JPH0325557U - - Google Patents
Info
- Publication number
- JPH0325557U JPH0325557U JP8600989U JP8600989U JPH0325557U JP H0325557 U JPH0325557 U JP H0325557U JP 8600989 U JP8600989 U JP 8600989U JP 8600989 U JP8600989 U JP 8600989U JP H0325557 U JPH0325557 U JP H0325557U
- Authority
- JP
- Japan
- Prior art keywords
- sputtering
- cooling water
- target line
- sputtering chamber
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004544 sputter deposition Methods 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 2
- 239000000498 cooling water Substances 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000001816 cooling Methods 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 2
- 239000013256 coordination polymer Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8600989U JPH0325557U (enrdf_load_stackoverflow) | 1989-07-21 | 1989-07-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8600989U JPH0325557U (enrdf_load_stackoverflow) | 1989-07-21 | 1989-07-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0325557U true JPH0325557U (enrdf_load_stackoverflow) | 1991-03-15 |
Family
ID=31635417
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8600989U Pending JPH0325557U (enrdf_load_stackoverflow) | 1989-07-21 | 1989-07-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0325557U (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007177310A (ja) * | 2005-12-28 | 2007-07-12 | Showa Shinku:Kk | スパッタリング装置および方法 |
-
1989
- 1989-07-21 JP JP8600989U patent/JPH0325557U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007177310A (ja) * | 2005-12-28 | 2007-07-12 | Showa Shinku:Kk | スパッタリング装置および方法 |
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