JPH0329535B2 - - Google Patents
Info
- Publication number
- JPH0329535B2 JPH0329535B2 JP60265055A JP26505585A JPH0329535B2 JP H0329535 B2 JPH0329535 B2 JP H0329535B2 JP 60265055 A JP60265055 A JP 60265055A JP 26505585 A JP26505585 A JP 26505585A JP H0329535 B2 JPH0329535 B2 JP H0329535B2
- Authority
- JP
- Japan
- Prior art keywords
- measurement
- bed
- workpiece
- reference plane
- inclination
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005259 measurement Methods 0.000 claims description 25
- 238000012545 processing Methods 0.000 claims description 13
- 238000006073 displacement reaction Methods 0.000 claims description 6
- 238000012937 correction Methods 0.000 claims description 2
- 238000003754 machining Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 2
- GNFTZDOKVXKIBK-UHFFFAOYSA-N 3-(2-methoxyethoxy)benzohydrazide Chemical compound COCCOC1=CC=CC(C(=O)NN)=C1 GNFTZDOKVXKIBK-UHFFFAOYSA-N 0.000 description 1
- FGUUSXIOTUKUDN-IBGZPJMESA-N C1(=CC=CC=C1)N1C2=C(NC([C@H](C1)NC=1OC(=NN=1)C1=CC=CC=C1)=O)C=CC=C2 Chemical compound C1(=CC=CC=C1)N1C2=C(NC([C@H](C1)NC=1OC(=NN=1)C1=CC=CC=C1)=O)C=CC=C2 FGUUSXIOTUKUDN-IBGZPJMESA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- YTAHJIFKAKIKAV-XNMGPUDCSA-N [(1R)-3-morpholin-4-yl-1-phenylpropyl] N-[(3S)-2-oxo-5-phenyl-1,3-dihydro-1,4-benzodiazepin-3-yl]carbamate Chemical compound O=C1[C@H](N=C(C2=C(N1)C=CC=C2)C1=CC=CC=C1)NC(O[C@H](CCN1CCOCC1)C1=CC=CC=C1)=O YTAHJIFKAKIKAV-XNMGPUDCSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Machine Tool Sensing Apparatuses (AREA)
- Machine Tool Units (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26505585A JPS62124842A (ja) | 1985-11-27 | 1985-11-27 | テ−ブルの傾斜補正型工作機械 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26505585A JPS62124842A (ja) | 1985-11-27 | 1985-11-27 | テ−ブルの傾斜補正型工作機械 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62124842A JPS62124842A (ja) | 1987-06-06 |
| JPH0329535B2 true JPH0329535B2 (de) | 1991-04-24 |
Family
ID=17411951
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26505585A Granted JPS62124842A (ja) | 1985-11-27 | 1985-11-27 | テ−ブルの傾斜補正型工作機械 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62124842A (de) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4335980C2 (de) * | 1993-10-21 | 1998-09-10 | Wacker Siltronic Halbleitermat | Verfahren zum Positionieren einer Werkstückhalterung |
| JP2000176761A (ja) * | 1998-12-10 | 2000-06-27 | Fanuc Ltd | 垂直軸直動機構 |
| JP2000288873A (ja) * | 1999-04-07 | 2000-10-17 | Fuji Seiki Kk | ワーク姿勢調整装置及びワーク姿勢調整方法 |
| JP4530479B2 (ja) * | 2000-05-24 | 2010-08-25 | 弘 江田 | 精密加工装置 |
| JP4339732B2 (ja) * | 2004-03-31 | 2009-10-07 | 株式会社タムラ製作所 | 精密研削装置および精密研削方法 |
| JP5341165B2 (ja) * | 2011-11-08 | 2013-11-13 | 住友重機械工業株式会社 | ステージ装置及びガントリ型ステージ装置及びステージ装置の制御方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61158138A (ja) * | 1984-12-28 | 1986-07-17 | Nec Kansai Ltd | ウエハ表面の突起物除去装置 |
-
1985
- 1985-11-27 JP JP26505585A patent/JPS62124842A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61158138A (ja) * | 1984-12-28 | 1986-07-17 | Nec Kansai Ltd | ウエハ表面の突起物除去装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62124842A (ja) | 1987-06-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |