JPH0327863B2 - - Google Patents
Info
- Publication number
- JPH0327863B2 JPH0327863B2 JP58089111A JP8911183A JPH0327863B2 JP H0327863 B2 JPH0327863 B2 JP H0327863B2 JP 58089111 A JP58089111 A JP 58089111A JP 8911183 A JP8911183 A JP 8911183A JP H0327863 B2 JPH0327863 B2 JP H0327863B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- wave
- lens
- distance
- ultrasonic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000002604 ultrasonography Methods 0.000 claims description 25
- 238000010897 surface acoustic wave method Methods 0.000 claims description 10
- 239000000523 sample Substances 0.000 description 61
- 238000000034 method Methods 0.000 description 11
- 238000005259 measurement Methods 0.000 description 9
- 238000007796 conventional method Methods 0.000 description 5
- 239000012530 fluid Substances 0.000 description 5
- 238000001514 detection method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000033001 locomotion Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000003957 acoustic microscopy Methods 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 230000004323 axial length Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 239000005350 fused silica glass Substances 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000001131 transforming effect Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000012800 visualization Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
- G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58089111A JPS59214759A (ja) | 1983-05-23 | 1983-05-23 | 超音波顕微鏡 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58089111A JPS59214759A (ja) | 1983-05-23 | 1983-05-23 | 超音波顕微鏡 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS59214759A JPS59214759A (ja) | 1984-12-04 |
JPH0327863B2 true JPH0327863B2 (de) | 1991-04-17 |
Family
ID=13961777
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58089111A Granted JPS59214759A (ja) | 1983-05-23 | 1983-05-23 | 超音波顕微鏡 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59214759A (de) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61210944A (ja) * | 1985-03-15 | 1986-09-19 | Hitachi Ltd | 超音波顕微鏡 |
JPH03185355A (ja) * | 1989-12-15 | 1991-08-13 | Isuzu Motors Ltd | 表面層の超音波測定法 |
-
1983
- 1983-05-23 JP JP58089111A patent/JPS59214759A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS59214759A (ja) | 1984-12-04 |
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