JPH03266207A - Production of mig type magnetic head - Google Patents

Abstract

PURPOSE:To make improvement in electromagnetic conversion characteristics and reproduced output by forming an Fe-Al-Si alloy film while successively changing the film forming speed from a low to high speed at the time of formation of this film. CONSTITUTION:The Fe-Al-Si alloy film 6 is formed while the film forming speed is successively changed stepwise from the low to the high speed at the time of forming this film by a vapor growth method after an interface reaction film consisting of a nonmagnetic inorg. material is deposited on a magnetic gap butt surface 2 of ferrite cores. Namely, the diffusion of the atoms at the boundary of the magnetic metallic film and ferrite is prevented by the interface reaction preventive film 5 of the 1st layer. The Fe-Al-Si alloy film layer 6 is formed along the crystal orientation of the initial layer formed at the low film forming speed at which the Fe-Al-Si alloy film becomes a substrate and the disturbance in the crystal orientation is decreased by forming the Fe-Al-Si alloy film 6 while successively changing the film forming speed from the low to the high speed at the time of forming this film. The improvement in the electromagnetic conversion characteristics and the reproduced output is made in this way.

Description

Detailed Description of the Invention Field of Application The present invention relates to a method for manufacturing an MIG (Metal In Gap) type magnetic head having a metal film with a high saturation magnetic flux density within a magnetic gap, in which an interfacial reaction prevention film is formed on a ferrite core. In addition, when depositing the Fe-Al-Si alloy film, the film formation speed is changed from low speed to high speed in order to eliminate the initial deterioration layer of the metal magnetic film. The present invention relates to a method of manufacturing an MIG magnetic head that suppresses the occurrence of pseudo gaps, improves electromagnetic conversion characteristics, and improves reproduction output.

BACKGROUND ART In recent years, technological developments in magnetic recording have been remarkable, and in particular, improvements in recording density have been remarkable.

For example, in magnetic recording and reproducing devices such as audio tape recorders and VTRs (video tape recorders), the density and quality of recording signals are increasing, and in response to this increase in recording density, magnetic recording F to magnetic powder as a medium
So-called metal tapes using powders made of metals or alloys such as e, Co, and Ni, and so-called evaporated tapes and magnetic disks in which ferromagnetic metal materials are directly deposited on a base film using vacuum thin film formation technology were developed. and has been put into practical use in various fields.

By the way, in order to make use of the characteristics of a magnetic recording medium having such high coercive force, the core material of the magnetic head must have a high saturation magnetic flux density, and the same magnetic head must be used for reproduction. In some cases, it is also required to have high magnetic permeability.

For example, ferrite materials, which have conventionally been widely used as core materials for magnetic heads, have a low saturation magnetic flux density, and permalloy has problems with wear resistance.

Therefore, as a core material that satisfies the above requirements, Fe-A
A so-called sendust alloy made of l-Si alloy is considered suitable and has already been put into practical use.

However, in materials with excellent soft magnetic properties such as this Sendust alloy, magnetostriction λS and magnetocrystalline anisotropy K
It is desirable that both of these values be around zero, and the material composition that can be used in the magnetic head is determined by taking these two values into consideration.

On the other hand, in the MIG type magnetic head, since it is almost difficult to measure the characteristics of a metal magnetic film on an actual magnetic oxide core, the characteristics of the metal magnetic film have been evaluated on a nonmagnetic substrate.

However, according to research conducted by the present inventors, it has been found that the characteristics of a metal magnetic film such as Sendust on a ferrite-like magnetic oxide substrate do not necessarily match the characteristics on a non-magnetic substrate.

In particular, the magnetic anisotropy is significantly different, and on a ferrite substrate, the above-mentioned film becomes a film with dispersed anisotropy. The measured soft magnetic state cannot be realized.

In other words, since the difficult axis direction of the dispersed single domain grains differs depending on the position from which the track is cut out, the magnetic permeability in the direction of magnetization due to electromagnetic conversion of the head differs, which cannot be considered as a factor that deteriorates the electromagnetic conversion characteristics of the magnetic head. can.

In addition, in the MIG type magnetic head, as mentioned above, pseudo-gaps caused by deterioration of the soft magnetic properties of the metal film and the initial layer as well as the formation of a non-magnetic reaction layer due to diffusion during heat treatment with magnetic oxides are also suppressed. Must-have.

Purpose of the Invention The purpose of the present invention is to provide a method for manufacturing an MIG type magnetic head that can eliminate the initial deterioration layer of the metal magnetic film, suppress the occurrence of pseudo gaps, and improve electromagnetic conversion characteristics and reproduction output. There is.

Summary of the Invention The present invention was developed as a result of various studies aimed at producing a soft magnetic film with excellent characteristics for MIG type magnetic heads.
By forming the e-Al-Si alloy film while changing the film-forming speed from low to high in sequence, the film is much better than the conventional alloy film formed at a single film-forming speed. It was found that soft magnetic properties can be obtained, and furthermore, by applying appropriate heat treatment, -axis anisotropy can be obtained.
Al2O between the ferrite equimagnetic oxide and the metal magnetic film
We found that by forming an interfacial reaction prevention film layer made of a thermally stable non-magnetic inorganic material such as No. 3, it is possible to suppress the reaction at the interface between the metal magnetic film and the oxide substrate and to suppress the pseudo gap.
This invention has been completed.

Conventionally, Fe-Al-Si alloy films for MIG magnetic heads have been deposited at a constant high deposition rate of 200 Å/min or more from the viewpoint of industrial production using vapor phase growth equipment such as sputtering equipment. However, according to the research of the present inventors, Fe
- If the Al-Si alloy film is deposited at a deposition rate exceeding 50A1 min at the start of deposition, the crystallinity of the initial layer will be poor and the soft magnetic properties will be poor, which is one of the reasons why such an initial layer forms a pseudo gap. It was confirmed that at least the initial layer of a predetermined thickness needs to be formed at a low film formation rate in order to improve crystallinity.

That is, in this invention, at least one magnetic core half is made of ferrite,
MI with a metal film with high saturation magnetic flux density in the magnetic gap
In a method for manufacturing a G-type magnetic head, an interfacial reaction prevention film made of a non-magnetic inorganic material is deposited on a magnetic gap abutting surface of a ferrite core, and then a Fe-Al-Si alloy film is deposited on the interfacial reaction prevention film. When forming a film using the vapor phase growth method, the film formation rate is gradually increased from low to low.
This is a method of manufacturing an MIG type magnetic head characterized by forming a film while changing the speed stepwise or continuously to a high speed.

Further, in the method, the present invention provides Fe-Al-S
This is a method for manufacturing an MIG type magnetic head, characterized in that the deposition rate from the start of deposition of the i-alloy film to at least 501 is as low as 50 Å/min or less.

Structure of the Invention Specifically, this invention uses a known thin film forming method,
5i02, Sialon, Al on various ferrite cores
After forming a film of at least one of non-magnetic inorganic materials such as 2O3, CrN, and Cr, Fe-Al-Si is deposited while gradually changing the film-forming speed from low to high.
After the alloy film is formed and laminated to form a metal magnetic film of the required thickness, it is heated in a high temperature atmosphere during the glass welding process, or for various purposes.
This method of manufacturing an MIG magnetic head is characterized by performing heat treatment at a temperature of 400° C. to 800° C. for 1 minute to 100 hours, which is appropriately selected depending on the film thickness, laminated structure, thickness ratio, etc.

The first layer, an interfacial reaction prevention film made of a non-magnetic inorganic material, prevents the diffusion of atoms at the interface between the metal magnetic film and the magnetic oxide. The crystallinity of the layer is significantly improved, and a soft magnetic film with excellent -axis anisotropy can be formed on an oxide substrate.

That is, the first layer of interfacial reaction prevention film prevents the diffusion of atoms at the interface between the metal magnetic film and the ferrite.
By forming the Fe-Al-Si alloy film while changing the film forming speed from low speed to high speed,
The Fe-Al-Si alloy film is deposited along the crystal orientation of the underlying initial layer, which is deposited at a low deposition rate, so that the crystal orientation is less disturbed and the soft magnetic properties can be easily improved by the required heat treatment. It is thought that this will improve.

In the Fe-Al-Si alloy film MIG type magnetic head, in order to suppress the occurrence of pseudo gaps, improve the electromagnetic conversion characteristics, and improve the relocation ability, it is necessary to use the Fe-Al-Si alloy film. Looking at the film formation process, since the film is formed sequentially along the crystal orientation of the initial layer, it is necessary to improve the crystallinity, especially at the beginning of film formation, in order to reduce the disturbance of the crystal orientation of the entire layer. It is important to obtain an initial layer.

In order to obtain an initial Fe-Al-Si alloy film layer with improved crystallinity, it is essential to keep the deposition rate as low as 50 Å/min or less, preferably 20 Å/min or less, and more preferably 20 Å/min or less. It is less than IO Å/min. In addition, the initial layer thickness requires at least 5OA thickness,
The thickness is preferably 100 Å or more, more preferably 200 A or more.

If necessary, Fe-Al required at the above-mentioned low deposition rate
It is also possible to deposit the entire -Si alloy film, and a film with excellent crystal orientation can be obtained, but most films are deposited along the crystal orientation of the initial layer, especially in industrial applications. Considering production, after the required initial layer is obtained,
It is desirable to form the film at a high film formation rate. Furthermore, compositional variations do not occur between the alloy film layer formed at a low film formation rate and the alloy film layer formed at a high film formation rate due to diffusion or the like due to heat treatment.

However, if the film formation speeds are significantly different, stress is likely to occur inside the formed Fe-Al-Si alloy film, leading to deterioration of characteristics. It is necessary to form a film while continuously changing the film formation speed to a high film formation speed. For example, depending on the film formation speed of the selected initial layer, the film formation speed may be changed to a required high film formation speed in one to several steps. It is recommended to change the rate continuously according to the capacity of the vapor phase growth apparatus, especially in industrial production from 100 Å/min.
It is preferable to appropriately select from the range of 1oooo people/minute.

The Fe-Al-Si alloy thin film is a so-called sendust alloy, which has been widely used in composite type and thin film magnetic heads, and a known composition can be appropriately selected depending on the purpose of the magnetic head. ~10wt%A1.6~15wt%S
i, an alloy in the range of 80 to 90 wt% Fe can be used, and optionally Cr, Ti, Ta,
It is also good to add Ni, Co, Mo, Zr, rare earth elements, platinum metal elements, etc.

In addition, the thickness of the Fe-Al-Si alloy film has high magnetic permeability,
It is selected appropriately to obtain a low coercive force, but if it is too thick, the frequency characteristics of the magnetic head will deteriorate, and if it is thin, the override characteristics will deteriorate, so it is usually used for one to several units. be.

Ferrite Core In the present invention, the ferrite core can be made of any known soft ferrite, in addition to single crystal ferrite such as Ni--Zn ferrite or Mn--Zn ferrite, HIP-treated sintered ferrite.

In this invention, the first layer of the interfacial reaction prevention film contains 5i.
02, one or more types of non-magnetic inorganic materials such as Sialon, Al2O3, CrN, and Cr are formed into a film, but if the film thickness is less than 50A, there is no diffusion prevention effect.
If it exceeds 0A, the diffusion prevention film itself acts as a pseudo gap, which is not preferable, so the thickness is set to 50 to 300 AI. Furthermore, it is preferably between 100 and 200.

Manufacturing conditions An interfacial reaction prevention film and a Fe-A1-Si alloy thin film are deposited on the magnetic gap abutment surface of the ferrite core, and the deposition methods include various sputtering methods, CV
Known vapor phase film forming methods such as the D method, vapor deposition method, and ion blating can be used.

Preferred deposition conditions for any method include:
The higher the ultimate vacuum degree, the better, at least 1O-8To
It is necessary to create a high vacuum below rr level, preferably 2x
lO-6 Torr or less, more preferably 1xlO'T
Orr or less is better.

When using the sputtering method, an inert gas such as argon gas is used as the sputtering gas, and the pressure may be appropriately selected depending on the structure of the sputtering apparatus.

Furthermore, the Fe-Al-Si alloy thin film to be deposited is strongly influenced by the surface condition of the substrate, such as residual strain and roughness, and the magnetic properties may deteriorate. It is necessary to keep the interfacial reaction prevention film and the surface roughness of the ferrite core below 40 Å, and MCP (
Mechanochemical polishing) processing is effective.

The heat treatment may be performed after film formation and before required processing, or may be performed, for example, after processing into the shape of a component such as a magnetic head. Furthermore, when bonding the pair of magnetic helad core halves, heating for glass welding may be used in combination with heat treatment.

The temperature and time of the heat treatment are selected appropriately to improve the magnetic properties of the composite metal magnetic film, and at the same time, the difference in thermal expansion coefficient with the core, the heat resistance of the substrate, the thickness of the film, the core, Diffusion prevention film, Fe or Fe-based alloy film, and Fe-A
It is necessary to select the material appropriately depending on the composition, etc., taking into consideration the mutual diffusion between the three materials with the l-Si alloy film.

If the heat treatment temperature is less than 400°C, stress relaxation will be insufficient and a sufficiently high magnetic permeability will not be obtained, which is undesirable. If it exceeds 800°C, the magnetic properties will deteriorate due to mutual diffusion between films, etc. The temperature is preferably 400°C to 800°C, more preferably 5°C because deterioration or peeling of the film is less likely to occur.
00°C to 700°C.

If the treatment time is less than 1 minute, it is not preferable because a sufficiently high magnetic permeability cannot be obtained, and if it exceeds 100 hours, the magnetic properties will deteriorate, so 1 minute to 100 hours is preferable, and more preferably 5 minutes. More preferably, the time is 10 hours or less.

The cooling rate needs to be appropriately selected depending on the composition and configuration of the substrate and composite metal magnetic film used as well as the heat treatment temperature and time, but it is usually 1°C/hr or more and 10,000"C.
/hr or less is preferable, particularly 50”C/hr to 600
A range of °C/hr is preferred.

The atmosphere may be any atmosphere as long as it does not significantly deteriorate the magnetic properties of the metal magnetic film and the ferromagnetic oxide, but vacuum, inert gas, or nitrogen gas is preferable, and in particular, a vacuum of 10'Torr or more is preferable. preferable.

Effects of the Invention The MIG magnetic head according to the present invention provides an interfacial reaction prevention film on the magnetic gap abutment surface of the ferrite core, and then sequentially changes the film formation speed from low to high when forming the Fe-Al-8 layer alloy film. By forming the film while changing the speed to a high speed, a soft magnetic film with soft magnetic properties (magnetic permeability and coercive force) superior to that of an Fe-Al-8 layer alloy film formed at a conventional single film forming speed is created. This has the advantage that it can be applied to high coercive force media and that high recording density can be obtained.

Further, the MIG type magnetic head according to the present invention has Fe-A
The l-8 layer alloy film has uniaxial anisotropy, and the g-axis anisotropy can be easily controlled during film formation of the Fe-Al-8 layer alloy film. The difficult axis can be directed vertically downward, and extremely favorable characteristics can be obtained.

Examples Example 1 Manufacturing a C-shaped block half (1) to become a C-shaped core and a ■-shaped block half (3) to become an I-type core as shown in FIG. 1 made of Mn-Zn polycrystalline ferrite. Then, the required surfaces of the C-shaped block halves 1), which are to become the CI Cocoa magnetic gap abutting surfaces (2), are mirror-finished using diamond powder, and then MCP processing is applied to the surfaces with high precision. Finished with a distortion-free surface.

At this time, when measuring with a Talystep surface level difference measuring device,
The roughness was 30 Å or less. Moreover, the state of removal of the surface strain layer was confirmed by ellipsometry.

After forming an Al2O3 film with a thickness of 100 mm on the main surface of the strain-free processed C-shaped block half (1) using an RF 2-pole magnetron sputtering device, a Cr film with a thickness of 100 mm was further applied in the same manner. The adhesive was formed using

Furthermore, an Fe-6AI-10Si-0,7Cr film was deposited at a rate of 1.5
The film was laminated to a thickness of 5 units.

As shown in Figure 2, the deposition conditions for the Fe-Al-8 layer alloy film were as follows: At the start of deposition, the film was deposited for 25 minutes at a deposition rate of 1 minute for 20 people, and then at a deposition rate of 1 minute for 100 people. The deposition rate was increased to 50 minutes, and then the deposition rate was further increased to 1 minute for 200 people, and deposition was performed for 50 minutes.

Note that the above sputtering conditions are such that the power input to the target is adjusted to achieve the required film formation rate, and M
The gas pressure was 4xlO'Torr.

Next, a glass film for forming a magnetic gap is formed on the substrate using an RF bipolar magnetron sputtering device.
Each core was deposited to a thickness of 0.3.

Furthermore, the C-type block half and the I-type block half without a winding groove were glass-bonded in an N2 gas atmosphere (680°C x 1O min), and at the same time, after improving the magnetic properties of the metal magnetic film, External processing is performed to obtain the specified dimensions and shape, resulting in a MIG type monolithic head.

For comparison, after forming the Al2O3 film and Cr film under the same conditions as described above, Fe-6AI-10Si
A -0,7Cr film was deposited for 125 minutes at a constant 200A 7 minute deposition rate from the start of deposition to a thickness of 1.55 pm, and a glass film was further deposited under the above conditions for glass bonding. Later, the MIG type monolithic head was developed.

Therefore, in the above two types of monolithic heads, as shown in FIG. A -Si film (6) is formed in a layered manner, and a glass film (7) for a magnetic gap is further formed.

Furthermore, to explain the Fe-Al-Si film (6) in detail, in the case of the head of the present invention, as shown in FIG. (61
), a layer (62) with a deposition rate of 100 Å/min, a deposition rate of 20
It is thought to consist of three layers: 08/min layer (63). Furthermore, as shown in the fourth diagram, the Fe-Al-Si film (6) of the comparative example was formed at a deposition rate of 200 people, which is the same as the conventional manufacturing method!
There is only one layer (63).

Next, the electromagnetic conversion characteristics of the above two types of monolithic heads were measured under the following conditions, 20 each, and the average value, maximum value, and minimum value are shown in Table 1.

Note that the pseudo gap in Table 1 is the output ratio b/a between the main peak a and the pseudo gap output obtained by observing the reproduced output waveform.
These are the average value, maximum value, and minimum value of the measurement results.

Coercive force of magnetic disk; 12000e Rotational speed of magnetic disk; 3600 rpm Number of turns of coil; 24 Flying height; 0.1 face m As is clear from Table 1, in the case of the head according to the present invention, the effect of the pseudo gap is It was confirmed that the electromagnetic conversion characteristics were significantly reduced to such an extent that there was no substantial problem, and that the electromagnetic conversion characteristics were even better than those of the comparative example.

Table 1 Using Mn-Zn single-crystal ferrite, a block half was produced under the same conditions as in Example 1, and an RF2F2 nomagnetron sputtering device was applied to the core surface, which had been finished with a highly accurate flat and distortion-free surface by MCP processing. Then, the Al2O3 film was
The adhesive was formed to a human thickness.

At this time, when measuring with a Talystep surface level difference measuring device,
The roughness was 20 Å or less. Moreover, the state of removal of the surface strain layer was confirmed by ellipsometry.

Furthermore, the RF2F2 nomagnetron sputtering equipment can produce a Fe-6AI-10Si film at 20%
A film with a thickness of 500AJ was formed in 25 minutes at a speed comparable to that of a human.
Next, the film forming speed was increased to 1 minute for 200 people, and a film was formed to a thickness of 1.5 μm for 100 minutes, and a layered film was formed to a thickness of 1.55 pm.

Next, a glass film for forming a magnetic gap is formed on the substrate using an RF2F2 no magnetron sputtering device.
Each core was coated to a thickness of 0.3 μm.

Furthermore, a C-type half body and an I-type half body without a winding groove are N2
After glass bonding in a gas atmosphere (680°C x 10 minutes) and at the same time improving the magnetic properties of the metal magnetic film, a large number of track grooves and winding grooves for forming tracks were formed, and slicing was performed. External processing was performed to obtain predetermined dimensions and shape, and a MIG type magnetic head chip was produced.

Therefore, the magnetic gap abutting surface of the C-shaped core is Al2
An O3 diffusion prevention film and a Fe-Al-Si film are laminated,
Furthermore, a glass film for a magnetic gap is formed.

For comparison, after forming the Al2O3 film under the same conditions as described above, a Fe-6AI-10Si film was formed for 125 minutes at a constant deposition rate of 200 people/1 minute from the start of film formation. Laminated films were formed to a thickness of 1.55 mm, a glass film was further formed under the above conditions, and after glass bonding, a MIG type magnetic rad chip was formed.

Next, a composite head was made and the electromagnetic conversion characteristics were measured. As a result of measuring the output ratio b/a between the main peak a and the pseudo gap output by observing the reproduced output waveform, it was found that b/a of the present invention
a is 0.02, and b/a of the conventional method is 0.1. In the case of the head according to the present invention, the effect of the pseudo gap is actually significantly reduced to the extent that it is not a qualitative problem, and a good result is obtained. It was confirmed that it had recording and reproducing characteristics.

Further, the waviness of the reproduction frequency characteristics of the composite head according to the present invention was significantly improved, and was less than 1 dB.

Example 3 The magnetic gap abutment surface (2) of the C-type block half (1) shown in FIG. 1 made of Mn-Zn polycrystalline ferrite was subjected to strain-free processing, and Sialon was applied thereon as a diffusion prevention film. 200 people formed films.

Furthermore, an Fe-6AI-10Si film was deposited using an RF bipolar magnetron sputtering device at 45%
A film of 500% was formed in about 11 minutes at a film formation speed of 1 person.
Next, the film formation rate was increased to 200 Å/min, and a film was formed to a thickness of 1.5 μm for 100 minutes to form a layered film to a thickness of 1.55 μm.

Glass films were used as gap films for the C-type block half (1) and the I-type block half (3), each with a thickness of 0. % m thickness, the gap forming surfaces were brought together, and glass bonding was performed in an N2 gas atmosphere (680° C. x 10 minutes).

A MIG monolithic slider was fabricated by processing the second bonded block, and its electromagnetic conversion characteristics were measured.

As a result, as in Example 1, it was confirmed that the effect of the pseudo gap was significantly reduced to the extent that it did not pose a substantial problem, and that good recording and reproducing characteristics were obtained.

Example 4 The magnetic gap abutting surface (2) of the C-type block half (1) shown in FIG. 1 made of Mn-Zn polycrystalline ferrite was subjected to strain-free processing, and Sialon was applied thereon as a diffusion prevention film. The film was formed at a temperature of 200.

Further, a Fe-6AI-10Si film was laminated to a thickness of 1.5p using an RF bipolar magnetron sputtering device.

As shown in Fig. 3, the deposition conditions for the Fe-Al-8 layer alloy film were as shown in Figure 3. By adjusting the power input to the target with a tilt, the power applied to the target was continuously increased to form a film with a thickness of 1.0 μm, and then a film with a thickness of 0.5 μm was formed for 25 minutes while maintaining the film forming speed of 20081 minutes.

After that, the C-type block half (1) and the I-type block half (
As the gap film in 3), glass films were deposited to a thickness of 0.3 pm each, and the gap forming surfaces were brought into contact with each other, and N
Glass bonding was performed in a two-gas atmosphere (720°C x 10 minutes).

This bonded block was processed to produce a MIG monolithic slider, and its electromagnetic conversion characteristics were measured.

Therefore, in the above monolithic head, as shown in FIG.
A film (6) is laminated, and a glass film (7) for a magnetic gap is further formed.
6), as shown in Figure C, a layer (64
) and a layer (63) with a deposition rate of 20 Å/min.

As a result of measuring the electromagnetic conversion characteristics, it was confirmed that, as in Example 1, the effect of the pseudo gap was significantly reduced to the extent that it did not pose a substantial problem, and it was confirmed that the sample had good recording and reproducing characteristics.

[Brief explanation of drawings]

FIG. 1 is a perspective explanatory view of a C-type block half and an I-type block half, showing the manufacture of an MIG type magnetic head. FIGS. 2 and 3 are graphs showing the deposition rate of the Fe-Al-8 layer alloy film according to the present invention. FIG. 4A is a cross-sectional explanatory diagram showing the film formation on the magnetic gap abutting surface of the herad core, and B-D in the same figure is
FIG. 3 is a cross-sectional explanatory diagram showing details of a Si film. DESCRIPTION OF SYMBOLS 1... C-type block half body, 2... Magnetic gap abutting surface, 3... I-type block half body, 4... Core, 5... Diffusion prevention film, 6... Fe- Al-Si film, 7... Glass film.

Claims (1)

[Claims] 1. At least one magnetic core half is made of ferrite,
MI with a metal film with high saturation magnetic flux density in the magnetic gap
In a method for manufacturing a G-type magnetic head, an interfacial reaction prevention film made of a non-magnetic inorganic material is deposited on a magnetic gap abutting surface of a ferrite core, and then a Fe-Al-Si alloy film is deposited on the interfacial reaction prevention film. When forming a film using the vapor phase growth method, the film forming speed is gradually increased from low to low.
A method for manufacturing an MIG type magnetic head, characterized by forming a film while changing the speed stepwise or continuously to a high speed. 2 At least 5 times from the start of film formation of Fe-Al-Si alloy film
2. The method of manufacturing an MIG magnetic head according to claim 1, wherein the film formation rate up to a thickness of 0 Å is as low as 50 Å/min or less.