高精度、たとえば３σ0.1を要求されるようになって
きた。上述した従来の方法では、第２図に示すように、
膜抵抗体２のＬ字のカット５の終端部で発生するマイク
ロクラック６を抑えることができず、３σ0.1を実現
するのが非常に困難であった。Recently, a thick film resistor has been required to have the same high precision as a thin film resistor, for example, 3σ0.1. In the conventional method described above, as shown in FIG.
Microcracks 6 generated at the end of the L-shaped cut 5 of the film resistor 2 could not be suppressed, and it was very difficult to achieve 3σ0.1.
本発明の膜抵抗体のトリミング方法の特徴とするとこ
ろは、１回目のトリミングをフック状またはＵ字状に行
い、２回目のトリミングをそのフック状またはＵ字状の
トリミング溝の終端部の延長上の膜抵抗体端部から切出
し方向に短くＬ字状に行った後、フック状またはＵ字状
のトリミング溝の外側の位置から直線状にトリミングを
行い、膜抵抗体の抵抗値を所望の値に調整することにあ
る。A feature of the method for trimming a film resistor according to the present invention is that the first trimming is performed in a hook shape or a U-shape, and the second trimming is performed by extending the terminal portion of the hook-shaped or U-shaped trimming groove. After making a short L-shape in the cutting direction from the upper end of the film resistor, trimming is performed linearly from a position outside the hook-shaped or U-shaped trimming groove, and the resistance value of the film resistor is set to a desired value. To adjust the value.
本発明では、Ｌ字形の代りにフック形あるいはＵ字状
のトリミングを行うことにより、トリミング終端部が電
流経路からはずれるために、仮にマイクロクラックが発
生してもドリフトに寄与しない。なお、１個のＬカット
よりフックカットの方が精度が悪いため、フックカット
につづけてＬカットを行うことにより精度をあげてい
る。後のＬカットでは、電流経路からはずれているた
め、終端部のマイクロクラックの影響はきわめて小さ
い。In the present invention, by performing the hook-shaped or U-shaped trimming instead of the L-shape, the trimming end portion deviates from the current path, so that even if a micro crack occurs, it does not contribute to the drift. Since the accuracy of hook cut is lower than that of one L cut, the accuracy is improved by performing L cut following hook cut. In the subsequent L cut, the influence of the micro crack at the terminal end portion is extremely small because it is deviated from the current path.
次に本発明について図面を参照して説明する。第１図
は本発明の一実施例のトリミングパターン図である。第
１図において、１は電極、２は膜抵抗体である。3,4,5
はそれぞれ直線状、フック状、Ｌ字状のトリミング溝を
示す。Next, the present invention will be described with reference to the drawings. FIG. 1 is a diagram showing a trimming pattern according to an embodiment of the present invention. In FIG. 1, 1 is an electrode, and 2 is a film resistor. 3,4,5
Indicates a straight, hook, or L-shaped trimming groove, respectively.
トリミングの手順は次の通りである。まず、抵抗体２
のほぼ1/4付近ｂからフック状にトリミングする。続い
て、フック状のトリミングの終端部の位置ｃからＬ字状
にトリミングする。次に、フック状のトリミングの外側
（0.2mm程度離す）ａから直線状にトリミングする。ト
リミングに際し、（l2−l4）〉l3、かつ、l1〈l2、の条
件を満すことが前提となる。l1,l2,l3,l4はトリミング
長を示す。The trimming procedure is as follows. First, resistor 2
Is trimmed into a hook shape from approximately 1/4 b. Subsequently, trimming is performed in an L-shape from the position c of the end of the hook-shaped trimming. Next, trimming is performed linearly from the outside a (approximately 0.2 mm apart) a of the hook-shaped trimming. When trimming, it is assumed that the conditions of (l 2 −l 4 )> l 3 and l 1 <l 2 are satisfied. l 1 , l 2 , l 3 and l 4 indicate trimming lengths.
フック状のトリミングの場合、終端部が電流経路から
はずれているために、マイクロクラックの影響を極めて
小さくできる。又２回目のＬ字状のトリミングをフック
状のトリミングより小さくすることにより、Ｌ字状のト
リミングの終端部のマイクロクラックの影響を小さく抑
えることができると同時に２回目のトリミングの精度を
上げることができる。さらに最後の直線状のトリミング
をフック状のトリミングより小さく行うことにより最終
微調をより精度よくできる。In the case of the hook-shaped trimming, the influence of the microcracks can be extremely reduced because the terminal portion is off the current path. In addition, by making the second L-shaped trimming smaller than the hook-shaped trimming, it is possible to reduce the influence of microcracks at the end of the L-shaped trimming and to improve the accuracy of the second trimming. Can be. Further, by performing the final linear trimming smaller than the hook-shaped trimming, the final fine adjustment can be performed more accurately.
第３図に本発明の第２の実施例を示す。フック状のト
リミングをＵ字状のトリミング７に替えることにより、
Ｌターン時のホットスポット領域を小さくでき、よりド
リフトの小さいトリミングが可能となる。FIG. 3 shows a second embodiment of the present invention. By replacing the hook-shaped trimming with the U-shaped trimming 7,
The hot spot area during the L-turn can be reduced, and trimming with less drift can be performed.
以上説明したように本発明により、トリミングの終端
部に発生するマイクロクラックの影響を小さく抑えるこ
とができ、高精度のトリミングを実現できる効果があ
る。トリミング条件を合することにより厚膜抵抗で３σ
0.1の調整が可能となる。As described above, according to the present invention, the effect of micro cracks generated at the end of trimming can be reduced, and there is an effect that highly accurate trimming can be realized. 3σ in thick film resistance by matching the trimming conditions
Adjustment of 0.1 becomes possible.
第１図は本発明の膜抵抗体のトリミング方法を示す膜抵
抗体パターン図、第２図は従来のトリミング方法を示す
図、第３図は本発明の第２の実施例を示す図である。 １……電極、２……膜抵抗体、３……直線状のトリミン
グ溝、４……フック状のトリミング溝、５……Ｌ字状の
トリミング溝、７……Ｕ字状のトリミング溝。FIG. 1 is a diagram showing a film resistor pattern showing a method of trimming a film resistor according to the present invention, FIG. 2 is a diagram showing a conventional trimming method, and FIG. 3 is a diagram showing a second embodiment of the present invention. . Reference numeral 1 denotes an electrode, 2 denotes a film resistor, 3 denotes a linear trimming groove, 4 denotes a hook-shaped trimming groove, 5 denotes an L-shaped trimming groove, and 7 denotes a U-shaped trimming groove.
Claims (2)
互いに対向した２辺部にそれぞれ電極が形成される膜抵
抗体に切り込みを形成して、前記膜抵抗体の抵抗値を所
望の値に調整するトリミング方法において、前記膜抵抗
体の電極が形成されない一辺（第１の辺）の任意の位置
から、前記第１の辺に対向する他辺（第２の辺）に向か
ってＬ字状にトリミングし、さらに、このＬ字の終端よ
り継続して前記第１の辺に向かって短く直線状にトリミ
ングしてフック状の１回目のトリミングを行い、前記１
回目のフック状トリミングの短い直線状終端部の延長線
と前記第１の辺との交点から前記第２の辺に向かって、
第１の辺から第２の辺に向かう直線部分が前記１回目の
フック状トリミングの前記第１の辺から第２の辺に向か
う直線よりも短いＬ字状に２回目のトリミングを行った
後、前記第１の辺上で、且つ、前記１回目のトリミング
部に対して前記２回目のＬ字状トリミングと反対側の任
意の位置から前記第２の辺に向かって、前記１回目のフ
ック状トリミングの前記第１の辺から第２の辺に向かう
直線よりも短い直鎖状のトリミングを行い、前記膜抵抗
体の抵抗値を所望の値に調整することを特徴とする膜抵
抗体のトリミング方法。1. A notch is formed in a film resistor formed on an insulating substrate and having a rectangular planar shape and electrodes formed on two sides facing each other, and the resistance of the film resistor is adjusted to a desired value. In the trimming method for adjusting the value to a value, L may be changed from an arbitrary position on one side (first side) where the electrode of the film resistor is not formed to another side (second side) opposite to the first side. The first trimming in the form of a hook is performed by trimming in a short straight line toward the first side continuously from the end of the L-shape.
From the intersection of the first side and the extension of the short straight terminal portion of the third hook-shaped trimming toward the second side,
After performing the second trimming in an L-shape where a straight line portion from the first side to the second side is shorter than the straight line from the first side to the second side in the first hook-shaped trimming. The first hook from any position on the first side and opposite to the second L-shaped trimming with respect to the first trimming portion toward the second side; A linear trimming shorter than a straight line from the first side to the second side of the linear trimming, and adjusting a resistance value of the film resistor to a desired value. Trimming method.
互いに対向した２辺部にそれぞれ電極が形成される膜抵
抗体に切り込みを形成して、前記膜抵抗体の抵抗値を所
望の値に調整するトリミング方法において、前記膜抵抗
体の電極が形成されない一辺（第１の辺）の任意の位置
からこの第１の辺に対向する他辺（第２の辺）に向かっ
て、Ｕの字の２つの直線部のうち一方の直線部が他方の
直線部よりも短い形状にトリミングして１回目のトリミ
ングを行い、前記１回目のトリミング部の終端部である
短い直線部の延長線と前記第１の辺との交点から前記第
２の辺に向かって、第１の辺から第２の辺に向かう直線
部分が前記１回目のトリミングの前記第１の辺から第２
の辺に向かう直線よりも短いＬ字状に２回目のトリミン
グを行った後、前記第１の辺上で、且つ、前記１回目の
トリミング部に対して前記２回目のＬ字状トリミングと
反対側の任意の位置から前記第２の辺に向かって、前記
１回目のトリミングの前記第１の辺から第２の辺に向か
う直線よりも短い直線状のトリミングを行い、前記膜抵
抗体の抵抗値を所望の値に調整することを特徴とする膜
抵抗体のトリミング方法。2. A notch is formed in a film resistor formed on an insulating substrate and having electrodes formed on two opposing sides each having a rectangular shape in plan view, and the resistance of the film resistor is adjusted to a desired value. In the trimming method for adjusting the value to a value, U is set from an arbitrary position on one side (first side) where the electrode of the film resistor is not formed toward another side (second side) facing the first side. The first straight portion is trimmed into a shape in which one straight portion of the two straight portions is shorter than the other straight portion, the first trimming is performed, and an extension of the short straight portion which is the terminal portion of the first trimming portion. From the intersection of the first side to the second side, a straight line portion from the first side to the second side is formed from the first side of the first trimming to the second side.
After performing the second trimming in an L-shape shorter than the straight line toward the side, the first trimming portion is opposite to the first L-shaped trimming with respect to the first trimming portion. From the arbitrary position on the side toward the second side, a linear trimming shorter than a straight line from the first side to the second side in the first trimming is performed, and the resistance of the film resistor is reduced. A method for trimming a film resistor, wherein the value is adjusted to a desired value.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2160164A JP2940079B2 (en) | 1990-06-19 | 1990-06-19 | Trimming method of membrane resistor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2160164A JP2940079B2 (en) | 1990-06-19 | 1990-06-19 | Trimming method of membrane resistor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0449602A JPH0449602A (en) | 1992-02-19 |
| JP2940079B2 true JP2940079B2 (en) | 1999-08-25 |
Family
ID=15709246
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2160164A Expired - Lifetime JP2940079B2 (en) | 1990-06-19 | 1990-06-19 | Trimming method of membrane resistor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2940079B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3327311B2 (en) * | 1995-02-21 | 2002-09-24 | 株式会社村田製作所 | How to trim the resistor |
-
1990
- 1990-06-19 JP JP2160164A patent/JP2940079B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0449602A (en) | 1992-02-19 |
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