JPH0323238A - ガラス基材の表面改質法 - Google Patents
ガラス基材の表面改質法Info
- Publication number
- JPH0323238A JPH0323238A JP1156328A JP15632889A JPH0323238A JP H0323238 A JPH0323238 A JP H0323238A JP 1156328 A JP1156328 A JP 1156328A JP 15632889 A JP15632889 A JP 15632889A JP H0323238 A JPH0323238 A JP H0323238A
- Authority
- JP
- Japan
- Prior art keywords
- glass substrate
- glass
- ion
- laser
- implanted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011521 glass Substances 0.000 title claims abstract description 78
- 239000000463 material Substances 0.000 title claims abstract description 16
- 238000000034 method Methods 0.000 title claims description 11
- 239000000758 substrate Substances 0.000 claims abstract description 65
- 238000005468 ion implantation Methods 0.000 claims abstract description 26
- 238000010438 heat treatment Methods 0.000 claims abstract description 8
- 239000010409 thin film Substances 0.000 claims abstract description 7
- 238000012986 modification Methods 0.000 claims description 5
- 230000004048 modification Effects 0.000 claims description 5
- 238000002715 modification method Methods 0.000 claims description 4
- -1 nitrogen ions Chemical class 0.000 abstract description 15
- 239000010408 film Substances 0.000 abstract description 11
- 150000002500 ions Chemical class 0.000 abstract description 10
- 229910052757 nitrogen Inorganic materials 0.000 abstract description 10
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract description 10
- 239000002585 base Substances 0.000 abstract description 7
- 239000003513 alkali Substances 0.000 abstract description 6
- 238000000137 annealing Methods 0.000 abstract description 5
- 239000004065 semiconductor Substances 0.000 abstract description 4
- 238000006243 chemical reaction Methods 0.000 abstract description 2
- 238000002425 crystallisation Methods 0.000 abstract description 2
- 230000008025 crystallization Effects 0.000 abstract description 2
- 238000002513 implantation Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 33
- 229910052581 Si3N4 Inorganic materials 0.000 description 17
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 17
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 7
- 239000000470 constituent Substances 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 229910052698 phosphorus Inorganic materials 0.000 description 3
- 239000011574 phosphorus Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- QIVUCLWGARAQIO-OLIXTKCUSA-N (3s)-n-[(3s,5s,6r)-6-methyl-2-oxo-1-(2,2,2-trifluoroethyl)-5-(2,3,6-trifluorophenyl)piperidin-3-yl]-2-oxospiro[1h-pyrrolo[2,3-b]pyridine-3,6'-5,7-dihydrocyclopenta[b]pyridine]-3'-carboxamide Chemical compound C1([C@H]2[C@H](N(C(=O)[C@@H](NC(=O)C=3C=C4C[C@]5(CC4=NC=3)C3=CC=CN=C3NC5=O)C2)CC(F)(F)F)C)=C(F)C=CC(F)=C1F QIVUCLWGARAQIO-OLIXTKCUSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 229910052783 alkali metal Inorganic materials 0.000 description 2
- 150000001340 alkali metals Chemical class 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000005360 phosphosilicate glass Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- HIVGXUNKSAJJDN-UHFFFAOYSA-N [Si].[P] Chemical compound [Si].[P] HIVGXUNKSAJJDN-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 229910001415 sodium ion Inorganic materials 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
- C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
- C03C23/0025—Other surface treatment of glass not in the form of fibres or filaments by irradiation by a laser beam
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
- C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
- C03C23/0055—Other surface treatment of glass not in the form of fibres or filaments by irradiation by ion implantation
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
- C03C23/007—Other surface treatment of glass not in the form of fibres or filaments by thermal treatment
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Thermal Sciences (AREA)
- Surface Treatment Of Glass (AREA)
- Physical Vapour Deposition (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1156328A JPH0323238A (ja) | 1989-06-19 | 1989-06-19 | ガラス基材の表面改質法 |
| CA002018781A CA2018781A1 (en) | 1989-06-19 | 1990-06-12 | Method of modifying the surface of glass substrate |
| DE4018804A DE4018804A1 (de) | 1989-06-19 | 1990-06-12 | Verfahren zur modifizierung der oberflaeche von glassubstraten |
| GB9013187A GB2234968B (en) | 1989-06-19 | 1990-06-13 | Method of modifying the surface of a glass substrate |
| IT02065990A IT1248863B (it) | 1989-06-19 | 1990-06-15 | Metodo di modifica della superficie di un substrato di vetro |
| FR9007678A FR2648454B1 (fr) | 1989-06-19 | 1990-06-19 | Procede de modification de la surface d'un substrat en verre |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1156328A JPH0323238A (ja) | 1989-06-19 | 1989-06-19 | ガラス基材の表面改質法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0323238A true JPH0323238A (ja) | 1991-01-31 |
Family
ID=15625384
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1156328A Pending JPH0323238A (ja) | 1989-06-19 | 1989-06-19 | ガラス基材の表面改質法 |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPH0323238A (en:Method) |
| CA (1) | CA2018781A1 (en:Method) |
| DE (1) | DE4018804A1 (en:Method) |
| FR (1) | FR2648454B1 (en:Method) |
| GB (1) | GB2234968B (en:Method) |
| IT (1) | IT1248863B (en:Method) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007238378A (ja) * | 2006-03-09 | 2007-09-20 | Central Glass Co Ltd | 高破壊靱性を有するガラス板およびその製造方法 |
| JP2019513676A (ja) * | 2016-04-12 | 2019-05-30 | エージーシー グラス ユーロップＡｇｃ Ｇｌａｓｓ Ｅｕｒｏｐｅ | 中間色反射防止ガラス基板およびそれを製造する方法 |
| JP2019513671A (ja) * | 2016-04-12 | 2019-05-30 | エージーシー グラス ユーロップＡｇｃ Ｇｌａｓｓ Ｅｕｒｏｐｅ | 熱処理可能な反射防止ガラス基板およびその製造方法 |
| JP2019513674A (ja) * | 2016-04-12 | 2019-05-30 | エージーシー グラス ユーロップＡｇｃ Ｇｌａｓｓ Ｅｕｒｏｐｅ | 低下した内部反射率のガラス基材およびその製造方法 |
| JP2019513675A (ja) * | 2016-04-12 | 2019-05-30 | エージーシー グラス ユーロップＡｇｃ Ｇｌａｓｓ Ｅｕｒｏｐｅ | 反射防止ガラス基板およびそれを製造する方法 |
| JP2019513672A (ja) * | 2016-04-12 | 2019-05-30 | エージーシー グラス ユーロップＡｇｃ Ｇｌａｓｓ Ｅｕｒｏｐｅ | 反射防止、耐引掻性ガラス基板およびその製造方法 |
| JP2019515863A (ja) * | 2016-04-12 | 2019-06-13 | エージーシー グラス ユーロップ エスエーＡｇｃ Ｇｌａｓｓ Ｅｕｒｏｐｅ Ｓａ | 青反射ガラス基材およびその製造方法 |
| JP2019524613A (ja) * | 2016-06-28 | 2019-09-05 | コーニング インコーポレイテッド | 接触損傷に対する高い耐性を有する、薄いガラス系物品 |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4467597B2 (ja) | 2007-04-06 | 2010-05-26 | 株式会社オハラ | 無機組成物物品 |
| DE102012213787A1 (de) * | 2012-08-03 | 2014-02-06 | Robert Bosch Gmbh | Oberflächenstrukturierung für zellbiologische und/oder medizinische Anwendungen |
| FR3002240B1 (fr) | 2013-02-15 | 2015-07-10 | Quertech Ingenierie | Procede de traitement par un faisceau d'ions pour produire des materiaux en verre antireflet durable |
| EP3181533A1 (en) * | 2015-12-18 | 2017-06-21 | AGC Glass Europe | Glass substrate for chemical strengthening and method for chemically strengthening with controlled curvature |
| US10731403B2 (en) * | 2017-10-06 | 2020-08-04 | Vkr Holding A/S | Vacuum insulated glazing unit |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4281030A (en) * | 1980-05-12 | 1981-07-28 | Bell Telephone Laboratories, Incorporated | Implantation of vaporized material on melted substrates |
| JPS5999713A (ja) * | 1982-11-30 | 1984-06-08 | Agency Of Ind Science & Technol | 薄膜トランジスタ用基板の製造方法 |
| DE3539047C2 (de) * | 1984-12-27 | 1994-06-01 | Bayer Ag | Verfahren zum Dekorieren oder Markieren von Gegenständen mit emaillierten Oberflächen mittels Laserstrahl |
-
1989
- 1989-06-19 JP JP1156328A patent/JPH0323238A/ja active Pending
-
1990
- 1990-06-12 DE DE4018804A patent/DE4018804A1/de not_active Withdrawn
- 1990-06-12 CA CA002018781A patent/CA2018781A1/en not_active Abandoned
- 1990-06-13 GB GB9013187A patent/GB2234968B/en not_active Expired - Fee Related
- 1990-06-15 IT IT02065990A patent/IT1248863B/it active IP Right Grant
- 1990-06-19 FR FR9007678A patent/FR2648454B1/fr not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007238378A (ja) * | 2006-03-09 | 2007-09-20 | Central Glass Co Ltd | 高破壊靱性を有するガラス板およびその製造方法 |
| JP2019513676A (ja) * | 2016-04-12 | 2019-05-30 | エージーシー グラス ユーロップＡｇｃ Ｇｌａｓｓ Ｅｕｒｏｐｅ | 中間色反射防止ガラス基板およびそれを製造する方法 |
| JP2019513671A (ja) * | 2016-04-12 | 2019-05-30 | エージーシー グラス ユーロップＡｇｃ Ｇｌａｓｓ Ｅｕｒｏｐｅ | 熱処理可能な反射防止ガラス基板およびその製造方法 |
| JP2019513674A (ja) * | 2016-04-12 | 2019-05-30 | エージーシー グラス ユーロップＡｇｃ Ｇｌａｓｓ Ｅｕｒｏｐｅ | 低下した内部反射率のガラス基材およびその製造方法 |
| JP2019513675A (ja) * | 2016-04-12 | 2019-05-30 | エージーシー グラス ユーロップＡｇｃ Ｇｌａｓｓ Ｅｕｒｏｐｅ | 反射防止ガラス基板およびそれを製造する方法 |
| JP2019513672A (ja) * | 2016-04-12 | 2019-05-30 | エージーシー グラス ユーロップＡｇｃ Ｇｌａｓｓ Ｅｕｒｏｐｅ | 反射防止、耐引掻性ガラス基板およびその製造方法 |
| JP2019515863A (ja) * | 2016-04-12 | 2019-06-13 | エージーシー グラス ユーロップ エスエーＡｇｃ Ｇｌａｓｓ Ｅｕｒｏｐｅ Ｓａ | 青反射ガラス基材およびその製造方法 |
| JP2019524613A (ja) * | 2016-06-28 | 2019-09-05 | コーニング インコーポレイテッド | 接触損傷に対する高い耐性を有する、薄いガラス系物品 |
Also Published As
| Publication number | Publication date |
|---|---|
| GB9013187D0 (en) | 1990-08-01 |
| IT9020659A0 (en:Method) | 1990-06-15 |
| GB2234968B (en) | 1993-02-17 |
| IT9020659A1 (it) | 1991-12-15 |
| DE4018804A1 (de) | 1990-12-20 |
| IT1248863B (it) | 1995-01-30 |
| FR2648454A1 (fr) | 1990-12-21 |
| GB2234968A (en) | 1991-02-20 |
| FR2648454B1 (fr) | 1993-07-09 |
| CA2018781A1 (en) | 1990-12-19 |
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