JPH0335617B2 - - Google Patents
Info
- Publication number
- JPH0335617B2 JPH0335617B2 JP3961488A JP3961488A JPH0335617B2 JP H0335617 B2 JPH0335617 B2 JP H0335617B2 JP 3961488 A JP3961488 A JP 3961488A JP 3961488 A JP3961488 A JP 3961488A JP H0335617 B2 JPH0335617 B2 JP H0335617B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- light receiving
- photoelectric
- scattered light
- signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001514 detection method Methods 0.000 claims description 32
- 230000003287 optical effect Effects 0.000 claims description 27
- 230000007547 defect Effects 0.000 claims description 17
- 238000007689 inspection Methods 0.000 claims description 17
- 230000008859 change Effects 0.000 claims description 12
- 230000004044 response Effects 0.000 claims description 4
- 239000007787 solid Substances 0.000 claims description 4
- 230000002950 deficient Effects 0.000 claims description 3
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 239000011521 glass Substances 0.000 description 26
- 238000010586 diagram Methods 0.000 description 19
- 239000000126 substance Substances 0.000 description 8
- 238000012545 processing Methods 0.000 description 6
- 230000008901 benefit Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000009467 reduction Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- 230000003321 amplification Effects 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000007257 malfunction Effects 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000009304 pastoral farming Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63039614A JPS63241342A (ja) | 1988-02-24 | 1988-02-24 | 欠陥検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63039614A JPS63241342A (ja) | 1988-02-24 | 1988-02-24 | 欠陥検査装置 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16144181A Division JPS5862544A (ja) | 1981-02-04 | 1981-10-09 | 欠陥検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63241342A JPS63241342A (ja) | 1988-10-06 |
| JPH0335617B2 true JPH0335617B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-05-28 |
Family
ID=12557985
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63039614A Granted JPS63241342A (ja) | 1988-02-24 | 1988-02-24 | 欠陥検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63241342A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63185077A (ja) * | 1987-01-27 | 1988-07-30 | Matsushita Electric Ind Co Ltd | 青色発光ダイオ−ド |
-
1988
- 1988-02-24 JP JP63039614A patent/JPS63241342A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63241342A (ja) | 1988-10-06 |