JPH0334218B2 - - Google Patents

Info

Publication number
JPH0334218B2
JPH0334218B2 JP1008875A JP887589A JPH0334218B2 JP H0334218 B2 JPH0334218 B2 JP H0334218B2 JP 1008875 A JP1008875 A JP 1008875A JP 887589 A JP887589 A JP 887589A JP H0334218 B2 JPH0334218 B2 JP H0334218B2
Authority
JP
Japan
Prior art keywords
sample
wafer
guide rail
processing section
guide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1008875A
Other languages
English (en)
Japanese (ja)
Other versions
JPH02188940A (ja
Inventor
Yasuaki Yokoyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SOKUEISHA KK
Original Assignee
SOKUEISHA KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SOKUEISHA KK filed Critical SOKUEISHA KK
Priority to JP1008875A priority Critical patent/JPH02188940A/ja
Publication of JPH02188940A publication Critical patent/JPH02188940A/ja
Publication of JPH0334218B2 publication Critical patent/JPH0334218B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP1008875A 1989-01-17 1989-01-17 試料処理用プリアライメント装置 Granted JPH02188940A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1008875A JPH02188940A (ja) 1989-01-17 1989-01-17 試料処理用プリアライメント装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1008875A JPH02188940A (ja) 1989-01-17 1989-01-17 試料処理用プリアライメント装置

Publications (2)

Publication Number Publication Date
JPH02188940A JPH02188940A (ja) 1990-07-25
JPH0334218B2 true JPH0334218B2 (de) 1991-05-21

Family

ID=11704857

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1008875A Granted JPH02188940A (ja) 1989-01-17 1989-01-17 試料処理用プリアライメント装置

Country Status (1)

Country Link
JP (1) JPH02188940A (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4842748B2 (ja) * 2006-09-22 2011-12-21 オリンパス株式会社 基板搬送システム

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5756025B2 (de) * 1972-05-02 1982-11-27

Also Published As

Publication number Publication date
JPH02188940A (ja) 1990-07-25

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