JPH0324527A - Liquid crystal display device - Google Patents

Liquid crystal display device

Info

Publication number
JPH0324527A
JPH0324527A JP1160015A JP16001589A JPH0324527A JP H0324527 A JPH0324527 A JP H0324527A JP 1160015 A JP1160015 A JP 1160015A JP 16001589 A JP16001589 A JP 16001589A JP H0324527 A JPH0324527 A JP H0324527A
Authority
JP
Japan
Prior art keywords
liquid crystal
picture element
crystal display
terminal
display device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1160015A
Other languages
Japanese (ja)
Inventor
Masafumi Hoshino
雅文 星野
Shunichi Motte
物袋 俊一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP1160015A priority Critical patent/JPH0324527A/en
Publication of JPH0324527A publication Critical patent/JPH0324527A/en
Pending legal-status Critical Current

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  • Liquid Crystal (AREA)

Abstract

PURPOSE:To preclude a spot defect and make only part of a picture element absent even if a two-terminal element is broken by dividing each picture element into several and driving respective parts by individual two-terminal elements. CONSTITUTION:One picture element electrode 2 is divided into 2 - 10 parts, which are each provided with a two-terminal element. For example, two picture element electrodes each on both sides of a driving electrode 3, i.e. four electrodes in total are provided on a substrate to form one picture element, and the respective picture element electrodes are formed by depositing, for example, I.T.O., etc., by a sputtering method and etching it selectively. There fore, even if an element defect occurs, 3/4 of one picture element is driven normally to prevet a remarkable decrease in display quality. Consequently, the liquid crystal display device which does not have a picture element defect even if a two-terminal element becomes defecive is obtained.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は計測器の表示パネル,パソコンの画像表示装置
,液晶テレビなどの二端子素子を用いた液晶表示装置に
関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a liquid crystal display device using a two-terminal element, such as a display panel for a measuring instrument, an image display device for a personal computer, and a liquid crystal television.

(発明の概要) 本発明は、画素電極と駆動用電極間に非線形抵抗膜を設
けた二端子素子を用いた液晶表示装置において、画素電
極を2〜lO分割し、分割したそれぞれの画素電極に二
端子素子を形成することにより、二端子素子の不良(シ
コート、オープン)が発生しても一画素の全体が欠陥に
ならず画素中の一部分だけが欠陥になるようにしたもの
である。
(Summary of the Invention) The present invention provides a liquid crystal display device using a two-terminal element in which a non-linear resistance film is provided between a pixel electrode and a driving electrode, in which a pixel electrode is divided into 2 to 1000000 parts, and each divided pixel electrode is By forming a two-terminal element, even if a two-terminal element becomes defective (such as an open circuit), the entire pixel does not become defective, but only a portion of the pixel becomes defective.

これにより液晶表示装置において表示品質、歩留まりが
向上する. (従来の技術) 小型.軽量,薄型.低消費電力の表示装置として、液晶
表示装置は他の表示装置と比べて優位性を持ち、近年実
用化が進められて来ている。?li.晶表示装置の表示
情報量の増大化を図る目的で薄膜トランジスタなどの三
端子アクティブマトリクス液晶表示装置や、Zn○バリ
スタや金属一絶縁膜−金属構造からなるいわゆるMIM
形非線形抵抗素子、絶縁膜部にSiリッチな窒化膜や酸
化膜などを用いた非線形抵抗素子などの二端子アクティ
ブマトリクス液晶表示装置が研究されている.二端子素
子は、三端子素子と比較して、形戊膜数が少なく、パタ
ーニング精度はかなり粗くてよいなどの特徴があり、低
コスト.大面積表示装置への応用が可能である。
This improves display quality and yield in liquid crystal display devices. (Conventional technology) Small size. Lightweight and thin. Liquid crystal display devices have an advantage over other display devices as display devices with low power consumption, and have been put into practical use in recent years. ? li. In order to increase the amount of information displayed on crystal display devices, three-terminal active matrix liquid crystal display devices such as thin film transistors, so-called MIMs consisting of Zn○ varistors and metal-insulating film-metal structures have been developed.
Two-terminal active matrix liquid crystal display devices, such as nonlinear resistive elements and nonlinear resistive elements using Si-rich nitride or oxide films in the insulating film portion, are being researched. Compared to three-terminal elements, two-terminal elements have the advantage of having fewer layers and relatively coarse patterning accuracy, making them low-cost. Application to large area display devices is possible.

第4図は、非線形抵抗素子を用いた二端子アクティブマ
トリクス液晶表示装置のX−Yマトリクスパネル回路図
である.行液晶駆動電極と列液晶駆動電極は基板及び対
向基板にそれぞれ通常100〜1000本程形威される
。x−y交差部には液晶33と非線形抵抗素子34が形
成される。第3図[al及び山)はそれぞれ非線形抵抗
素子として、3iリンチな窒化シリコン膜などを用いた
二端子素子の正面図と側面図である。
FIG. 4 is an X-Y matrix panel circuit diagram of a two-terminal active matrix liquid crystal display device using nonlinear resistance elements. Usually, about 100 to 1000 row liquid crystal drive electrodes and column liquid crystal drive electrodes are formed on each of the substrate and the counter substrate. A liquid crystal 33 and a nonlinear resistance element 34 are formed at the xy intersection. FIG. 3 [al and ridges] are a front view and a side view, respectively, of a two-terminal element using a 3i silicon nitride film or the like as a nonlinear resistance element.

透明基板上に画素電極22 (1.T.O.)を選択的
に形成した後、非線形抵抗膜24(窒化シリコン)と駆
動電極23(Cr)を堆積し、それぞれを選択的にエフ
チングした構造になっている.この様な液晶表示装置の
駆動は次のように行う。
After selectively forming a pixel electrode 22 (1.T.O.) on a transparent substrate, a nonlinear resistance film 24 (silicon nitride) and a drive electrode 23 (Cr) are deposited, and each is selectively etched. It has become. Driving of such a liquid crystal display device is performed as follows.

第4図の多数の行電極31を一本ずつ上の方から線順次
に選択し、その選択期間内に列電極32によってデータ
を書き込む.このとき十分なコントラストで表示が行え
るためには、選択点での液晶に印加される実行電圧が液
晶の飽和電圧よりも太きいこと、非選択点での液晶に印
加される実行電圧が液晶のしきい値電圧よりも小さいこ
とが必要である.非線形抵抗膜を用いると、選択点では
書き込み時(高電圧印加時)には非線形抵抗膜24の抵
抗が低くなり、液晶33に電荷が注入されやすくなり、
保持期間(低電圧印加時)には、非線形抵抗Wl!24
の抵抗が高くなり、液晶33に注入された電荷が保持さ
れやすくなる。こうして液晶33に印加される実行電圧
を高く保つことができる。また、非選択時では書き込み
時に非線形抵抗膜24の抵抗はそれ程低くならず液晶3
3にはあまり電荷は注入されない。よって液晶33に印
加される実行電圧は比較的小さく抑えられることになり
、分割数をかなり大きくしても高いコントラストを保て
る。非線形抵抗素子においては、書き込み期間、保持期
間それぞれの期間に、非線形抵抗膜が所望の抵抗値にな
るように膜の&lI戒や構造を決定する。また、このよ
うな液晶表示装置で表示を行うにあたって、十分な駆動
マージンを得るためには、各々の画素における液晶部の
容量CLCと、非線形抵抗素子部の容量CIとの比を十
分大きくすることも必要である。(最低でもCLC/C
I≧5) 〔発明が解決しようとする課題〕 このように非線形抵抗素子を用いた液晶表示装置では、
表示の大容量化が可能となるが、SiNX成膜時の欠陥
、パターニング時のエッチング欠陥、静電破壊等により
画素欠陥が発生する。今までの構造では二端子素子が1
個壊れるとl画素が点欠陥になるが、本発明は二端子素
子が破壊しても点欠陥にならず画素の一部分だけが欠け
るような液晶表示装置を提供する。
A large number of row electrodes 31 in FIG. 4 are selected line-by-line from the top one by one, and data is written using the column electrodes 32 within the selection period. In order to display with sufficient contrast at this time, the effective voltage applied to the liquid crystal at the selected point must be greater than the liquid crystal's saturation voltage, and the effective voltage applied to the liquid crystal at non-selected points must be higher than the liquid crystal's saturation voltage. It needs to be smaller than the threshold voltage. When a nonlinear resistance film is used, the resistance of the nonlinear resistance film 24 becomes low at the selection point during writing (when high voltage is applied), and charges are easily injected into the liquid crystal 33.
During the holding period (when low voltage is applied), the nonlinear resistance Wl! 24
The resistance of the liquid crystal 33 increases, and the charges injected into the liquid crystal 33 are more likely to be retained. In this way, the effective voltage applied to the liquid crystal 33 can be kept high. In addition, when not selected, the resistance of the nonlinear resistance film 24 does not decrease so much during writing, and the resistance of the liquid crystal 3
3, not much charge is injected into it. Therefore, the effective voltage applied to the liquid crystal 33 can be kept relatively low, and high contrast can be maintained even if the number of divisions is considerably increased. In the nonlinear resistance element, the &lI rule and structure of the nonlinear resistance film are determined so that the nonlinear resistance film has a desired resistance value during each of the writing period and the holding period. Furthermore, in order to obtain a sufficient drive margin when displaying with such a liquid crystal display device, the ratio between the capacitance CLC of the liquid crystal section and the capacitance CI of the nonlinear resistance element section in each pixel must be made sufficiently large. is also necessary. (At least CLC/C
I≧5) [Problem to be solved by the invention] In this way, in a liquid crystal display device using a nonlinear resistance element,
Although it is possible to increase the display capacity, pixel defects occur due to defects during SiNX film formation, etching defects during patterning, electrostatic damage, and the like. In the conventional structure, one two-terminal element
If one pixel is broken, one pixel becomes a point defect, but the present invention provides a liquid crystal display device in which even if a two-terminal element breaks, it does not become a point defect and only a part of the pixel is chipped.

〔課題を解決するための手段〕[Means to solve the problem]

本発明は上記問題点を解決するために、一つの画素電極
を2〜10分割しその各々に二端子素子を設けることに
より、SiNx成膜不良,パターニング不良,静電破壊
等で二端子素子に欠陥が生してもM素欠陥にならずに画
素の一部分が欠けるようにしたものである. 〔実施例〕 以下に本発明の実施例を図面に基づいて説明する.第1
図(al及び(bl及び第2図+a+. (blは本発
明の二端子素子を示す図である。第1図においては基板
1の上に駆動電極3の両側に2個ずつ合計4個で1画素
になるようにした。各画素電極は、例えば16T.○,
などをスバノク法などによって堆積し、選択的にエソチ
ングすることによって形威できる。次に非線形抵抗膜4
 (例えばSiリンチな3iNx)と駆動用電極3 (
例えばCr)をこの順に連続的に堆積し、1回のマスク
工程で連続的にエソチングする。
In order to solve the above-mentioned problems, the present invention divides one pixel electrode into 2 to 10 parts and provides a two-terminal element in each of them. Even if a defect occurs, it does not become an M-element defect and only a portion of the pixel is missing. [Examples] Examples of the present invention will be described below based on the drawings. 1st
Figures (al and (bl) and Figure 2+a+. (bl is a diagram showing the two-terminal element of the present invention. In Figure 1, there are four terminals in total, two on each side of the drive electrode 3 on the substrate 1. 1 pixel.Each pixel electrode is, for example, 16T.○,
The material can be deposited by the Subanok method, etc., and then selectively etched. Next, the nonlinear resistive film 4
(for example, Si 3iNx) and drive electrode 3 (
For example, Cr) is continuously deposited in this order and etched continuously in one mask step.

二端子素子が不良になる原因としては、非線形抵抗膜T
!i.膜時の基仮の馬れ、ゴξ付着等による戒膜不良.
パターニング時に基板上のゴミ付着,レジスト気泡,レ
ジストキズ,マスクキズ等により駆動用電極3,画素電
極2,非線形抵抗膜4の必要な部分がエソチングされる
不良,液晶パネル製造工程中の静電気による破壊等が考
えられる。
The reason why a two-terminal element becomes defective is that the nonlinear resistive film T
! i. Defects in the membrane due to roughness of the base at the time of membrane, adhesion of rubber, etc.
Defects such as etching of necessary parts of the drive electrode 3, pixel electrode 2, and nonlinear resistive film 4 due to dust adhesion on the substrate, resist bubbles, resist scratches, mask scratches, etc. during patterning, destruction due to static electricity during the liquid crystal panel manufacturing process, etc. is possible.

これらの画素欠陶は、このように1画素を4分割するこ
とにより、素子欠陥が発生してもl画素中374は正常
に駆動し、表示品質の著しい低下を防止できる。
By dividing one pixel into four in this way, even if an element defect occurs, 374 out of 1 pixels can be driven normally, and a significant deterioration in display quality can be prevented.

第2図は1画素を2分割した場合の実施例である。FIG. 2 shows an example in which one pixel is divided into two.

〔発明の効果〕〔Effect of the invention〕

以上説明したように本発明によれば、工程の環境(クリ
ーン度,静電気)を改善することなくマスクの形状を変
えるだけで液晶パネルの表示品質、歩留まりを向上する
ことができる。
As described above, according to the present invention, the display quality and yield of a liquid crystal panel can be improved simply by changing the shape of the mask without improving the process environment (cleanliness, static electricity).

3,23・ 4  24・ 31・ ・ ・ 32・ ・ ・ 33・ ・ ・ 34・ ・ 駆動用電極 非線形抵抗膜 行液晶駆動用電極 列液晶駆動用電極 液晶 非線形抵抗素子3,23・ 4 24・ 31・・・・ 32・・・・ 33・・・・ 34・・ Drive electrode nonlinear resistive film Row liquid crystal drive electrode Column liquid crystal drive electrode liquid crystal nonlinear resistance element

【図面の簡単な説明】[Brief explanation of drawings]

第1図(al及び(b)はそれぞれ本発明の第1実施例
を示す平面図及び断面図、第2図(al及び(blはそ
れぞれ本発明の第2実施例を示す平面図及び断面図、第
3図tag. fblはそれぞれ従来の二端子素子を示
す平面図,断面図、第4図は非線形抵抗素子を用いた二
端子アクティブマトリクス液晶表示装置のX−Yマトリ
クスパネル回路図である.
FIG. 1 (al and (b) are a plan view and a sectional view, respectively, showing a first embodiment of the present invention, and FIG. 2 (al and (bl) are a plan view and a sectional view, respectively, showing a second embodiment of the present invention. , Fig. 3 tag.

Claims (1)

【特許請求の範囲】[Claims] 透明基板上に複数の画素電極を有し、非線形抵抗膜、駆
動用電極からなる二端子素子を用いた液晶表示装置にお
いて、各画素が2〜10分割され、それぞれを別々の二
端子素子で駆動することを特徴とする液晶表示装置。
In a liquid crystal display device that has multiple pixel electrodes on a transparent substrate and uses a two-terminal element consisting of a nonlinear resistive film and a driving electrode, each pixel is divided into 2 to 10 parts, each of which is driven by a separate two-terminal element. A liquid crystal display device characterized by:
JP1160015A 1989-06-21 1989-06-21 Liquid crystal display device Pending JPH0324527A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1160015A JPH0324527A (en) 1989-06-21 1989-06-21 Liquid crystal display device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1160015A JPH0324527A (en) 1989-06-21 1989-06-21 Liquid crystal display device

Publications (1)

Publication Number Publication Date
JPH0324527A true JPH0324527A (en) 1991-02-01

Family

ID=15706136

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1160015A Pending JPH0324527A (en) 1989-06-21 1989-06-21 Liquid crystal display device

Country Status (1)

Country Link
JP (1) JPH0324527A (en)

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