JPH0346626A - Two-terminal element - Google Patents

Abstract

PURPOSE:To prevent a line disconnection and to improve the yield even if one side is disconnected by a patterning defect, etc., by wiring one piece each of electrodes for driving on both sides of a picture element and wiring two pieces for each of respective lines and connecting the two pieces to each other for each of the picture elements. CONSTITUTION:Plural pieces of the picture element electrodes 2 are formed on a substrate 1 and a nonlinear resistance film 4 (for example, Si-rich SiNx) and the electrodes 3 for driving (for example, Cr) are continuously deposited in this order and are continuously etched by one time of mask stage. Two pieces of the electrodes 3 for driving are wired in the line state on both sides of the picture element electrode 2 and the two pieces are connected by the spacing between the adjacent picture element electrodes 2 at this time. The necessary one part of the electrodes 3 for driving is etched and disconnected if there are dust sticking, resist bubbles, resist flaws, mask flaws, etc., on the substrate at the time of patterning, then the electrodes are wired double in such a manner. The line disconnection does not arise in the liquid crystal panel if the electrodes 3 for driving on the opposite side are normally patterned in spite of the disconnection on one side.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a one-terminal element in a display panel of a measuring instrument, an iM (& display device) of a personal computer, and a liquid crystal panel of a liquid crystal television.

[Summary of the invention]

The present invention provides a two-terminal element in which a nonlinear resistance film is provided between a pixel electrode and a drive electrode, in which one drive electrode is placed on both sides of the pixel.
By arranging two wires for each line and connecting the two wires for each pixel, the purpose is to improve yield without causing line disconnection even if one side is disconnected due to patterning defects or the like.

[Conventional technology]

Liquid crystal display devices have advantages over other 1L display devices as small, lightweight, thin, and low power consumption display devices, and have been put into practical use in recent years. In order to increase the amount of information displayed on a liquid crystal display device, three-terminal active matrix liquid crystal display devices such as fungicidal film transistors are equipped with so-called MIM type non-shape linear resistive elements made of Zn○ halisk or metal-insulated metal structure. Two-terminal active matrix liquid crystal display devices such as nonlinear resistance elements using silicon-based nitride films, oxide films, or the like in the film portion are being researched.

Compared to three-terminal elements, two-terminal elements have the characteristics of fewer failures in formation and relatively rough patterning accuracy, and can be applied to low-cost I/large-area display devices.

FIG. 3 is an X-Y7 trix panel circuit diagram of a two-terminal active matrix liquid crystal display device using nonlinear resistance elements. Usually, about 100 to 1000 row liquid crystal drive electrodes and column liquid crystal drive electrodes are formed on each of the substrate and the counter substrate. A liquid crystal 33 and a nonlinear resistance element 34 are formed at the X-forming intersection. FIG. 2 is a front view and a cross-sectional view of a two-terminal element using a silicon nitride film or the like as a nonlinear resistance element.

After selectively forming a pixel electrode 22 (+, T, O,) on a transparent substrate, a nonlinear resistance film 24 (silicon nitride) and a drive electrode 23 (Cr) are deposited, and each is selectively etched. It has become.

Driving of such a liquid crystal display device is performed as follows. Third
A large number of row electrodes 31 in the figure are selected line-by-line from the top one tree at a time, and data is written using the column electrodes 32 within the selection period. In order to display with sufficient contrast at this time, the effective voltage applied to the liquid crystal at the selected point must be greater than the saturation voltage of the circuit, and the effective voltage applied to the liquid crystal at non-selected points must be higher than the saturation voltage of the liquid crystal. It needs to be smaller than the threshold voltage. When a nonlinear resistive film is used, the resistance of the nonlinear resistive film 24 becomes low at the selection point during writing (when high voltage is applied), and charge is easily injected into the liquid crystal 33, which increases the resistance during the holding period (when low voltage is applied). , the resistance of the nonlinear resistive film 24 becomes high, and the charge injected into the liquid crystal 33 is easily retained (this makes it possible to maintain a high execution voltage applied to the liquid crystal 33. At times, the resistance of the nonlinear resistance film 24 is not so low that not much charge is injected into the liquid crystal 33.

Therefore, the effective voltage applied to the liquid crystal 33 can be kept relatively low, and high contrast can be maintained even if the Lili number is made considerably large. In the nonlinear resistance element, the composition and structure of the nonlinear resistance film are determined so that the nonlinear resistance film has a desired resistance value during each of the writing period and the holding period. Furthermore, in order to obtain a sufficient drive margin when displaying with such a liquid crystal display device, the ratio between the capacitance 1cLc of the liquid crystal section and the capacitance cr of the nonlinear resistance element section in each pixel must be made sufficiently large. is also necessary.

(At least CLC/Cl≧5) [Problem to be solved by the invention] In this way, in a liquid crystal display device using a nonlinear resistance element,
Although it is possible to increase the capacity of a display, the drive electrodes are disconnected due to dust adhesion during patterning, resist 1 bubbles, resist scratches, etc., which causes a decrease in yield. Therefore, the present invention proposes a two-terminal element that does not cause a line defect in a liquid crystal panel even if a portion of the drive electrode is disconnected due to poor patterning.

[Means to solve the problem]

In order to solve the problem described in item 2, the present invention wires two driving electrodes for each line, one on each side of the pixel, and connects the two electrodes for each pixel, thereby preventing patterning defects and the like. This prevents line breakage even if one side breaks.

〔Example〕

Embodiments of the present invention will be described below based on the drawings. 1st
Figure F81. (bl is a plan view and a sectional view showing a two-terminal element of the present invention. In FIG. 1, a plurality of pixel electrodes 2 are formed on a substrate 1.
It can be formed by depositing O, etc. by sputtering or the like and selectively etching it. Next, the nonlinear resistive film 4 (for example, Si'J Sochina 3+Nx) and the driving electrode 3 (for example, Cr) are sequentially stacked in this order, and 1
Continuous etching with multiple mask steps. In particular, two drive electrodes 3 are wired in a line on both sides of the pixel electrode 2, and the two drive electrodes 3 are continuous in the gap between adjacent pixel electrodes 2.

Ground balls on the board during patterning (-1st place, resist 1-
Drive electrode 3 due to bubbles, resist scratches, mask scratches, etc.
A necessary part of the line will be etched and the line will break, but by doubling the wiring in this way, even if one side breaks, as long as the driving electrode 3 on the opposite side is patterned correctly, the line will not break as a liquid crystal panel. do not become.

Furthermore, if the line width of the two lines is the same as that of a conventional two-terminal element, the wiring resistance will be the same, and the aperture ratio will not need to be lowered comparatively. Alternatively, two drive electrodes 3 may be wired in a line between the pixel electrodes 2, and the two may be connected at positions corresponding to each pixel electrode 2.

〔Effect of the invention〕

As described above, according to the present invention, line breakage of the liquid crystal panel can be almost completely prevented by simply changing the shape of the mask without increasing the number of steps, and the yield can be improved.

[Brief explanation of drawings]

Fig. 1 Fa+ is a plan view showing the two-terminal element of the present invention;
Figures (bl is a cross-sectional view taken along line A-A, Figure 2 (al) is a plan view showing a conventional two-terminal element, Figure 2 (b) is a cross-sectional view taken along line B-B,
The figure is an X-Y7 trix panel circuit diagram of a two-terminal active matrix liquid crystal display device using nonlinear resistance elements. 1.21・ 2.22・ 3 23・ 4 24 ・ 31・ ・ ・ 32・ ・ ・ Substrate pixel electrode drive electrode Nonlinear abrasive resistance Electrode column for liquid crystal drive Liquid crystal drive electrode 33・ ・Liquid crystal 34・ ・Nonlinear More than resistance element

Claims (1)

[Claims] In a two-terminal element having a plurality of pixel electrodes on a transparent substrate and consisting of a nonlinear resistive film, a driving electrode, etc., two driving electrodes are wired for each line, and the two driving electrodes are connected for each pixel. A two-terminal element characterized by: