JPH0325755Y2 - - Google Patents
Info
- Publication number
- JPH0325755Y2 JPH0325755Y2 JP14019487U JP14019487U JPH0325755Y2 JP H0325755 Y2 JPH0325755 Y2 JP H0325755Y2 JP 14019487 U JP14019487 U JP 14019487U JP 14019487 U JP14019487 U JP 14019487U JP H0325755 Y2 JPH0325755 Y2 JP H0325755Y2
- Authority
- JP
- Japan
- Prior art keywords
- flow rate
- pump
- filter
- solvent
- motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002904 solvent Substances 0.000 claims description 18
- 238000005406 washing Methods 0.000 claims description 10
- 238000001514 detection method Methods 0.000 description 4
- 230000005856 abnormality Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 239000003208 petroleum Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14019487U JPH0325755Y2 (de) | 1987-09-14 | 1987-09-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14019487U JPH0325755Y2 (de) | 1987-09-14 | 1987-09-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6443885U JPS6443885U (de) | 1989-03-16 |
| JPH0325755Y2 true JPH0325755Y2 (de) | 1991-06-04 |
Family
ID=31404144
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14019487U Expired JPH0325755Y2 (de) | 1987-09-14 | 1987-09-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0325755Y2 (de) |
-
1987
- 1987-09-14 JP JP14019487U patent/JPH0325755Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6443885U (de) | 1989-03-16 |
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