JPH0334622B2 - - Google Patents
Info
- Publication number
- JPH0334622B2 JPH0334622B2 JP16675383A JP16675383A JPH0334622B2 JP H0334622 B2 JPH0334622 B2 JP H0334622B2 JP 16675383 A JP16675383 A JP 16675383A JP 16675383 A JP16675383 A JP 16675383A JP H0334622 B2 JPH0334622 B2 JP H0334622B2
- Authority
- JP
- Japan
- Prior art keywords
- base material
- substrate
- magnetic
- ionized
- adhesion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 27
- 239000010408 film Substances 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 13
- 229910052751 metal Inorganic materials 0.000 claims description 10
- 239000002184 metal Substances 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 238000000151 deposition Methods 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 6
- 230000008021 deposition Effects 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 10
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 238000010894 electron beam technology Methods 0.000 description 5
- 230000008020 evaporation Effects 0.000 description 5
- 238000001704 evaporation Methods 0.000 description 5
- 150000002500 ions Chemical class 0.000 description 5
- 229910052742 iron Inorganic materials 0.000 description 5
- 238000007733 ion plating Methods 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910001337 iron nitride Inorganic materials 0.000 description 1
- -1 nitrogen ions Chemical class 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Thin Magnetic Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16675383A JPS6059535A (ja) | 1983-09-12 | 1983-09-12 | 磁気記録媒体の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16675383A JPS6059535A (ja) | 1983-09-12 | 1983-09-12 | 磁気記録媒体の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6059535A JPS6059535A (ja) | 1985-04-05 |
| JPH0334622B2 true JPH0334622B2 (enrdf_load_stackoverflow) | 1991-05-23 |
Family
ID=15837095
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16675383A Granted JPS6059535A (ja) | 1983-09-12 | 1983-09-12 | 磁気記録媒体の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6059535A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05106029A (ja) * | 1991-10-15 | 1993-04-27 | Mitsubishi Electric Corp | 薄膜形成装置 |
-
1983
- 1983-09-12 JP JP16675383A patent/JPS6059535A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6059535A (ja) | 1985-04-05 |