JPH0334617B2 - - Google Patents
Info
- Publication number
- JPH0334617B2 JPH0334617B2 JP22578983A JP22578983A JPH0334617B2 JP H0334617 B2 JPH0334617 B2 JP H0334617B2 JP 22578983 A JP22578983 A JP 22578983A JP 22578983 A JP22578983 A JP 22578983A JP H0334617 B2 JPH0334617 B2 JP H0334617B2
- Authority
- JP
- Japan
- Prior art keywords
- ferromagnetic metal
- thin film
- metal thin
- vacuum
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005294 ferromagnetic effect Effects 0.000 claims description 36
- 239000002184 metal Substances 0.000 claims description 36
- 229910052751 metal Inorganic materials 0.000 claims description 36
- 239000010409 thin film Substances 0.000 claims description 28
- 230000005291 magnetic effect Effects 0.000 claims description 13
- 238000004519 manufacturing process Methods 0.000 claims description 11
- 238000011282 treatment Methods 0.000 claims description 11
- 208000028659 discharge Diseases 0.000 claims description 10
- 239000000758 substrate Substances 0.000 claims description 10
- 238000004381 surface treatment Methods 0.000 claims description 10
- 238000005192 partition Methods 0.000 claims description 7
- 239000011241 protective layer Substances 0.000 claims description 7
- 238000007740 vapor deposition Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 description 8
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 4
- 230000008020 evaporation Effects 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 238000007733 ion plating Methods 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 238000007738 vacuum evaporation Methods 0.000 description 3
- 229910017052 cobalt Inorganic materials 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 229920006254 polymer film Polymers 0.000 description 2
- 230000004913 activation Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 235000014113 dietary fatty acids Nutrition 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 229930195729 fatty acid Natural products 0.000 description 1
- 239000000194 fatty acid Substances 0.000 description 1
- 150000004665 fatty acids Chemical class 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Thin Magnetic Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22578983A JPS60119636A (ja) | 1983-11-30 | 1983-11-30 | 磁気記録媒体の製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22578983A JPS60119636A (ja) | 1983-11-30 | 1983-11-30 | 磁気記録媒体の製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60119636A JPS60119636A (ja) | 1985-06-27 |
| JPH0334617B2 true JPH0334617B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-05-23 |
Family
ID=16834799
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22578983A Granted JPS60119636A (ja) | 1983-11-30 | 1983-11-30 | 磁気記録媒体の製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60119636A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62234236A (ja) * | 1986-04-04 | 1987-10-14 | Hitachi Ltd | 磁気記録媒体の製造方法 |
-
1983
- 1983-11-30 JP JP22578983A patent/JPS60119636A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60119636A (ja) | 1985-06-27 |