JPH0325402Y2 - - Google Patents
Info
- Publication number
- JPH0325402Y2 JPH0325402Y2 JP1985135649U JP13564985U JPH0325402Y2 JP H0325402 Y2 JPH0325402 Y2 JP H0325402Y2 JP 1985135649 U JP1985135649 U JP 1985135649U JP 13564985 U JP13564985 U JP 13564985U JP H0325402 Y2 JPH0325402 Y2 JP H0325402Y2
- Authority
- JP
- Japan
- Prior art keywords
- ring
- substrate
- block body
- shaped
- substrate holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 37
- 210000000078 claw Anatomy 0.000 claims description 12
- 238000000034 method Methods 0.000 description 12
- 235000012431 wafers Nutrition 0.000 description 7
- 239000013078 crystal Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000010894 electron beam technology Methods 0.000 description 4
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985135649U JPH0325402Y2 (US20100056889A1-20100304-C00004.png) | 1985-09-06 | 1985-09-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985135649U JPH0325402Y2 (US20100056889A1-20100304-C00004.png) | 1985-09-06 | 1985-09-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6244433U JPS6244433U (US20100056889A1-20100304-C00004.png) | 1987-03-17 |
| JPH0325402Y2 true JPH0325402Y2 (US20100056889A1-20100304-C00004.png) | 1991-06-03 |
Family
ID=31038036
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985135649U Expired JPH0325402Y2 (US20100056889A1-20100304-C00004.png) | 1985-09-06 | 1985-09-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0325402Y2 (US20100056889A1-20100304-C00004.png) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60112691A (ja) * | 1983-11-18 | 1985-06-19 | Anelva Corp | 分子線エピタキシャル成長装置用の基板保持装置 |
-
1985
- 1985-09-06 JP JP1985135649U patent/JPH0325402Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60112691A (ja) * | 1983-11-18 | 1985-06-19 | Anelva Corp | 分子線エピタキシャル成長装置用の基板保持装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6244433U (US20100056889A1-20100304-C00004.png) | 1987-03-17 |
