JPH0330991B2 - - Google Patents

Info

Publication number
JPH0330991B2
JPH0330991B2 JP59186391A JP18639184A JPH0330991B2 JP H0330991 B2 JPH0330991 B2 JP H0330991B2 JP 59186391 A JP59186391 A JP 59186391A JP 18639184 A JP18639184 A JP 18639184A JP H0330991 B2 JPH0330991 B2 JP H0330991B2
Authority
JP
Japan
Prior art keywords
film
conductor layer
formula
thermal expansion
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59186391A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6165457A (ja
Inventor
Mitsuru Hirao
Shunichi Numata
Yasuhiro Mochizuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Resonac Corp
Original Assignee
Hitachi Chemical Co Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd, Hitachi Ltd filed Critical Hitachi Chemical Co Ltd
Priority to JP18639184A priority Critical patent/JPS6165457A/ja
Publication of JPS6165457A publication Critical patent/JPS6165457A/ja
Publication of JPH0330991B2 publication Critical patent/JPH0330991B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Formation Of Insulating Films (AREA)
JP18639184A 1984-09-07 1984-09-07 半導体装置の多層配線構造 Granted JPS6165457A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18639184A JPS6165457A (ja) 1984-09-07 1984-09-07 半導体装置の多層配線構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18639184A JPS6165457A (ja) 1984-09-07 1984-09-07 半導体装置の多層配線構造

Publications (2)

Publication Number Publication Date
JPS6165457A JPS6165457A (ja) 1986-04-04
JPH0330991B2 true JPH0330991B2 (cs) 1991-05-01

Family

ID=16187573

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18639184A Granted JPS6165457A (ja) 1984-09-07 1984-09-07 半導体装置の多層配線構造

Country Status (1)

Country Link
JP (1) JPS6165457A (cs)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4979190A (cs) * 1972-12-04 1974-07-31

Also Published As

Publication number Publication date
JPS6165457A (ja) 1986-04-04

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term