JPH0325849B2 - - Google Patents
Info
- Publication number
- JPH0325849B2 JPH0325849B2 JP58145193A JP14519383A JPH0325849B2 JP H0325849 B2 JPH0325849 B2 JP H0325849B2 JP 58145193 A JP58145193 A JP 58145193A JP 14519383 A JP14519383 A JP 14519383A JP H0325849 B2 JPH0325849 B2 JP H0325849B2
- Authority
- JP
- Japan
- Prior art keywords
- support
- film
- alloy film
- layer
- tape
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 claims description 72
- 238000004519 manufacturing process Methods 0.000 claims description 39
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 16
- 229910052710 silicon Inorganic materials 0.000 claims description 16
- 239000010703 silicon Substances 0.000 claims description 16
- 239000002210 silicon-based material Substances 0.000 claims description 5
- 239000010408 film Substances 0.000 description 177
- 239000007789 gas Substances 0.000 description 116
- 239000010410 layer Substances 0.000 description 86
- 229910045601 alloy Inorganic materials 0.000 description 62
- 239000000956 alloy Substances 0.000 description 62
- 229910020630 Co Ni Inorganic materials 0.000 description 59
- 229910002440 CoâNi Inorganic materials 0.000 description 59
- 239000000203 mixture Substances 0.000 description 48
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 38
- 239000001301 oxygen Substances 0.000 description 38
- 229910052760 oxygen Inorganic materials 0.000 description 38
- NKSJNEHGWDZZQF-UHFFFAOYSA-N ethenyl(trimethoxy)silane Chemical compound CO[Si](OC)(OC)C=C NKSJNEHGWDZZQF-UHFFFAOYSA-N 0.000 description 31
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 22
- 238000000921 elemental analysis Methods 0.000 description 22
- 238000007599 discharging Methods 0.000 description 21
- 229910000990 Ni alloy Inorganic materials 0.000 description 18
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 17
- 230000000052 comparative effect Effects 0.000 description 17
- 238000006243 chemical reaction Methods 0.000 description 12
- 238000006116 polymerization reaction Methods 0.000 description 11
- 238000004804 winding Methods 0.000 description 10
- 229910052757 nitrogen Inorganic materials 0.000 description 8
- 239000010409 thin film Substances 0.000 description 8
- 238000004458 analytical method Methods 0.000 description 7
- 150000001875 compounds Chemical class 0.000 description 7
- 230000006866 deterioration Effects 0.000 description 7
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 6
- 238000005260 corrosion Methods 0.000 description 6
- 230000007797 corrosion Effects 0.000 description 6
- FFUAGWLWBBFQJT-UHFFFAOYSA-N hexamethyldisilazane Chemical compound C[Si](C)(C)N[Si](C)(C)C FFUAGWLWBBFQJT-UHFFFAOYSA-N 0.000 description 6
- 239000000696 magnetic material Substances 0.000 description 6
- -1 rhodium and chromium Chemical class 0.000 description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 5
- 238000005299 abrasion Methods 0.000 description 5
- 229910052799 carbon Inorganic materials 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- 238000004132 cross linking Methods 0.000 description 5
- 239000001257 hydrogen Substances 0.000 description 5
- 229910052739 hydrogen Inorganic materials 0.000 description 5
- CZDYPVPMEAXLPK-UHFFFAOYSA-N tetramethylsilane Chemical compound C[Si](C)(C)C CZDYPVPMEAXLPK-UHFFFAOYSA-N 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 4
- YTPLMLYBLZKORZ-UHFFFAOYSA-N Thiophene Chemical compound C=1C=CSC=1 YTPLMLYBLZKORZ-UHFFFAOYSA-N 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000001816 cooling Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 4
- WEVYAHXRMPXWCK-UHFFFAOYSA-N Acetonitrile Chemical compound CC#N WEVYAHXRMPXWCK-UHFFFAOYSA-N 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 3
- HTDJPCNNEPUOOQ-UHFFFAOYSA-N hexamethylcyclotrisiloxane Chemical compound C[Si]1(C)O[Si](C)(C)O[Si](C)(C)O1 HTDJPCNNEPUOOQ-UHFFFAOYSA-N 0.000 description 3
- UQEAIHBTYFGYIE-UHFFFAOYSA-N hexamethyldisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)C UQEAIHBTYFGYIE-UHFFFAOYSA-N 0.000 description 3
- 230000001050 lubricating effect Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- PARWUHTVGZSQPD-UHFFFAOYSA-N phenylsilane Chemical compound [SiH3]C1=CC=CC=C1 PARWUHTVGZSQPD-UHFFFAOYSA-N 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- WGGNJZRNHUJNEM-UHFFFAOYSA-N 2,2,4,4,6,6-hexamethyl-1,3,5,2,4,6-triazatrisilinane Chemical compound C[Si]1(C)N[Si](C)(C)N[Si](C)(C)N1 WGGNJZRNHUJNEM-UHFFFAOYSA-N 0.000 description 2
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 2
- 239000005977 Ethylene Substances 0.000 description 2
- YLQBMQCUIZJEEH-UHFFFAOYSA-N Furan Chemical compound C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 2
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 2
- 229910017709 Ni Co Inorganic materials 0.000 description 2
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 2
- 229910001297 Zn alloy Inorganic materials 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 229910001566 austenite Inorganic materials 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 229910001882 dioxygen Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001941 electron spectroscopy Methods 0.000 description 2
- ZQBFAOFFOQMSGJ-UHFFFAOYSA-N hexafluorobenzene Chemical compound FC1=C(F)C(F)=C(F)C(F)=C1F ZQBFAOFFOQMSGJ-UHFFFAOYSA-N 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 238000007733 ion plating Methods 0.000 description 2
- 239000006247 magnetic powder Substances 0.000 description 2
- 230000005415 magnetization Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000000178 monomer Substances 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 229920006254 polymer film Polymers 0.000 description 2
- 150000003377 silicon compounds Chemical class 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229930192474 thiophene Natural products 0.000 description 2
- WRECIMRULFAWHA-UHFFFAOYSA-N trimethyl borate Chemical compound COB(OC)OC WRECIMRULFAWHA-UHFFFAOYSA-N 0.000 description 2
- CYTQBVOFDCPGCX-UHFFFAOYSA-N trimethyl phosphite Chemical compound COP(OC)OC CYTQBVOFDCPGCX-UHFFFAOYSA-N 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 1
- 239000005047 Allyltrichlorosilane Substances 0.000 description 1
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- 229910004261 CaF 2 Inorganic materials 0.000 description 1
- 229920001747 Cellulose diacetate Polymers 0.000 description 1
- 229920002284 Cellulose triacetate Polymers 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- PYVHTIWHNXTVPF-UHFFFAOYSA-N F.F.F.F.C=C Chemical compound F.F.F.F.C=C PYVHTIWHNXTVPF-UHFFFAOYSA-N 0.000 description 1
- 229910001030 Ironânickel alloy Inorganic materials 0.000 description 1
- 229910003267 Ni-Co Inorganic materials 0.000 description 1
- 229910003262 NiâCo Inorganic materials 0.000 description 1
- 229910018487 NiâCr Inorganic materials 0.000 description 1
- 229910001096 P alloy Inorganic materials 0.000 description 1
- YGYAWVDWMABLBF-UHFFFAOYSA-N Phosgene Chemical compound ClC(Cl)=O YGYAWVDWMABLBF-UHFFFAOYSA-N 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 229910018557 Si O Inorganic materials 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- NNLVGZFZQQXQNW-ADJNRHBOSA-N [(2r,3r,4s,5r,6s)-4,5-diacetyloxy-3-[(2s,3r,4s,5r,6r)-3,4,5-triacetyloxy-6-(acetyloxymethyl)oxan-2-yl]oxy-6-[(2r,3r,4s,5r,6s)-4,5,6-triacetyloxy-2-(acetyloxymethyl)oxan-3-yl]oxyoxan-2-yl]methyl acetate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](OC(C)=O)[C@H]1OC(C)=O)O[C@H]1[C@@H]([C@@H](OC(C)=O)[C@H](OC(C)=O)[C@@H](COC(C)=O)O1)OC(C)=O)COC(=O)C)[C@@H]1[C@@H](COC(C)=O)O[C@@H](OC(C)=O)[C@H](OC(C)=O)[C@H]1OC(C)=O NNLVGZFZQQXQNW-ADJNRHBOSA-N 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- RLECCBFNWDXKPK-UHFFFAOYSA-N bis(trimethylsilyl)sulfide Chemical compound C[Si](C)(C)S[Si](C)(C)C RLECCBFNWDXKPK-UHFFFAOYSA-N 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- ACAUYCZBWABOLI-UHFFFAOYSA-N bromomethyl(trimethyl)silane Chemical compound C[Si](C)(C)CBr ACAUYCZBWABOLI-UHFFFAOYSA-N 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 229920002678 cellulose Polymers 0.000 description 1
- 239000001913 cellulose Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- XRRDNAZMVAXXQP-UHFFFAOYSA-N difluoro(dimethyl)silane Chemical compound C[Si](C)(F)F XRRDNAZMVAXXQP-UHFFFAOYSA-N 0.000 description 1
- JJQZDUKDJDQPMQ-UHFFFAOYSA-N dimethoxy(dimethyl)silane Chemical compound CO[Si](C)(C)OC JJQZDUKDJDQPMQ-UHFFFAOYSA-N 0.000 description 1
- UBHZUDXTHNMNLD-UHFFFAOYSA-N dimethylsilane Chemical compound C[SiH2]C UBHZUDXTHNMNLD-UHFFFAOYSA-N 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- VDCSGNNYCFPWFK-UHFFFAOYSA-N diphenylsilane Chemical compound C=1C=CC=CC=1[SiH2]C1=CC=CC=C1 VDCSGNNYCFPWFK-UHFFFAOYSA-N 0.000 description 1
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 description 1
- FWDBOZPQNFPOLF-UHFFFAOYSA-N ethenyl(triethoxy)silane Chemical compound CCO[Si](OCC)(OCC)C=C FWDBOZPQNFPOLF-UHFFFAOYSA-N 0.000 description 1
- GCSJLQSCSDMKTP-UHFFFAOYSA-N ethenyl(trimethyl)silane Chemical compound C[Si](C)(C)C=C GCSJLQSCSDMKTP-UHFFFAOYSA-N 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- NEXSMEBSBIABKL-UHFFFAOYSA-N hexamethyldisilane Chemical compound C[Si](C)(C)[Si](C)(C)C NEXSMEBSBIABKL-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000005055 methyl trichlorosilane Substances 0.000 description 1
- JLUFWMXJHAVVNN-UHFFFAOYSA-N methyltrichlorosilane Chemical compound C[Si](Cl)(Cl)Cl JLUFWMXJHAVVNN-UHFFFAOYSA-N 0.000 description 1
- BFXIKLCIZHOAAZ-UHFFFAOYSA-N methyltrimethoxysilane Chemical compound CO[Si](C)(OC)OC BFXIKLCIZHOAAZ-UHFFFAOYSA-N 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000005054 phenyltrichlorosilane Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Inorganic materials [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 description 1
- ABTOQLMXBSRXSM-UHFFFAOYSA-N silicon tetrafluoride Chemical compound F[Si](F)(F)F ABTOQLMXBSRXSM-UHFFFAOYSA-N 0.000 description 1
- 239000000344 soap Substances 0.000 description 1
- ORVMIVQULIKXCP-UHFFFAOYSA-N trichloro(phenyl)silane Chemical compound Cl[Si](Cl)(Cl)C1=CC=CC=C1 ORVMIVQULIKXCP-UHFFFAOYSA-N 0.000 description 1
- HKFSBKQQYCMCKO-UHFFFAOYSA-N trichloro(prop-2-enyl)silane Chemical compound Cl[Si](Cl)(Cl)CC=C HKFSBKQQYCMCKO-UHFFFAOYSA-N 0.000 description 1
- ISPSHPOFLYFIRR-UHFFFAOYSA-N trihexylsilicon Chemical compound CCCCCC[Si](CCCCCC)CCCCCC ISPSHPOFLYFIRR-UHFFFAOYSA-N 0.000 description 1
- HYWCXWRMUZYRPH-UHFFFAOYSA-N trimethyl(prop-2-enyl)silane Chemical compound C[Si](C)(C)CC=C HYWCXWRMUZYRPH-UHFFFAOYSA-N 0.000 description 1
- AKQNYQDSIDKVJZ-UHFFFAOYSA-N triphenylsilane Chemical compound C1=CC=CC=C1[SiH](C=1C=CC=CC=1)C1=CC=CC=C1 AKQNYQDSIDKVJZ-UHFFFAOYSA-N 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/72—Protective coatings, e.g. anti-static or antifriction
Description
ãaã ç£æ¥äžã®å©çšåéïŒ
æ¬çºæã¯ç£æ°èšé²åªäœã®æ¹è¯ã«é¢ãããã®ã§ã
ããç¹ã«ãªãŒãã³ãŒãå±€ã®èµ°è¡æ§ãèæ©èæ§ãã
ã³èé£æ§ãåäžããèèåç£æ°èšé²åªäœããã³ã
ã®è£œé æ¹æ³ã«é¢ããã ãbã åŸæ¥æè¡ïŒ ç£æ°èšé²åªäœãç£æ§å±€åœ¢ææ¹æ³ã®é¢ã§åé¡ãã
ãšã(1)èèåã®ãã®ãšã(2)å¡åžåã®ãã®ãšã«åã
ãããã èèåç£æ°èšé²åªäœã¯ãæ¯æäœäžã«ç£æ§ææã
ç空èžçãã¹ããã¿ãªã³ã°ãã€ãªã³ãã¬ãŒãã€ã³
ã°ãã¡ããçã®æ¹æ³ã«ããç£æ§çžã圢æãããã®
ã§ããã å¡åžåç£æ°èšé²åªäœã¯ãæ¯æäœäžã«ç£æ§ç²ãã
ã€ã³ããŒã§ç²çããç£æ§å¡æãå¡åžããŠç£æ§å±€ã
圢æãããã®ã§ããããã®å¡åžåç£æ°èšé²åªäœ
ã¯ããã€ã³ããŒå«æåã ãç£æ§å±€ã«ãããåäœå®¹
ç©åœãã®å®è³ªå å¡«çãäœãããŸããç£æ°ããããš
ã®éã®ã¹ããŒã·ã³ã°ãã¹ã倧ãããªãããåçåº
åãå°ãããªãã ããã«åããèèåç£æ°èšé²åªäœã¯ãç£æ§å±€å
ã§ã®ç£æ§ç²ã®å®è³ªçå å¡«çã¯é«ãããã©ããç£æ§
å±€ã®èé£æ§ãäœããèµ°è¡æã«ç£æ°ããããã¬ã€ã
ããŒã©çãšæ¥è§Šããã¹ãªå·ãä»ããããããã€ãº
çºçã®åå ãšãªãããŸãæ©æŠä¿æ°ã倧ãããèµ°è¡
æ§ãæªããæ©æ¢°ç匷床ã匱ãæ¬ ç¹ãããã èèåç£æ°èšé²åªäœã«ãããäžè¿°ã®æ¬ ç¹ãæ¹å
ãããããåŸæ¥ããç£æ§å±€äžé¢ã«ãç空èžçãã¹
ããã¿ãªã³ã°ãã€ãªã³ãã¬ãŒãã€ã³ã°çã®æ¹æ³ã«
ãã€ãŠããªãŒãã³ãŒãããæ¹æ³ãè¡ãããŠããã
ããªãã¡ã ããžãŠã ãã¯ãã ãªã©ã®éå±ããWCã
TiO2ãCaF2ãMgF2ãªã©ã®é«ç¡¬åºŠç¡æ©ç©ïŒé
å±ã»ãã±ã³ã®ãããªæœ€æ»æ§ææ©ç©ãç空èžçæ³
ã§ãªãŒãã³ãŒãããæ¹æ³ïŒ å¡åžæ³ã«ããã最æ»æ§ææ©å«æå±€ããªãŒãã³
ãŒãããæ¹æ³ïŒ ãã¬ããªããŒæ¶²ãå¡åžåŸãåœè©²å¡åžèã«çŽ«å€
ç·ãé»åç·ãç §å°ããŠéååå¿ããããªãŒãã³
ãŒãå±€ã圢æããæ¹æ³ïŒ ç¹éæ57â167132å·ãå57â167133å·ãå57
â167134å·å ¬å ±æ现æžã«ç€ºãããŠããããã«ã
ç£æ§å±€äžã«çªçŽ ã¬ã¹è¥ããã¯é žçŽ ã¬ã¹ã®ã€ãªã³
åã¯ãããã®ã¬ã¹ããã©ãºãåŠçããããšã«ã
ãçªåèãé žåèããªãŒãã³ãŒãããæ¹æ³ïŒ æå56幎床é»åéä¿¡åŠçåå°äœã»ææéšéå š
åœå€§äŒã«ãããŠçºè¡šãããå倧äŒäºçš¿éNo.175
ïŒ1981ïŒã«ç€ºãããŠããããã«ãã³ãã«ãè
ïŒç£æ§å±€ïŒäžã«ããªã«ã¬ãã·ãªã³ã³ç³»ã¢ããã«
ãããã©ãºãéåèããªãŒãã³ãŒããããããš
çãç¥ãããŠããã ããããåèšããã³ã®æ¹æ³ã§åœ¢æãããèž
çèããã³å¡åžèã¯è匷床ã匱ããç¹ã«ãã«ã
ããŠé«ååå¡åžèã®å Žåã¯èèã«ããã®ãé£ã
ããç£æ°ããããšã®éã«ã¹ããŒã·ã³ã°ãã¹ãç
ããåçåºåãäœäžããæ¬ ç¹ãããã ãŸããã®æ¹æ³ã§åœ¢æãããå¡åžç¡¬åå±€ã¯ãé·
æã«ããã最æ»æ§ãä¿æãã€ã¥ããã®ãå°é£ã§ã
ããã®æ¹æ³ã§åœ¢æãããçªåèãé žåèã¯èµ°è¡
å®å®æ§ã®ç¹ã§æºè¶³ãé£ãã ããã«ãã®æ¹æ³ã§åŸããããªãŒãã³ãŒãè
ã¯ãèé£æ§ã¯è¯å¥œã§ããããèæ©èæ§ãåäžãã
ãããã«ãªãŒãã³ãŒãå±€ãåãããªããã°ãªããª
ãé£ç¹ãããããã®çµæãç£æ°ããããšç£æ§å±€é
ã®ã¹ããŒã·ã³ã°ãã¹ãå¢å€§ããåçåºåãå°ãã
ãªãæ¬ ç¹ãããããã®ç¹ã«é¢ããŠã¯ãåŸæ¥ããç¥
ãããŠãããããšãã°1977幎米åœå åŠäŒ
ïŒOptical Society of AmericaïŒçºè¡ã®åŠè¡éèª
ãã¢ãã©ã€ããªãããã¯ã¹èªãïŒApplied OpticsïŒ
第16巻第ïŒå·ã第717é ãã第721é ã«ãããè«æ
ããã©ãºã ããªãã©ã€ãºã ã³ãŒãã€ã³ã° ã
ãªããªã«ãŒãããŒãïŒã·ã³ã°ã« ã¬ã€ã€ãŒãã¢ã
ã¬ãŒã·ãšã³ ã¬ãžã¹ã¿ã³ããã¢ã³ã ã¢ã³ãã¬ã
ã¬ã¯ã·ãšã³ãïŒPlasma polymerized coating for
porycarbonateïŒsingle layerãabrasion
resistantãand antireflecticnïŒäžã«ãããã«ã
ãªã¡ãã«ãªãã·ã·ã©ã³ãã€ã«ã ã®è¡šé¢ãé žçŽ ã°ã
ãŒæŸé»ã«ããSiâçµåïŒæ¶æ©åºŠïŒãå¢ããè¡šé¢
硬床ãæ©èæ§ãé«ããããšãã§ãããšå ±åãããŠ
ããããã«éåã®æ¶æ©åºŠãå€åããã°ãåœè©²éå
èã®è«žç©æ§ãå€åããã§ãããããšãäºæ³ããã
ãšãã§ãããããããç©æ§å€ã®å€åãããéåè
ã®æ¶æ©åºŠã確å®ã«ææ¡ããæ¹æ³ã¯æªã ç¥ãããŠã
ãªãã æ¬çºæè çã¯ãéåã®æ¶æ©åºŠãå¢ãã°ãå±æç
ãå¿ ç¶çã«å€åããå±æçã®é«ãéåèããªãŒã
ã³ãŒãã«äœ¿çšããããšã«ããèæ©èæ§ã®é«ãç£æ°
èšé²åªäœãäœè£œããããšã®æšæž¬ã®äžã«çš®ã ç 究ã
éãããšããããã©ãºãéåèã®å±æçã1.45以
äžã®ãªãŒãã³ãŒãå±€ãæããç£æ°èšé²åªäœã¯ãå±
æç1.45以äžã®ãªãŒãã³ãŒãå±€ãæããç£æ°èšé²
åªäœã«æ¯ã¹ãŠãåŸè¿°ããåæ©æŠä¿æ°ãã¹ãã«å¯¿åœ
ãé£èºçã«åäžããããšãèŠãåºããæ¬çºæã«å°
éããã ãcã çºæã®ç®çïŒ æ¬çºæã¯èµ°è¡æ§ãèæ©èæ§ããã³èé£æ§ã«åªã
ããªãŒãã³ãŒãå±€ãæããèèåç£æ°èšé²åªäœã
æäŸããããšãç®çãšããã ãŸããæ¬çºæã¯ãã®ãããªèèåç£æ°èšé²åªäœ
ã®è£œé æ¹æ³ãæäŸããããšããç®çãšããã ãdã çºæã®æ§æïŒ åèšæ¬çºæã®ç¬¬ïŒã®ç®çã¯ãæ¯æäœäžã«ãç£æ§
å±€ãšç£æ§å±€äžã«åœ¢æãããªãŒããŒã³ãŒãå±€ãå±æ
ç1.45以äžã§ãããå«ããçŽ ææ©ãã©ãºãéåå±€
ã§æ§æããããã®ã§ããããšã«ãã€ãŠéæãã
ãã æ¬çºæã«ãããç£æ°èšé²åªäœã®ç£æ§å±€äžã«åœ¢æ
ãããªãŒãã³ãŒãå±€ãæ§æãããå±æçã1.45以
äžã®å«ããçŽ ææ©ãã©ãºãéåå±€ã®çµæã¯ã â〠ãã©ãºãéåå±€ãäž»ã«ãããçŽ ïŒSiïŒã®ä»
ã«ãççŽ (C)ãé žçŽ ïŒïŒ¯ïŒããã³æ°ŽçŽ (H)ã«ãã€ãŠ
æ§æããããã®ã§ããã°ãããçŽ ã«å¯ŸããççŽ
ã®çµææ¯ïŒïŒ£ïŒSiïŒã0.1ã2.0ãé žçŽ ã®çµææ¯
ïŒïŒ¯ïŒSiïŒã1.0ã3.0ã§ããããšã奜ãŸããã âã ãŸãããã©ãºãéåå±€ãäž»ã«ãããçŽ ãç
çŽ ãé žçŽ ãçªçŽ ãæ°ŽçŽ ã§æ§æããããã®ã§ãã
ã°ãããçŽ ã«å¯ŸããççŽ ãé žçŽ ãçªçŽ ã®çµææ¯
ã¯ããããã0.1ã2.0ïŒ0.1ã2.0ïŒ0.1ã2.0ã§ã
ãããšã奜ãŸããã å«ããçŽ ãã©ãºãéåå±€ã®çµæã®å¥œãŸãããã®
ãšããŠãããšãã°ãC0.38H0.11Si0.51ïŒC0.44H0.31
O0.32Si0.21ïŒC0.20H0.08O0.05Si0.67ïŒC0.37H0.02O0.1
5
Si0.46ïŒC0.13H0.08O0.46Si0.33ïŒC0.08H0.02O0.52
Si0.38ïŒC0.11H0.03O0.41N0.11Si0.34ïŒC0.05O0.40N0.3
0
Si0.25ïŒC0.07O0.32N0.28Si0.33ïŒC0.32H0.10O0.15N0.2
7
Si0.16ïŒC0.21H0.08O0.18N0.26Si0.27ïŒC0.13H0.08O0.3
5
S0.11Si0.33çããããããã åèšãã©ãºãéåå±€ã¯ãäžéšã«å šãããçŽ åå
ç©ãå«ãã§ããªããŠããããèåã¯20ã1000â«ã®
ç¯å²ã®ãã®ã奜ãŸãããç¹ã«æãŸããèåã¯100
ã500â«ã®ç¯å²ã§ããã20â«æªæºã®èåã®ãã®ã¯
èãããŠãªãŒãã³ãŒãå±€ãšããŠã®å¹æããªãã
1000â«ãè¶ãããšç£æ§å±€ã®ç£æ°ãããéã®ã¹ããŒ
ã·ã³ã°ãã¯ã倧ããããåçåºåãäœäžããã åèšå«ããçŽ ææ©ãã©ãºãéåå±€ã¯ãç£æ§å±€ã®
äžé¢ã ãã§ãªããç£æ§å±€åœ¢æé¢ãšå察åŽã®æ¯æäœ
è£é¢ã«ã圢æã§ãããã®æ¹æ³ã«äŸããæ¯æäœã®
ãåãããé²ãããšãã§ããã ãŸããå¿ èŠã«å¿ããå«ããçŽ ææ©ãã©ãºãéå
å±€äžé¢ã«ã最æ»å±€ã圢æããŠãããã æ¬çºæã«ãããç£æ°èšé²åªäœã®è£œé æ¹æ³ã¯ãæ¯
æäœäžã«ç£æ§å±€ã圢æããåŸã該ç£æ§å±€äžã«ãã
ãŠãããçŽ å«æååç©ãšéãã©ãºãéåæ§ã¬ã¹ãš
ãåæã«ãã©ãºãéååŠçããåèšç£æ§å±€äžã«å«
ããçŽ ææ©ãã©ã¹ãéåå±€ã§æ§æãããå±æç
1.45以äžã®ãªãŒããŒã³ãŒãå±€ã圢æããããšã«ã
ã€ãŠéæãããã æ¬çºæã«ãããç£æ°èšé²åªäœã®è£œé æ¹æ³ã«ãã
ãããçŽ ååç©ãšéãã©ãºãéåæ§ã¬ã¹ã®ãã©ãº
ãéååŠçã¯ããã©ãºãéåæ³ãšç§°ãããéåæ¹
æ³ãªããã©ã®ãããªæ¹æ³ãè¡ã€ãŠããããããã
çŽ ãå«æããååç©ã®ã¬ã¹ãšãå¿ èŠã«å¿ããŠä»ã®
ååç©ãããã¯ã¢ã«ãŽã³ïŒArïŒãããªã³ïŒNeïŒ
çã®äžæŽ»æ§ã¬ã¹ãéåããŠãåå¿ç©ºéã«å°å ¥ãã
ãã®ç©ºéã«ãããŠã°ããŒæŸé»ãããæ¯æäœäžã®ç£
æ§å±€äžã«æåºãããæ¹æ³ã奜ãŸããã ãã©ãºãéåã«äœ¿çšããããçŽ å«æååç©ã®ã¬
ã¹ãšããŠã¯ãã¢ãã·ã©ã³ïŒãžã·ã©ã³ïŒããã©ã¡ã
ã«ã·ã©ã³ïŒããã«ããªã¡ãã«ã·ã©ã³ïŒã¢ãªã«ããª
ã¡ãã«ã·ã©ã³ïŒããšãã«ã·ã©ã³ïŒãžããšãã«ã·ã©
ã³ïŒããªããšãã«ã·ã©ã³ïŒãžã¡ãã«ã·ã©ã³ïŒããª
ããã·ã«ã·ã©ã³ïŒããã©ããã·ã·ã©ã³ïŒããã©ãš
ããã·ã·ã©ã³ïŒã¡ãã«ããªã¡ããã·ã·ã©ã³ïŒãã
ã«ããªã¡ããã·ã·ã©ã³ïŒããã«ããªãšããã·ã·ã©
ã³ïŒãžã¡ãã«ãžã¡ããã·ã·ã©ã³ïŒãããµã¡ãã«ãž
ã·ãããµã³ïŒãããµã«ã¡ãã«ãžã·ã©ã¶ã³ïŒãããµ
ã¡ãã«ã·ã¯ãããªã·ãããµã³ïŒãããµã¡ãã«ã·ã¯
ãããªã·ã©ã¶ã³ïŒãããµã¡ãã«ãžã·ã©ã³ïŒãããµ
ã¡ãã«ãžã·ã«ãã¢ã³ïŒããã©ãã«ãªãã·ã©ã³ïŒã
ãã©ã¯ãã«ã·ã©ã³ïŒã¡ãã«ããªã¯ãã«ã·ã©ã³ïŒã
ãããªã¯ãã«ã·ã©ã³ïŒã¢ãªã«ããªã¯ãã«ã·ã©ã³ïŒ
ããšãã«ããªã¯ãã«ã·ã©ã³ïŒãžã¡ãã«ãžãžã¯ãã«
ã·ã©ã³ïŒãžã¡ãã«ã«ãžãã«ãªãã·ã©ã³ïŒããã¢ã¡
ãã«ããªã¡ãã«ã·ã©ã³çãããæ®çºæ§ãæããã
ãçŽ å«æååç©ã®ã¬ã¹ã§ããã°ãªãã§ãè¯ãããŸ
ããä»ã®ååç©ãšããŠã¯ããšãã¬ã³ãã¢ã»ãã¬
ã³ããžãã©ã³ããã¹ã²ã³çã®åžžæž©ã§æ°äœã®ååç©
ã§ãã€ãŠãè¯ãããåã¯ã¡ãã«ã¡ã¿ã¯ãªã¬ãŒãïŒ
ã¹ãã¬ã³ïŒã¢ã¯ãªããããªã«ïŒå¡©åããã«ïŒååŒ
åãšãã¬ã³ïŒçã®ããããã¢ãããŒã§ãã€ãŠãã
ããããã³ãŒã³ïŒãã«ãšã³ïŒãããµã³ïŒã¢ã»ãã
ããªã«ïŒããŒãã«ãªããã³ãŒã³ïŒããªãžã³ïŒãã©
ã³ïŒããªããšã³ïŒããªã¡ãã«ããªã¹ãã¢ã€ãïŒã
ãªã¡ãã«ãã¬ãŒãçäžè¬ã«ã¯ééåæ§ã®ååç©ã§
ãã€ãŠãããã ãã©ãºãéåã«çšããååç©ãšããŠæäœäžã®èŠ³
ç¹ãããåžžæž©ã§æ²žç¹ã200â以äžã®ååç©ã奜ãŸ
ããã150â以äžã§ãããã®ããã奜ãŸããã ãŸããæ¬çºæã«ãããç£æ°èšé²åªäœã®è£œé æ¹æ³
ã«äœ¿çšã§ããéãã©ãºãæ§éåã¬ã¹ãšããŠãé ž
çŽ ãæ°ŽçŽ ãçªçŽ ã奜ãŸãããç¹ã«é žçŽ ã»çªçŽ ã¯ã
ãã©ãºãéåæ§ã¬ã¹ãšåå¿ããŠæ¶æ©ç¹ã圢æãã
ã®ã¿ãªããèªèº«ãéåå±€äžã«ãšã蟌ãŸãã匷ãçµ
åãçæããèæ©èæ§ãåäžããç¹ã§å¥œãŸããã æ¬çºæã«ãããç£æ°èšé²åªäœã®è£œé æ¹æ³ã«ãã
ãŠã¯ããã©ãºãéåæ¡ä»¶ãé©å®èª¿æŽããããšã«ã
ãããã©ãºãéåå±€å ã«å éšå¿åãçºçãããç£
æ§å±€ã®å察åŽïŒããªãã¡ãæ¯æäœã®è£é¢åŽïŒã«å
ã€ãŠæ¯æäœã«åããäžããããšãã§ãããããã
ã€ãŠãæ¯æäœäžã«ç£æ§å±€ã圢æããéãæ¯æäœã
ç£æ§å±€åœ¢æé¢ã«åãçŸè±¡ïŒããããã«ããã³ã°ïŒ
ãçžæ®ºããããšãã§ããããã®ã«ããã³ã°ãçžæ®º
ãããã©ãºãéåèãäœè£œããéãã¢ã«ãŽã³
ïŒArïŒçã®ç¬¬ïŒæåã¬ã¹ã®å°å ¥ãå°ãªãããããš
ãæãŸããã æ¬çºæã«ãããç£æ°èšé²åªäœã®ç£æ§å±€ã«äœ¿çšã§
ããç£æ§ææã¯ãåŸæ¥ãã䜿çšãããŠããå ¬ç¥ã®
ãã®ã§ãããããããç£æ§ææãšããŠÎ³â
Fe2O3ãCoå«æγâFe2O3ãCo被çγâFe2O3ã
Fe3O4ãCoå«æFe3O4ãCrO2çã®ããããé žåç©
ç³»ç£æ§ææïŒ FeâNiâCoåéãFeâMnâZnåéãFeâNi
âZnåéãFeâCoâNiâCråéãFeâCoâNi
âåéãCoâNiåéçFeãNi Coãäž»æåãš
ããåéç³»ç£æ§ææçåçš®ã®ç£æ§ææãæããã
ãã æ¯æäœäžã«ç£æ§å±€ã圢æããæ¹æ³ãšããŠãå ¬ç¥
ã®ç空èžçãã¹ããã¿ãªã³ã°ãã€ãªã³ãã¬ãŒãã€
ã³ã°ãã¡ããæ³çãæãããããåéç³»ã®ç£æ§æ
æã䜿çšããå Žåã¯ãçµæãå€åããªãããã«çµ
æãå¶åŸ¡ããŠèžçåã¯ã¡ããããªãã°ãªããªãã æ¯æäœã®çŽ æãšããŠã¯ãããªãšãã¬ã³ãã¬ãã¿
ã¬ãŒããããªãšãã¬ã³âïŒïŒïŒâããã¿ã¬ãŒãç
ã®ããªãšã¹ãã«é¡ãããªãããã¬ã³çã®ããªãªã¬
ãã€ã³é¡ãã»ã«ããŒã¹ããªã¢ã»ããŒããã»ã«ããŒ
ã¹ãã€ã¢ã»ããŒãçã®ã»ã«ããŒã¹èªå°äœãããªã«
ãŒãããŒããªã©ã®ãã©ã¹ããã¯ãCuãAlãZnãª
ã©ã®éå±ãã¬ã©ã¹ãããããããŠãŒã»ã©ããã¯
ïŒããšãã°çªåã»ãçŽ ãçåããçŽ çïŒãªã©ã䜿
çšãããã æ¯æäœã®åœ¢æ ã¯ããŒããã·ãŒããã«ãŒãããã€
ã¹ã¯ããã©ã çãããã§ãããã圢æ ã«å¿ããŠ
çš®ã ã®ææãå¿ èŠã«å¿ããŠéžæãããã ãããã®æ¯æäœã®åã¿ã¯ããã€ã«ã ãã·ãŒãç¶
ã®å Žåã¯çŽïŒã100ÎŒçšåºŠã奜ãŸããã¯ïŒã50ÎŒã§
ããããã€ã¹ã¯ãã«ãŒãç¶ã®å Žåã¯30ÎŒã10mmçš
床ã§ããã ãeã å®æœäŸïŒ 以äžãæ¬çºæã®å®æœäŸã«ã€ããŠèª¬æããã å®æœäŸ ïŒ ç¬¬ïŒå³ã¯ãæ¬çºæã«ãããç£æ°èšé²åªäœã®è£œé
è£ çœ®ã®èŠéšæé¢å³ã瀺ãã 補é è£ çœ®ã¯ãå šäœç¬Šå·ïŒã§ç€ºãã±ãŒã·ã³ã°ãã
æã€ãŠãããã±ãŒã·ã³ã°ïŒã¯ãã«ãžã€ç¶ã®æŸé»å®€
ïŒãæ¯æäœéåºå®€ïŒä»¥äžãåã«ãéåºå®€ããšã
ããïŒïŒãæ¯æäœå·»åã宀ïŒä»¥äžãåã«ãå·»åã
宀ããšãããïŒïŒããæããæŸé»å®€ïŒããã³å·»å
ã宀ïŒïŒæŸé»å®€ïŒããã³éåºå®€ïŒéã«ã¯ç管ïŒã
é£çµãããæ¯æäœéè·¯ã圢æããŠããã éåºã宀ïŒãå·»åã宀ïŒã®åŽå£ã«ã¯å°é管ïŒïŒ
ãä»èšãããŠãããç管ïŒã«ã¯æ管ïŒïŒãé£çµã
ããŠãããå°é管ïŒïŒã®å 端ã¯ãã€ãªã€ã¬ã¹æº
ïŒå³ç€ºãããïŒã«æ¥ç¶ããŠããããŸãæ管ïŒïŒã®å
端ã¯ææ°ç³»ã«ïŒå³ç€ºãããïŒã«æ¥ç¶ããã ãŸããå¿ èŠã«å¿ããŠå·»åã宀ïŒã®åºéšã«ãææ°
ç³»ã«é£ç¶ããä»ã®æ管ïŒïŒâ²ãä»èšããã ããã«ãæŸé»ç®¡ïŒã«ã¯ãäžéšé»æ¥µïŒãšäžéšé»æ¥µ
ïŒãé èšãããŠãããäžéšé»æ¥µïŒã®å éšã¯ç©ºæŽã«
圢æãããäžæ¹ã®ç«¯éšã¯çŽ°ç®¡ã圢æããéãã©ãº
ãéåæ§ã¬ã¹ãœãŒã¹ïŒå³ç€ºãããïŒã«é£ãªããä»
端ã¯æŸé»å®€ç©ºéãšå°éããå€æ°ã®èå·£ç¶å°éåã
èšããããŠãããåèšçŽ°ç®¡ãéããŠç©ºæŽå ã«å°å ¥
ãããéãã©ãºãéåæ§ã¬ã¹ããæŸé»å®€å ãžäŸçµŠ
ã§ããæ§é ãšãªã€ãŠããããŸããäžéšé»æ¥µïŒã¯ã
æŸé»æã«çããçºç±ãå·åŽã§ããããã«æ°Žå·åŒã«
æ§æãããŠãããé»åã¯ããããã³ã°ããã¯ã¹ïŒ
ãä»ããŠé»æºïŒããé«åšæ³¢é»åãäŸçµŠãããã äžèšè£œé è£ çœ®ã䜿çšããç£æ°èšé²åªäœãäœè£œã
ãå Žåã¯ãå ã垯ç¶ã®ããªãšãã¬ã³ãã¬ãã¿ã¬ãŒ
ããã€ã«ã äžã«äºãå ¬ç¥ã®æ¹æ³ã«äŸããCoâNi
åéèãèžçããæ¯æäœïŒïŒãéåºçšãªãŒã«ïŒïŒ
ã«å·»ãåããéåºå®€ïŒã«ã»ããããããªãŒã«ïŒïŒ
ã«å·»ãåãããæ¯æäœïŒïŒã®å 端éšã¯ãã¬ã€ãã
ãŒã©ïŒïŒãéãç管ïŒå ãã¬ã€ããããæŸé»å®€ïŒ
ããå·»åã宀ïŒãžéã蟌ãŸããã å·»åã宀ïŒå ã«ã¯ä»ã®å·»åããªãŒã«ïŒïŒãåã
ä»ããããŠãããåèšéåºå®€åŽã®ãªãŒã«ïŒïŒãã
å·»åã宀ïŒãžéå ¥ãããæ¯æäœïŒïŒãå·»ãåãã
ãã«æ©èœããã äžè¿°ã®ããã«ããŠãã±ãŒã·ã³ã°ïŒå ã«ã»ããã
ããæ¯æäœïŒïŒã®CoâNiåéèäžã«ãåããçŽ
ææ©ãã©ãºãéåå±€ããªãŒãã³ãŒãããã«åœã€ãŠ
ã¯ãå ãææ°ç³»ãäœåããŠãæ管ïŒïŒããã±ãŒã·
ã³ã°ïŒå ãç空ææ°ããåŸãå°é管ïŒïŒããã±ãŒ
ã·ã³ã°ïŒå ãžArã¬ã¹ãäŸçµŠããã 次ã«ãäžéšé»æ¥µïŒã¢ãŒã¹ããäžéšé»æ¥µïŒã«å¯Ÿã
ãŠãããã³ã°ããã¯ã¹ïŒãä»ããŠãé«åšæ³¢é»æºïŒ
ãã13.56MHzÃ50Wã®é«åšæ³¢é»åãäŸçµŠããæŸ
é»å®€å ã«Arããã©ãºããçºçãããæ¯æäœäžã®
CoâNiåéèè¡šé¢ãæž æµã«ããã ã€ãã§ãäžéšé»æ¥µïŒã®çŽ°ç®¡éšãéãã空æŽå®€å
ãžããçŽ å«æååç©ã¬ã¹ïŒ¡ãšããŠããã«ããªã¡ã
ãã·ã·ã©ã³ãéãã©ãºãéåæ§ã¬ã¹ïŒ¢ãšããŠé žçŽ
ãšãã¢ã«æ¯ïŒïŒïŒïŒïŒã§æ··åããã¬ã¹ãå°å ¥ãã
ã±ãŒã·ã³ã°ïŒå ã®å§åã0.11Torrã«ç¶æããå
ã³ãäžéšé»æ¥µïŒã«300Wã®é«åšæ³¢é»åãäŸçµŠãã
æŸé»å®€å ã«Arã¬ã¹ã®æŸé»ãçºçãããæŸé»å®€å
ã«äŸçµŠãããäžèšããã«ããªã¡ããã·ã·ã©ã³ã¬ã¹
ããã³é žçŽ ã¬ã¹ã®ãã©ãºããåèšæ¯æ察ïŒïŒäžã®
CoâNiåéèäžã«ãå«ããçŽ ææ©ãã©ãºãéå
èãšããŠãªãŒãã³ãŒããããã ãã®åŸãå·»åã宀ïŒåŽå°é管ïŒïŒããåŸåŠçã¬
ã¹ãå°å ¥ããç管ïŒã®æ管ïŒïŒãéãã±ãŒã·ã³ã°
å ã®æ®çã¬ã¹ãæé€ããã ããã«ãã±ãŒã·ã³ã°ïŒå ãåžžå§ã«ãã©ããåŸã
å·»åã宀ïŒå ã®ãªãŒã«ïŒïŒãåå€ãããªãŒã«ã«å·»
ãããæ¯æäœïŒïŒäžã®ãªãŒãã³ãŒãå±€ãã¿ãªã¹ã
ãããESCAïŒElectron Spektroscopy for
Chemical AnalysisïŒããã³å çŽ åææ³ã«ããå
æããçµæãèåã¯280â«ã§ãããèçµæã¯C0.22
H0.11O0.49Si0.18ã§ããããšã確èªãããã ããããŠåŸãããæ¯æäœãã12.65mmå·Ÿã«è£æ
ããŠãããªããŒããäœè£œããããã®è©ŠæããŒãã
å®æœäŸããŒãïŒãšããã ãŸãã第ïŒå³ã«ç€ºã補é è£ çœ®ã¯ãæ¯æäœïŒïŒäž
ã«äºãè£ çœ®å€ã§ç£æ§å±€ã圢æããåŸãåœè©²æ¯æäœ
ãè£ çœ®å ã«ã»ãããããªãŒãã³ãŒãããè£ çœ®ã®äž
äŸã瀺ãããã®ã§ãããã第ïŒå³ã«ç€ºãããã«ã
æŸé»å®€ïŒä»¥å€ã«åŸè¿°ããèžç宀ïŒïŒãå ·åãã補
é è£ çœ®ã䜿çšããããšã«ãããæ¯æäœäžãžã®ç£æ§
å±€ã®åœ¢æããå·¥çšãšãç£æ§å±€äžã«ãªãŒãã³ãŒãå±€
ã圢æããå·¥çšãšãåäžè£œé è£ çœ®å ã§äžè²«ããŠè¡
ãããšãã§ããã 第ïŒå³ã«ç€ºãè£ çœ®ã¯ãéåºå®€ïŒãšå·»åã宀ïŒã®
äž¡è ãå Œçšãã宀ïŒïŒãäžå€®ã«é 眮ãã宀ïŒïŒã®
å·Šå³äž¡åŽã«ããããéå£ïŒïŒãéãŠãŠæŸé»å®€ïŒãš
èžç宀ïŒïŒãèšããŠããã èžç宀ïŒïŒã«ã¯ãã¬ã€ãããŒã©ïŒïŒãå·åŽçŒ¶ïŒ
ïŒããã€ãŒïŒïŒãé»åããŒã çºçè£ çœ®ïŒïŒããã³
é®ãžãæ¿ïŒïŒãèšããããŠããã ãªãŒã«ïŒïŒããéããã垯ç¶æ¯æäœïŒïŒã¯éå£
ïŒïŒã«èšãããã现ééè·¯ïŒïŒãéããã¬ã€ãã
ãŒã«ïŒïŒãä»ããŠå·åŽçŒ¶ïŒïŒã®åšåŽé¢ã«å°ãã
ããå·åŽçŒ¶ïŒïŒã®çµåŽé¢ã«ãããŠã¯ãå·åŽçŒ¶ïŒïŒ
ã®äžæ¹ã«èšçœ®ãããé»åããŒã çºçè£ çœ®ã®æäœã«
ãã€ãŠããã€ãŒïŒïŒå ã®CoâNiåéç²ãå ç±ãã
æ¯æäœïŒïŒé¢ã«CoâNiåéèãèžçãããã CoâNiåéèã圢æãããæ¯æäœïŒïŒã¯ãä»
ã®ã¬ã€ãããŒã©ïŒïŒãä»ããŠã现ééè·¯ïŒïŒãé
ããæŸé»å®€ïŒã«éããã第ïŒå³ã«ç€ºã補é è£ çœ®ãš
åæ§ã®æé ãçµãŠãäžéšé»æ¥µïŒå ã«å°å ¥ãããã
ãã«ããªã¡ãã·ã·ã©ã³ãšé žçŽ ã®æ··åã¬ã¹ïŒïŒïŒ
ïŒïŒããæ¯æäœïŒïŒã®CoâNiåéèäžã§ãã©ãº
ãéåããããåäžè£ 眮å ã§æ¯æäœã®ç£æ§å±€ãšã
ãªãŒãã³ãŒãå±€ã®åœ¢æãšãé£ç¶ããŠè¡ãããšãã§
ããã å®æœäŸ ïŒ ç¬¬ïŒå³ã«ç€ºã補é è£ çœ®ãçšããæŸé»å®€ïŒå ã«ã
ããŠæ¯æäœïŒïŒäžé¢ã«åœ¢æããCoâNiåéèäž
ã§ããã«ããªã¡ããã·ã·ã©ã³åã³é žçŽ ãšãã¢ã«æ¯
ã§ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ããã¬ã¹å§
0.11Torrãé«åšæ³¢é»å300Wã®æ¡ä»¶ã§ã°ããŒæŸé»
ããã代ãã«ãäžèšã®è¡šâïŒãNo.ïŒã«ç€ºãããã«
ããªã¡ããã·ã·ã©ã³ããã³é žçŽ ãã¢ã«æ¯ïŒïŒïŒ
ïŒïŒã®å²åã§æ··åããã¬ã¹ãã ã¬ã¹å§ïŒïŒmmTorr äŸçµŠé«åšæ³¢é»åïŒ10W ã®æ¡ä»¶äžã§ã°ããŒæŸé»ããã以å€ã¯ãå®æœäŸïŒãš
åæ§ã®åŠçããã³æé ã«ãããã€ãŠãæ¯æäœïŒïŒ
äžã®CoâNiåéèäžã«å«ããçŽ ææ©ãã©ãºãé
åå±€ã圢æããã äžèšãã©ãºãéå局圢æåŸãã±ãŒã·ã³ã°å ã®æ®
çã¬ã¹ãæé€ããåŸãæ¯æäœïŒïŒãåå€ããæ¯æ
äœäžã®CoâNiåéèäžã«åœ¢æããããªãŒãã³ãŒ
ãå±€ããã¿ãªã¹ããããESCAåã³å çŽ åææ³ã«
ããåæãããšããã èåïŒ300â« èçµæïŒC0.15H0.16O0.48Si0.21 ã§ããããšã確èªã§ããã ããããŠåŸãããæ¯æäœã12.65mmå·Ÿã«è£æã
ãŠãããªããŒããäœè£œããããã®è©ŠæããŒããå®
æœäŸããŒããšããã
ããç¹ã«ãªãŒãã³ãŒãå±€ã®èµ°è¡æ§ãèæ©èæ§ãã
ã³èé£æ§ãåäžããèèåç£æ°èšé²åªäœããã³ã
ã®è£œé æ¹æ³ã«é¢ããã ãbã åŸæ¥æè¡ïŒ ç£æ°èšé²åªäœãç£æ§å±€åœ¢ææ¹æ³ã®é¢ã§åé¡ãã
ãšã(1)èèåã®ãã®ãšã(2)å¡åžåã®ãã®ãšã«åã
ãããã èèåç£æ°èšé²åªäœã¯ãæ¯æäœäžã«ç£æ§ææã
ç空èžçãã¹ããã¿ãªã³ã°ãã€ãªã³ãã¬ãŒãã€ã³
ã°ãã¡ããçã®æ¹æ³ã«ããç£æ§çžã圢æãããã®
ã§ããã å¡åžåç£æ°èšé²åªäœã¯ãæ¯æäœäžã«ç£æ§ç²ãã
ã€ã³ããŒã§ç²çããç£æ§å¡æãå¡åžããŠç£æ§å±€ã
圢æãããã®ã§ããããã®å¡åžåç£æ°èšé²åªäœ
ã¯ããã€ã³ããŒå«æåã ãç£æ§å±€ã«ãããåäœå®¹
ç©åœãã®å®è³ªå å¡«çãäœãããŸããç£æ°ããããš
ã®éã®ã¹ããŒã·ã³ã°ãã¹ã倧ãããªãããåçåº
åãå°ãããªãã ããã«åããèèåç£æ°èšé²åªäœã¯ãç£æ§å±€å
ã§ã®ç£æ§ç²ã®å®è³ªçå å¡«çã¯é«ãããã©ããç£æ§
å±€ã®èé£æ§ãäœããèµ°è¡æã«ç£æ°ããããã¬ã€ã
ããŒã©çãšæ¥è§Šããã¹ãªå·ãä»ããããããã€ãº
çºçã®åå ãšãªãããŸãæ©æŠä¿æ°ã倧ãããèµ°è¡
æ§ãæªããæ©æ¢°ç匷床ã匱ãæ¬ ç¹ãããã èèåç£æ°èšé²åªäœã«ãããäžè¿°ã®æ¬ ç¹ãæ¹å
ãããããåŸæ¥ããç£æ§å±€äžé¢ã«ãç空èžçãã¹
ããã¿ãªã³ã°ãã€ãªã³ãã¬ãŒãã€ã³ã°çã®æ¹æ³ã«
ãã€ãŠããªãŒãã³ãŒãããæ¹æ³ãè¡ãããŠããã
ããªãã¡ã ããžãŠã ãã¯ãã ãªã©ã®éå±ããWCã
TiO2ãCaF2ãMgF2ãªã©ã®é«ç¡¬åºŠç¡æ©ç©ïŒé
å±ã»ãã±ã³ã®ãããªæœ€æ»æ§ææ©ç©ãç空èžçæ³
ã§ãªãŒãã³ãŒãããæ¹æ³ïŒ å¡åžæ³ã«ããã最æ»æ§ææ©å«æå±€ããªãŒãã³
ãŒãããæ¹æ³ïŒ ãã¬ããªããŒæ¶²ãå¡åžåŸãåœè©²å¡åžèã«çŽ«å€
ç·ãé»åç·ãç §å°ããŠéååå¿ããããªãŒãã³
ãŒãå±€ã圢æããæ¹æ³ïŒ ç¹éæ57â167132å·ãå57â167133å·ãå57
â167134å·å ¬å ±æ现æžã«ç€ºãããŠããããã«ã
ç£æ§å±€äžã«çªçŽ ã¬ã¹è¥ããã¯é žçŽ ã¬ã¹ã®ã€ãªã³
åã¯ãããã®ã¬ã¹ããã©ãºãåŠçããããšã«ã
ãçªåèãé žåèããªãŒãã³ãŒãããæ¹æ³ïŒ æå56幎床é»åéä¿¡åŠçåå°äœã»ææéšéå š
åœå€§äŒã«ãããŠçºè¡šãããå倧äŒäºçš¿éNo.175
ïŒ1981ïŒã«ç€ºãããŠããããã«ãã³ãã«ãè
ïŒç£æ§å±€ïŒäžã«ããªã«ã¬ãã·ãªã³ã³ç³»ã¢ããã«
ãããã©ãºãéåèããªãŒãã³ãŒããããããš
çãç¥ãããŠããã ããããåèšããã³ã®æ¹æ³ã§åœ¢æãããèž
çèããã³å¡åžèã¯è匷床ã匱ããç¹ã«ãã«ã
ããŠé«ååå¡åžèã®å Žåã¯èèã«ããã®ãé£ã
ããç£æ°ããããšã®éã«ã¹ããŒã·ã³ã°ãã¹ãç
ããåçåºåãäœäžããæ¬ ç¹ãããã ãŸããã®æ¹æ³ã§åœ¢æãããå¡åžç¡¬åå±€ã¯ãé·
æã«ããã最æ»æ§ãä¿æãã€ã¥ããã®ãå°é£ã§ã
ããã®æ¹æ³ã§åœ¢æãããçªåèãé žåèã¯èµ°è¡
å®å®æ§ã®ç¹ã§æºè¶³ãé£ãã ããã«ãã®æ¹æ³ã§åŸããããªãŒãã³ãŒãè
ã¯ãèé£æ§ã¯è¯å¥œã§ããããèæ©èæ§ãåäžãã
ãããã«ãªãŒãã³ãŒãå±€ãåãããªããã°ãªããª
ãé£ç¹ãããããã®çµæãç£æ°ããããšç£æ§å±€é
ã®ã¹ããŒã·ã³ã°ãã¹ãå¢å€§ããåçåºåãå°ãã
ãªãæ¬ ç¹ãããããã®ç¹ã«é¢ããŠã¯ãåŸæ¥ããç¥
ãããŠãããããšãã°1977幎米åœå åŠäŒ
ïŒOptical Society of AmericaïŒçºè¡ã®åŠè¡éèª
ãã¢ãã©ã€ããªãããã¯ã¹èªãïŒApplied OpticsïŒ
第16巻第ïŒå·ã第717é ãã第721é ã«ãããè«æ
ããã©ãºã ããªãã©ã€ãºã ã³ãŒãã€ã³ã° ã
ãªããªã«ãŒãããŒãïŒã·ã³ã°ã« ã¬ã€ã€ãŒãã¢ã
ã¬ãŒã·ãšã³ ã¬ãžã¹ã¿ã³ããã¢ã³ã ã¢ã³ãã¬ã
ã¬ã¯ã·ãšã³ãïŒPlasma polymerized coating for
porycarbonateïŒsingle layerãabrasion
resistantãand antireflecticnïŒäžã«ãããã«ã
ãªã¡ãã«ãªãã·ã·ã©ã³ãã€ã«ã ã®è¡šé¢ãé žçŽ ã°ã
ãŒæŸé»ã«ããSiâçµåïŒæ¶æ©åºŠïŒãå¢ããè¡šé¢
硬床ãæ©èæ§ãé«ããããšãã§ãããšå ±åãããŠ
ããããã«éåã®æ¶æ©åºŠãå€åããã°ãåœè©²éå
èã®è«žç©æ§ãå€åããã§ãããããšãäºæ³ããã
ãšãã§ãããããããç©æ§å€ã®å€åãããéåè
ã®æ¶æ©åºŠã確å®ã«ææ¡ããæ¹æ³ã¯æªã ç¥ãããŠã
ãªãã æ¬çºæè çã¯ãéåã®æ¶æ©åºŠãå¢ãã°ãå±æç
ãå¿ ç¶çã«å€åããå±æçã®é«ãéåèããªãŒã
ã³ãŒãã«äœ¿çšããããšã«ããèæ©èæ§ã®é«ãç£æ°
èšé²åªäœãäœè£œããããšã®æšæž¬ã®äžã«çš®ã ç 究ã
éãããšããããã©ãºãéåèã®å±æçã1.45以
äžã®ãªãŒãã³ãŒãå±€ãæããç£æ°èšé²åªäœã¯ãå±
æç1.45以äžã®ãªãŒãã³ãŒãå±€ãæããç£æ°èšé²
åªäœã«æ¯ã¹ãŠãåŸè¿°ããåæ©æŠä¿æ°ãã¹ãã«å¯¿åœ
ãé£èºçã«åäžããããšãèŠãåºããæ¬çºæã«å°
éããã ãcã çºæã®ç®çïŒ æ¬çºæã¯èµ°è¡æ§ãèæ©èæ§ããã³èé£æ§ã«åªã
ããªãŒãã³ãŒãå±€ãæããèèåç£æ°èšé²åªäœã
æäŸããããšãç®çãšããã ãŸããæ¬çºæã¯ãã®ãããªèèåç£æ°èšé²åªäœ
ã®è£œé æ¹æ³ãæäŸããããšããç®çãšããã ãdã çºæã®æ§æïŒ åèšæ¬çºæã®ç¬¬ïŒã®ç®çã¯ãæ¯æäœäžã«ãç£æ§
å±€ãšç£æ§å±€äžã«åœ¢æãããªãŒããŒã³ãŒãå±€ãå±æ
ç1.45以äžã§ãããå«ããçŽ ææ©ãã©ãºãéåå±€
ã§æ§æããããã®ã§ããããšã«ãã€ãŠéæãã
ãã æ¬çºæã«ãããç£æ°èšé²åªäœã®ç£æ§å±€äžã«åœ¢æ
ãããªãŒãã³ãŒãå±€ãæ§æãããå±æçã1.45以
äžã®å«ããçŽ ææ©ãã©ãºãéåå±€ã®çµæã¯ã â〠ãã©ãºãéåå±€ãäž»ã«ãããçŽ ïŒSiïŒã®ä»
ã«ãççŽ (C)ãé žçŽ ïŒïŒ¯ïŒããã³æ°ŽçŽ (H)ã«ãã€ãŠ
æ§æããããã®ã§ããã°ãããçŽ ã«å¯ŸããççŽ
ã®çµææ¯ïŒïŒ£ïŒSiïŒã0.1ã2.0ãé žçŽ ã®çµææ¯
ïŒïŒ¯ïŒSiïŒã1.0ã3.0ã§ããããšã奜ãŸããã âã ãŸãããã©ãºãéåå±€ãäž»ã«ãããçŽ ãç
çŽ ãé žçŽ ãçªçŽ ãæ°ŽçŽ ã§æ§æããããã®ã§ãã
ã°ãããçŽ ã«å¯ŸããççŽ ãé žçŽ ãçªçŽ ã®çµææ¯
ã¯ããããã0.1ã2.0ïŒ0.1ã2.0ïŒ0.1ã2.0ã§ã
ãããšã奜ãŸããã å«ããçŽ ãã©ãºãéåå±€ã®çµæã®å¥œãŸãããã®
ãšããŠãããšãã°ãC0.38H0.11Si0.51ïŒC0.44H0.31
O0.32Si0.21ïŒC0.20H0.08O0.05Si0.67ïŒC0.37H0.02O0.1
5
Si0.46ïŒC0.13H0.08O0.46Si0.33ïŒC0.08H0.02O0.52
Si0.38ïŒC0.11H0.03O0.41N0.11Si0.34ïŒC0.05O0.40N0.3
0
Si0.25ïŒC0.07O0.32N0.28Si0.33ïŒC0.32H0.10O0.15N0.2
7
Si0.16ïŒC0.21H0.08O0.18N0.26Si0.27ïŒC0.13H0.08O0.3
5
S0.11Si0.33çããããããã åèšãã©ãºãéåå±€ã¯ãäžéšã«å šãããçŽ åå
ç©ãå«ãã§ããªããŠããããèåã¯20ã1000â«ã®
ç¯å²ã®ãã®ã奜ãŸãããç¹ã«æãŸããèåã¯100
ã500â«ã®ç¯å²ã§ããã20â«æªæºã®èåã®ãã®ã¯
èãããŠãªãŒãã³ãŒãå±€ãšããŠã®å¹æããªãã
1000â«ãè¶ãããšç£æ§å±€ã®ç£æ°ãããéã®ã¹ããŒ
ã·ã³ã°ãã¯ã倧ããããåçåºåãäœäžããã åèšå«ããçŽ ææ©ãã©ãºãéåå±€ã¯ãç£æ§å±€ã®
äžé¢ã ãã§ãªããç£æ§å±€åœ¢æé¢ãšå察åŽã®æ¯æäœ
è£é¢ã«ã圢æã§ãããã®æ¹æ³ã«äŸããæ¯æäœã®
ãåãããé²ãããšãã§ããã ãŸããå¿ èŠã«å¿ããå«ããçŽ ææ©ãã©ãºãéå
å±€äžé¢ã«ã最æ»å±€ã圢æããŠãããã æ¬çºæã«ãããç£æ°èšé²åªäœã®è£œé æ¹æ³ã¯ãæ¯
æäœäžã«ç£æ§å±€ã圢æããåŸã該ç£æ§å±€äžã«ãã
ãŠãããçŽ å«æååç©ãšéãã©ãºãéåæ§ã¬ã¹ãš
ãåæã«ãã©ãºãéååŠçããåèšç£æ§å±€äžã«å«
ããçŽ ææ©ãã©ã¹ãéåå±€ã§æ§æãããå±æç
1.45以äžã®ãªãŒããŒã³ãŒãå±€ã圢æããããšã«ã
ã€ãŠéæãããã æ¬çºæã«ãããç£æ°èšé²åªäœã®è£œé æ¹æ³ã«ãã
ãããçŽ ååç©ãšéãã©ãºãéåæ§ã¬ã¹ã®ãã©ãº
ãéååŠçã¯ããã©ãºãéåæ³ãšç§°ãããéåæ¹
æ³ãªããã©ã®ãããªæ¹æ³ãè¡ã€ãŠããããããã
çŽ ãå«æããååç©ã®ã¬ã¹ãšãå¿ èŠã«å¿ããŠä»ã®
ååç©ãããã¯ã¢ã«ãŽã³ïŒArïŒãããªã³ïŒNeïŒ
çã®äžæŽ»æ§ã¬ã¹ãéåããŠãåå¿ç©ºéã«å°å ¥ãã
ãã®ç©ºéã«ãããŠã°ããŒæŸé»ãããæ¯æäœäžã®ç£
æ§å±€äžã«æåºãããæ¹æ³ã奜ãŸããã ãã©ãºãéåã«äœ¿çšããããçŽ å«æååç©ã®ã¬
ã¹ãšããŠã¯ãã¢ãã·ã©ã³ïŒãžã·ã©ã³ïŒããã©ã¡ã
ã«ã·ã©ã³ïŒããã«ããªã¡ãã«ã·ã©ã³ïŒã¢ãªã«ããª
ã¡ãã«ã·ã©ã³ïŒããšãã«ã·ã©ã³ïŒãžããšãã«ã·ã©
ã³ïŒããªããšãã«ã·ã©ã³ïŒãžã¡ãã«ã·ã©ã³ïŒããª
ããã·ã«ã·ã©ã³ïŒããã©ããã·ã·ã©ã³ïŒããã©ãš
ããã·ã·ã©ã³ïŒã¡ãã«ããªã¡ããã·ã·ã©ã³ïŒãã
ã«ããªã¡ããã·ã·ã©ã³ïŒããã«ããªãšããã·ã·ã©
ã³ïŒãžã¡ãã«ãžã¡ããã·ã·ã©ã³ïŒãããµã¡ãã«ãž
ã·ãããµã³ïŒãããµã«ã¡ãã«ãžã·ã©ã¶ã³ïŒãããµ
ã¡ãã«ã·ã¯ãããªã·ãããµã³ïŒãããµã¡ãã«ã·ã¯
ãããªã·ã©ã¶ã³ïŒãããµã¡ãã«ãžã·ã©ã³ïŒãããµ
ã¡ãã«ãžã·ã«ãã¢ã³ïŒããã©ãã«ãªãã·ã©ã³ïŒã
ãã©ã¯ãã«ã·ã©ã³ïŒã¡ãã«ããªã¯ãã«ã·ã©ã³ïŒã
ãããªã¯ãã«ã·ã©ã³ïŒã¢ãªã«ããªã¯ãã«ã·ã©ã³ïŒ
ããšãã«ããªã¯ãã«ã·ã©ã³ïŒãžã¡ãã«ãžãžã¯ãã«
ã·ã©ã³ïŒãžã¡ãã«ã«ãžãã«ãªãã·ã©ã³ïŒããã¢ã¡
ãã«ããªã¡ãã«ã·ã©ã³çãããæ®çºæ§ãæããã
ãçŽ å«æååç©ã®ã¬ã¹ã§ããã°ãªãã§ãè¯ãããŸ
ããä»ã®ååç©ãšããŠã¯ããšãã¬ã³ãã¢ã»ãã¬
ã³ããžãã©ã³ããã¹ã²ã³çã®åžžæž©ã§æ°äœã®ååç©
ã§ãã€ãŠãè¯ãããåã¯ã¡ãã«ã¡ã¿ã¯ãªã¬ãŒãïŒ
ã¹ãã¬ã³ïŒã¢ã¯ãªããããªã«ïŒå¡©åããã«ïŒååŒ
åãšãã¬ã³ïŒçã®ããããã¢ãããŒã§ãã€ãŠãã
ããããã³ãŒã³ïŒãã«ãšã³ïŒãããµã³ïŒã¢ã»ãã
ããªã«ïŒããŒãã«ãªããã³ãŒã³ïŒããªãžã³ïŒãã©
ã³ïŒããªããšã³ïŒããªã¡ãã«ããªã¹ãã¢ã€ãïŒã
ãªã¡ãã«ãã¬ãŒãçäžè¬ã«ã¯ééåæ§ã®ååç©ã§
ãã€ãŠãããã ãã©ãºãéåã«çšããååç©ãšããŠæäœäžã®èŠ³
ç¹ãããåžžæž©ã§æ²žç¹ã200â以äžã®ååç©ã奜ãŸ
ããã150â以äžã§ãããã®ããã奜ãŸããã ãŸããæ¬çºæã«ãããç£æ°èšé²åªäœã®è£œé æ¹æ³
ã«äœ¿çšã§ããéãã©ãºãæ§éåã¬ã¹ãšããŠãé ž
çŽ ãæ°ŽçŽ ãçªçŽ ã奜ãŸãããç¹ã«é žçŽ ã»çªçŽ ã¯ã
ãã©ãºãéåæ§ã¬ã¹ãšåå¿ããŠæ¶æ©ç¹ã圢æãã
ã®ã¿ãªããèªèº«ãéåå±€äžã«ãšã蟌ãŸãã匷ãçµ
åãçæããèæ©èæ§ãåäžããç¹ã§å¥œãŸããã æ¬çºæã«ãããç£æ°èšé²åªäœã®è£œé æ¹æ³ã«ãã
ãŠã¯ããã©ãºãéåæ¡ä»¶ãé©å®èª¿æŽããããšã«ã
ãããã©ãºãéåå±€å ã«å éšå¿åãçºçãããç£
æ§å±€ã®å察åŽïŒããªãã¡ãæ¯æäœã®è£é¢åŽïŒã«å
ã€ãŠæ¯æäœã«åããäžããããšãã§ãããããã
ã€ãŠãæ¯æäœäžã«ç£æ§å±€ã圢æããéãæ¯æäœã
ç£æ§å±€åœ¢æé¢ã«åãçŸè±¡ïŒããããã«ããã³ã°ïŒ
ãçžæ®ºããããšãã§ããããã®ã«ããã³ã°ãçžæ®º
ãããã©ãºãéåèãäœè£œããéãã¢ã«ãŽã³
ïŒArïŒçã®ç¬¬ïŒæåã¬ã¹ã®å°å ¥ãå°ãªãããããš
ãæãŸããã æ¬çºæã«ãããç£æ°èšé²åªäœã®ç£æ§å±€ã«äœ¿çšã§
ããç£æ§ææã¯ãåŸæ¥ãã䜿çšãããŠããå ¬ç¥ã®
ãã®ã§ãããããããç£æ§ææãšããŠÎ³â
Fe2O3ãCoå«æγâFe2O3ãCo被çγâFe2O3ã
Fe3O4ãCoå«æFe3O4ãCrO2çã®ããããé žåç©
ç³»ç£æ§ææïŒ FeâNiâCoåéãFeâMnâZnåéãFeâNi
âZnåéãFeâCoâNiâCråéãFeâCoâNi
âåéãCoâNiåéçFeãNi Coãäž»æåãš
ããåéç³»ç£æ§ææçåçš®ã®ç£æ§ææãæããã
ãã æ¯æäœäžã«ç£æ§å±€ã圢æããæ¹æ³ãšããŠãå ¬ç¥
ã®ç空èžçãã¹ããã¿ãªã³ã°ãã€ãªã³ãã¬ãŒãã€
ã³ã°ãã¡ããæ³çãæãããããåéç³»ã®ç£æ§æ
æã䜿çšããå Žåã¯ãçµæãå€åããªãããã«çµ
æãå¶åŸ¡ããŠèžçåã¯ã¡ããããªãã°ãªããªãã æ¯æäœã®çŽ æãšããŠã¯ãããªãšãã¬ã³ãã¬ãã¿
ã¬ãŒããããªãšãã¬ã³âïŒïŒïŒâããã¿ã¬ãŒãç
ã®ããªãšã¹ãã«é¡ãããªãããã¬ã³çã®ããªãªã¬
ãã€ã³é¡ãã»ã«ããŒã¹ããªã¢ã»ããŒããã»ã«ããŒ
ã¹ãã€ã¢ã»ããŒãçã®ã»ã«ããŒã¹èªå°äœãããªã«
ãŒãããŒããªã©ã®ãã©ã¹ããã¯ãCuãAlãZnãª
ã©ã®éå±ãã¬ã©ã¹ãããããããŠãŒã»ã©ããã¯
ïŒããšãã°çªåã»ãçŽ ãçåããçŽ çïŒãªã©ã䜿
çšãããã æ¯æäœã®åœ¢æ ã¯ããŒããã·ãŒããã«ãŒãããã€
ã¹ã¯ããã©ã çãããã§ãããã圢æ ã«å¿ããŠ
çš®ã ã®ææãå¿ èŠã«å¿ããŠéžæãããã ãããã®æ¯æäœã®åã¿ã¯ããã€ã«ã ãã·ãŒãç¶
ã®å Žåã¯çŽïŒã100ÎŒçšåºŠã奜ãŸããã¯ïŒã50ÎŒã§
ããããã€ã¹ã¯ãã«ãŒãç¶ã®å Žåã¯30ÎŒã10mmçš
床ã§ããã ãeã å®æœäŸïŒ 以äžãæ¬çºæã®å®æœäŸã«ã€ããŠèª¬æããã å®æœäŸ ïŒ ç¬¬ïŒå³ã¯ãæ¬çºæã«ãããç£æ°èšé²åªäœã®è£œé
è£ çœ®ã®èŠéšæé¢å³ã瀺ãã 補é è£ çœ®ã¯ãå šäœç¬Šå·ïŒã§ç€ºãã±ãŒã·ã³ã°ãã
æã€ãŠãããã±ãŒã·ã³ã°ïŒã¯ãã«ãžã€ç¶ã®æŸé»å®€
ïŒãæ¯æäœéåºå®€ïŒä»¥äžãåã«ãéåºå®€ããšã
ããïŒïŒãæ¯æäœå·»åã宀ïŒä»¥äžãåã«ãå·»åã
宀ããšãããïŒïŒããæããæŸé»å®€ïŒããã³å·»å
ã宀ïŒïŒæŸé»å®€ïŒããã³éåºå®€ïŒéã«ã¯ç管ïŒã
é£çµãããæ¯æäœéè·¯ã圢æããŠããã éåºã宀ïŒãå·»åã宀ïŒã®åŽå£ã«ã¯å°é管ïŒïŒ
ãä»èšãããŠãããç管ïŒã«ã¯æ管ïŒïŒãé£çµã
ããŠãããå°é管ïŒïŒã®å 端ã¯ãã€ãªã€ã¬ã¹æº
ïŒå³ç€ºãããïŒã«æ¥ç¶ããŠããããŸãæ管ïŒïŒã®å
端ã¯ææ°ç³»ã«ïŒå³ç€ºãããïŒã«æ¥ç¶ããã ãŸããå¿ èŠã«å¿ããŠå·»åã宀ïŒã®åºéšã«ãææ°
ç³»ã«é£ç¶ããä»ã®æ管ïŒïŒâ²ãä»èšããã ããã«ãæŸé»ç®¡ïŒã«ã¯ãäžéšé»æ¥µïŒãšäžéšé»æ¥µ
ïŒãé èšãããŠãããäžéšé»æ¥µïŒã®å éšã¯ç©ºæŽã«
圢æãããäžæ¹ã®ç«¯éšã¯çŽ°ç®¡ã圢æããéãã©ãº
ãéåæ§ã¬ã¹ãœãŒã¹ïŒå³ç€ºãããïŒã«é£ãªããä»
端ã¯æŸé»å®€ç©ºéãšå°éããå€æ°ã®èå·£ç¶å°éåã
èšããããŠãããåèšçŽ°ç®¡ãéããŠç©ºæŽå ã«å°å ¥
ãããéãã©ãºãéåæ§ã¬ã¹ããæŸé»å®€å ãžäŸçµŠ
ã§ããæ§é ãšãªã€ãŠããããŸããäžéšé»æ¥µïŒã¯ã
æŸé»æã«çããçºç±ãå·åŽã§ããããã«æ°Žå·åŒã«
æ§æãããŠãããé»åã¯ããããã³ã°ããã¯ã¹ïŒ
ãä»ããŠé»æºïŒããé«åšæ³¢é»åãäŸçµŠãããã äžèšè£œé è£ çœ®ã䜿çšããç£æ°èšé²åªäœãäœè£œã
ãå Žåã¯ãå ã垯ç¶ã®ããªãšãã¬ã³ãã¬ãã¿ã¬ãŒ
ããã€ã«ã äžã«äºãå ¬ç¥ã®æ¹æ³ã«äŸããCoâNi
åéèãèžçããæ¯æäœïŒïŒãéåºçšãªãŒã«ïŒïŒ
ã«å·»ãåããéåºå®€ïŒã«ã»ããããããªãŒã«ïŒïŒ
ã«å·»ãåãããæ¯æäœïŒïŒã®å 端éšã¯ãã¬ã€ãã
ãŒã©ïŒïŒãéãç管ïŒå ãã¬ã€ããããæŸé»å®€ïŒ
ããå·»åã宀ïŒãžéã蟌ãŸããã å·»åã宀ïŒå ã«ã¯ä»ã®å·»åããªãŒã«ïŒïŒãåã
ä»ããããŠãããåèšéåºå®€åŽã®ãªãŒã«ïŒïŒãã
å·»åã宀ïŒãžéå ¥ãããæ¯æäœïŒïŒãå·»ãåãã
ãã«æ©èœããã äžè¿°ã®ããã«ããŠãã±ãŒã·ã³ã°ïŒå ã«ã»ããã
ããæ¯æäœïŒïŒã®CoâNiåéèäžã«ãåããçŽ
ææ©ãã©ãºãéåå±€ããªãŒãã³ãŒãããã«åœã€ãŠ
ã¯ãå ãææ°ç³»ãäœåããŠãæ管ïŒïŒããã±ãŒã·
ã³ã°ïŒå ãç空ææ°ããåŸãå°é管ïŒïŒããã±ãŒ
ã·ã³ã°ïŒå ãžArã¬ã¹ãäŸçµŠããã 次ã«ãäžéšé»æ¥µïŒã¢ãŒã¹ããäžéšé»æ¥µïŒã«å¯Ÿã
ãŠãããã³ã°ããã¯ã¹ïŒãä»ããŠãé«åšæ³¢é»æºïŒ
ãã13.56MHzÃ50Wã®é«åšæ³¢é»åãäŸçµŠããæŸ
é»å®€å ã«Arããã©ãºããçºçãããæ¯æäœäžã®
CoâNiåéèè¡šé¢ãæž æµã«ããã ã€ãã§ãäžéšé»æ¥µïŒã®çŽ°ç®¡éšãéãã空æŽå®€å
ãžããçŽ å«æååç©ã¬ã¹ïŒ¡ãšããŠããã«ããªã¡ã
ãã·ã·ã©ã³ãéãã©ãºãéåæ§ã¬ã¹ïŒ¢ãšããŠé žçŽ
ãšãã¢ã«æ¯ïŒïŒïŒïŒïŒã§æ··åããã¬ã¹ãå°å ¥ãã
ã±ãŒã·ã³ã°ïŒå ã®å§åã0.11Torrã«ç¶æããå
ã³ãäžéšé»æ¥µïŒã«300Wã®é«åšæ³¢é»åãäŸçµŠãã
æŸé»å®€å ã«Arã¬ã¹ã®æŸé»ãçºçãããæŸé»å®€å
ã«äŸçµŠãããäžèšããã«ããªã¡ããã·ã·ã©ã³ã¬ã¹
ããã³é žçŽ ã¬ã¹ã®ãã©ãºããåèšæ¯æ察ïŒïŒäžã®
CoâNiåéèäžã«ãå«ããçŽ ææ©ãã©ãºãéå
èãšããŠãªãŒãã³ãŒããããã ãã®åŸãå·»åã宀ïŒåŽå°é管ïŒïŒããåŸåŠçã¬
ã¹ãå°å ¥ããç管ïŒã®æ管ïŒïŒãéãã±ãŒã·ã³ã°
å ã®æ®çã¬ã¹ãæé€ããã ããã«ãã±ãŒã·ã³ã°ïŒå ãåžžå§ã«ãã©ããåŸã
å·»åã宀ïŒå ã®ãªãŒã«ïŒïŒãåå€ãããªãŒã«ã«å·»
ãããæ¯æäœïŒïŒäžã®ãªãŒãã³ãŒãå±€ãã¿ãªã¹ã
ãããESCAïŒElectron Spektroscopy for
Chemical AnalysisïŒããã³å çŽ åææ³ã«ããå
æããçµæãèåã¯280â«ã§ãããèçµæã¯C0.22
H0.11O0.49Si0.18ã§ããããšã確èªãããã ããããŠåŸãããæ¯æäœãã12.65mmå·Ÿã«è£æ
ããŠãããªããŒããäœè£œããããã®è©ŠæããŒãã
å®æœäŸããŒãïŒãšããã ãŸãã第ïŒå³ã«ç€ºã補é è£ çœ®ã¯ãæ¯æäœïŒïŒäž
ã«äºãè£ çœ®å€ã§ç£æ§å±€ã圢æããåŸãåœè©²æ¯æäœ
ãè£ çœ®å ã«ã»ãããããªãŒãã³ãŒãããè£ çœ®ã®äž
äŸã瀺ãããã®ã§ãããã第ïŒå³ã«ç€ºãããã«ã
æŸé»å®€ïŒä»¥å€ã«åŸè¿°ããèžç宀ïŒïŒãå ·åãã補
é è£ çœ®ã䜿çšããããšã«ãããæ¯æäœäžãžã®ç£æ§
å±€ã®åœ¢æããå·¥çšãšãç£æ§å±€äžã«ãªãŒãã³ãŒãå±€
ã圢æããå·¥çšãšãåäžè£œé è£ çœ®å ã§äžè²«ããŠè¡
ãããšãã§ããã 第ïŒå³ã«ç€ºãè£ çœ®ã¯ãéåºå®€ïŒãšå·»åã宀ïŒã®
äž¡è ãå Œçšãã宀ïŒïŒãäžå€®ã«é 眮ãã宀ïŒïŒã®
å·Šå³äž¡åŽã«ããããéå£ïŒïŒãéãŠãŠæŸé»å®€ïŒãš
èžç宀ïŒïŒãèšããŠããã èžç宀ïŒïŒã«ã¯ãã¬ã€ãããŒã©ïŒïŒãå·åŽçŒ¶ïŒ
ïŒããã€ãŒïŒïŒãé»åããŒã çºçè£ çœ®ïŒïŒããã³
é®ãžãæ¿ïŒïŒãèšããããŠããã ãªãŒã«ïŒïŒããéããã垯ç¶æ¯æäœïŒïŒã¯éå£
ïŒïŒã«èšãããã现ééè·¯ïŒïŒãéããã¬ã€ãã
ãŒã«ïŒïŒãä»ããŠå·åŽçŒ¶ïŒïŒã®åšåŽé¢ã«å°ãã
ããå·åŽçŒ¶ïŒïŒã®çµåŽé¢ã«ãããŠã¯ãå·åŽçŒ¶ïŒïŒ
ã®äžæ¹ã«èšçœ®ãããé»åããŒã çºçè£ çœ®ã®æäœã«
ãã€ãŠããã€ãŒïŒïŒå ã®CoâNiåéç²ãå ç±ãã
æ¯æäœïŒïŒé¢ã«CoâNiåéèãèžçãããã CoâNiåéèã圢æãããæ¯æäœïŒïŒã¯ãä»
ã®ã¬ã€ãããŒã©ïŒïŒãä»ããŠã现ééè·¯ïŒïŒãé
ããæŸé»å®€ïŒã«éããã第ïŒå³ã«ç€ºã補é è£ çœ®ãš
åæ§ã®æé ãçµãŠãäžéšé»æ¥µïŒå ã«å°å ¥ãããã
ãã«ããªã¡ãã·ã·ã©ã³ãšé žçŽ ã®æ··åã¬ã¹ïŒïŒïŒ
ïŒïŒããæ¯æäœïŒïŒã®CoâNiåéèäžã§ãã©ãº
ãéåããããåäžè£ 眮å ã§æ¯æäœã®ç£æ§å±€ãšã
ãªãŒãã³ãŒãå±€ã®åœ¢æãšãé£ç¶ããŠè¡ãããšãã§
ããã å®æœäŸ ïŒ ç¬¬ïŒå³ã«ç€ºã補é è£ çœ®ãçšããæŸé»å®€ïŒå ã«ã
ããŠæ¯æäœïŒïŒäžé¢ã«åœ¢æããCoâNiåéèäž
ã§ããã«ããªã¡ããã·ã·ã©ã³åã³é žçŽ ãšãã¢ã«æ¯
ã§ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ããã¬ã¹å§
0.11Torrãé«åšæ³¢é»å300Wã®æ¡ä»¶ã§ã°ããŒæŸé»
ããã代ãã«ãäžèšã®è¡šâïŒãNo.ïŒã«ç€ºãããã«
ããªã¡ããã·ã·ã©ã³ããã³é žçŽ ãã¢ã«æ¯ïŒïŒïŒ
ïŒïŒã®å²åã§æ··åããã¬ã¹ãã ã¬ã¹å§ïŒïŒmmTorr äŸçµŠé«åšæ³¢é»åïŒ10W ã®æ¡ä»¶äžã§ã°ããŒæŸé»ããã以å€ã¯ãå®æœäŸïŒãš
åæ§ã®åŠçããã³æé ã«ãããã€ãŠãæ¯æäœïŒïŒ
äžã®CoâNiåéèäžã«å«ããçŽ ææ©ãã©ãºãé
åå±€ã圢æããã äžèšãã©ãºãéå局圢æåŸãã±ãŒã·ã³ã°å ã®æ®
çã¬ã¹ãæé€ããåŸãæ¯æäœïŒïŒãåå€ããæ¯æ
äœäžã®CoâNiåéèäžã«åœ¢æããããªãŒãã³ãŒ
ãå±€ããã¿ãªã¹ããããESCAåã³å çŽ åææ³ã«
ããåæãããšããã èåïŒ300â« èçµæïŒC0.15H0.16O0.48Si0.21 ã§ããããšã確èªã§ããã ããããŠåŸãããæ¯æäœã12.65mmå·Ÿã«è£æã
ãŠãããªããŒããäœè£œããããã®è©ŠæããŒããå®
æœäŸããŒããšããã
ãè¡šã
ãè¡šã
å®æœäŸ ïŒ
第ïŒå³ã«ç€ºã補é è£
眮ãçšããæŸé»å®€ïŒå
ã«ã¬
ã€ããããæ¯æäœïŒïŒäžã®CoâNiåéèäžã«ã
ããŠãããã«ããªã¡ããã·ã·ã©ã³ãšé žçŽ ãã¢ã«æ¯
ã§ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ0.11Torr äŸçµŠé«åšæ³¢é»åïŒ300W ã§ã°ããŒæŸé»ããã代ãã«ãäžèšã®è¡šâïŒãNo.ïŒ
ã«ç€ºãããã«ããªã¡ããã·ã·ã©ã³ãšçªçŽ ãã¢ã«æ¯
ã§ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ12mmTorr äŸçµŠé«åšæ³¢é»åïŒ15W ã®æ¡ä»¶ã§ã°ããŒæŸé»ããã以å€ã¯ãå®æœäŸïŒãšå
æ§ã®åŠçããã³æé ã«ãããã€ãŠãæ¯æäœïŒïŒäž
ã®CoâNiåéèäžã«å«ããçŽ ææ©ãã©ãºãéå
èã圢æããã äžèšãã©ãºãéåè圢æåŸãã±ãŒã·ã³ã°å ã®æ®
çã¬ã¹ãæé€ããåŸãæ¯æäœïŒïŒãåå€ããæ¯æ
äœïŒïŒäžã®CoâNiåéèã«ãªãŒãã³ãŒããšãã
ãå±€ããã¿ãªã¹ããããESCAåã³å çŽ åææ³ã«
ããåæãããšããã èåïŒ180â« èçµæïŒC0.19H0.12O0.18N0.22Si0.29 ã§ããããšã確èªã§ããã ããããŠåŸãããæ¯æäœã12.65mmå·Ÿã«è£æã
ãŠãããªããŒããäœè£œããããã®è©ŠæããŒããå®
æœäŸããŒãïŒãšããã å®æœäŸ ïŒ ç¬¬ïŒå³ã«ç€ºã補é è£ çœ®ãçšããæŸé»å®€ïŒå ã«ã¬
ã€ããããæ¯æäœïŒïŒäžã®CoâNiåéèäžã«ã
ããŠãããã«ããªã¡ããã·ã·ã©ã³ãšé žçŽ ãã¢ã«æ¯
ã§ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ0.11Torr äŸçµŠé«åšæ³¢é»åïŒ300W ã§ã°ããŒæŸé»ããã代ãã«ãäžèšã®è¡šâïŒãNo.ïŒ
ã«ç€ºãããã«ããªã¡ããã·ã·ã©ã³ãšçªçŽ ãã¢ã«æ¯
ã§ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ16mmTorr äŸçµŠé«åšæ³¢é»åïŒ10W ã®æ¡ä»¶ã§ã°ããŒæŸé»ããã以å€ã¯ãå®æœäŸïŒãšå
æ§ã®åŠçããã³æé ã«ãããã€ãŠãæ¯æäœïŒïŒäž
ã®CoâNiåéèäžã«å«ããçŽ ææ©ãã©ãºãéå
èã圢æããã äžèšãã©ãºãéåè圢æåŸãã±ãŒã·ã³ã°å ã®æ®
çã¬ã¹ãæé€ããåŸãæ¯æäœïŒïŒãåå€ããæ¯æ
äœïŒïŒäžã®CoâNiåéèã«ãªãŒãã³ãŒããšãã
ãå±€ããã¿ãªã¹ããããESCAåã³å çŽ åææ³ã«
ããåæãããšããã èåïŒ160â« èçµæïŒC0.21H0.15O0.16Si0.29 ã§ããããšã確èªã§ããã ããããŠåŸãããæ¯æäœã12.65mmå·Ÿã«è£æã
ãŠãããªããŒããäœè£œããããã®è©ŠæããŒããå®
æœäŸããŒãïŒãšããã å®æœäŸ ïŒ ç¬¬ïŒå³ã«ç€ºã補é è£ çœ®ãçšããæŸé»å®€ïŒå ã«ã¬
ã€ããããæ¯æäœïŒïŒäžã®CoâNiåéèäžã«ã
ããŠãããã«ããªã¡ããã·ã·ã©ã³ãšé žçŽ ãã¢ã«æ¯
ã§ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ0.11mmTorr äŸçµŠé«åšæ³¢é»åïŒ300W ã§ã°ããŒæŸé»ããã代ãã«ãäžèšã®è¡šâïŒãNo.ïŒ
ã«ç€ºãããã«ããªã¡ããã·ã·ã©ã³ãšæ°ŽçŽ ãã¢ã«æ¯
ã§ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ155mmTorr äŸçµŠé«åšæ³¢é»åïŒ150W ã®æ¡ä»¶ã§ã°ããŒæŸé»ããã以å€ã¯ãå®æœäŸïŒãšå
æ§ã®åŠçããã³æé ã«ãããã€ãŠãæ¯æäœïŒïŒäž
ã®CoâNiåéèäžã«ãã©ãºãéåèã圢æããã äžèšãã©ãºãéåè圢æåŸãã±ãŒã·ã³ã°å ã®æ®
çã¬ã¹ãæé€ããåŸãè£ çœ®ããæ¯æäœïŒïŒãåå€
ããæ¯æäœïŒïŒäžã®CoâNiåéèã«ãªãŒãã³ãŒ
ããããå±€ããã¿ãªã¹ããããESCAåã³å çŽ å
ææ³ã«ããåæãããšããã èåïŒ220â« èçµæïŒC0.23H0.29O0.25Si0.23 ã§ããããšã確èªã§ããã ããããŠåŸãããæ¯æäœã12.65mmå·Ÿã«è£æã
ãŠãããªããŒããäœè£œããããã®è©ŠæããŒããå®
æœäŸããŒãïŒãšããã å®æœäŸ ïŒ ç¬¬ïŒå³ã«ç€ºã補é è£ çœ®ãçšããæŸé»å®€ïŒå ã«ã¬
ã€ããããæ¯æäœïŒïŒäžã®CoâNiåéèäžã«ã
ããŠãããã«ããªã¡ããã·ã·ã©ã³ãšé žçŽ ãã¢ã«æ¯
ã§ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ0.11Torr äŸçµŠé«åšæ³¢é»åïŒ300W ã§ã°ããŒæŸé»ããã代ãã«ãäžèšã®è¡šâïŒãNo.ïŒ
ã«ç€ºãããã©ã¡ãã«ã·ã©ã³ãšé žçŽ ãã¢ã«æ¯ã§
ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ15mmTorr äŸçµŠé«åšæ³¢é»åïŒ15W ã®æ¡ä»¶ã§ã°ããŒæŸé»ããã以å€ã¯ãå®æœäŸïŒãšå
æ§ã®åŠçããã³æé ã«ãããã€ãŠãæ¯æäœïŒïŒäž
ã®CoâNiåéèäžã«ãã©ãºãéåèã圢æããã äžèšãã©ãºãéåè圢æåŸãã±ãŒã·ã³ã°å ã®æ®
çã¬ã¹ãæé€ããåŸãæ¯æäœïŒïŒãåå€ããæ¯æ
äœïŒïŒäžã®CoâNiåéèã«ãªãŒãã³ãŒããšãã
ãå±€ããã¿ãªã¹ããããESCAåã³å çŽ åææ³ã«
ããåæãããšããã èåïŒ160â« èçµæïŒC0.18H0.08O0.52Si0.22 ã§ããããšã確èªã§ããã ããããŠåŸãããæ¯æäœã12.65mmå·Ÿã«è£æã
ãŠãããªããŒããäœè£œããããã®è©ŠæããŒããå®
æœäŸããŒãïŒãšããã å®æœäŸ ïŒ ç¬¬ïŒå³ã«ç€ºã補é è£ çœ®ãçšããæŸé»å®€ïŒå ã«ã¬
ã€ããããæ¯æäœïŒïŒäžã®CoâNiåéèäžã«ã
ããŠãããã«ããªã¡ããã·ã·ã©ã³ãšé žçŽ ãšãã¢ã«
æ¯ã§ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ0.11Torr äŸçµŠé«åšæ³¢é»åïŒ300W ã§ã°ããŒæŸé»ããã代ãã«ãäžèšã®è¡šâïŒãNo.ïŒ
ã«ç€ºãããã©ã¡ãã«ã·ã©ã³ãšé žçŽ ãã¢ã«æ¯ã§
ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ140mmTorr äŸçµŠé«åšæ³¢é»åïŒ300W ã®æ¡ä»¶ã§ã°ããŒæŸé»ããã以å€ã¯ãå®æœäŸïŒãšå
æ§ã®åŠçããã³æé ã«ãããã€ãŠãæ¯æäœïŒïŒäž
ã®CoâNiåéèäžã«ãã©ãºãéåèã圢æããã äžèšãã©ãºãéå局圢æåŸãã±ãŒã·ã³ã°å ã®æ®
çã¬ã¹ãæé€ããåŸãè£ çœ®ããæ¯æäœïŒïŒãåå€
ããæ¯æäœïŒïŒäžã®CoâNiåéèã«ãªãŒãã³ãŒ
ããšãããå±€ããã¿ãªã¹ããããESCAåã³å çŽ
åææ³ã«ããåæãããšããã èåïŒ180â« èçµæïŒC0.21H0.09O0.44Si0.36 ã§ããããšã確èªã§ããã ããããŠåŸãããæ¯æäœã12.65mmå·Ÿã«è£æã
ãŠãããªããŒããäœè£œããããã®è©ŠæããŒããå®
æœäŸããŒãïŒãšããã å®æœäŸ ïŒ ç¬¬ïŒå³ã«ç€ºã補é è£ çœ®ãçšããæŸé»å®€ïŒå ã«ã¬
ã€ããããæ¯æäœïŒïŒäžã®CoâNiåéèäžã«ã
ããŠãããã«ããªã¡ããã·ã·ã©ã³ãšé žçŽ ãã¢ã«æ¯
ã§ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ0.11Torr äŸçµŠé«åšæ³¢é»åïŒ300W ã§ã°ããŒæŸé»ããã代ãã«ãäžèšã®è¡šâïŒãNo.ïŒ
ã«ç€ºããããµã¡ãã«ãžã·ã©ã¶ã³ãšçªçŽ ãã¢ã«æ¯ã§
ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ125mmTorr äŸçµŠé«åšæ³¢é»åïŒ200W ã®æ¡ä»¶ã§ã°ããŒæŸé»ããã以å€ã¯ãå®æœäŸïŒãšå
æ§ã®åŠçããã³æé ã«ãããã€ãŠãæ¯æäœïŒïŒäž
ã®CoâNiåéèäžã«ãã©ãºãéåèã圢æããã äžèšãã©ãºãéåè圢æåŸãã±ãŒã·ã³ã°å ã®æ®
çã¬ã¹ãæé€ããåŸãè£ çœ®æ¯æäœïŒïŒãåå€ãã
æ¯æäœïŒïŒäžã®CoâNiåéèã«ãªãŒãã³ãŒããš
ãããå±€ããã¿ãªã¹ããããESCAåã³å çŽ åæ
æ³ã«ããåæãããšããã èåïŒ240â« èçµæïŒC0.12H0.14O0.02Si0.36 ã§ããããšã確èªã§ããã ããããŠåŸãããæ¯æäœã12.65mmå·Ÿã«è£æã
ãŠãããªããŒããäœè£œããããã®è©ŠæããŒããå®
æœäŸããŒãïŒãšããã å®æœäŸ ïŒ ç¬¬ïŒå³ã«ç€ºã補é è£ çœ®ãçšããæŸé»å®€ïŒå ã«ã¬
ã€ããããæ¯æäœïŒïŒäžã®CoâNiåéèäžã«ã
ããŠãããã«ããªã¡ããã·ã·ã©ã³ãšé žçŽ ãã¢ã«æ¯
ã§ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ0.11Torr äŸçµŠé«åšæ³¢é»åïŒ300W ã§ã°ããŒæŸé»ããã代ãã«ãäžèšã®è¡šâïŒãNo.ïŒ
ã«ç€ºããããµã¡ãã«ãžã·ã©ã¶ã³ãšé žçŽ ãã¢ã«æ¯ã§
ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ105mmTorr äŸçµŠé«åšæ³¢é»åïŒ150W ã®æ¡ä»¶ã§ã°ããŒæŸé»ããã以å€ã¯ãå®æœäŸïŒãšå
æ§ã®åŠçããã³æé ã«ãããã€ãŠãæ¯æäœïŒïŒäž
ã®CoâNiåéèäžã«ãã©ãºãéåèã圢æããã äžèšãã©ãºãéåè圢æåŸãã±ãŒã·ã³ã°å ã®æ®
çã¬ã¹ãæé€ããåŸãè£ çœ®ããæ¯æäœïŒïŒãåå€
ããæ¯æäœïŒïŒäžã®CoâNiåéèã«ãªãŒãã³ãŒ
ããšãããå±€ããã¿ãªã¹ããããESCAåã³å çŽ
åææ³ã«ããåæãããšããã èåïŒ260â« èçµæïŒC0.11H0.14O0.22Si0.25 ã§ããããšã確èªã§ããã ããããŠåŸãããæ¯æäœã12.65mmå·Ÿã«è£æã
ãŠãããªããŒããäœè£œããããã®è©ŠæããŒããå®
æœäŸããŒãïŒãšããã å®æœäŸ 10 第ïŒå³ã«ç€ºã補é è£ çœ®ãçšããæŸé»å®€ïŒå ã«ã¬
ã€ããããæ¯æäœïŒïŒäžã®CoâNiåéèäžã«ã
ããŠãããã«ããªã¡ããã·ã·ã©ã³ãšé žçŽ ãã¢ã«æ¯
ã§ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ0.11Torr äŸçµŠé«åšæ³¢é»åïŒ300W ã§ã°ããŒæŸé»ããã代ãã«ãäžèšã®è¡šâïŒãNo.10
ã«ç€ºããããµã¡ãã«ãžã·ã©ã¶ã³ãšé žçŽ ãã¢ã«æ¯ã§
ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ22mmTorr äŸçµŠé«åšæ³¢é»åïŒ120W ã®æ¡ä»¶ã§ã°ããŒæŸé»ããã以å€ã¯ãå®æœäŸïŒãšå
æ§ã®åŠçããã³æé ã«ãããã€ãŠãæ¯æäœïŒïŒäž
ã®CoâNiåéèäžã«ãã©ãºãéåèã圢æããã äžèšãã©ãºãéåè圢æåŸãã±ãŒã·ã³ã°å ã®æ®
çã¬ã¹ãæé€ããåŸãè£ çœ®ããæ¯æäœïŒïŒãåå€
ããæ¯æäœïŒïŒäžã®CoâNiåéèã«ãªãŒãã³ãŒ
ããšãããå±€ããã¿ãªã¹ããããESCAåã³å çŽ
åææ³ã«ããåæãããšããã èåïŒ260â« èçµæïŒC0.09H0.16O0.24Si0.25 ã§ããããšã確èªã§ããã ããããŠåŸãããæ¯æäœã12.65mmå·Ÿã«è£æã
ãŠãããªããŒããäœè£œããããã®è©ŠæããŒããå®
æœäŸããŒã10ãšããã å®æœäŸ 11 第ïŒå³ã«ç€ºã補é è£ çœ®ãçšããæŸé»å®€ïŒå ã«ã¬
ã€ããããæ¯æäœïŒïŒäžã®CoâNiåéèäžã«ã
ããŠãããã«ããªã¡ããã·ã·ã©ã³ãšé žçŽ ãã¢ã«æ¯
ã§ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ0.11Torr äŸçµŠé«åšæ³¢é»åïŒ300W ã§ã°ããŒæŸé»ããã代ãã«ãäžèšã®è¡šâïŒãNo.11
ã«ç€ºããããµã¡ãã«ãžã·ãããµã³ãšããªããšã³å
ã³é žçŽ ãã¢ã«æ¯ã§ïŒ20ïŒïŒïŒ10ïŒã®å²åã§æ··åã
ãã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒïŒmmTorr äŸçµŠé«åšæ³¢é»åïŒ50W ã®æ¡ä»¶ã§ã°ããŒæŸé»ããã以å€ã¯ãå®æœäŸïŒãšå
æ§ã®åŠçããã³æé ã«ãããã€ãŠãæ¯æäœïŒïŒäž
ã®CoâNiåéèäžã«ãã©ãºãéåèã圢æããã äžèšãã©ãºãéåè圢æåŸãã±ãŒã·ã³ã°å ã®æ®
çã¬ã¹ãæé€ããåŸãè£ çœ®ããæ¯æäœïŒïŒãåå€
ããæ¯æäœïŒïŒäžã®CoâNiåéèã«ãªãŒãã³ãŒ
ããšãããå±€ããã¿ãªã¹ããããESCAåã³å çŽ
åææ³ã«ããåæãããšããã èåïŒ240â« èçµæïŒC0.19H0.24O0.21Si0.19S0.17 ã§ããããšã確èªã§ããã ããããŠåŸãããæ¯æäœã12.65mmå·Ÿã«è£æã
ãŠãããªããŒããäœè£œããããã®è©ŠæããŒããå®
æœäŸããŒã11ãšããã å®æœäŸ 12 第ïŒå³ã«ç€ºã補é è£ çœ®ãçšããæŸé»å®€ïŒå ã«ã¬
ã€ããããæ¯æäœïŒïŒäžã®CoâNiåéèäžã«ã
ããŠãããã«ããªã¡ããã·ã·ã©ã³ãšé žçŽ ãšãã¢ã«
æ¯ã§ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ0.11Torr äŸçµŠé«åšæ³¢é»åïŒ300W ã§ã°ããŒæŸé»ããã代ãã«ãäžèšã®è¡šâïŒãNo.12
ã«ç€ºããããµã¡ãã«ãžã·ãããµã³ãšããªã¡ãã«ã
ã¹ãã¢ã€ãããã³é žçŽ ãã¢ã«æ¯ã§ïŒ20ïŒïŒïŒ10ïŒ
ã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ10mmTorr äŸçµŠé«åšæ³¢é»åïŒ80W ã®åå¿æ¡ä»¶ã§ã°ããŒæŸé»ããã以å€ã¯ãå®æœäŸïŒ
ãšåæ§ã®åŠçããã³æé ã«ãããã€ãŠãæ¯æäœïŒ
ïŒäžã®CoâNiåéèäžã«ãã©ãºãéåèã圢æ
ããã äžèšãã©ãºãéåè圢æåŸãã±ãŒã·ã³ã°å ã®æ®
çã¬ã¹ãæé€ããåŸãè£ çœ®ããæ¯æäœïŒïŒãåå€
ããæ¯æäœïŒïŒäžã®CoâNiåéèã«åœ¢æããã
ãªãŒãã³ãŒãå±€ããã¿ãªã¹ããããESCAããã³
å çŽ åææ³ã«ããåæãããšããã èåïŒ280â« èçµæïŒC0.16H0.19O0.28Si0.24P0.13 ã§ããããšã確èªããã ããããŠåŸãããæ¯æäœã12.65mmå·Ÿã«è£æã
ãŠãããªããŒããäœè£œããã ãã®è©ŠæããŒããå®æœäŸããŒã12ãšããã å®æœäŸ 13 第ïŒå³ã«ç€ºã補é è£ çœ®ãçšããæŸé»å®€ïŒå ã«ã¬
ã€ããããæ¯æäœïŒïŒäžã®CoâNiåéèäžã«ã
ããŠãããã«ããªã¡ããã·ã·ã©ã³ãšé žçŽ ãšãã¢ã«
æ¯ã§ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ0.11Torr äŸçµŠé«åšæ³¢é»åïŒ300W ã§ã°ããŒæŸé»ããã代ãã«ãäžèšã®è¡šâïŒãNo.13
ã«ç€ºãããšãã«ã·ã©ã³ãšãã³ãŒã³ããã³é žçŽ ãã¢
ã«æ¯ã§ïŒïŒïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ205mmTorr äŸçµŠé«åšæ³¢é»åïŒ300W ã®åå¿æ¡ä»¶ã§ã°ããŒæŸé»ããã以å€ã¯ãå®æœäŸïŒ
ãšåæ§ã®åŠçããã³æé ã«ãããã€ãŠãæ¯æäœïŒ
ïŒäžã®CoâNiåéèäžã«ãã©ãºãéåèã圢æ
ããã äžèšãã©ãºãéåè圢æåŸãã±ãŒã·ã³ã°å ã®æ®
çã¬ã¹ãæé€ããåŸãè£ çœ®ããæ¯æäœïŒïŒãååº
ããæ¯æäœïŒïŒäžã®CoâNiåéèã«åœ¢æããã
ãªãŒãã³ãŒãå±€ããã¿ãªã¹ããããESCAããã³
å çŽ åææ³ã«ããåæãããšããã èåïŒ180â« èçµæïŒC0.28H0.08O0.21Si0.43 ã§ããããšã確èªããã ããããŠåŸãããæ¯æäœã12.65mmå·Ÿã«è£æã
ãŠãããªããŒããäœè£œããã ãã®è©ŠæããŒããå®æœäŸããŒã13ãšããã å®æœäŸ 14 第ïŒå³ã«ç€ºã補é è£ çœ®ãçšããæŸé»å®€ïŒå ã«ã¬
ã€ããããæ¯æäœïŒïŒäžã®CoâNiåéèäžã«ã
ããŠãããã«ããªã¡ããã·ã·ã©ã³ãšé žçŽ ãšãã¢ã«
æ¯ã§ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ0.11Torr äŸçµŠé«åšæ³¢é»åïŒ300W ã§ã°ããŒæŸé»ããã代ãã«ãäžèšã®è¡šâïŒãNo.14
ã«ç€ºãããšãã«ã·ã©ã³ãšã¡ãã«ã¡ã¿ã¯ãªã¬ãŒãã
ãã³çªçŽ ãã¢ã«æ¯ã§ïŒïŒïŒïŒïŒ40ïŒã®å²åã§æ··å
ããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ135mmTorr äŸçµŠé«åšæ³¢é»åïŒ180W ã®åå¿æ¡ä»¶ã§ã°ããŒæŸé»ããã以å€ã¯ãå®æœäŸïŒ
ãšåæ§ã®åŠçããã³æé ã«ãããã€ãŠãæ¯æäœïŒ
ïŒäžã®CoâNiåéèäžã«ãã©ãºãéåèã圢æ
ããã äžèšãã©ãºãéåè圢æåŸãã±ãŒã·ã³ã°å ã®æ®
çã¬ã¹ãæé€ããåŸãè£ çœ®ããæ¯æäœïŒïŒãååº
ããæ¯æäœïŒïŒäžã®CoâNiåéèã«åœ¢æããã
ãªãŒãã³ãŒãå±€ããã¿ãªã¹ããããESCAããã³
å çŽ åææ³ã«ããåæãããšããã èåïŒ160â« èçµæïŒC0.27H0.28O0.19N0.10Si0.16 ã§ããããšã確èªããã ããããŠåŸãããæ¯æäœã12.65mmå·Ÿã«è£æã
ãŠãããªããŒããäœè£œããã ãã®è©ŠæããŒããå®æœäŸããŒã14ãšããã å®æœäŸ 15 第ïŒå³ã«ç€ºã補é è£ çœ®ãçšããæŸé»å®€ïŒå ã«ã¬
ã€ããããæ¯æäœïŒïŒäžã®CoâNiåéèäžã«ã
ããŠãããã«ããªã¡ããã·ã·ã©ã³ãšé žçŽ ãšãã¢ã«
æ¯ã§ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ0.11Torr äŸçµŠé«åšæ³¢é»åïŒ300W ã§ã°ããŒæŸé»ããã代ãã«ãäžèšã®è¡šâïŒãNo.15
ã«ç€ºããããµã¡ãã«ã·ã¯ãããªã·ãããµã³ãšããª
ã¡ãã«ãã¬ãŒãããã³é žçŽ ãã¢ã«æ¯ã§ïŒ10ïŒïŒïŒ
20ïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ135mmTorr äŸçµŠé«åšæ³¢é»åïŒ180W ã®åå¿æ¡ä»¶ã§ã°ããŒæŸé»ããã以å€ã¯ãå®æœäŸïŒ
ãšåæ§ã®åŠçããã³æé ã«ãããã€ãŠãæ¯æäœïŒ
ïŒäžã®CoâNiåéèäžã«ãã©ãºãéåèã圢æ
ããã äžèšãã©ãºãéåè圢æåŸãã±ãŒã·ã³ã°å ã®æ®
çã¬ã¹ãæé€ããåŸãè£ çœ®ããæ¯æäœïŒïŒãååº
ããæ¯æäœïŒïŒäžã®CoâNiåéèã«åœ¢æããã
ãªãŒãã³ãŒãå±€ããã¿ãªã¹ããããESCAããã³
å çŽ åææ³ã«ããåæãããšããã èåïŒ260â« èçµæïŒC0.21H0.14O0.43Si0.11B0.11 ã§ããããšã確èªããã ããããŠåŸãããæ¯æäœã12.65mmå·Ÿã«è£æã
ãŠãããªããŒããäœè£œããã ãã®è©ŠæããŒããå®æœäŸããŒã15ãšããã å®æœäŸ 16 第ïŒå³ã«ç€ºã補é è£ çœ®ãçšããæŸé»å®€ïŒå ã«ã¬
ã€ããããæ¯æäœïŒïŒäžã®CoâNiåéèäžã«ã
ããŠãããã«ããªã¡ããã·ã·ã©ã³ãšé žçŽ ãšãã¢ã«
æ¯ã§ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ0.11Torr äŸçµŠé«åšæ³¢é»åïŒ300W ã§ã°ããŒæŸé»ããã代ãã«ãäžèšã®è¡šâïŒãNo.16
ã«ç€ºããããµã¡ãã«ã·ã¯ãããªã·ãããµã³ãšå¡©å
ããã«ããã³æ°ŽçŽ ãã¢ã«æ¯ã§ïŒïŒïŒïŒïŒïŒïŒã®å²
åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ11mmTorr äŸçµŠé«åšæ³¢é»åïŒ8W ã®åå¿æ¡ä»¶ã§ã°ããŒæŸé»ããã以å€ã¯ãå®æœäŸïŒ
ãšåæ§ã®åŠçããã³æé ã«ãããã€ãŠãæ¯æäœïŒ
ïŒäžã®CoâNiåéèäžã«ãã©ãºãéåèã圢æ
ããã äžèšãã©ãºãéåè圢æåŸãã±ãŒã·ã³ã°å ã®æ®
çã¬ã¹ãæé€ããåŸãè£ çœ®ããæ¯æäœïŒïŒãååº
ããæ¯æäœïŒïŒäžã®CoâNiåéèã«åœ¢æããã
ãªãŒãã³ãŒãå±€ããã¿ãªã¹ããããESCAããã³
å çŽ åææ³ã«ããåæãããšããã èåïŒ260â« èçµæïŒC0.33H0.08O0.18Si0.38Cl0.03 ã§ããããšã確èªããã ããããŠåŸãããæ¯æäœã12.65mmå·Ÿã«è£æã
ãŠãããªããŒããäœè£œããã ãã®è©ŠæããŒããå®æœäŸããŒã16ãšããã æ¯èŒäŸ ïŒ ç¬¬ïŒå³ã«ç€ºã補é è£ çœ®ãçšããæŸé»å®€ïŒå ã«ã¬
ã€ããããæ¯æäœïŒïŒäžã®CoâNiåéèäžã§ã
ããã«ããªâã¡ããã·ã·ã©ã³ãšé žçŽ ãšãã¢ã«æ¯ã§
ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ0.11Torr äŸçµŠé«åšæ³¢é»åïŒ300W ã®æ¡ä»¶ã§ã°ããŒæŸé»ããã代ãã«ãäžèšè¡šâïŒã
No.ïŒã«ç€ºãããã«ããªã¡ããã·ã·ã©ã³ãã å°å ¥ã¬ã¹å§ïŒ18mmTorr äŸçµŠé«åšæ³¢é»åïŒ50W ã®åå¿æ¡ä»¶ã§ã°ããŒæŸé»ããã以å€ã¯ãå®æœäŸïŒ
ãšåæ§ã®åŠçããã³æé ã«ãããã€ãŠãæ¯æäœïŒ
ïŒäžã®CoâNiåéèäžã«ãã©ãºãéåèããªãŒ
ãã³ãŒãããã äžèšãã©ãºãéåè圢æåŸãã±ãŒã·ã³ã°å ã®æ®
çã¬ã¹ãæé€ããåŸãè£ çœ®ããæ¯æäœïŒïŒãååº
ããæ¯æäœïŒïŒäžã®CoâNiåéèã«åœ¢æããã
ãªãŒãã³ãŒãå±€ããã¿ãªã¹ããããESCAããã³
å çŽ åææ³ã«ããåæãããšããã èåïŒ260â« èçµæïŒC0.31H0.13Si0.33O0.23 ã§ããããšã確èªããã ããããŠåŸãããæ¯æäœã12.65mmå·Ÿã«è£æã
ãŠãããªããŒããäœè£œããã ãã®è©ŠæããŒããæ¯èŒäŸããŒãïŒãšããã
ã€ããããæ¯æäœïŒïŒäžã®CoâNiåéèäžã«ã
ããŠãããã«ããªã¡ããã·ã·ã©ã³ãšé žçŽ ãã¢ã«æ¯
ã§ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ0.11Torr äŸçµŠé«åšæ³¢é»åïŒ300W ã§ã°ããŒæŸé»ããã代ãã«ãäžèšã®è¡šâïŒãNo.ïŒ
ã«ç€ºãããã«ããªã¡ããã·ã·ã©ã³ãšçªçŽ ãã¢ã«æ¯
ã§ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ12mmTorr äŸçµŠé«åšæ³¢é»åïŒ15W ã®æ¡ä»¶ã§ã°ããŒæŸé»ããã以å€ã¯ãå®æœäŸïŒãšå
æ§ã®åŠçããã³æé ã«ãããã€ãŠãæ¯æäœïŒïŒäž
ã®CoâNiåéèäžã«å«ããçŽ ææ©ãã©ãºãéå
èã圢æããã äžèšãã©ãºãéåè圢æåŸãã±ãŒã·ã³ã°å ã®æ®
çã¬ã¹ãæé€ããåŸãæ¯æäœïŒïŒãåå€ããæ¯æ
äœïŒïŒäžã®CoâNiåéèã«ãªãŒãã³ãŒããšãã
ãå±€ããã¿ãªã¹ããããESCAåã³å çŽ åææ³ã«
ããåæãããšããã èåïŒ180â« èçµæïŒC0.19H0.12O0.18N0.22Si0.29 ã§ããããšã確èªã§ããã ããããŠåŸãããæ¯æäœã12.65mmå·Ÿã«è£æã
ãŠãããªããŒããäœè£œããããã®è©ŠæããŒããå®
æœäŸããŒãïŒãšããã å®æœäŸ ïŒ ç¬¬ïŒå³ã«ç€ºã補é è£ çœ®ãçšããæŸé»å®€ïŒå ã«ã¬
ã€ããããæ¯æäœïŒïŒäžã®CoâNiåéèäžã«ã
ããŠãããã«ããªã¡ããã·ã·ã©ã³ãšé žçŽ ãã¢ã«æ¯
ã§ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ0.11Torr äŸçµŠé«åšæ³¢é»åïŒ300W ã§ã°ããŒæŸé»ããã代ãã«ãäžèšã®è¡šâïŒãNo.ïŒ
ã«ç€ºãããã«ããªã¡ããã·ã·ã©ã³ãšçªçŽ ãã¢ã«æ¯
ã§ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ16mmTorr äŸçµŠé«åšæ³¢é»åïŒ10W ã®æ¡ä»¶ã§ã°ããŒæŸé»ããã以å€ã¯ãå®æœäŸïŒãšå
æ§ã®åŠçããã³æé ã«ãããã€ãŠãæ¯æäœïŒïŒäž
ã®CoâNiåéèäžã«å«ããçŽ ææ©ãã©ãºãéå
èã圢æããã äžèšãã©ãºãéåè圢æåŸãã±ãŒã·ã³ã°å ã®æ®
çã¬ã¹ãæé€ããåŸãæ¯æäœïŒïŒãåå€ããæ¯æ
äœïŒïŒäžã®CoâNiåéèã«ãªãŒãã³ãŒããšãã
ãå±€ããã¿ãªã¹ããããESCAåã³å çŽ åææ³ã«
ããåæãããšããã èåïŒ160â« èçµæïŒC0.21H0.15O0.16Si0.29 ã§ããããšã確èªã§ããã ããããŠåŸãããæ¯æäœã12.65mmå·Ÿã«è£æã
ãŠãããªããŒããäœè£œããããã®è©ŠæããŒããå®
æœäŸããŒãïŒãšããã å®æœäŸ ïŒ ç¬¬ïŒå³ã«ç€ºã補é è£ çœ®ãçšããæŸé»å®€ïŒå ã«ã¬
ã€ããããæ¯æäœïŒïŒäžã®CoâNiåéèäžã«ã
ããŠãããã«ããªã¡ããã·ã·ã©ã³ãšé žçŽ ãã¢ã«æ¯
ã§ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ0.11mmTorr äŸçµŠé«åšæ³¢é»åïŒ300W ã§ã°ããŒæŸé»ããã代ãã«ãäžèšã®è¡šâïŒãNo.ïŒ
ã«ç€ºãããã«ããªã¡ããã·ã·ã©ã³ãšæ°ŽçŽ ãã¢ã«æ¯
ã§ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ155mmTorr äŸçµŠé«åšæ³¢é»åïŒ150W ã®æ¡ä»¶ã§ã°ããŒæŸé»ããã以å€ã¯ãå®æœäŸïŒãšå
æ§ã®åŠçããã³æé ã«ãããã€ãŠãæ¯æäœïŒïŒäž
ã®CoâNiåéèäžã«ãã©ãºãéåèã圢æããã äžèšãã©ãºãéåè圢æåŸãã±ãŒã·ã³ã°å ã®æ®
çã¬ã¹ãæé€ããåŸãè£ çœ®ããæ¯æäœïŒïŒãåå€
ããæ¯æäœïŒïŒäžã®CoâNiåéèã«ãªãŒãã³ãŒ
ããããå±€ããã¿ãªã¹ããããESCAåã³å çŽ å
ææ³ã«ããåæãããšããã èåïŒ220â« èçµæïŒC0.23H0.29O0.25Si0.23 ã§ããããšã確èªã§ããã ããããŠåŸãããæ¯æäœã12.65mmå·Ÿã«è£æã
ãŠãããªããŒããäœè£œããããã®è©ŠæããŒããå®
æœäŸããŒãïŒãšããã å®æœäŸ ïŒ ç¬¬ïŒå³ã«ç€ºã補é è£ çœ®ãçšããæŸé»å®€ïŒå ã«ã¬
ã€ããããæ¯æäœïŒïŒäžã®CoâNiåéèäžã«ã
ããŠãããã«ããªã¡ããã·ã·ã©ã³ãšé žçŽ ãã¢ã«æ¯
ã§ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ0.11Torr äŸçµŠé«åšæ³¢é»åïŒ300W ã§ã°ããŒæŸé»ããã代ãã«ãäžèšã®è¡šâïŒãNo.ïŒ
ã«ç€ºãããã©ã¡ãã«ã·ã©ã³ãšé žçŽ ãã¢ã«æ¯ã§
ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ15mmTorr äŸçµŠé«åšæ³¢é»åïŒ15W ã®æ¡ä»¶ã§ã°ããŒæŸé»ããã以å€ã¯ãå®æœäŸïŒãšå
æ§ã®åŠçããã³æé ã«ãããã€ãŠãæ¯æäœïŒïŒäž
ã®CoâNiåéèäžã«ãã©ãºãéåèã圢æããã äžèšãã©ãºãéåè圢æåŸãã±ãŒã·ã³ã°å ã®æ®
çã¬ã¹ãæé€ããåŸãæ¯æäœïŒïŒãåå€ããæ¯æ
äœïŒïŒäžã®CoâNiåéèã«ãªãŒãã³ãŒããšãã
ãå±€ããã¿ãªã¹ããããESCAåã³å çŽ åææ³ã«
ããåæãããšããã èåïŒ160â« èçµæïŒC0.18H0.08O0.52Si0.22 ã§ããããšã確èªã§ããã ããããŠåŸãããæ¯æäœã12.65mmå·Ÿã«è£æã
ãŠãããªããŒããäœè£œããããã®è©ŠæããŒããå®
æœäŸããŒãïŒãšããã å®æœäŸ ïŒ ç¬¬ïŒå³ã«ç€ºã補é è£ çœ®ãçšããæŸé»å®€ïŒå ã«ã¬
ã€ããããæ¯æäœïŒïŒäžã®CoâNiåéèäžã«ã
ããŠãããã«ããªã¡ããã·ã·ã©ã³ãšé žçŽ ãšãã¢ã«
æ¯ã§ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ0.11Torr äŸçµŠé«åšæ³¢é»åïŒ300W ã§ã°ããŒæŸé»ããã代ãã«ãäžèšã®è¡šâïŒãNo.ïŒ
ã«ç€ºãããã©ã¡ãã«ã·ã©ã³ãšé žçŽ ãã¢ã«æ¯ã§
ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ140mmTorr äŸçµŠé«åšæ³¢é»åïŒ300W ã®æ¡ä»¶ã§ã°ããŒæŸé»ããã以å€ã¯ãå®æœäŸïŒãšå
æ§ã®åŠçããã³æé ã«ãããã€ãŠãæ¯æäœïŒïŒäž
ã®CoâNiåéèäžã«ãã©ãºãéåèã圢æããã äžèšãã©ãºãéå局圢æåŸãã±ãŒã·ã³ã°å ã®æ®
çã¬ã¹ãæé€ããåŸãè£ çœ®ããæ¯æäœïŒïŒãåå€
ããæ¯æäœïŒïŒäžã®CoâNiåéèã«ãªãŒãã³ãŒ
ããšãããå±€ããã¿ãªã¹ããããESCAåã³å çŽ
åææ³ã«ããåæãããšããã èåïŒ180â« èçµæïŒC0.21H0.09O0.44Si0.36 ã§ããããšã確èªã§ããã ããããŠåŸãããæ¯æäœã12.65mmå·Ÿã«è£æã
ãŠãããªããŒããäœè£œããããã®è©ŠæããŒããå®
æœäŸããŒãïŒãšããã å®æœäŸ ïŒ ç¬¬ïŒå³ã«ç€ºã補é è£ çœ®ãçšããæŸé»å®€ïŒå ã«ã¬
ã€ããããæ¯æäœïŒïŒäžã®CoâNiåéèäžã«ã
ããŠãããã«ããªã¡ããã·ã·ã©ã³ãšé žçŽ ãã¢ã«æ¯
ã§ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ0.11Torr äŸçµŠé«åšæ³¢é»åïŒ300W ã§ã°ããŒæŸé»ããã代ãã«ãäžèšã®è¡šâïŒãNo.ïŒ
ã«ç€ºããããµã¡ãã«ãžã·ã©ã¶ã³ãšçªçŽ ãã¢ã«æ¯ã§
ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ125mmTorr äŸçµŠé«åšæ³¢é»åïŒ200W ã®æ¡ä»¶ã§ã°ããŒæŸé»ããã以å€ã¯ãå®æœäŸïŒãšå
æ§ã®åŠçããã³æé ã«ãããã€ãŠãæ¯æäœïŒïŒäž
ã®CoâNiåéèäžã«ãã©ãºãéåèã圢æããã äžèšãã©ãºãéåè圢æåŸãã±ãŒã·ã³ã°å ã®æ®
çã¬ã¹ãæé€ããåŸãè£ çœ®æ¯æäœïŒïŒãåå€ãã
æ¯æäœïŒïŒäžã®CoâNiåéèã«ãªãŒãã³ãŒããš
ãããå±€ããã¿ãªã¹ããããESCAåã³å çŽ åæ
æ³ã«ããåæãããšããã èåïŒ240â« èçµæïŒC0.12H0.14O0.02Si0.36 ã§ããããšã確èªã§ããã ããããŠåŸãããæ¯æäœã12.65mmå·Ÿã«è£æã
ãŠãããªããŒããäœè£œããããã®è©ŠæããŒããå®
æœäŸããŒãïŒãšããã å®æœäŸ ïŒ ç¬¬ïŒå³ã«ç€ºã補é è£ çœ®ãçšããæŸé»å®€ïŒå ã«ã¬
ã€ããããæ¯æäœïŒïŒäžã®CoâNiåéèäžã«ã
ããŠãããã«ããªã¡ããã·ã·ã©ã³ãšé žçŽ ãã¢ã«æ¯
ã§ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ0.11Torr äŸçµŠé«åšæ³¢é»åïŒ300W ã§ã°ããŒæŸé»ããã代ãã«ãäžèšã®è¡šâïŒãNo.ïŒ
ã«ç€ºããããµã¡ãã«ãžã·ã©ã¶ã³ãšé žçŽ ãã¢ã«æ¯ã§
ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ105mmTorr äŸçµŠé«åšæ³¢é»åïŒ150W ã®æ¡ä»¶ã§ã°ããŒæŸé»ããã以å€ã¯ãå®æœäŸïŒãšå
æ§ã®åŠçããã³æé ã«ãããã€ãŠãæ¯æäœïŒïŒäž
ã®CoâNiåéèäžã«ãã©ãºãéåèã圢æããã äžèšãã©ãºãéåè圢æåŸãã±ãŒã·ã³ã°å ã®æ®
çã¬ã¹ãæé€ããåŸãè£ çœ®ããæ¯æäœïŒïŒãåå€
ããæ¯æäœïŒïŒäžã®CoâNiåéèã«ãªãŒãã³ãŒ
ããšãããå±€ããã¿ãªã¹ããããESCAåã³å çŽ
åææ³ã«ããåæãããšããã èåïŒ260â« èçµæïŒC0.11H0.14O0.22Si0.25 ã§ããããšã確èªã§ããã ããããŠåŸãããæ¯æäœã12.65mmå·Ÿã«è£æã
ãŠãããªããŒããäœè£œããããã®è©ŠæããŒããå®
æœäŸããŒãïŒãšããã å®æœäŸ 10 第ïŒå³ã«ç€ºã補é è£ çœ®ãçšããæŸé»å®€ïŒå ã«ã¬
ã€ããããæ¯æäœïŒïŒäžã®CoâNiåéèäžã«ã
ããŠãããã«ããªã¡ããã·ã·ã©ã³ãšé žçŽ ãã¢ã«æ¯
ã§ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ0.11Torr äŸçµŠé«åšæ³¢é»åïŒ300W ã§ã°ããŒæŸé»ããã代ãã«ãäžèšã®è¡šâïŒãNo.10
ã«ç€ºããããµã¡ãã«ãžã·ã©ã¶ã³ãšé žçŽ ãã¢ã«æ¯ã§
ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ22mmTorr äŸçµŠé«åšæ³¢é»åïŒ120W ã®æ¡ä»¶ã§ã°ããŒæŸé»ããã以å€ã¯ãå®æœäŸïŒãšå
æ§ã®åŠçããã³æé ã«ãããã€ãŠãæ¯æäœïŒïŒäž
ã®CoâNiåéèäžã«ãã©ãºãéåèã圢æããã äžèšãã©ãºãéåè圢æåŸãã±ãŒã·ã³ã°å ã®æ®
çã¬ã¹ãæé€ããåŸãè£ çœ®ããæ¯æäœïŒïŒãåå€
ããæ¯æäœïŒïŒäžã®CoâNiåéèã«ãªãŒãã³ãŒ
ããšãããå±€ããã¿ãªã¹ããããESCAåã³å çŽ
åææ³ã«ããåæãããšããã èåïŒ260â« èçµæïŒC0.09H0.16O0.24Si0.25 ã§ããããšã確èªã§ããã ããããŠåŸãããæ¯æäœã12.65mmå·Ÿã«è£æã
ãŠãããªããŒããäœè£œããããã®è©ŠæããŒããå®
æœäŸããŒã10ãšããã å®æœäŸ 11 第ïŒå³ã«ç€ºã補é è£ çœ®ãçšããæŸé»å®€ïŒå ã«ã¬
ã€ããããæ¯æäœïŒïŒäžã®CoâNiåéèäžã«ã
ããŠãããã«ããªã¡ããã·ã·ã©ã³ãšé žçŽ ãã¢ã«æ¯
ã§ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ0.11Torr äŸçµŠé«åšæ³¢é»åïŒ300W ã§ã°ããŒæŸé»ããã代ãã«ãäžèšã®è¡šâïŒãNo.11
ã«ç€ºããããµã¡ãã«ãžã·ãããµã³ãšããªããšã³å
ã³é žçŽ ãã¢ã«æ¯ã§ïŒ20ïŒïŒïŒ10ïŒã®å²åã§æ··åã
ãã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒïŒmmTorr äŸçµŠé«åšæ³¢é»åïŒ50W ã®æ¡ä»¶ã§ã°ããŒæŸé»ããã以å€ã¯ãå®æœäŸïŒãšå
æ§ã®åŠçããã³æé ã«ãããã€ãŠãæ¯æäœïŒïŒäž
ã®CoâNiåéèäžã«ãã©ãºãéåèã圢æããã äžèšãã©ãºãéåè圢æåŸãã±ãŒã·ã³ã°å ã®æ®
çã¬ã¹ãæé€ããåŸãè£ çœ®ããæ¯æäœïŒïŒãåå€
ããæ¯æäœïŒïŒäžã®CoâNiåéèã«ãªãŒãã³ãŒ
ããšãããå±€ããã¿ãªã¹ããããESCAåã³å çŽ
åææ³ã«ããåæãããšããã èåïŒ240â« èçµæïŒC0.19H0.24O0.21Si0.19S0.17 ã§ããããšã確èªã§ããã ããããŠåŸãããæ¯æäœã12.65mmå·Ÿã«è£æã
ãŠãããªããŒããäœè£œããããã®è©ŠæããŒããå®
æœäŸããŒã11ãšããã å®æœäŸ 12 第ïŒå³ã«ç€ºã補é è£ çœ®ãçšããæŸé»å®€ïŒå ã«ã¬
ã€ããããæ¯æäœïŒïŒäžã®CoâNiåéèäžã«ã
ããŠãããã«ããªã¡ããã·ã·ã©ã³ãšé žçŽ ãšãã¢ã«
æ¯ã§ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ0.11Torr äŸçµŠé«åšæ³¢é»åïŒ300W ã§ã°ããŒæŸé»ããã代ãã«ãäžèšã®è¡šâïŒãNo.12
ã«ç€ºããããµã¡ãã«ãžã·ãããµã³ãšããªã¡ãã«ã
ã¹ãã¢ã€ãããã³é žçŽ ãã¢ã«æ¯ã§ïŒ20ïŒïŒïŒ10ïŒ
ã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ10mmTorr äŸçµŠé«åšæ³¢é»åïŒ80W ã®åå¿æ¡ä»¶ã§ã°ããŒæŸé»ããã以å€ã¯ãå®æœäŸïŒ
ãšåæ§ã®åŠçããã³æé ã«ãããã€ãŠãæ¯æäœïŒ
ïŒäžã®CoâNiåéèäžã«ãã©ãºãéåèã圢æ
ããã äžèšãã©ãºãéåè圢æåŸãã±ãŒã·ã³ã°å ã®æ®
çã¬ã¹ãæé€ããåŸãè£ çœ®ããæ¯æäœïŒïŒãåå€
ããæ¯æäœïŒïŒäžã®CoâNiåéèã«åœ¢æããã
ãªãŒãã³ãŒãå±€ããã¿ãªã¹ããããESCAããã³
å çŽ åææ³ã«ããåæãããšããã èåïŒ280â« èçµæïŒC0.16H0.19O0.28Si0.24P0.13 ã§ããããšã確èªããã ããããŠåŸãããæ¯æäœã12.65mmå·Ÿã«è£æã
ãŠãããªããŒããäœè£œããã ãã®è©ŠæããŒããå®æœäŸããŒã12ãšããã å®æœäŸ 13 第ïŒå³ã«ç€ºã補é è£ çœ®ãçšããæŸé»å®€ïŒå ã«ã¬
ã€ããããæ¯æäœïŒïŒäžã®CoâNiåéèäžã«ã
ããŠãããã«ããªã¡ããã·ã·ã©ã³ãšé žçŽ ãšãã¢ã«
æ¯ã§ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ0.11Torr äŸçµŠé«åšæ³¢é»åïŒ300W ã§ã°ããŒæŸé»ããã代ãã«ãäžèšã®è¡šâïŒãNo.13
ã«ç€ºãããšãã«ã·ã©ã³ãšãã³ãŒã³ããã³é žçŽ ãã¢
ã«æ¯ã§ïŒïŒïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ205mmTorr äŸçµŠé«åšæ³¢é»åïŒ300W ã®åå¿æ¡ä»¶ã§ã°ããŒæŸé»ããã以å€ã¯ãå®æœäŸïŒ
ãšåæ§ã®åŠçããã³æé ã«ãããã€ãŠãæ¯æäœïŒ
ïŒäžã®CoâNiåéèäžã«ãã©ãºãéåèã圢æ
ããã äžèšãã©ãºãéåè圢æåŸãã±ãŒã·ã³ã°å ã®æ®
çã¬ã¹ãæé€ããåŸãè£ çœ®ããæ¯æäœïŒïŒãååº
ããæ¯æäœïŒïŒäžã®CoâNiåéèã«åœ¢æããã
ãªãŒãã³ãŒãå±€ããã¿ãªã¹ããããESCAããã³
å çŽ åææ³ã«ããåæãããšããã èåïŒ180â« èçµæïŒC0.28H0.08O0.21Si0.43 ã§ããããšã確èªããã ããããŠåŸãããæ¯æäœã12.65mmå·Ÿã«è£æã
ãŠãããªããŒããäœè£œããã ãã®è©ŠæããŒããå®æœäŸããŒã13ãšããã å®æœäŸ 14 第ïŒå³ã«ç€ºã補é è£ çœ®ãçšããæŸé»å®€ïŒå ã«ã¬
ã€ããããæ¯æäœïŒïŒäžã®CoâNiåéèäžã«ã
ããŠãããã«ããªã¡ããã·ã·ã©ã³ãšé žçŽ ãšãã¢ã«
æ¯ã§ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ0.11Torr äŸçµŠé«åšæ³¢é»åïŒ300W ã§ã°ããŒæŸé»ããã代ãã«ãäžèšã®è¡šâïŒãNo.14
ã«ç€ºãããšãã«ã·ã©ã³ãšã¡ãã«ã¡ã¿ã¯ãªã¬ãŒãã
ãã³çªçŽ ãã¢ã«æ¯ã§ïŒïŒïŒïŒïŒ40ïŒã®å²åã§æ··å
ããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ135mmTorr äŸçµŠé«åšæ³¢é»åïŒ180W ã®åå¿æ¡ä»¶ã§ã°ããŒæŸé»ããã以å€ã¯ãå®æœäŸïŒ
ãšåæ§ã®åŠçããã³æé ã«ãããã€ãŠãæ¯æäœïŒ
ïŒäžã®CoâNiåéèäžã«ãã©ãºãéåèã圢æ
ããã äžèšãã©ãºãéåè圢æåŸãã±ãŒã·ã³ã°å ã®æ®
çã¬ã¹ãæé€ããåŸãè£ çœ®ããæ¯æäœïŒïŒãååº
ããæ¯æäœïŒïŒäžã®CoâNiåéèã«åœ¢æããã
ãªãŒãã³ãŒãå±€ããã¿ãªã¹ããããESCAããã³
å çŽ åææ³ã«ããåæãããšããã èåïŒ160â« èçµæïŒC0.27H0.28O0.19N0.10Si0.16 ã§ããããšã確èªããã ããããŠåŸãããæ¯æäœã12.65mmå·Ÿã«è£æã
ãŠãããªããŒããäœè£œããã ãã®è©ŠæããŒããå®æœäŸããŒã14ãšããã å®æœäŸ 15 第ïŒå³ã«ç€ºã補é è£ çœ®ãçšããæŸé»å®€ïŒå ã«ã¬
ã€ããããæ¯æäœïŒïŒäžã®CoâNiåéèäžã«ã
ããŠãããã«ããªã¡ããã·ã·ã©ã³ãšé žçŽ ãšãã¢ã«
æ¯ã§ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ0.11Torr äŸçµŠé«åšæ³¢é»åïŒ300W ã§ã°ããŒæŸé»ããã代ãã«ãäžèšã®è¡šâïŒãNo.15
ã«ç€ºããããµã¡ãã«ã·ã¯ãããªã·ãããµã³ãšããª
ã¡ãã«ãã¬ãŒãããã³é žçŽ ãã¢ã«æ¯ã§ïŒ10ïŒïŒïŒ
20ïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ135mmTorr äŸçµŠé«åšæ³¢é»åïŒ180W ã®åå¿æ¡ä»¶ã§ã°ããŒæŸé»ããã以å€ã¯ãå®æœäŸïŒ
ãšåæ§ã®åŠçããã³æé ã«ãããã€ãŠãæ¯æäœïŒ
ïŒäžã®CoâNiåéèäžã«ãã©ãºãéåèã圢æ
ããã äžèšãã©ãºãéåè圢æåŸãã±ãŒã·ã³ã°å ã®æ®
çã¬ã¹ãæé€ããåŸãè£ çœ®ããæ¯æäœïŒïŒãååº
ããæ¯æäœïŒïŒäžã®CoâNiåéèã«åœ¢æããã
ãªãŒãã³ãŒãå±€ããã¿ãªã¹ããããESCAããã³
å çŽ åææ³ã«ããåæãããšããã èåïŒ260â« èçµæïŒC0.21H0.14O0.43Si0.11B0.11 ã§ããããšã確èªããã ããããŠåŸãããæ¯æäœã12.65mmå·Ÿã«è£æã
ãŠãããªããŒããäœè£œããã ãã®è©ŠæããŒããå®æœäŸããŒã15ãšããã å®æœäŸ 16 第ïŒå³ã«ç€ºã補é è£ çœ®ãçšããæŸé»å®€ïŒå ã«ã¬
ã€ããããæ¯æäœïŒïŒäžã®CoâNiåéèäžã«ã
ããŠãããã«ããªã¡ããã·ã·ã©ã³ãšé žçŽ ãšãã¢ã«
æ¯ã§ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ0.11Torr äŸçµŠé«åšæ³¢é»åïŒ300W ã§ã°ããŒæŸé»ããã代ãã«ãäžèšã®è¡šâïŒãNo.16
ã«ç€ºããããµã¡ãã«ã·ã¯ãããªã·ãããµã³ãšå¡©å
ããã«ããã³æ°ŽçŽ ãã¢ã«æ¯ã§ïŒïŒïŒïŒïŒïŒïŒã®å²
åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ11mmTorr äŸçµŠé«åšæ³¢é»åïŒ8W ã®åå¿æ¡ä»¶ã§ã°ããŒæŸé»ããã以å€ã¯ãå®æœäŸïŒ
ãšåæ§ã®åŠçããã³æé ã«ãããã€ãŠãæ¯æäœïŒ
ïŒäžã®CoâNiåéèäžã«ãã©ãºãéåèã圢æ
ããã äžèšãã©ãºãéåè圢æåŸãã±ãŒã·ã³ã°å ã®æ®
çã¬ã¹ãæé€ããåŸãè£ çœ®ããæ¯æäœïŒïŒãååº
ããæ¯æäœïŒïŒäžã®CoâNiåéèã«åœ¢æããã
ãªãŒãã³ãŒãå±€ããã¿ãªã¹ããããESCAããã³
å çŽ åææ³ã«ããåæãããšããã èåïŒ260â« èçµæïŒC0.33H0.08O0.18Si0.38Cl0.03 ã§ããããšã確èªããã ããããŠåŸãããæ¯æäœã12.65mmå·Ÿã«è£æã
ãŠãããªããŒããäœè£œããã ãã®è©ŠæããŒããå®æœäŸããŒã16ãšããã æ¯èŒäŸ ïŒ ç¬¬ïŒå³ã«ç€ºã補é è£ çœ®ãçšããæŸé»å®€ïŒå ã«ã¬
ã€ããããæ¯æäœïŒïŒäžã®CoâNiåéèäžã§ã
ããã«ããªâã¡ããã·ã·ã©ã³ãšé žçŽ ãšãã¢ã«æ¯ã§
ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ0.11Torr äŸçµŠé«åšæ³¢é»åïŒ300W ã®æ¡ä»¶ã§ã°ããŒæŸé»ããã代ãã«ãäžèšè¡šâïŒã
No.ïŒã«ç€ºãããã«ããªã¡ããã·ã·ã©ã³ãã å°å ¥ã¬ã¹å§ïŒ18mmTorr äŸçµŠé«åšæ³¢é»åïŒ50W ã®åå¿æ¡ä»¶ã§ã°ããŒæŸé»ããã以å€ã¯ãå®æœäŸïŒ
ãšåæ§ã®åŠçããã³æé ã«ãããã€ãŠãæ¯æäœïŒ
ïŒäžã®CoâNiåéèäžã«ãã©ãºãéåèããªãŒ
ãã³ãŒãããã äžèšãã©ãºãéåè圢æåŸãã±ãŒã·ã³ã°å ã®æ®
çã¬ã¹ãæé€ããåŸãè£ çœ®ããæ¯æäœïŒïŒãååº
ããæ¯æäœïŒïŒäžã®CoâNiåéèã«åœ¢æããã
ãªãŒãã³ãŒãå±€ããã¿ãªã¹ããããESCAããã³
å çŽ åææ³ã«ããåæãããšããã èåïŒ260â« èçµæïŒC0.31H0.13Si0.33O0.23 ã§ããããšã確èªããã ããããŠåŸãããæ¯æäœã12.65mmå·Ÿã«è£æã
ãŠãããªããŒããäœè£œããã ãã®è©ŠæããŒããæ¯èŒäŸããŒãïŒãšããã
ãè¡šã
æ¯èŒäŸ ïŒ
第ïŒå³ã«ç€ºã補é è£
眮ãçšããæŸé»å®€ïŒå
ã«ã¬
ã€ããããæ¯æäœïŒïŒäžã®CoâNiåéèäžã§ã
ããã«ããªã¡ããã·ã·ã©ã³ãšé žçŽ ãšãã¢ã«æ¯ã§
ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ0.11Torr äŸçµŠé«åšæ³¢é»åïŒ300W ã®æ¡ä»¶ã§ã°ããŒæŸé»ããã代ãã«ãäžèšè¡šâïŒã
No.ïŒã«ç€ºãããã«ããªã¡ããã·ã·ã©ã³ããã³ãšã
ã¬ã³ãã¢ã«æ¯ã§ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹
ãã å°å ¥ã¬ã¹å§ïŒ35mmTorr äŸçµŠé«åšæ³¢é»åïŒ100W ã®åå¿æ¡ä»¶ã§ã°ããŒæŸé»ããã以å€ã¯ãå®æœäŸïŒ
ãšåæ§ã®åŠçããã³æé ã«ãããã€ãŠãæ¯æäœïŒ
ïŒäžã®CoâNiåéèäžã«ãã©ãºãéåèããªãŒ
ãã³ãŒãããã äžèšãã©ãºãéåè圢æåŸãã±ãŒã·ã³ã°å ã®æ®
çã¬ã¹ãæé€ããåŸãè£ çœ®ããæ¯æäœïŒïŒãååº
ããæ¯æäœïŒïŒäžã®CoâNiåéèã«åœ¢æããã
ãªãŒãã³ãŒãå±€ããã¿ãªã¹ããããESCAããã³
å çŽ åææ³ã«ããåèµ€ãããšããã èåïŒ260â« èçµæïŒC0.44H0.15Si0.25O0.16 ã§ããããšã確èªããã ããããŠåŸãããæ¯æäœã12.65mmå·Ÿã«è£æã
ãŠãããªããŒããäœè£œããã ãã®è©ŠæããŒããæ¯èŒäŸããŒãïŒãšããã æ¯èŒäŸ ïŒ ç¬¬ïŒå³ã«ç€ºã補é è£ çœ®ãçšããæŸé»å®€ïŒå ã«ã¬
ã€ããããæ¯æäœïŒïŒäžã®CoâNiåéèäžã§ã
ããã«ããªã¡ããã·ã·ã©ã³ãšé žçŽ ãšãã¢ã«æ¯ã§
ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ0.11Torr äŸçµŠé«åšæ³¢é»åïŒ300W ã®æ¡ä»¶ã§ã°ããŒæŸé»ããã代ãã«ãäžèšè¡šâïŒã
No.ïŒã«ç€ºãããã©ã¡ãã«ã·ã©ã³ãã å°å ¥ã¬ã¹å§ïŒ12mmTorr äŸçµŠé«åšæ³¢é»åïŒ100W ã®åå¿æ¡ä»¶ã§ã°ããŒæŸé»ããã以å€ã¯ãå®æœäŸïŒ
ãšåæ§ã®åŠçããã³æé ã«ãããã€ãŠãæ¯æäœïŒ
ïŒäžã®CoâNiåéèäžã«ãã©ãºãéåèããªãŒ
ãã³ãŒãããã äžèšãã©ãºãéåè圢æåŸãã±ãŒã·ã³ã°å ã®æ®
çã¬ã¹ãæé€ããåŸãè£ çœ®ããæ¯æäœïŒïŒãååº
ããæ¯æäœïŒïŒäžã®CoâNiåéèã«åœ¢æããã
ãªãŒãã³ãŒãå±€ããã¿ãªã¹ããããESCAããã³
å çŽ åææ³ã«ããåæãããšããã èåïŒ180â« èçµæïŒC0.51H0.04Si0.40O0.05 ã§ããããšã確èªããã ããããŠåŸãããæ¯æäœã12.65mmå·Ÿã«è£æã
ãŠãããªããŒããäœè£œããã ãã®è©ŠæããŒããæ¯èŒäŸããŒãïŒãšããã æ¯èŒäŸ ïŒ ç¬¬ïŒå³ã«ç€ºã補é è£ çœ®ãçšããæŸé»å®€ïŒå ã«ã¬
ã€ããããæ¯æäœïŒïŒäžã®CoâNiåéèäžã§ã
ããã«ããªã¡ããã·ã·ã©ã³ãšé žçŽ ãšãã¢ã«æ¯ã§
ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ0.11Torr äŸçµŠé«åšæ³¢é»åïŒ300W ã®æ¡ä»¶ã§ã°ããŒæŸé»ããã代ãã«ãäžèšè¡šâïŒã
No.ïŒã«ç€ºãããã©ã¡ãã«ã·ã©ã³ããã³ã¹ãã¬ã³ã
ã¢ã«æ¯ã§ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ125mmTorr äŸçµŠé«åšæ³¢é»åïŒ300W ã®åå¿æ¡ä»¶ã§ã°ããŒæŸé»ããã以å€ã¯ãå®æœäŸïŒ
ãšåæ§ã®åŠçããã³æé ã«ãããã€ãŠãæ¯æäœïŒ
ïŒäžã®CoâNiåéèäžã«ãã©ãºãéåèããªãŒ
ãã³ãŒãããã äžèšãã©ãºãéåè圢æåŸãã±ãŒã·ã³ã°å ã®æ®
çã¬ã¹ãæé€ããåŸãè£ çœ®ããæ¯æäœïŒïŒãååº
ããæ¯æäœïŒïŒäžã®CoâNiåéèã«åœ¢æããã
ãªãŒãã³ãŒãå±€ããã¿ãªã¹ããããESCAããã³
å çŽ åææ³ã«ããåæãããšããã èåïŒ300â« èçµæïŒC0.55H0.21Si0.41O0.05 ã§ããããšã確èªããã ããããŠåŸãããæ¯æäœã12.65mmå·Ÿã«è£æã
ãŠãããªããŒããäœè£œããã ãã®è©ŠæããŒããæ¯èŒäŸããŒãïŒãšããã æ¯èŒäŸ ïŒ ç¬¬ïŒå³ã«ç€ºã補é è£ çœ®ãçšããæŸé»å®€ïŒå ã«ã¬
ã€ããããæ¯æäœïŒïŒäžã®CoâNiåéèäžã§ã
ããã«ããªã¡ããã·ã·ã©ã³ãšé žçŽ ãšãã¢ã«æ¯ã§
ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ0.11Torr äŸçµŠé«åšæ³¢é»åïŒ300W ã®æ¡ä»¶ã§ã°ããŒæŸé»ããã代ãã«ãäžèšè¡šâïŒã
No.ïŒã«ç€ºããããµã¡ãã«ã·ã¯ãããªã·ã©ã¶ã³ãã å°å ¥ã¬ã¹å§ïŒ140mmTorr äŸçµŠé«åšæ³¢é»åïŒ250W ã®åå¿æ¡ä»¶ã§ã°ããŒæŸé»ããã以å€ã¯ãå®æœäŸïŒ
ãšåæ§ã®åŠçããã³æé ã«ãããã€ãŠãæ¯æäœïŒ
ïŒäžã®CoâNiåéèäžã«ãã©ãºãéåèããªãŒ
ãã³ãŒãããã äžèšãã©ãºãéåè圢æåŸãã±ãŒã·ã³ã°å ã®æ®
çã¬ã¹ãæé€ããåŸãè£ çœ®ããæ¯æäœïŒïŒãååº
ããæ¯æäœïŒïŒäžã®CoâNiåéèã«åœ¢æããã
ãªãŒãã³ãŒãå±€ããã¿ãªã¹ããããESCAããã³
å çŽ åææ³ã«ããåæãããšããã èåïŒ360â« èçµæïŒC0.31H0.11Si0.33O0.08N0.17 ã§ããããšã確èªããã ããããŠåŸãããæ¯æäœã12.65mmå·Ÿã«è£æã
ãŠãããªããŒããäœè£œããã ãã®è©ŠæããŒããæ¯èŒäŸããŒãïŒãšããã æ¯èŒäŸ ïŒ ç¬¬ïŒå³ã«ç€ºã補é è£ çœ®ãçšããæŸé»å®€ïŒå ã«ã¬
ã€ããããæ¯æäœïŒïŒäžã®CoâNiåéèäžã§ã
ããã«ããªã¡ããã·ã·ã©ã³ãšé žçŽ ãšãã¢ã«æ¯ã§
ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ0.11Torr äŸçµŠé«åšæ³¢é»åïŒ300W ã®æ¡ä»¶ã§ã°ããŒæŸé»ããã代ãã«ãäžèšè¡šâïŒã
No.ïŒã«ç€ºããããµã¡ãã«ã·ã¯ãããªã·ã©ã¶ã³ãã å°å ¥ã¬ã¹å§ïŒ18mmTorr äŸçµŠé«åšæ³¢é»åïŒ30W ã®åå¿æ¡ä»¶ã§ã°ããŒæŸé»ããã以å€ã¯ãå®æœäŸïŒ
ãšåæ§ã®åŠçããã³æé ã«ãããã€ãŠãæ¯æäœïŒ
ïŒäžã®CoâNiåéèäžã«ãã©ãºãéåèããªãŒ
ãã³ãŒãããã äžèšãã©ãºãéåè圢æåŸãã±ãŒã·ã³ã°å ã®æ®
çã¬ã¹ãæé€ããåŸãè£ çœ®ããæ¯æäœïŒïŒãååº
ããæ¯æäœïŒïŒäžã®CoâNiåéèã«åœ¢æããã
ãªãŒãã³ãŒãå±€ããã¿ãªã¹ããããESCAããã³
å çŽ åææ³ã«ããåæãããšããã èåïŒ320â« èçµæïŒC0.28H0.07Si0.23O0.10N0.32 ã§ããããšã確èªããã ããããŠåŸãããæ¯æäœã12.65mmå·Ÿã«è£æã
ãŠãããªããŒããäœè£œããã ãã®è©ŠæããŒããæ¯èŒäŸããŒãïŒãšããã 次ã«ãå®æœäŸïŒã16ããã³æ¯èŒäŸïŒãïŒã«ãã
ãŠåŸãããåå®æœäŸããŒãïŒã16ããã³æ¯èŒäŸã
ãŒãïŒãïŒã®ãªãŒãã³ãŒãå±€ã®å±æçãåæ©æŠä¿
æ°ãÏsã®å£åããã³ããŒãã®ã¹ãã«å¯¿åœïŒåïŒã«
ã€ããŠæž¬å®ããçµæããè¡šâïŒã«ç€ºãã
ã€ããããæ¯æäœïŒïŒäžã®CoâNiåéèäžã§ã
ããã«ããªã¡ããã·ã·ã©ã³ãšé žçŽ ãšãã¢ã«æ¯ã§
ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ0.11Torr äŸçµŠé«åšæ³¢é»åïŒ300W ã®æ¡ä»¶ã§ã°ããŒæŸé»ããã代ãã«ãäžèšè¡šâïŒã
No.ïŒã«ç€ºãããã«ããªã¡ããã·ã·ã©ã³ããã³ãšã
ã¬ã³ãã¢ã«æ¯ã§ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹
ãã å°å ¥ã¬ã¹å§ïŒ35mmTorr äŸçµŠé«åšæ³¢é»åïŒ100W ã®åå¿æ¡ä»¶ã§ã°ããŒæŸé»ããã以å€ã¯ãå®æœäŸïŒ
ãšåæ§ã®åŠçããã³æé ã«ãããã€ãŠãæ¯æäœïŒ
ïŒäžã®CoâNiåéèäžã«ãã©ãºãéåèããªãŒ
ãã³ãŒãããã äžèšãã©ãºãéåè圢æåŸãã±ãŒã·ã³ã°å ã®æ®
çã¬ã¹ãæé€ããåŸãè£ çœ®ããæ¯æäœïŒïŒãååº
ããæ¯æäœïŒïŒäžã®CoâNiåéèã«åœ¢æããã
ãªãŒãã³ãŒãå±€ããã¿ãªã¹ããããESCAããã³
å çŽ åææ³ã«ããåèµ€ãããšããã èåïŒ260â« èçµæïŒC0.44H0.15Si0.25O0.16 ã§ããããšã確èªããã ããããŠåŸãããæ¯æäœã12.65mmå·Ÿã«è£æã
ãŠãããªããŒããäœè£œããã ãã®è©ŠæããŒããæ¯èŒäŸããŒãïŒãšããã æ¯èŒäŸ ïŒ ç¬¬ïŒå³ã«ç€ºã補é è£ çœ®ãçšããæŸé»å®€ïŒå ã«ã¬
ã€ããããæ¯æäœïŒïŒäžã®CoâNiåéèäžã§ã
ããã«ããªã¡ããã·ã·ã©ã³ãšé žçŽ ãšãã¢ã«æ¯ã§
ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ0.11Torr äŸçµŠé«åšæ³¢é»åïŒ300W ã®æ¡ä»¶ã§ã°ããŒæŸé»ããã代ãã«ãäžèšè¡šâïŒã
No.ïŒã«ç€ºãããã©ã¡ãã«ã·ã©ã³ãã å°å ¥ã¬ã¹å§ïŒ12mmTorr äŸçµŠé«åšæ³¢é»åïŒ100W ã®åå¿æ¡ä»¶ã§ã°ããŒæŸé»ããã以å€ã¯ãå®æœäŸïŒ
ãšåæ§ã®åŠçããã³æé ã«ãããã€ãŠãæ¯æäœïŒ
ïŒäžã®CoâNiåéèäžã«ãã©ãºãéåèããªãŒ
ãã³ãŒãããã äžèšãã©ãºãéåè圢æåŸãã±ãŒã·ã³ã°å ã®æ®
çã¬ã¹ãæé€ããåŸãè£ çœ®ããæ¯æäœïŒïŒãååº
ããæ¯æäœïŒïŒäžã®CoâNiåéèã«åœ¢æããã
ãªãŒãã³ãŒãå±€ããã¿ãªã¹ããããESCAããã³
å çŽ åææ³ã«ããåæãããšããã èåïŒ180â« èçµæïŒC0.51H0.04Si0.40O0.05 ã§ããããšã確èªããã ããããŠåŸãããæ¯æäœã12.65mmå·Ÿã«è£æã
ãŠãããªããŒããäœè£œããã ãã®è©ŠæããŒããæ¯èŒäŸããŒãïŒãšããã æ¯èŒäŸ ïŒ ç¬¬ïŒå³ã«ç€ºã補é è£ çœ®ãçšããæŸé»å®€ïŒå ã«ã¬
ã€ããããæ¯æäœïŒïŒäžã®CoâNiåéèäžã§ã
ããã«ããªã¡ããã·ã·ã©ã³ãšé žçŽ ãšãã¢ã«æ¯ã§
ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ0.11Torr äŸçµŠé«åšæ³¢é»åïŒ300W ã®æ¡ä»¶ã§ã°ããŒæŸé»ããã代ãã«ãäžèšè¡šâïŒã
No.ïŒã«ç€ºãããã©ã¡ãã«ã·ã©ã³ããã³ã¹ãã¬ã³ã
ã¢ã«æ¯ã§ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ125mmTorr äŸçµŠé«åšæ³¢é»åïŒ300W ã®åå¿æ¡ä»¶ã§ã°ããŒæŸé»ããã以å€ã¯ãå®æœäŸïŒ
ãšåæ§ã®åŠçããã³æé ã«ãããã€ãŠãæ¯æäœïŒ
ïŒäžã®CoâNiåéèäžã«ãã©ãºãéåèããªãŒ
ãã³ãŒãããã äžèšãã©ãºãéåè圢æåŸãã±ãŒã·ã³ã°å ã®æ®
çã¬ã¹ãæé€ããåŸãè£ çœ®ããæ¯æäœïŒïŒãååº
ããæ¯æäœïŒïŒäžã®CoâNiåéèã«åœ¢æããã
ãªãŒãã³ãŒãå±€ããã¿ãªã¹ããããESCAããã³
å çŽ åææ³ã«ããåæãããšããã èåïŒ300â« èçµæïŒC0.55H0.21Si0.41O0.05 ã§ããããšã確èªããã ããããŠåŸãããæ¯æäœã12.65mmå·Ÿã«è£æã
ãŠãããªããŒããäœè£œããã ãã®è©ŠæããŒããæ¯èŒäŸããŒãïŒãšããã æ¯èŒäŸ ïŒ ç¬¬ïŒå³ã«ç€ºã補é è£ çœ®ãçšããæŸé»å®€ïŒå ã«ã¬
ã€ããããæ¯æäœïŒïŒäžã®CoâNiåéèäžã§ã
ããã«ããªã¡ããã·ã·ã©ã³ãšé žçŽ ãšãã¢ã«æ¯ã§
ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ0.11Torr äŸçµŠé«åšæ³¢é»åïŒ300W ã®æ¡ä»¶ã§ã°ããŒæŸé»ããã代ãã«ãäžèšè¡šâïŒã
No.ïŒã«ç€ºããããµã¡ãã«ã·ã¯ãããªã·ã©ã¶ã³ãã å°å ¥ã¬ã¹å§ïŒ140mmTorr äŸçµŠé«åšæ³¢é»åïŒ250W ã®åå¿æ¡ä»¶ã§ã°ããŒæŸé»ããã以å€ã¯ãå®æœäŸïŒ
ãšåæ§ã®åŠçããã³æé ã«ãããã€ãŠãæ¯æäœïŒ
ïŒäžã®CoâNiåéèäžã«ãã©ãºãéåèããªãŒ
ãã³ãŒãããã äžèšãã©ãºãéåè圢æåŸãã±ãŒã·ã³ã°å ã®æ®
çã¬ã¹ãæé€ããåŸãè£ çœ®ããæ¯æäœïŒïŒãååº
ããæ¯æäœïŒïŒäžã®CoâNiåéèã«åœ¢æããã
ãªãŒãã³ãŒãå±€ããã¿ãªã¹ããããESCAããã³
å çŽ åææ³ã«ããåæãããšããã èåïŒ360â« èçµæïŒC0.31H0.11Si0.33O0.08N0.17 ã§ããããšã確èªããã ããããŠåŸãããæ¯æäœã12.65mmå·Ÿã«è£æã
ãŠãããªããŒããäœè£œããã ãã®è©ŠæããŒããæ¯èŒäŸããŒãïŒãšããã æ¯èŒäŸ ïŒ ç¬¬ïŒå³ã«ç€ºã補é è£ çœ®ãçšããæŸé»å®€ïŒå ã«ã¬
ã€ããããæ¯æäœïŒïŒäžã®CoâNiåéèäžã§ã
ããã«ããªã¡ããã·ã·ã©ã³ãšé žçŽ ãšãã¢ã«æ¯ã§
ïŒïŒïŒïŒïŒã®å²åã§æ··åããã¬ã¹ãã å°å ¥ã¬ã¹å§ïŒ0.11Torr äŸçµŠé«åšæ³¢é»åïŒ300W ã®æ¡ä»¶ã§ã°ããŒæŸé»ããã代ãã«ãäžèšè¡šâïŒã
No.ïŒã«ç€ºããããµã¡ãã«ã·ã¯ãããªã·ã©ã¶ã³ãã å°å ¥ã¬ã¹å§ïŒ18mmTorr äŸçµŠé«åšæ³¢é»åïŒ30W ã®åå¿æ¡ä»¶ã§ã°ããŒæŸé»ããã以å€ã¯ãå®æœäŸïŒ
ãšåæ§ã®åŠçããã³æé ã«ãããã€ãŠãæ¯æäœïŒ
ïŒäžã®CoâNiåéèäžã«ãã©ãºãéåèããªãŒ
ãã³ãŒãããã äžèšãã©ãºãéåè圢æåŸãã±ãŒã·ã³ã°å ã®æ®
çã¬ã¹ãæé€ããåŸãè£ çœ®ããæ¯æäœïŒïŒãååº
ããæ¯æäœïŒïŒäžã®CoâNiåéèã«åœ¢æããã
ãªãŒãã³ãŒãå±€ããã¿ãªã¹ããããESCAããã³
å çŽ åææ³ã«ããåæãããšããã èåïŒ320â« èçµæïŒC0.28H0.07Si0.23O0.10N0.32 ã§ããããšã確èªããã ããããŠåŸãããæ¯æäœã12.65mmå·Ÿã«è£æã
ãŠãããªããŒããäœè£œããã ãã®è©ŠæããŒããæ¯èŒäŸããŒãïŒãšããã 次ã«ãå®æœäŸïŒã16ããã³æ¯èŒäŸïŒãïŒã«ãã
ãŠåŸãããåå®æœäŸããŒãïŒã16ããã³æ¯èŒäŸã
ãŒãïŒãïŒã®ãªãŒãã³ãŒãå±€ã®å±æçãåæ©æŠä¿
æ°ãÏsã®å£åããã³ããŒãã®ã¹ãã«å¯¿åœïŒåïŒã«
ã€ããŠæž¬å®ããçµæããè¡šâïŒã«ç€ºãã
ãè¡šã
ãè¡šã
è¡šâïŒã«ç€ºããªãŒãã³ãŒãå±€ã®å±æçãåæ©æŠ
ä¿æ°ãÏså£åçããã³ã¹ãã«å¯¿åœã¯æ¬¡ã®æ¹æ³ã«ã
ããã€ãŠè©äŸ¡ããã (a) ãªãŒãã³ãŒãå±€ã®å±æçïŒ ãšãªããœã¡ãŒã¿ã§æž¬å®ããã (b) ãªãŒãã³ãŒãå±€ã®åæ©æŠä¿æ°ïŒ ããŒãã枩床25âãçžå¯Ÿæ¹¿åºŠ55ïŒ ã®é°å²æ°äž
ã§24æéæŸçœ®åŸãããŒãã®äžç«¯ããã³ã·ãšã³æ€
åºéšã«åãä»ããä»æ¹ã®ç«¯ã«ã¯30ïœè·éããã
ãŠéæ¢ããŠãããããã«åœè©²ããŒãäžé¢ã«å転
ããŒã©ïŒçŽåŸïŒmmïŒãæ¥è§ŠãããŠãåšé床14
mmïŒsecã§å転ããããšããäžèšãã³ã·ãšã³æ€
åºéšã«æ€åºãããå€ããã€ãŠåæ©æŠä¿æ°ãšã
ãã (c) Ïså£åçïŒ ããŒããé«æž©å€æ¹¿ã®æ¡ä»¶äžïŒæž©åºŠ60âãçžå¯Ÿ
湿床80ïŒ ïŒã«ãããŠïŒé±éæŸçœ®ããåŸã®ãåœè©²
ããŒãã®é£œåç£åÏsãšãæŸçœ®åã®ããŒãã®é£œå
ç£åÏspãšããã次åŒã«åŸã€ãŠæ±ããã Ïså£åçïŒïŒÏspâÏsïŒÏspïŒÃ100 ããã€ãŠè¡šç€ºããã (d) ã¹ãã«å¯¿åœïŒ TVç»é¢äžã®åçéæ¢ç»åãæ¶å€±ãããŸã§ã®
æéãïŒåïŒåäœã§è¡šç€ºããããŸããåèšå®æœ
äŸïŒã16ããã³æ¯èŒäŸïŒãïŒã«ãããããŒãã®
ãªãŒãã³ãŒãå±€ã®èåã¯Rank talor Hobson
瀟補ã¿ãªã¹ããããçšãåžžæ³ã«åŸã€ãŠæž¬å®ã
ãã è¡šâïŒã«è¡šãããã枬å®çµæããããªãŒãã³ãŒ
ãå±€ã®å±æçã1.45以äžã®è³æããŒãïŒæ¯èŒäŸã
ãŒãïŒãïŒïŒã¯ãå±æç1.45以äžã®è©ŠæããŒã
ïŒå®æœäŸããŒãïŒã16ïŒã«æ¯ã¹ãŠãåæ©æŠä¿æ°ã
Ïså£åçããããã倧ãããããŒãèµ°è¡æ§ãæªã
ã¹ãªå·ãçãããããèé£æ§ïŒä¿åå®å®æ§ïŒãå£
ãããšãå€ãã ããã«ããªãŒãã³ãŒãå±€ã®å±æç1.45以äžã®è©Š
æããŒãã¯ãå±æç1.45以äžã®ãªãŒãã³ãŒãå±€ã
æããè©ŠæããŒãã«æ¯ã¹ãŠãã¹ãã«å¯¿åœãé·ãè
æ©èæ§ãåªããŠããããšãå€ãã è¡šâïŒã«ç€ºããã枬å®å€ã«åºã¥ããŠãè©ŠæããŒ
ãã®å±æçãšã¹ãã«å¯¿åœãšã®é¢ä¿ããããããã
ãšã第ïŒå³ã«ç€ºãããšãçµæãšãªããå³äžÃå°
ã¯ãå±æç1.45以äžã®è©ŠæããŒãã®ç¹æ§å€ã§ã
ããã»å°ã¯ãå±æç1.45以äžã®è©ŠæããŒãã®ç¹æ§
å€ãè¡šããããã®çµæã«åºã¥ããŠå æ¿ç·ãããã
ãããŠã¿ããšãïŒçš®é¡ã®å æ¿ç·C1ãšC2ãåŸãã
ãã å æ¿ç·C1ïŒC2ãããå±æçã1.45以äžã®ãªãŒã
ã³ãŒãå±€ãæããããŒãã®ã¹ãã«å¯¿åœã¯ãå±æç
1.45以äžã®ãªãŒãã³ãŒãå±€ãæããããŒãã®ã¹ã
ã«å¯¿åœã«æ¯ã¹ãŠé£èºçã«å¢å ããŠãããããŒãã®
èæ©èæ§ãåäžããããšãå€ãã ãfã çºæã®å¹æïŒ ä»¥äžã®ããšããæ¬çºæã«ãããšãç£æ°èšé²åªäœ
ã¯ã èµ°è¡æ§ãæ¹åãããèµ°è¡äžè¯ã«åºã¥ãç»é¢ã
ããã¯é²é³ã®ä¹±ããå°ãªããªãã ãŸããèæ©èæ§ãé«ããããé·æé䜿çšããŠ
ããåçåºåä¿¡å·ã®å€åãå°ãªãã ããã«ãèé£æ§ã«åªããŠãããããé·æéé«
æž©ã»é«æ¹¿ã®æ¡ä»¶ã®äžã«æŸçœ®ããŠããåçåºåã®
å£åãå°ãªããé«ãä¿åå®å®æ§ãåŸãããã
ä¿æ°ãÏså£åçããã³ã¹ãã«å¯¿åœã¯æ¬¡ã®æ¹æ³ã«ã
ããã€ãŠè©äŸ¡ããã (a) ãªãŒãã³ãŒãå±€ã®å±æçïŒ ãšãªããœã¡ãŒã¿ã§æž¬å®ããã (b) ãªãŒãã³ãŒãå±€ã®åæ©æŠä¿æ°ïŒ ããŒãã枩床25âãçžå¯Ÿæ¹¿åºŠ55ïŒ ã®é°å²æ°äž
ã§24æéæŸçœ®åŸãããŒãã®äžç«¯ããã³ã·ãšã³æ€
åºéšã«åãä»ããä»æ¹ã®ç«¯ã«ã¯30ïœè·éããã
ãŠéæ¢ããŠãããããã«åœè©²ããŒãäžé¢ã«å転
ããŒã©ïŒçŽåŸïŒmmïŒãæ¥è§ŠãããŠãåšé床14
mmïŒsecã§å転ããããšããäžèšãã³ã·ãšã³æ€
åºéšã«æ€åºãããå€ããã€ãŠåæ©æŠä¿æ°ãšã
ãã (c) Ïså£åçïŒ ããŒããé«æž©å€æ¹¿ã®æ¡ä»¶äžïŒæž©åºŠ60âãçžå¯Ÿ
湿床80ïŒ ïŒã«ãããŠïŒé±éæŸçœ®ããåŸã®ãåœè©²
ããŒãã®é£œåç£åÏsãšãæŸçœ®åã®ããŒãã®é£œå
ç£åÏspãšããã次åŒã«åŸã€ãŠæ±ããã Ïså£åçïŒïŒÏspâÏsïŒÏspïŒÃ100 ããã€ãŠè¡šç€ºããã (d) ã¹ãã«å¯¿åœïŒ TVç»é¢äžã®åçéæ¢ç»åãæ¶å€±ãããŸã§ã®
æéãïŒåïŒåäœã§è¡šç€ºããããŸããåèšå®æœ
äŸïŒã16ããã³æ¯èŒäŸïŒãïŒã«ãããããŒãã®
ãªãŒãã³ãŒãå±€ã®èåã¯Rank talor Hobson
瀟補ã¿ãªã¹ããããçšãåžžæ³ã«åŸã€ãŠæž¬å®ã
ãã è¡šâïŒã«è¡šãããã枬å®çµæããããªãŒãã³ãŒ
ãå±€ã®å±æçã1.45以äžã®è³æããŒãïŒæ¯èŒäŸã
ãŒãïŒãïŒïŒã¯ãå±æç1.45以äžã®è©ŠæããŒã
ïŒå®æœäŸããŒãïŒã16ïŒã«æ¯ã¹ãŠãåæ©æŠä¿æ°ã
Ïså£åçããããã倧ãããããŒãèµ°è¡æ§ãæªã
ã¹ãªå·ãçãããããèé£æ§ïŒä¿åå®å®æ§ïŒãå£
ãããšãå€ãã ããã«ããªãŒãã³ãŒãå±€ã®å±æç1.45以äžã®è©Š
æããŒãã¯ãå±æç1.45以äžã®ãªãŒãã³ãŒãå±€ã
æããè©ŠæããŒãã«æ¯ã¹ãŠãã¹ãã«å¯¿åœãé·ãè
æ©èæ§ãåªããŠããããšãå€ãã è¡šâïŒã«ç€ºããã枬å®å€ã«åºã¥ããŠãè©ŠæããŒ
ãã®å±æçãšã¹ãã«å¯¿åœãšã®é¢ä¿ããããããã
ãšã第ïŒå³ã«ç€ºãããšãçµæãšãªããå³äžÃå°
ã¯ãå±æç1.45以äžã®è©ŠæããŒãã®ç¹æ§å€ã§ã
ããã»å°ã¯ãå±æç1.45以äžã®è©ŠæããŒãã®ç¹æ§
å€ãè¡šããããã®çµæã«åºã¥ããŠå æ¿ç·ãããã
ãããŠã¿ããšãïŒçš®é¡ã®å æ¿ç·C1ãšC2ãåŸãã
ãã å æ¿ç·C1ïŒC2ãããå±æçã1.45以äžã®ãªãŒã
ã³ãŒãå±€ãæããããŒãã®ã¹ãã«å¯¿åœã¯ãå±æç
1.45以äžã®ãªãŒãã³ãŒãå±€ãæããããŒãã®ã¹ã
ã«å¯¿åœã«æ¯ã¹ãŠé£èºçã«å¢å ããŠãããããŒãã®
èæ©èæ§ãåäžããããšãå€ãã ãfã çºæã®å¹æïŒ ä»¥äžã®ããšããæ¬çºæã«ãããšãç£æ°èšé²åªäœ
ã¯ã èµ°è¡æ§ãæ¹åãããèµ°è¡äžè¯ã«åºã¥ãç»é¢ã
ããã¯é²é³ã®ä¹±ããå°ãªããªãã ãŸããèæ©èæ§ãé«ããããé·æé䜿çšããŠ
ããåçåºåä¿¡å·ã®å€åãå°ãªãã ããã«ãèé£æ§ã«åªããŠãããããé·æéé«
æž©ã»é«æ¹¿ã®æ¡ä»¶ã®äžã«æŸçœ®ããŠããåçåºåã®
å£åãå°ãªããé«ãä¿åå®å®æ§ãåŸãããã
第ïŒå³ã¯ãæ¬çºæã®ç£æ°èšé²åªäœè£œé è£
眮ã®èŠ
éšæé¢å³ã第ïŒå³ã¯æ¬çºæã®ç£æ°èšé²åªäœè£œé è£
眮ã®ä»ã®å®æœäŸã®èŠéšæé¢å³ã第ïŒå³ã¯æ¬çºæã«
ãããç£æ°èšé²åªäœãšæ¯èŒäŸã®ç£æ°èšé²åªäœã®ãª
ãŒãã³ãŒãå±€ã®å±æç察ã¹ãã«å¯¿åœã®é¢ä¿ã瀺ã
ç¹æ§æ²ç·å³ã§ããã ïŒâŠâŠæŸé»å®€ãïŒâŠâŠæ¯æäœéåºå®€ãïŒâŠâŠæ¯
æäœå·»åã宀ãïŒâŠâŠäžéšé»æ¥µãïŒâŠâŠäžéšé»
極ãïŒâŠâŠãããã³ã°ããã¯ã¹ãïŒâŠâŠé«åšæ³¢é»
æºãïŒïŒâŠâŠæ¯æäœãïŒïŒâŠâŠæ¯æäœéåºãªãŒ
ã«ãïŒïŒâŠâŠæ¯æäœå·»åãªãŒã«ã
éšæé¢å³ã第ïŒå³ã¯æ¬çºæã®ç£æ°èšé²åªäœè£œé è£
眮ã®ä»ã®å®æœäŸã®èŠéšæé¢å³ã第ïŒå³ã¯æ¬çºæã«
ãããç£æ°èšé²åªäœãšæ¯èŒäŸã®ç£æ°èšé²åªäœã®ãª
ãŒãã³ãŒãå±€ã®å±æç察ã¹ãã«å¯¿åœã®é¢ä¿ã瀺ã
ç¹æ§æ²ç·å³ã§ããã ïŒâŠâŠæŸé»å®€ãïŒâŠâŠæ¯æäœéåºå®€ãïŒâŠâŠæ¯
æäœå·»åã宀ãïŒâŠâŠäžéšé»æ¥µãïŒâŠâŠäžéšé»
極ãïŒâŠâŠãããã³ã°ããã¯ã¹ãïŒâŠâŠé«åšæ³¢é»
æºãïŒïŒâŠâŠæ¯æäœãïŒïŒâŠâŠæ¯æäœéåºãªãŒ
ã«ãïŒïŒâŠâŠæ¯æäœå·»åãªãŒã«ã
Claims (1)
- ãç¹èš±è«æ±ã®ç¯å²ã ïŒ æ¯æäœäžã«ãç£æ§å±€ãšç£æ§å±€äžã«åœ¢æãããª
ãŒããŒã³ãŒãå±€ãæããç£æ°èšé²åªäœã«ãããŠã
ãªãŒããŒã³ãŒãå±€ãå±æç1.45以äžã§ãããå«ã
ãçŽ ææ©ãã©ãºãéåå±€ã§æ§æããããã®ã§ãã
ããšãç¹åŸŽãšããç£æ°èšé²åªäœã ïŒ æ¯æäœäžã«ç£æ§å±€ã圢æããåŸã該ç£æ§å±€äž
ã§éãã©ãºãéåæ§ã¬ã¹ãšå«ããçŽ ååç©ãšãå
æã«ãã©ãºãéååŠçããç£æ§å±€äžã«å«ããçŽ æ
æ©ãã©ãºãéåå±€ã§æ§æãããå±æç1.45以äžã®
ãªãŒããŒã³ãŒãå±€ã圢æããããšãç¹åŸŽãšããç£
æ°èšé²åªäœã®è£œé æ¹æ³ã
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58145193A JPS6038727A (ja) | 1983-08-09 | 1983-08-09 | ç£æ°èšé²åªäœããã³ãã®è£œé æ¹æ³ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58145193A JPS6038727A (ja) | 1983-08-09 | 1983-08-09 | ç£æ°èšé²åªäœããã³ãã®è£œé æ¹æ³ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6038727A JPS6038727A (ja) | 1985-02-28 |
| JPH0325849B2 true JPH0325849B2 (ja) | 1991-04-09 |
Family
ID=15379572
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58145193A Granted JPS6038727A (ja) | 1983-08-09 | 1983-08-09 | ç£æ°èšé²åªäœããã³ãã®è£œé æ¹æ³ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6038727A (ja) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6057536A (ja) * | 1983-09-08 | 1985-04-03 | Hitachi Maxell Ltd | ç£æ°èšé²åªäœã®è£œé æ¹æ³ |
| JP2542574B2 (ja) * | 1985-12-27 | 1996-10-09 | ã€ããæ ªåŒäŒç€Ÿ | é»å楜åšã®ããã«è£ 眮 |
| ZA884511B (en) * | 1987-07-15 | 1989-03-29 | Boc Group Inc | Method of plasma enhanced silicon oxide deposition |
| EP1109947A4 (en) * | 1998-07-27 | 2004-09-22 | Bekaert Sa Nv | PROTECTIVE LAYERS FOR FLAT SCREEN DISPLAY SUBSTRATES |
-
1983
- 1983-08-09 JP JP58145193A patent/JPS6038727A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6038727A (ja) | 1985-02-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4551778A (en) | Magnetic recording media and process of producing them | |
| US4599266A (en) | Magnetic recording medium | |
| EP0230911B1 (en) | Magnetic recording medium | |
| US6855232B2 (en) | Magnetic disk comprising a first carbon overcoat having a high SP3 content and a second carbon overcoat having a low SP3 content | |
| US4992316A (en) | Recording medium and method of producing the same | |
| US5750210A (en) | Hydrogenated carbon composition | |
| US6165582A (en) | Magnetic recording medium | |
| US5677051A (en) | Magnetic recording medium having a specified plasma polymerized hydrogen containing carbon film and lubricant | |
| US5589263A (en) | Magnetic recording medium having a ferromagnetic metal thin film, a dry etched layer, a carbonaceous film, and a lubricant film | |
| JPH0325849B2 (ja) | ||
| JP3419045B2 (ja) | ç£æ°èšé²åªäœã®è£œé æ¹æ³ | |
| JPH0223926B2 (ja) | ||
| US4988573A (en) | Medium related members | |
| JPH0325850B2 (ja) | ||
| EP0655733B1 (en) | Magnetic recording medium and method for producing the same | |
| JP3219596B2 (ja) | å èšé²åªäœã®è£œé æ¹æ³ | |
| JPS62172521A (ja) | ç£æ°èšé²åªäœ | |
| JPH0364931B2 (ja) | ||
| JPH0364930B2 (ja) | ||
| US5472778A (en) | Magnetic recording medium | |
| JP2670690B2 (ja) | åªäœçšéšæã®è£œé æ¹æ³ | |
| JPS6069826A (ja) | ç£æ°èšé²åªäœ | |
| JPS6113424A (ja) | ç£æ°èšé²åªäœ | |
| JPS6122426A (ja) | ç£æ°èšé²åªäœ | |
| JPH079700B2 (ja) | ç£æ°èšé²åªäœ |