DE4018804A1 - Verfahren zur modifizierung der oberflaeche von glassubstraten - Google Patents
Verfahren zur modifizierung der oberflaeche von glassubstratenInfo
- Publication number
- DE4018804A1 DE4018804A1 DE4018804A DE4018804A DE4018804A1 DE 4018804 A1 DE4018804 A1 DE 4018804A1 DE 4018804 A DE4018804 A DE 4018804A DE 4018804 A DE4018804 A DE 4018804A DE 4018804 A1 DE4018804 A1 DE 4018804A1
- Authority
- DE
- Germany
- Prior art keywords
- glass substrate
- layer
- ion implantation
- sample
- ions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000000758 substrate Substances 0.000 title claims description 69
- 238000000034 method Methods 0.000 title claims description 23
- 239000011521 glass Substances 0.000 claims description 75
- 238000005468 ion implantation Methods 0.000 claims description 38
- 150000002500 ions Chemical class 0.000 claims description 27
- 230000005855 radiation Effects 0.000 claims description 19
- 238000010438 heat treatment Methods 0.000 claims description 11
- 239000003513 alkali Substances 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 7
- 238000000151 deposition Methods 0.000 claims 1
- 239000010410 layer Substances 0.000 description 53
- -1 phosphorus ions Chemical class 0.000 description 15
- 229910052581 Si3N4 Inorganic materials 0.000 description 13
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 13
- 229910052757 nitrogen Inorganic materials 0.000 description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 9
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 6
- 229910021417 amorphous silicon Inorganic materials 0.000 description 6
- 239000002344 surface layer Substances 0.000 description 5
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000007496 glass forming Methods 0.000 description 3
- 238000002513 implantation Methods 0.000 description 3
- 229910052698 phosphorus Inorganic materials 0.000 description 3
- 239000011574 phosphorus Substances 0.000 description 3
- 238000000137 annealing Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000011358 absorbing material Substances 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000005034 decoration Methods 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000002715 modification method Methods 0.000 description 1
- 239000005360 phosphosilicate glass Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 229910001415 sodium ion Inorganic materials 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
- C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
- C03C23/0025—Other surface treatment of glass not in the form of fibres or filaments by irradiation by a laser beam
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
- C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
- C03C23/0055—Other surface treatment of glass not in the form of fibres or filaments by irradiation by ion implantation
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
- C03C23/007—Other surface treatment of glass not in the form of fibres or filaments by thermal treatment
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Thermal Sciences (AREA)
- Surface Treatment Of Glass (AREA)
- Physical Vapour Deposition (AREA)
- Formation Of Insulating Films (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1156328A JPH0323238A (ja) | 1989-06-19 | 1989-06-19 | ガラス基材の表面改質法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE4018804A1 true DE4018804A1 (de) | 1990-12-20 |
Family
ID=15625384
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE4018804A Withdrawn DE4018804A1 (de) | 1989-06-19 | 1990-06-12 | Verfahren zur modifizierung der oberflaeche von glassubstraten |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPH0323238A (en:Method) |
| CA (1) | CA2018781A1 (en:Method) |
| DE (1) | DE4018804A1 (en:Method) |
| FR (1) | FR2648454B1 (en:Method) |
| GB (1) | GB2234968B (en:Method) |
| IT (1) | IT1248863B (en:Method) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2692855A1 (de) * | 2012-08-03 | 2014-02-05 | Robert Bosch GmbH | Oberflächenstrukturierung für zellbiologische und/oder medizinische Anwendungen |
| WO2017102345A1 (en) * | 2015-12-18 | 2017-06-22 | Agc Glass Europe | Glass substrate for chemical strengthening and method for chemically strengthening with controlled curvature |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007238378A (ja) * | 2006-03-09 | 2007-09-20 | Central Glass Co Ltd | 高破壊靱性を有するガラス板およびその製造方法 |
| JP4467597B2 (ja) | 2007-04-06 | 2010-05-26 | 株式会社オハラ | 無機組成物物品 |
| FR3002240B1 (fr) | 2013-02-15 | 2015-07-10 | Quertech Ingenierie | Procede de traitement par un faisceau d'ions pour produire des materiaux en verre antireflet durable |
| US20190161403A1 (en) * | 2016-04-12 | 2019-05-30 | Agc Glass Europe | Blue reflective glass substrate and method for manufacturing the same |
| BR112018070872A2 (pt) | 2016-04-12 | 2019-02-05 | Agc Glass Company North America | substrato de vidro antirrefletivo e método de fabricação do mesmo |
| US20190119154A1 (en) * | 2016-04-12 | 2019-04-25 | Agc Glass Europe | Glass substrate with reduced internal reflectance and method for manufacturing the same |
| US11339089B2 (en) * | 2016-04-12 | 2022-05-24 | Agc Glass Europe | Neutral color antireflective glass substrate and method for manufacturing the same |
| JP7015788B2 (ja) * | 2016-04-12 | 2022-02-15 | エージーシー グラス ユーロップ | 反射防止、耐引掻性ガラス基板およびその製造方法 |
| JP2019513671A (ja) * | 2016-04-12 | 2019-05-30 | エージーシー グラス ユーロップＡｇｃ Ｇｌａｓｓ Ｅｕｒｏｐｅ | 熱処理可能な反射防止ガラス基板およびその製造方法 |
| US10612129B2 (en) | 2016-06-28 | 2020-04-07 | Corning Incorporated | Thin glass based article with high resistance to contact damage |
| US10731403B2 (en) * | 2017-10-06 | 2020-08-04 | Vkr Holding A/S | Vacuum insulated glazing unit |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4281030A (en) * | 1980-05-12 | 1981-07-28 | Bell Telephone Laboratories, Incorporated | Implantation of vaporized material on melted substrates |
| JPS5999713A (ja) * | 1982-11-30 | 1984-06-08 | Agency Of Ind Science & Technol | 薄膜トランジスタ用基板の製造方法 |
| DE3539047C2 (de) * | 1984-12-27 | 1994-06-01 | Bayer Ag | Verfahren zum Dekorieren oder Markieren von Gegenständen mit emaillierten Oberflächen mittels Laserstrahl |
-
1989
- 1989-06-19 JP JP1156328A patent/JPH0323238A/ja active Pending
-
1990
- 1990-06-12 DE DE4018804A patent/DE4018804A1/de not_active Withdrawn
- 1990-06-12 CA CA002018781A patent/CA2018781A1/en not_active Abandoned
- 1990-06-13 GB GB9013187A patent/GB2234968B/en not_active Expired - Fee Related
- 1990-06-15 IT IT02065990A patent/IT1248863B/it active IP Right Grant
- 1990-06-19 FR FR9007678A patent/FR2648454B1/fr not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2692855A1 (de) * | 2012-08-03 | 2014-02-05 | Robert Bosch GmbH | Oberflächenstrukturierung für zellbiologische und/oder medizinische Anwendungen |
| WO2017102345A1 (en) * | 2015-12-18 | 2017-06-22 | Agc Glass Europe | Glass substrate for chemical strengthening and method for chemically strengthening with controlled curvature |
| CN108367975A (zh) * | 2015-12-18 | 2018-08-03 | 旭硝子欧洲玻璃公司 | 用于化学强化的玻璃基板和用受控曲率进行化学强化的方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| GB9013187D0 (en) | 1990-08-01 |
| IT9020659A0 (en:Method) | 1990-06-15 |
| GB2234968B (en) | 1993-02-17 |
| IT9020659A1 (it) | 1991-12-15 |
| IT1248863B (it) | 1995-01-30 |
| FR2648454A1 (fr) | 1990-12-21 |
| JPH0323238A (ja) | 1991-01-31 |
| GB2234968A (en) | 1991-02-20 |
| FR2648454B1 (fr) | 1993-07-09 |
| CA2018781A1 (en) | 1990-12-19 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8141 | Disposal/no request for examination |