JPH0328161Y2 - - Google Patents
Info
- Publication number
- JPH0328161Y2 JPH0328161Y2 JP13510085U JP13510085U JPH0328161Y2 JP H0328161 Y2 JPH0328161 Y2 JP H0328161Y2 JP 13510085 U JP13510085 U JP 13510085U JP 13510085 U JP13510085 U JP 13510085U JP H0328161 Y2 JPH0328161 Y2 JP H0328161Y2
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- spring
- drive shaft
- biasing force
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000012530 fluid Substances 0.000 claims description 7
- 238000006073 displacement reaction Methods 0.000 claims description 4
- 230000000694 effects Effects 0.000 description 2
- 230000032683 aging Effects 0.000 description 1
- 210000004907 gland Anatomy 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
Landscapes
- Actuator (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13510085U JPH0328161Y2 (no) | 1985-09-05 | 1985-09-05 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13510085U JPH0328161Y2 (no) | 1985-09-05 | 1985-09-05 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6244109U JPS6244109U (no) | 1987-03-17 |
JPH0328161Y2 true JPH0328161Y2 (no) | 1991-06-18 |
Family
ID=31036966
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13510085U Expired JPH0328161Y2 (no) | 1985-09-05 | 1985-09-05 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0328161Y2 (no) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2024062389A (ja) | 2022-10-24 | 2024-05-09 | 信越化学工業株式会社 | レジスト材料及びパターン形成方法 |
-
1985
- 1985-09-05 JP JP13510085U patent/JPH0328161Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS6244109U (no) | 1987-03-17 |
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