JPH0335731B2 - - Google Patents
Info
- Publication number
- JPH0335731B2 JPH0335731B2 JP233783A JP233783A JPH0335731B2 JP H0335731 B2 JPH0335731 B2 JP H0335731B2 JP 233783 A JP233783 A JP 233783A JP 233783 A JP233783 A JP 233783A JP H0335731 B2 JPH0335731 B2 JP H0335731B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- substrate
- magnetic
- target
- magnetic recording
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/851—Coating a support with a magnetic layer by sputtering
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP233783A JPS59129944A (ja) | 1983-01-12 | 1983-01-12 | 磁気記録媒体の製造方法及び磁気記録媒体の製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP233783A JPS59129944A (ja) | 1983-01-12 | 1983-01-12 | 磁気記録媒体の製造方法及び磁気記録媒体の製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59129944A JPS59129944A (ja) | 1984-07-26 |
| JPH0335731B2 true JPH0335731B2 (en:Method) | 1991-05-29 |
Family
ID=11526485
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP233783A Granted JPS59129944A (ja) | 1983-01-12 | 1983-01-12 | 磁気記録媒体の製造方法及び磁気記録媒体の製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59129944A (en:Method) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6187223A (ja) * | 1984-10-04 | 1986-05-02 | Tdk Corp | 磁気記録媒体の製造方法 |
| JPS6267729A (ja) * | 1985-09-20 | 1987-03-27 | Sanyo Electric Co Ltd | 垂直磁気記録媒体の製造方法 |
-
1983
- 1983-01-12 JP JP233783A patent/JPS59129944A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59129944A (ja) | 1984-07-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5069770A (en) | Sputtering process employing an enclosed sputtering target | |
| US4740385A (en) | Apparatus for producing coils from films of insulating material, conductively coated in a vacuum | |
| EP0387904B1 (en) | Method of producing thin film | |
| EP0046090B1 (en) | Process fpr producing a magnetic recording medium | |
| EP0035870B1 (en) | Method of producing a magnetic recording medium | |
| EP0035894B1 (en) | Process for producing a magnetic recording medium | |
| JPH0335731B2 (en:Method) | ||
| JPH02280310A (ja) | 電解コンデンサ用電極材料の製造方法 | |
| JPS5836413B2 (ja) | 磁気記録媒体の製造方法およびその製造装置 | |
| JPH0352136B2 (en:Method) | ||
| JPH0320466A (ja) | 薄膜の製造方法 | |
| JPH1136063A (ja) | アーク式蒸発源 | |
| JP2530694B2 (ja) | 光学記録ディスク用反射膜の製造方法 | |
| JPH059849B2 (en:Method) | ||
| JPH03111565A (ja) | 連続式バイアススパツタリング装置 | |
| JPH0121539B2 (en:Method) | ||
| JPS6217174A (ja) | Dcマグネトロン式スパツタ装置による薄膜の製造方法 | |
| JP2970344B2 (ja) | プラズマ装置 | |
| JPS62266731A (ja) | 垂直磁気記録媒体の製造装置 | |
| JPS6237454B2 (en:Method) | ||
| JPH0428867A (ja) | バイアススパッタリング方法および装置 | |
| JPS6046370A (ja) | 対向タ−ゲット式スパッタ装置 | |
| JPH1083585A (ja) | 相変化型光記録膜の製造方法 | |
| JPH0120494B2 (en:Method) | ||
| JPH0680530B2 (ja) | 磁気記録媒体の製造方法 |