JPH0331219B2 - - Google Patents

Info

Publication number
JPH0331219B2
JPH0331219B2 JP57179819A JP17981982A JPH0331219B2 JP H0331219 B2 JPH0331219 B2 JP H0331219B2 JP 57179819 A JP57179819 A JP 57179819A JP 17981982 A JP17981982 A JP 17981982A JP H0331219 B2 JPH0331219 B2 JP H0331219B2
Authority
JP
Japan
Prior art keywords
pattern
board
light
wiring
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57179819A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5970947A (ja
Inventor
Yasuhiko Hara
Koichi Tsukazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP17981982A priority Critical patent/JPS5970947A/ja
Publication of JPS5970947A publication Critical patent/JPS5970947A/ja
Publication of JPH0331219B2 publication Critical patent/JPH0331219B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP17981982A 1982-10-15 1982-10-15 印刷配線基板のパタ−ン検出方法 Granted JPS5970947A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17981982A JPS5970947A (ja) 1982-10-15 1982-10-15 印刷配線基板のパタ−ン検出方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17981982A JPS5970947A (ja) 1982-10-15 1982-10-15 印刷配線基板のパタ−ン検出方法

Publications (2)

Publication Number Publication Date
JPS5970947A JPS5970947A (ja) 1984-04-21
JPH0331219B2 true JPH0331219B2 (enrdf_load_stackoverflow) 1991-05-02

Family

ID=16072440

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17981982A Granted JPS5970947A (ja) 1982-10-15 1982-10-15 印刷配線基板のパタ−ン検出方法

Country Status (1)

Country Link
JP (1) JPS5970947A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103175850A (zh) * 2011-12-21 2013-06-26 北京兆维电子(集团)有限责任公司 宽幅面高速生产线材料表面瑕疵检测方法及系统
CN103175840B (zh) * 2011-12-21 2016-01-20 北京兆维电子(集团)有限责任公司 基于机器视觉的胶印版材表面检测方法及系统
CN103175841B (zh) * 2011-12-21 2015-03-18 北京兆维电子(集团)有限责任公司 基于机器视觉的ctp版表面检测方法及系统

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ZA754657B (en) * 1974-07-27 1976-07-28 Beecham Group Ltd Adhesive composition
JPS5555204A (en) * 1978-10-20 1980-04-23 Fujitsu Ltd Pattern detection method of printed board for lamination

Also Published As

Publication number Publication date
JPS5970947A (ja) 1984-04-21

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