JPH0334610B2 - - Google Patents

Info

Publication number
JPH0334610B2
JPH0334610B2 JP198482A JP198482A JPH0334610B2 JP H0334610 B2 JPH0334610 B2 JP H0334610B2 JP 198482 A JP198482 A JP 198482A JP 198482 A JP198482 A JP 198482A JP H0334610 B2 JPH0334610 B2 JP H0334610B2
Authority
JP
Japan
Prior art keywords
substrate
temperature
tape
rotating support
medium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP198482A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58121132A (ja
Inventor
Koichi Shinohara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP198482A priority Critical patent/JPS58121132A/ja
Publication of JPS58121132A publication Critical patent/JPS58121132A/ja
Publication of JPH0334610B2 publication Critical patent/JPH0334610B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/85Coating a support with a magnetic layer by vapour deposition
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54Controlling or regulating the coating process
    • C23C14/541Heating or cooling of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)
JP198482A 1982-01-08 1982-01-08 磁気記録媒体の製造方法 Granted JPS58121132A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP198482A JPS58121132A (ja) 1982-01-08 1982-01-08 磁気記録媒体の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP198482A JPS58121132A (ja) 1982-01-08 1982-01-08 磁気記録媒体の製造方法

Publications (2)

Publication Number Publication Date
JPS58121132A JPS58121132A (ja) 1983-07-19
JPH0334610B2 true JPH0334610B2 (enrdf_load_stackoverflow) 1991-05-23

Family

ID=11516760

Family Applications (1)

Application Number Title Priority Date Filing Date
JP198482A Granted JPS58121132A (ja) 1982-01-08 1982-01-08 磁気記録媒体の製造方法

Country Status (1)

Country Link
JP (1) JPS58121132A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS58121132A (ja) 1983-07-19

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