JPH0330640Y2 - - Google Patents
Info
- Publication number
- JPH0330640Y2 JPH0330640Y2 JP1986101036U JP10103686U JPH0330640Y2 JP H0330640 Y2 JPH0330640 Y2 JP H0330640Y2 JP 1986101036 U JP1986101036 U JP 1986101036U JP 10103686 U JP10103686 U JP 10103686U JP H0330640 Y2 JPH0330640 Y2 JP H0330640Y2
- Authority
- JP
- Japan
- Prior art keywords
- section
- vacuum pressure
- detection device
- ejector pump
- air ejector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 18
- 238000006243 chemical reaction Methods 0.000 claims description 4
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 210000002445 nipple Anatomy 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Jet Pumps And Other Pumps (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986101036U JPH0330640Y2 (zh) | 1986-06-30 | 1986-06-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986101036U JPH0330640Y2 (zh) | 1986-06-30 | 1986-06-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS637299U JPS637299U (zh) | 1988-01-18 |
| JPH0330640Y2 true JPH0330640Y2 (zh) | 1991-06-27 |
Family
ID=30971409
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986101036U Expired JPH0330640Y2 (zh) | 1986-06-30 | 1986-06-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0330640Y2 (zh) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102004031924B4 (de) * | 2004-06-23 | 2006-05-04 | J. Schmalz Gmbh | Vorrichtung zum Erzeugen eines Unterdrucks |
| US7313966B2 (en) * | 2004-12-14 | 2008-01-01 | Brooks Automation, Inc. | Method and apparatus for storing vacuum gauge calibration parameters and measurement data on a vacuum gauge structure |
| JP6174768B1 (ja) * | 2016-04-18 | 2017-08-02 | 經登企業股▲フン▼有限公司 | デジタル圧力計及び制御システム |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59112593U (ja) * | 1983-01-20 | 1984-07-30 | オリオン機械株式会社 | 吸着部の真空圧検知機能付き真空発生装置 |
-
1986
- 1986-06-30 JP JP1986101036U patent/JPH0330640Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS637299U (zh) | 1988-01-18 |
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