JPH0332792Y2 - - Google Patents

Info

Publication number
JPH0332792Y2
JPH0332792Y2 JP1983033464U JP3346483U JPH0332792Y2 JP H0332792 Y2 JPH0332792 Y2 JP H0332792Y2 JP 1983033464 U JP1983033464 U JP 1983033464U JP 3346483 U JP3346483 U JP 3346483U JP H0332792 Y2 JPH0332792 Y2 JP H0332792Y2
Authority
JP
Japan
Prior art keywords
vacuum
valve
vacuum pump
valve seat
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983033464U
Other languages
English (en)
Japanese (ja)
Other versions
JPS59141178U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3346483U priority Critical patent/JPS59141178U/ja
Publication of JPS59141178U publication Critical patent/JPS59141178U/ja
Application granted granted Critical
Publication of JPH0332792Y2 publication Critical patent/JPH0332792Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP3346483U 1983-03-10 1983-03-10 真空破壊弁を内蔵する真空ポンプ Granted JPS59141178U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3346483U JPS59141178U (ja) 1983-03-10 1983-03-10 真空破壊弁を内蔵する真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3346483U JPS59141178U (ja) 1983-03-10 1983-03-10 真空破壊弁を内蔵する真空ポンプ

Publications (2)

Publication Number Publication Date
JPS59141178U JPS59141178U (ja) 1984-09-20
JPH0332792Y2 true JPH0332792Y2 (cs) 1991-07-11

Family

ID=30164255

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3346483U Granted JPS59141178U (ja) 1983-03-10 1983-03-10 真空破壊弁を内蔵する真空ポンプ

Country Status (1)

Country Link
JP (1) JPS59141178U (cs)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5176618A (ja) * 1974-12-13 1976-07-02 Hitachi Ltd Shinkuhonpusoonteigenkiko

Also Published As

Publication number Publication date
JPS59141178U (ja) 1984-09-20

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