Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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National Institute of Advanced Industrial Science and Technology AIST
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Agency of Industrial Science and Technology
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Publication date
Application filed by Agency of Industrial Science and TechnologyfiledCriticalAgency of Industrial Science and Technology
Priority to JP5638886ApriorityCriticalpatent/JPS62214183A/ja
Publication of JPS62214183ApublicationCriticalpatent/JPS62214183A/ja
Publication of JPH0333780B2publicationCriticalpatent/JPH0333780B2/ja
Verfahren zur Regenerierung von eisenhaltigen Ätzlösungen zur Verwendung beim Ätzen oder Beizen von Kupfer oder Kupferlegierungen sowie eine Vorrichtung zur Durchführung desselben