JPH0328161Y2 - - Google Patents

Info

Publication number
JPH0328161Y2
JPH0328161Y2 JP13510085U JP13510085U JPH0328161Y2 JP H0328161 Y2 JPH0328161 Y2 JP H0328161Y2 JP 13510085 U JP13510085 U JP 13510085U JP 13510085 U JP13510085 U JP 13510085U JP H0328161 Y2 JPH0328161 Y2 JP H0328161Y2
Authority
JP
Japan
Prior art keywords
diaphragm
spring
drive shaft
biasing force
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13510085U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6244109U (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13510085U priority Critical patent/JPH0328161Y2/ja
Publication of JPS6244109U publication Critical patent/JPS6244109U/ja
Application granted granted Critical
Publication of JPH0328161Y2 publication Critical patent/JPH0328161Y2/ja
Expired legal-status Critical Current

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  • Actuator (AREA)
JP13510085U 1985-09-05 1985-09-05 Expired JPH0328161Y2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13510085U JPH0328161Y2 (de) 1985-09-05 1985-09-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13510085U JPH0328161Y2 (de) 1985-09-05 1985-09-05

Publications (2)

Publication Number Publication Date
JPS6244109U JPS6244109U (de) 1987-03-17
JPH0328161Y2 true JPH0328161Y2 (de) 1991-06-18

Family

ID=31036966

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13510085U Expired JPH0328161Y2 (de) 1985-09-05 1985-09-05

Country Status (1)

Country Link
JP (1) JPH0328161Y2 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2024062389A (ja) 2022-10-24 2024-05-09 信越化学工業株式会社 レジスト材料及びパターン形成方法

Also Published As

Publication number Publication date
JPS6244109U (de) 1987-03-17

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