JPH032628B2 - - Google Patents
Info
- Publication number
- JPH032628B2 JPH032628B2 JP12752784A JP12752784A JPH032628B2 JP H032628 B2 JPH032628 B2 JP H032628B2 JP 12752784 A JP12752784 A JP 12752784A JP 12752784 A JP12752784 A JP 12752784A JP H032628 B2 JPH032628 B2 JP H032628B2
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- tool
- polishing
- drive motor
- rotated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005498 polishing Methods 0.000 claims description 37
- 239000007788 liquid Substances 0.000 claims description 9
- 238000001514 detection method Methods 0.000 claims description 7
- 230000000694 effects Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Landscapes
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12752784A JPS618269A (ja) | 1984-06-22 | 1984-06-22 | 曲面研摩機 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12752784A JPS618269A (ja) | 1984-06-22 | 1984-06-22 | 曲面研摩機 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS618269A JPS618269A (ja) | 1986-01-14 |
JPH032628B2 true JPH032628B2 (US06312121-20011106-C00033.png) | 1991-01-16 |
Family
ID=14962217
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12752784A Granted JPS618269A (ja) | 1984-06-22 | 1984-06-22 | 曲面研摩機 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS618269A (US06312121-20011106-C00033.png) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63232956A (ja) * | 1987-03-19 | 1988-09-28 | Canon Inc | 研磨方法 |
JPS63232966A (ja) * | 1987-03-19 | 1988-09-28 | Canon Inc | 研削機械 |
JPS63232952A (ja) * | 1987-03-19 | 1988-09-28 | Canon Inc | 研磨装置 |
JPS63232965A (ja) * | 1987-03-19 | 1988-09-28 | Canon Inc | 加工体研削方法 |
JPS63232932A (ja) * | 1987-03-19 | 1988-09-28 | Canon Inc | 修正研磨方法およびその装置 |
JPS63232964A (ja) * | 1987-03-19 | 1988-09-28 | Canon Inc | 修正研摩装置 |
CN108177047B (zh) * | 2017-12-15 | 2019-10-18 | 中国科学院上海光学精密机械研究所 | 大尺寸板条状光学元件的加工装置检测装置和加工方法 |
KR200493639Y1 (ko) * | 2021-01-14 | 2021-05-07 | 문병갑 | 스핀들의 복합적 요동운동을 이용한 초정밀 구심연마시스템 |
-
1984
- 1984-06-22 JP JP12752784A patent/JPS618269A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS618269A (ja) | 1986-01-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |