JPH032394Y2 - - Google Patents

Info

Publication number
JPH032394Y2
JPH032394Y2 JP1986108729U JP10872986U JPH032394Y2 JP H032394 Y2 JPH032394 Y2 JP H032394Y2 JP 1986108729 U JP1986108729 U JP 1986108729U JP 10872986 U JP10872986 U JP 10872986U JP H032394 Y2 JPH032394 Y2 JP H032394Y2
Authority
JP
Japan
Prior art keywords
flexible arm
mirror
laser
robot
bracket
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986108729U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6316590U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986108729U priority Critical patent/JPH032394Y2/ja
Publication of JPS6316590U publication Critical patent/JPS6316590U/ja
Application granted granted Critical
Publication of JPH032394Y2 publication Critical patent/JPH032394Y2/ja
Expired legal-status Critical Current

Links

JP1986108729U 1986-07-17 1986-07-17 Expired JPH032394Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986108729U JPH032394Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-07-17 1986-07-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986108729U JPH032394Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-07-17 1986-07-17

Publications (2)

Publication Number Publication Date
JPS6316590U JPS6316590U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-02-03
JPH032394Y2 true JPH032394Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-01-23

Family

ID=30986193

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986108729U Expired JPH032394Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-07-17 1986-07-17

Country Status (1)

Country Link
JP (1) JPH032394Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7049226B2 (en) 2001-09-26 2006-05-23 Applied Materials, Inc. Integration of ALD tantalum nitride for copper metallization
JP2007065205A (ja) * 2005-08-30 2007-03-15 Denso Corp 表示装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7049226B2 (en) 2001-09-26 2006-05-23 Applied Materials, Inc. Integration of ALD tantalum nitride for copper metallization
JP2007065205A (ja) * 2005-08-30 2007-03-15 Denso Corp 表示装置

Also Published As

Publication number Publication date
JPS6316590U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-02-03

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