JPH0324062B2 - - Google Patents

Info

Publication number

JPH0324062B2

JPH0324062B2 JP28936088A JP28936088A JPH0324062B2 JP H0324062 B2 JPH0324062 B2 JP H0324062B2 JP 28936088 A JP28936088 A JP 28936088A JP 28936088 A JP28936088 A JP 28936088A JP H0324062 B2 JPH0324062 B2 JP H0324062B2

Authority

JP

Japan

Prior art keywords

gate electrode

gate

electrode

shot

film

Prior art date

1988-11-16

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

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