JPH0334364B2 - - Google Patents

Info

Publication number
JPH0334364B2
JPH0334364B2 JP59057870A JP5787084A JPH0334364B2 JP H0334364 B2 JPH0334364 B2 JP H0334364B2 JP 59057870 A JP59057870 A JP 59057870A JP 5787084 A JP5787084 A JP 5787084A JP H0334364 B2 JPH0334364 B2 JP H0334364B2
Authority
JP
Japan
Prior art keywords
sio
mist
dust
liquid
blower
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59057870A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60202711A (ja
Inventor
Kunihiro Sakata
Tadashi Sakamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Kyushu Ltd
Original Assignee
NEC Kyushu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Kyushu Ltd filed Critical NEC Kyushu Ltd
Priority to JP5787084A priority Critical patent/JPS60202711A/ja
Publication of JPS60202711A publication Critical patent/JPS60202711A/ja
Publication of JPH0334364B2 publication Critical patent/JPH0334364B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Separation Of Particles Using Liquids (AREA)
JP5787084A 1984-03-26 1984-03-26 ＳｉＯ↓２粉塵の処理装置 Granted JPS60202711A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5787084A JPS60202711A (ja) 1984-03-26 1984-03-26 ＳｉＯ↓２粉塵の処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5787084A JPS60202711A (ja) 1984-03-26 1984-03-26 ＳｉＯ↓２粉塵の処理装置

Publications (2)

Publication Number Publication Date
JPS60202711A JPS60202711A (ja) 1985-10-14
JPH0334364B2 true JPH0334364B2 (OSRAM) 1991-05-22

Family

ID=13068014

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5787084A Granted JPS60202711A (ja) 1984-03-26 1984-03-26 ＳｉＯ↓２粉塵の処理装置

Country Status (1)

Country Link
JP (1) JPS60202711A (OSRAM)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3595190B2 (ja) * 1999-04-16 2004-12-02 株式会社日立製作所 半導体の製造方法及び半導体製造装置
CN100391581C (zh) * 2005-08-19 2008-06-04 力晶半导体股份有限公司 粉末去除装置与废气处理机

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5237633B2 (OSRAM) * 1972-11-21 1977-09-24
JPS4978264A (OSRAM) * 1972-11-30 1974-07-27

Also Published As

Publication number Publication date
JPS60202711A (ja) 1985-10-14

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