JPH0328738U - - Google Patents
Info
- Publication number
- JPH0328738U JPH0328738U JP8949289U JP8949289U JPH0328738U JP H0328738 U JPH0328738 U JP H0328738U JP 8949289 U JP8949289 U JP 8949289U JP 8949289 U JP8949289 U JP 8949289U JP H0328738 U JPH0328738 U JP H0328738U
- Authority
- JP
- Japan
- Prior art keywords
- fuse
- semiconductor device
- trimming
- tip
- advance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009966 trimming Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims 2
- 239000011229 interlayer Substances 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
Landscapes
- Semiconductor Integrated Circuits (AREA)
- Design And Manufacture Of Integrated Circuits (AREA)
Description
第１図は本考案一実施例を示す抵抗部の略断面
図、第２図は本考案による他の実施例を示す抵抗
部の略断面図、第３図は従来例によるトリミング
装置の平面図、第４図は従来例による抵抗部の略
断面図である。
３……１層目配線、４……層間絶縁膜、５……
ヒユーズ（パツド部）、６……ヒユーズ（溶断部
）。
FIG. 1 is a schematic cross-sectional view of a resistor section showing one embodiment of the present invention, FIG. 2 is a schematic cross-sectional view of a resistor section showing another embodiment of the present invention, and FIG. 3 is a plan view of a conventional trimming device. , FIG. 4 is a schematic cross-sectional view of a resistor section according to a conventional example. 3...First layer wiring, 4...Interlayer insulating film, 5...
Fuse (padded part), 6...Fuse (fused part).
Claims (1)
ヒユーズとを備えた半導体装置において、 予め上記ヒユーズの下地に段差を設け、該段差
の上にヒユーズを形成し、上記段差の突端部周囲
のヒユーズ厚を薄くしてなることを特徴とする半
導体装置。[Claims for Utility Model Registration] In a semiconductor device equipped with a trimming resistor and a fuse that is blown during trimming, a step is provided in advance on the base of the fuse, a fuse is formed on the step, and the tip of the step is A semiconductor device characterized by having a thin fuse around the part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8949289U JPH0328738U (en) | 1989-07-28 | 1989-07-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8949289U JPH0328738U (en) | 1989-07-28 | 1989-07-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0328738U true JPH0328738U (en) | 1991-03-22 |
Family
ID=31639068
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8949289U Pending JPH0328738U (en) | 1989-07-28 | 1989-07-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0328738U (en) |
-
1989
- 1989-07-28 JP JP8949289U patent/JPH0328738U/ja active Pending