JPH0327045B2 - - Google Patents

Info

Publication number
JPH0327045B2
JPH0327045B2 JP59171112A JP17111284A JPH0327045B2 JP H0327045 B2 JPH0327045 B2 JP H0327045B2 JP 59171112 A JP59171112 A JP 59171112A JP 17111284 A JP17111284 A JP 17111284A JP H0327045 B2 JPH0327045 B2 JP H0327045B2
Authority
JP
Japan
Prior art keywords
reflective surface
prism
light
detected
light source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59171112A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6148707A (ja
Inventor
Shigeki Ikehata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP59171112A priority Critical patent/JPS6148707A/ja
Publication of JPS6148707A publication Critical patent/JPS6148707A/ja
Publication of JPH0327045B2 publication Critical patent/JPH0327045B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Collating Specific Patterns (AREA)
  • Image Input (AREA)
JP59171112A 1984-08-16 1984-08-16 凹凸検出方法及び凹凸検出情報入力装置 Granted JPS6148707A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59171112A JPS6148707A (ja) 1984-08-16 1984-08-16 凹凸検出方法及び凹凸検出情報入力装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59171112A JPS6148707A (ja) 1984-08-16 1984-08-16 凹凸検出方法及び凹凸検出情報入力装置

Publications (2)

Publication Number Publication Date
JPS6148707A JPS6148707A (ja) 1986-03-10
JPH0327045B2 true JPH0327045B2 (enrdf_load_stackoverflow) 1991-04-12

Family

ID=15917190

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59171112A Granted JPS6148707A (ja) 1984-08-16 1984-08-16 凹凸検出方法及び凹凸検出情報入力装置

Country Status (1)

Country Link
JP (1) JPS6148707A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR930001001Y1 (ko) * 1990-11-17 1993-03-02 주식회사 금성사 지문 인식장치

Also Published As

Publication number Publication date
JPS6148707A (ja) 1986-03-10

Similar Documents

Publication Publication Date Title
KR900006061B1 (ko) 요철면 정보 검출장치
JP2795595B2 (ja) 透明板状体の欠点検出方法
US4197011A (en) Defect detection and plotting system
JPH0814544B2 (ja) フロッピーディスクの検査方法
JPH05100413A (ja) 異物検査装置
JPH0787208B2 (ja) 面板欠陥検出光学装置
JPH0327045B2 (enrdf_load_stackoverflow)
JPS6129453B2 (enrdf_load_stackoverflow)
JPH11304724A (ja) 光透過性シートの穴検出装置及び穴検出方法
JP2005228191A (ja) 指紋画像入力装置
JPH09105724A (ja) 表面検査装置
JPS58184116A (ja) 透光性物体表面の欠陥検査方法
JP3326276B2 (ja) 光学ディスクの保護コート膜検査方法及びそれを使用した検査装置
JPH0311403B2 (enrdf_load_stackoverflow)
JPS63221483A (ja) 凹凸情報検出方法
JPH0228815B2 (enrdf_load_stackoverflow)
JPH03115844A (ja) 表面欠点検出方法
JPH09218162A (ja) 表面欠陥検査装置
JPH0431748A (ja) 透明板状体の欠点検査方法
JP3109709B2 (ja) 光学ディスクの保護コート膜検査方法及びそれを使用した検査装置
JPS5862506A (ja) 表面微小検査装置
JPS62209686A (ja) 凹凸面情報検出装置
JP3369268B2 (ja) 透光性物体内部の欠点検出方法
JP2559470B2 (ja) 外観検査方法
JPH10293015A (ja) 光学検出装置