JPH0331076Y2 - - Google Patents

Info

Publication number
JPH0331076Y2
JPH0331076Y2 JP10597181U JP10597181U JPH0331076Y2 JP H0331076 Y2 JPH0331076 Y2 JP H0331076Y2 JP 10597181 U JP10597181 U JP 10597181U JP 10597181 U JP10597181 U JP 10597181U JP H0331076 Y2 JPH0331076 Y2 JP H0331076Y2
Authority
JP
Japan
Prior art keywords
tantalum
thin film
gold
integrated circuit
lower layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10597181U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5812942U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10597181U priority Critical patent/JPS5812942U/ja
Publication of JPS5812942U publication Critical patent/JPS5812942U/ja
Application granted granted Critical
Publication of JPH0331076Y2 publication Critical patent/JPH0331076Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Parts Printed On Printed Circuit Boards (AREA)
  • Die Bonding (AREA)
JP10597181U 1981-07-16 1981-07-16 薄膜集積回路装置 Granted JPS5812942U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10597181U JPS5812942U (ja) 1981-07-16 1981-07-16 薄膜集積回路装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10597181U JPS5812942U (ja) 1981-07-16 1981-07-16 薄膜集積回路装置

Publications (2)

Publication Number Publication Date
JPS5812942U JPS5812942U (ja) 1983-01-27
JPH0331076Y2 true JPH0331076Y2 (en:Method) 1991-07-01

Family

ID=29900488

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10597181U Granted JPS5812942U (ja) 1981-07-16 1981-07-16 薄膜集積回路装置

Country Status (1)

Country Link
JP (1) JPS5812942U (en:Method)

Also Published As

Publication number Publication date
JPS5812942U (ja) 1983-01-27

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